CN216668250U

CN216668250U - Suspended solar cell chain type drying groove

Info

Publication number: CN216668250U
Application number: CN202123122569.XU
Authority: CN
Inventors: 姜博; 朱志鹏
Original assignee: Tongwei Solar Chengdu Co Ltd
Current assignee: Tongwei Solar Chengdu Co Ltd
Priority date: 2021-12-13
Filing date: 2021-12-13
Publication date: 2022-06-03
Anticipated expiration: 2031-12-13

Abstract

The utility model discloses a suspended solar cell chain type drying groove, and belongs to the technical field of drying grooves. The silicon wafer drying device comprises a suspension upper air knife set and a suspension lower air knife set which are symmetrically arranged at the upper end and the lower end in a drying groove, wherein the suspension upper air knife set and the suspension lower air knife set respectively comprise a plurality of suspension upper air knives and suspension lower air knives which are uniformly arranged at intervals along the length direction of the drying groove, and the air pressure of the suspension lower air knives is equal to the sum of the air pressure of the suspension upper air knives and the self gravity of a silicon wafer; still including setting up the plectrum mechanism in the inside upper end of stoving inslot, plectrum mechanism includes the conveyer belt that extends along stoving inslot length direction, and the bottom of conveyer belt is provided with a plurality of plectrum apical teeth that are used for promoting the silicon chip and move ahead along length direction even interval. The utility model can effectively solve the problem of poor roller printing caused by the current chain type drying groove roller supporting structure, and avoids the direct contact between the drying groove roller and the silicon wafer, thereby avoiding the pollution of the roller dirt to the silicon wafer.

Description

Suspended solar cell chain type drying groove

Technical Field

The utility model belongs to the technical field of drying grooves, and particularly relates to a suspended solar cell chain type drying groove.

Background

At present, in the manufacturing process of solar cells, the back of a silicon wafer needs to be subjected to chemical polishing treatment, and the back polishing is divided into chain polishing and groove polishing according to different polishing machine structures. The groove type polishing is to use a tool fixture to bear a silicon wafer, finish surface dehydration and drying in a drying groove, and the contact point of the silicon wafer is the clamping tooth of the tool fixture, which is typically represented by a groove type alkali polishing etching process. Chain polishing is different from groove polishing in that a rotating roller is used for supporting and driving a silicon wafer to be transmitted among groove bodies, surface dehydration and drying are completed in a drying groove, the contact point of the silicon wafer is a roller contact surface, generally an upper roller is a step roller, a lower roller is a flat roller or a step roller, and the typical examples of the process are an acid polishing etching process and a chain alkali polishing etching process. Because the gyro wheel increases along with the live time, the dirty accumulation is more and more, and the dirty adhesion that drops causes the pollution on the silicon chip, can resume normal until the dirty silicon chip of being taken away gradually, seriously influence and produce the line yield. The abnormal troubleshooting difficulty of the production line is high, the troubleshooting period is long, the control is difficult in daily production, and the influence on the productivity is large. Therefore, an urgent need exists to design a floated solar cell chain stoving groove, can effectively solve the bad problem of gyro wheel seal that current chain stoving groove gyro wheel bearing structure brought, has improved the product yield.

Through retrieval, partial patents have been published on the structure of the solar cell chain type drying groove, for example, the Chinese patent application numbers are as follows: 2017110885325, discloses a silicon wafer drying furnace, a furnace body is provided with a silicon wafer conveying and drying space, and the upper side and the lower side of the silicon wafer conveying and drying space are respectively provided with an upper heating device and a lower heating device; a conveying device for realizing the side-standing conveying of the silicon wafers is arranged in the silicon wafer conveying and drying space, an upper heating device and a lower heating device are arranged in a partition mode along the length direction of the silicon wafer conveying and drying space, the upper heating device is provided with an upper heating body and an upper air box which radiate heat downwards, and the lower heating device is provided with a lower heating body and a lower air box which radiate heat upwards; an exhaust device is also arranged on the furnace body. The silicon wafer is conveyed in a side-standing mode, the upper heating body and the lower heating body heat and dry the front side and the back side of the silicon wafer at the same time, and the process time is shortened; go up bellows and bellows promotion drying temperature homogenization down, energy-conservation, environmental protection, no difference in temperature dead angle satisfy HIT solar photovoltaic cell silicon chip production, and practice thrift the production space, improve production efficiency and satisfy the production quality requirement simultaneously.

