CN216668463U - Instrument frame for dial gauge and measuring device - Google Patents
Instrument frame for dial gauge and measuring device Download PDFInfo
- Publication number
- CN216668463U CN216668463U CN202123339278.6U CN202123339278U CN216668463U CN 216668463 U CN216668463 U CN 216668463U CN 202123339278 U CN202123339278 U CN 202123339278U CN 216668463 U CN216668463 U CN 216668463U
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- Prior art keywords
- gauge
- frame
- holder
- dial gauge
- measuring
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- 235000012431 wafers Nutrition 0.000 claims abstract description 37
- 239000000919 ceramic Substances 0.000 claims description 13
- 230000004308 accommodation Effects 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 238000001514 detection method Methods 0.000 abstract description 15
- 229910052594 sapphire Inorganic materials 0.000 description 9
- 239000010980 sapphire Substances 0.000 description 9
- 238000005259 measurement Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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Abstract
The utility model relates to the field of measuring devices and discloses an instrument frame for a dial indicator and a measuring device. Through the technical scheme, when detecting a plurality of positions to be detected, the position of the gauge stand is not required to be moved, the position of the gauge rod is only required to be adjusted, the measuring head is enabled to detect the corresponding positions to be detected respectively, and the position of the gauge stand is not required to be moved, so that only one-time zero setting is required to be carried out before detecting a plurality of positions to be detected, the detection efficiency is improved, errors caused by multiple zero setting are avoided, and edge breakage of wafers caused by moving the gauge stand is also avoided.
Description
Technical Field
The utility model relates to the field of measuring devices, in particular to an instrument frame for a dial indicator and a measuring device.
Background
In the process of manufacturing the substrate material by the sapphire crystal, single-side hard polishing processing is required to reduce the warping degree of the sapphire wafer and remove a damage layer on the surface, so that the sapphire wafer meets the flatness requirement. After the single-side hard polishing is finished, whether the flatness of the sapphire wafer reaches the standard or not needs to be detected, and at present, a dial indicator is installed on a click type measuring support to measure the thickness of at least the outer side position, the central position and the inner side position of the sapphire wafer respectively. However, when the inching type measuring support is used for measuring different positions, the inching type measuring support needs to be installed to the corresponding position respectively, and zeroing operation before measurement is carried out at the position, namely, a sapphire wafer needs to be installed with at least three supports and is zeroed for three times, so that the detection efficiency is low, the risk of edge breakage of the wafer is promoted due to the fact that the number of times of installation of the support is large, and meanwhile, measurement errors can also occur due to the fact that the zeroing operation is carried out for multiple times, and the detection precision is affected.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the problems of low detection efficiency, high wafer edge breakage risk and low detection precision in the prior art that a dial indicator is arranged on a click-type measurement bracket to detect a sapphire wafer, and provides an instrument frame for the dial indicator and a measurement device.
In order to achieve the above object, in one aspect, the present invention provides an instrument holder for a dial gauge, including a gauge holder and a gauge rod, where the gauge holder is a frame structure, an accommodating space is defined in the middle of the gauge holder and is used for simultaneously corresponding to a plurality of positions to be measured, the gauge rod is used for mounting the dial gauge and positioning a measuring head of the dial gauge in the accommodating space, and the gauge rod is detachably mounted on the gauge holder so as to be able to change the position of the measuring head in the accommodating space.
Preferably, the meter rack is provided with two positioning grooves arranged along the length direction of the measuring rod, the bottoms of the two positioning grooves are equal in height, and the measuring rod is suitable for being embedded into the two positioning grooves simultaneously.
Preferably, the watch frame is a triangular frame structure, one positioning groove is located at any tip of the frame structure, and the other positioning groove is located on a beam corresponding to the tip.
Preferably, the watch frame is an isosceles triangle frame structure.
Preferably, the groove body contour of each positioning groove is matched with the peripheral contour of the measuring rod.
Preferably, one side of the meter frame facing the position to be measured is provided with at least three support legs, and the at least three support legs surround the accommodating space.
Preferably, each of the legs includes a positioning ball nut and a positioning ball screw provided on the bezel, the positioning ball nut and the positioning ball screw being screw-coupled to enable the height of the leg to be adjusted.
Preferably, the number of the support legs is three, and the three support legs are arranged in one-to-one correspondence with the triangular tips of the watch rack.
Another aspect of the present invention provides a measuring apparatus comprising a dial gauge and the above-described instrument holder for a dial gauge.
Preferably, the measuring device further comprises a ceramic disc, a top plane of the ceramic disc is used for arranging a plurality of wafers arranged along the circumferential direction of the ceramic disc, the watch holder is placed on the ceramic disc, and any wafer is located below the accommodating space.
Through above-mentioned technical scheme, set up frame structure's table frame, the accommodation space of table frame can correspond a plurality of positions that await measuring simultaneously, and measuring rod detachable installs on the table frame to can change the position of gauge head in the accommodation space, when examining a plurality of positions that await measuring, need not to remove the position of table frame, only need adjust the position of measuring rod, make the gauge head detect the position that awaits measuring that corresponds respectively, consequently use above-mentioned technical scheme to examine time measuring sapphire wafer, owing to need not to remove the position of table frame, consequently only need carry out zero setting once before detecting a plurality of positions that await measuring can, detection efficiency has been promoted, and the error of having avoided many times zero setting production, still avoided simultaneously causing the wafer to collapse the limit because of removing the table frame.
Drawings
FIG. 1 is a schematic diagram of the construction of one embodiment of an instrument holder for a dial gauge of the present invention;
FIG. 2 is a schematic structural diagram of an embodiment of the measuring device of the present invention.
Description of the reference numerals
1. A watch frame; 2. a measuring rod; 3. an accommodating space; 4. a dial indicator; 5. a positioning ball nut; 6. a positioning ball screw; 7. a ceramic pan; 8. a wafer.
Detailed Description
The following detailed description of embodiments of the utility model refers to the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating the present invention, are given by way of illustration and explanation only, not limitation.
The utility model provides an instrument frame for a dial indicator, which comprises a gauge frame 1 and a measuring rod 2, wherein the gauge frame 1 is of a frame structure, an accommodating space 3 formed by enclosing the gauge frame 1 is used for simultaneously corresponding to a plurality of positions to be measured, the measuring rod 2 is used for installing the dial indicator 4 and enabling a measuring head of the dial indicator 4 to be positioned in the accommodating space 3, and the measuring rod 2 is detachably arranged on the gauge frame 1 so as to change the position of the measuring head in the accommodating space 3.
Through the technical scheme, the gauge stand 1 with the frame structure is arranged, the accommodating space 3 of the gauge stand 1 can simultaneously correspond to a plurality of positions to be detected, the measuring rod 2 is detachably mounted on the gauge stand 1 so as to change the positions of the measuring heads in the accommodating space 3, when a plurality of positions to be detected are detected, the position of the gauge stand 1 is not required to be moved, the position of the measuring rod 2 is only required to be adjusted, the measuring heads respectively detect the corresponding positions to be detected, namely the measuring rod 2 and the dial indicator 4 are arranged on the gauge stand 1 and correspond to one detection position, the measuring rod 2 and the dial indicator 4 are taken down after the position is detected, then the measuring rod 2 and the dial indicator 4 are corresponding to the next detection position and are remounted on the gauge stand 1 for detection, therefore, when the sapphire wafer is detected by using the technical scheme, the position of the gauge stand 1 is not required to be moved, and only one-time zero setting is required before the plurality of positions to be detected, the detection efficiency is improved, the error caused by multiple zero setting is avoided, the edge breakage of the wafer caused by moving the meter frame 1 is avoided, and the dial indicator 4 is remounted by corresponding to each to-be-detected position through the detachable structures of the measuring rod 2 and the meter frame 1, so that the movement of the wafer on the meter frame 1 is avoided, and the scratch or edge breakage caused by the wafer in the moving process is avoided.