SUMMERY OF THE UTILITY MODEL

1. Technical problem to be solved by the utility model

The utility model aims to provide a suspended solar cell chain type drying groove, which can effectively solve the problem of poor roller printing caused by the roller supporting structure of the current chain type drying groove and avoid the direct contact of the roller of the drying groove and a silicon wafer, thereby avoiding the pollution of the dirtiness of the roller to the silicon wafer, reducing the difficulty of abnormal treatment, shortening the time of abnormal investigation and improving the yield of products.

2. Technical scheme

In order to solve the above problems, the present invention adopts the following technical solutions.

The utility model relates to a suspended solar cell chain type drying groove which comprises a suspended upper air knife set and a suspended lower air knife set, wherein the suspended upper air knife set and the suspended lower air knife set are symmetrically arranged at the upper end and the lower end in the drying groove; still including setting up the plectrum mechanism in the inside upper end of stoving inslot, plectrum mechanism includes the conveyer belt that extends along stoving inslot length direction, and the bottom of conveyer belt is provided with a plurality of plectrum apical teeth that are used for promoting the silicon chip and move ahead along length direction even interval.

As a further improvement of the utility model, an emergency roller group is arranged below the conveyor belt, and the emergency roller group comprises a plurality of emergency rollers which are uniformly arranged below the center position of the conveyor belt at intervals.

As a further improvement of the emergency system, the emergency system.

As a further improvement of the utility model, two ends of the conveyor belt respectively extend to the steering rollers at the outermost sides of the steering roller groups at two sides.

As a further improvement of the utility model, a pair of guide roller groups which are symmetrically arranged up and down are arranged at the end part of the drying groove close to the inlet, and the guide roller groups are positioned at the outer side of the inlet steering roller groups.

As a further improvement of the utility model, the upper end and the lower end of the inlet of the drying groove are symmetrically provided with an inlet upper roller group and an inlet lower roller group, the lower end of the outlet of the drying groove is provided with an outlet lower roller group, wherein the diameter sizes of the inlet upper roller, the inlet lower roller and the inlet lower roller are the same and are all larger than the diameter size of the steering roller on the outermost side in the steering roller groups.

As a further improvement of the utility model, the two outer suspension upper air knives and the two outer suspension lower air knives in the suspension upper air knife group and the suspension lower air knife group are respectively positioned at two outer sides of the length direction of the conveyor belt.

As a further improvement of the utility model, the plectrum mechanism comprises guide rollers symmetrically arranged at two sides of the length direction of the conveyor belt, and the guide rollers are driven by a motor to rotate in the circumferential direction.

3. Advantageous effects

Compared with the prior art, the utility model has the beneficial effects that:

(1) according to the suspension type solar cell chain type drying groove, silicon wafers are in a suspension balance state under the action of the suspension upper air knife and the suspension lower air knife and are synchronously dried, the silicon wafers are not required to be supported and driven by the rollers any more, but are supported by the action of the air knives and are conveyed to move forwards through the shifting mechanism, the silicon wafers are prevented from being in direct contact with the rollers, the surfaces of the rollers are wetted and polluted, the silicon wafers are further influenced, the pollution risk of the silicon wafers is reduced, the abnormal inspection difficulty is reduced, and the yield and the productivity are improved.

(2) According to the chain type drying groove for the suspended solar cell, the roller is not in contact with the silicon wafer in the whole drying process. In normal production, the silicon wafer is in a suspension state, and in an abnormal state, the silicon wafer is transmitted out through the steering roller group without the risk of wafer blocking.

(3) According to the suspended solar cell chain type drying groove, the emergency roller set is arranged below the conveying belt and comprises a plurality of emergency rollers which are uniformly arranged below the center of the conveying belt at intervals, and the emergency rollers are located below silicon wafers and used for supporting the silicon wafers in an abnormal state and preventing the silicon wafers from falling off to cause wafer blocking.

(4) According to the suspended solar cell chain type drying groove, the two ends of the emergency roller group are symmetrically provided with the group of steering rollers with different diameters, so that the steering transition of a silicon wafer is more natural, and the risk of fragments is reduced.