The detachable mounting structure of the meter rack 1 and the measuring bar 2 is not limited in the present invention, and preferably, as shown in the embodiment of fig. 1, the meter rack 1 is provided with two positioning slots arranged along the length direction of the measuring bar 2, the bottoms of the two positioning slots are equal in height, the measuring bar 2 is adapted to be embedded into the two positioning slots at the same time, and the positioning slots may be grooves arranged on the meter rack 1 or formed by spaces between two protrusions arranged on the top surface of the meter rack 1. Of course, in other embodiments, the measuring bar 2 may be directly mounted on the meter base 1.
The specific structure of the watch frame 1 is not limited in the present invention, and preferably, as shown in the embodiment of fig. 1, the watch frame 1 is a triangular frame structure, one of the positioning grooves is located at any tip of the frame structure, and the other positioning groove is located on a beam corresponding to the tip. Of course, in another embodiment, the case band 1 may be a rectangular or circular frame.
Preferably, in the embodiment shown in fig. 1, the meter stand 1 has an isosceles triangle frame structure, so that the accommodating space 3 can correspond to three positions to be measured of one wafer, namely, the outer position, the central position and the inner position of the wafer, and the occupied area of the meter stand 1 is reduced.
The connection structure of the positioning groove and the measuring rod 2 is not particularly limited, preferably, in the embodiment shown in fig. 1, the groove body profile of each positioning groove is matched with the peripheral profile of the measuring rod 2, and the connection mode that the positioning groove abuts against the measuring rod 2 can limit the measuring rod 2, so that the measuring error or scratch caused by the shaking of the measuring rod 2 in the measuring process is avoided. Of course, in other embodiments, positioning structures may be provided to define the position of the measuring stick 2, for example positioning pins to insert the measuring stick 2 and the watch frame 1.
In order to avoid the situation that the instrument rack 1 collides with the wafer when being placed, so that the wafer is broken, further, as shown in the embodiment of fig. 1, at least three support legs are arranged on one side of the position to be detected, which faces the instrument rack 1, and surround the accommodating space 3, so that a certain space distance is formed between the instrument rack 1 and the wafer, and the support legs are located on the periphery of the wafer, so that the wafer can be prevented from being contacted, and meanwhile, the support legs are arranged so that part of the frame side of the instrument rack 1 can be located above the wafer, so that the occupied area of the instrument rack 1 can be reduced, and the application range of the detection environment can be improved. Of course, in other embodiments, the support legs may not be provided, and the area of the accommodating space 3 is larger than that of the wafer, so that the wafer is located in the accommodating space during the detection, thereby avoiding contact.
The utility model does not limit the structure of the stand bar, preferably, as shown in the embodiment shown in fig. 1, each stand bar comprises a positioning ball nut 5 and a positioning ball screw 6 which are arranged on the gauge stand 1, the positioning ball nut 5 and the positioning ball screw 6 are in threaded connection to adjust the height of the stand bar, so that the gauge stand 1 is kept horizontal, the measurement error caused by the inclined angle of the gauge stand 1 is avoided, meanwhile, the stand bar can prevent the distance between the gauge stand 1 and the wafer from being too high, and the dial gauge 4 can be detected. Of course, in other embodiments, the legs may be fixedly disposed struts.
In order to avoid toppling or shifting of the watch frame 1 after placement, preferably, in the embodiment shown in fig. 1, three support legs are provided, and the three support legs are arranged in one-to-one correspondence with the triangular tip of the watch frame 1, so as to ensure stability.
Another aspect of the present invention provides a measuring apparatus comprising the dial gauge 4 and the instrument holder for dial gauge described above. Due to the adoption of the instrument frame for the dial gauge, the detection efficiency can be improved, errors caused by multiple zeroing can be avoided, and edge breakage of a wafer caused by moving the gauge frame 1 can be avoided.
Further, in order to realize the detection of the plurality of wafers 8, in the embodiment shown in fig. 2, the measuring device further includes a ceramic disk 7, a top plane of the ceramic disk 7 is used for arranging the plurality of wafers 8 arranged along the circumferential direction thereof, the gauge stand 1 is placed on the ceramic disk 7, any one of the wafers 8 is located below the accommodating space 3, a top surface of the ceramic disk 7 can be simultaneously used as a zero reference plane of the dial indicator 4, and the plurality of wafers 8 and the instrument stand are both arranged on the zero reference plane, so that only one zeroing operation needs to be performed when the dial indicator 4 detects the plurality of wafers 8 arranged on the ceramic disk 7, and the detection efficiency is further improved.
The preferred embodiments of the present invention have been described in detail above with reference to the accompanying drawings, but the present invention is not limited thereto. Within the scope of the technical idea of the utility model, numerous simple modifications can be made to the technical solution of the utility model, including combinations of the specific features in any suitable way, and the utility model will not be further described in relation to the various possible combinations in order to avoid unnecessary repetition. Such simple modifications and combinations should also be considered as disclosed in the present invention, and all such modifications and combinations are intended to be included within the scope of the present invention.
Claims (10)
1. The utility model provides an instrument frame for amesdial, its characterized in that, includes table frame (1) and graduated flask (2), table frame (1) is frame structure, and accommodation space (3) that its middle was enclosed is used for corresponding a plurality of positions that await measuring simultaneously, graduated flask (2) are used for installing amesdial (4), and make the gauge head of amesdial (4) is located in accommodation space (3), graduated flask (2) detachable install on table frame (1) to can change the position of gauge head in accommodation space (3).
2. The instrument holder for the dial gauge according to claim 1, wherein the gauge holder (1) is provided with two positioning grooves arranged along the length direction of the measuring rod (2), the groove bottoms of the two positioning grooves are equal in height, and the measuring rod (2) is suitable for being embedded into the two positioning grooves simultaneously.
3. The instrument holder for the dial gauge according to claim 2, wherein the gauge holder (1) is a triangular frame structure, one of the positioning grooves is located at any tip of the frame structure, and the other positioning groove is located on a beam corresponding to the tip.
4. The instrument holder for the dial gauge according to claim 2, wherein the gauge holder (1) is an isosceles triangle frame structure.
5. The instrument holder for a dial gauge according to claim 2, wherein the groove body profile of each positioning groove is adapted to the peripheral profile of the measuring rod (2).
6. Instrument holder according to any one of claims 1-5, characterized in that the side of the holder (1) facing the position to be measured is provided with at least three legs, which surround the receiving space (3).
7. The instrument holder for a dial gauge according to claim 6, wherein each of the legs comprises a positioning ball nut (5) and a positioning ball screw (6) provided on the gauge stand (1), the positioning ball nut (5) and the positioning ball screw (6) being screwed so as to be able to adjust the height of the leg.
8. The instrument holder for the dial gauge according to claim 7, wherein the number of the support legs is three, and the three support legs are arranged in one-to-one correspondence with the tips of the triangular instrument holder (1).
9. A measuring device, characterized by comprising a dial gauge (4) and an instrument holder for a dial gauge according to any of claims 1-8.
10. The measuring device according to claim 9, characterized in that it further comprises a ceramic disk (7), the top plane of said ceramic disk (7) being intended to house a plurality of wafers (8) arranged along its circumference, said watch frame (1) being placed on said ceramic disk (7) with any of said wafers (8) below said containment space (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123339278.6U CN216668463U (en) | 2021-12-28 | 2021-12-28 | Instrument frame for dial gauge and measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202123339278.6U CN216668463U (en) | 2021-12-28 | 2021-12-28 | Instrument frame for dial gauge and measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216668463U true CN216668463U (en) | 2022-06-03 |
Family
ID=81798554
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202123339278.6U Expired - Fee Related CN216668463U (en) | 2021-12-28 | 2021-12-28 | Instrument frame for dial gauge and measuring device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216668463U (en) |
-
2021
- 2021-12-28 CN CN202123339278.6U patent/CN216668463U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20220603 |