(5) According to the chain type drying groove for the suspended solar cell, the emergency roller set and the two-end steering roller set are arranged for emergency use, under a normal condition, a silicon wafer achieves dynamic balance under the action of the suspended upper air knife and the suspended lower air knife, and under the thrust of the sheet shifting mechanism, the silicon wafer is shifted to move towards the outlet. When the air knife is abnormal, the wind power of the upper air knife and the lower air knife can be changed, and the stress of the silicon wafer is changed. When the silicon wafer is only acted by upward force, the shifting piece mechanism can prevent the silicon wafer from continuously moving upward and simultaneously move to the outlet under the action of the thrust of the shifting piece mechanism; when the silicon wafer is only acted by a downward force, hardware equipment is needed to support the silicon wafer below the silicon wafer, the silicon wafer is prevented from continuously moving downward, and the situations that the silicon wafer drops to cause wafer blocking and the like are avoided.

Drawings

FIG. 1 is a schematic structural diagram of a solar cell chain type drying slot in the prior art;

FIG. 2 is a schematic structural view of a suspension type solar cell chain drying trough in a normal working state according to the present invention;

fig. 3 is a schematic structural view of a suspension type solar cell chain type drying groove in an emergency state.

The reference numbers in the figures are:

1. a drying tank; 11. an upper roller set; 12. a lower roller set; 13. drying the upper air knife; 14. drying the lower air knife; 21. the roller group is arranged on the inlet; 22. an inlet lower roller group; 23. a guide roller set; 24. a steering roller set; 25. an emergency roller set; 26. suspending an upper air knife; 27. suspending a lower air knife; 28. an outlet lower roller group; 3. a silicon wafer; 4. a shifting mechanism; 41. a conveyor belt; 42. a guide roller; 43. the plectrum is against the tooth.

Detailed Description

For a further understanding of the utility model, reference should be made to the following detailed description taken in conjunction with the accompanying drawings.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

The present invention will be further described with reference to the following examples.

Example 1

In the existing chain type drying groove 1 structure, as shown in fig. 1, silicon wafers 3 are driven by an upper roller set 11 and a lower roller set 12 which rotate at an inlet of the drying groove 1 to enter the drying groove 1 for drying treatment, and the silicon wafers 3 are dried under the simultaneous action of an upper drying air knife 13 and a lower drying air knife 14 in the drying groove 1. Wherein, the upper and lower both ends symmetry in the stoving groove 1 is provided with upper roller set 11 and lower roller set 12, and upper roller set 11 and lower roller set 12 include a plurality of upper rollers and lower rollers that set up along the even interval of stoving groove 1 length direction, and silicon chip 3 is gone forward along the length direction in stoving groove 1 under the drive of rolling upper roller set and lower roller set. Because the silicon wafer lamination is in liquid or hidden crack, chemicals are remained, the upper roller set 11 and the lower roller set 12 are affected with damp and dirt when the silicon wafer lamination moves forwards, and the dirt accumulated on the rollers falls off to pollute the silicon wafer 3.

In order to overcome the problem that the silicon wafer 3 in the prior art is easily contaminated due to the contact with the driving roller in the drying groove 1, the embodiment provides a suspension type solar cell chain type drying groove, and the roller is not in contact with the silicon wafer 3 in the whole drying process. In normal production, the silicon wafer 3 is in a suspension state, and in an abnormal state, the silicon wafer 3 is transmitted out through the steering roller group 24 without the risk of wafer blocking. Specifically, as shown in fig. 2 and fig. 3, the silicon wafer drying device includes a suspension upper wind knife set and a suspension lower wind knife set symmetrically disposed at the upper end and the lower end inside the drying slot 1, the suspension upper wind knife set and the suspension lower wind knife set respectively include a plurality of suspension upper wind knives 26 and suspension lower wind knives 27 uniformly spaced along the length direction of the drying slot 1, and an area between the suspension upper wind knives 26 and the suspension lower wind knives 27 is used for conveying the silicon wafer 3. Wherein the wind pressure of the suspended lower air knife 27 is equal to the sum of the wind pressure of the suspended upper air knife 26 and the self gravity of the silicon wafer 3, namely, the suspended lower air knife 27 provides an upward thrust A for the silicon wafer 3, the self gravity B of the silicon wafer 3, the suspended upper air knife 26 provides a downward thrust C for the silicon wafer 3, finally the silicon wafer 3 is balanced up and down, the thrust A is gravity B + thrust C, at the moment, the silicon wafer 3 is in a suspended balanced state under the action of the suspended upper air knife 26 and the suspended lower air knife 27 and is synchronously dried, the silicon wafer 3 does not need a roller to support and transmit, but supports the silicon wafer 3 under the action of the air knife and is conveyed forwards through the shifting mechanism 4, the silicon wafer 3 is prevented from directly contacting with the roller, the surface of the roller is prevented from being moistened and becomes dirty, further the silicon wafer 3 is influenced, the pollution risk of the silicon wafer 3 is reduced, and the difficulty of abnormal investigation is reduced, the yield and the productivity are improved.

The embodiment also comprises a shifting piece mechanism 4 arranged at the upper end in the drying groove 1, wherein the shifting piece mechanism 4 comprises a conveyor belt 41 extending along the length direction of the drying groove 1, and a plurality of shifting piece top teeth 43 used for pushing the silicon wafers 3 to move forwards are uniformly arranged at intervals along the length direction at the bottom of the conveyor belt 41. The shifting piece mechanism 4 further comprises guide rollers 42 symmetrically arranged on two sides of the length direction of the conveyor belt 41, and the guide rollers 42 are driven by a motor to rotate circumferentially so as to drive the conveyor belt 41 and the shifting piece top teeth 43 below to move left and right. In this embodiment, the top teeth 43 of the pick are used for providing forward thrust for the silicon wafers 3 suspended between the upper air knife 26 and the lower air knife 27, and the top teeth 43 of the pick are driven by the conveyor belt 41 to move from the inlet to the outlet, so as to stir the silicon wafers 3 to move forward stably. The silicon chip 3 is in the balanced state of suspension under the wind pressure adjustment of wind sword 27 under suspension and suspension, simultaneously in the stirring of plectrum apical tooth 43 down to the export motion for silicon chip 3 is in the suspended state in drying groove 1, dries the moisture of silicon chip 3 just, reverse side simultaneously, effectively avoids a great deal of harmfulness because of the gyro wheel brings, and simple structure improves the yield again when improving the productivity simultaneously, reaches the purpose of improving.

In this embodiment, the emergency roller set 25 is arranged below the conveying belt 41, the emergency roller set 25 includes a plurality of emergency rollers arranged below the central position of the conveying belt 41 at uniform intervals, and the emergency rollers are located below the silicon wafer 3 and used for supporting the silicon wafer 3 in an abnormal state, so that the silicon wafer 3 is prevented from falling off and a wafer blocking event is avoided. The emergency roller set 25 comprises a plurality of emergency rollers 24, wherein the emergency rollers 24 are symmetrically arranged at two ends of the emergency roller set 25, the emergency rollers 24 comprise a plurality of steering rollers which are arranged along the length direction at equal intervals, the diameter sizes of the steering rollers are gradually reduced along the direction close to the emergency roller set 25, and the diameter sizes of the emergency rollers are smaller than the diameter size of the innermost steering roller in the emergency roller set 24. A group of steering rollers with different diameters are symmetrically arranged at two ends of the emergency roller group 25, so that the steering transition of the silicon wafer 3 is more natural, and the risk of fragments is reduced. The emergency roller set 25 and the two-end turning roller set 24 are set for emergency, and under normal conditions, the silicon wafer 3 achieves a dynamic balance under the action of the suspended upper air knife 26 and the suspended lower air knife 27, and under the thrust of the sheet shifting mechanism 4, the silicon wafer 3 is shifted to move towards the outlet. When the air knife is abnormal, the wind power of the upper air knife and the lower air knife can be changed, and the stress of the silicon wafer 3 is changed. When the silicon wafer 3 is only acted by upward acting force, the shifting piece mechanism 4 can prevent the silicon wafer 3 from continuously ascending and simultaneously move to the outlet under the action of the thrust of the shifting piece mechanism 4; when the silicon wafer 3 is only subjected to downward acting force, hardware equipment is required to support the silicon wafer 3 below the silicon wafer 3 (specifically, as shown in fig. 3), so that the silicon wafer 3 is prevented from continuously moving downward, and the conditions that the silicon wafer 3 falls to cause wafer blocking and the like are avoided.

In this embodiment, both ends of the conveyor belt 41 respectively extend to the outermost turning rollers of the turning roller groups 24 at both sides, i.e. the suspension drying region of the silicon wafers 3 is located at the lower region of the conveyor belt 41. In this embodiment, a pair of guiding roller sets 23 is symmetrically disposed at the end of the drying slot 1 near the inlet, the guiding roller sets 23 are located at the outer side of the inlet turning roller set 24, and the guiding roller sets 23 are used for smoothly guiding the silicon wafer 3 at the inlet into the drying slot 1. Wherein the upper and lower ends of the inlet of the drying slot 1 are symmetrically provided with an inlet upper roller group 21 and an inlet lower roller group 22, the lower end of the outlet of the drying slot 1 is provided with an outlet lower roller group 28, wherein the diameter sizes of the inlet upper roller, the inlet lower roller and the inlet lower roller are the same and are all larger than the diameter size of the steering roller at the outermost side in the steering roller group 24. The suspended upper air knife 26 and the suspended lower air knife 27 on the two outer sides in the suspended upper air knife group and the suspended lower air knife group are respectively positioned on the two outer sides in the length direction of the conveyor belt 41.

The examples described herein are merely illustrative of the preferred embodiments of the present invention and do not limit the spirit and scope of the present invention, and various modifications and improvements made to the technical solutions of the present invention by those skilled in the art without departing from the design concept of the present invention shall fall within the protection scope of the present invention.

Claims

1. The utility model provides a floated solar cell chain stoving groove which characterized in that: the silicon wafer drying device comprises a suspension upper air knife set and a suspension lower air knife set which are symmetrically arranged at the upper end and the lower end in a drying groove (1), wherein the suspension upper air knife set and the suspension lower air knife set respectively comprise a plurality of suspension upper air knives (26) and suspension lower air knives (27) which are uniformly arranged at intervals along the length direction of the drying groove (1), the area between the suspension upper air knives (26) and the suspension lower air knives (27) is used for conveying a silicon wafer (3), and the air pressure of the suspension lower air knives (27) is equal to the sum of the air pressure of the suspension upper air knives (26) and the self gravity of the silicon wafer (3); the silicon wafer drying device is characterized by further comprising a shifting piece mechanism (4) arranged at the upper end inside the drying groove (1), wherein the shifting piece mechanism (4) comprises a conveying belt (41) extending along the length direction of the drying groove (1), and a plurality of shifting piece top teeth (43) used for pushing the silicon wafer (3) to move forward are uniformly arranged at the bottom of the conveying belt (41) along the length direction at intervals.

2. The suspended solar cell chain type drying slot of claim 1, wherein: an emergency roller group (25) is arranged below the conveying belt (41), and the emergency roller group (25) comprises a plurality of emergency rollers which are arranged below the center position of the conveying belt (41) at uniform intervals.

3. The suspended solar cell chain type drying slot of claim 2, wherein: the equal symmetry in both ends of emergent gyro wheel group (25) is equipped with turning roller group (24), turning roller group (24) are including a plurality of turning rollers that set up along the even interval of length direction, and the diameter size of a plurality of turning rollers reduces along the direction of being close to emergent gyro wheel group (25) gradually, just the diameter size of emergent gyro wheel is less than the diameter size of the most inboard turning roller in turning roller group (24).

4. The suspended solar cell chain type drying slot of claim 3, wherein: two ends of the conveyor belt (41) respectively extend to the outermost steering rollers of the steering roller groups (24) at two sides.

5. The suspended solar cell chain type drying slot of claim 4, wherein: the end part of the inside of the drying groove (1) close to the inlet is provided with a pair of guide roller groups (23) which are arranged in an up-down symmetrical manner, and the guide roller groups (23) are positioned on the outer side of the inlet steering roller group (24).

6. The suspension type solar cell chain type drying groove according to claim 5, wherein: the upper end and the lower end of an inlet of the drying groove (1) are symmetrically provided with an inlet upper roller group (21) and an inlet lower roller group (22), the outlet lower end of the drying groove (1) is provided with an outlet lower roller group (28), and the diameter sizes of the inlet upper roller, the inlet lower roller and the inlet lower roller are the same and are all larger than the diameter size of the steering roller on the outermost side in the steering roller group (24).

7. The suspended solar cell chain type drying slot of claim 5, wherein: the suspended upper air knife (26) and the suspended lower air knife (27) on the two outer sides in the suspended upper air knife group and the suspended lower air knife group are respectively positioned on the two outer sides in the length direction of the conveyor belt (41).

8. The suspended solar cell chain type drying slot according to any one of claims 1 to 7, wherein: the sheet shifting mechanism (4) comprises guide rollers (42) which are symmetrically arranged on two sides of the length direction of the conveyor belt (41), and the guide rollers (42) are driven by a motor to rotate in the circumferential direction.