CN216648554U - Driving part with discontinuous support and MEMS switch - Google Patents
Driving part with discontinuous support and MEMS switch Download PDFInfo
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- CN216648554U CN216648554U CN202122979612.8U CN202122979612U CN216648554U CN 216648554 U CN216648554 U CN 216648554U CN 202122979612 U CN202122979612 U CN 202122979612U CN 216648554 U CN216648554 U CN 216648554U
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Abstract
The application discloses a driving part of a discontinuous support, which comprises a support frame, wherein the support frame comprises substrates arranged oppositely; a sliding component arranged on the support frame; the width of the sliding part is larger than the distance between the substrates; the driving component is arranged in the relative range of the substrate and is not completely positioned in the relative range, the height of the driving component is less than that of the substrate, and in the initial position, the projection overlapping area of the sliding component and the driving component positioned outside the sliding component on the horizontal plane is greater than or equal to zero. The driving part supports the sliding part only through the support frame formed by the substrate, so that the contact area between the sliding part and the substrate is reduced, the friction force between the sliding part and the substrate is reduced, and the driving force required by the sliding part is reduced; and the sliding component and the edge of the driving component positioned at the outer side of the sliding component are in a critical state of being just overlapped, so that the edge effect can be eliminated, and the friction force is greatly reduced. The present application further provides a MEMS switch.
Description
Technical Field
The application relates to the technical field of radio frequency devices, in particular to a driving part and an MEMS switch which are supported discontinuously.
Background
An RF MEMS (Radio Frequency Micro-Electro-Mechanical System) driving part has excellent characteristics such as high linearity, low loss, high isolation, and is widely applied in the fields of mobile communication terminals and systems, satellite communication systems, high-performance phased array radars, and the like.
At present, a driving part is arranged in a substrate of an in-plane sliding type driving part, a sliding part is arranged on the upper surface of the substrate, and in the process of driving the sliding part to move by the driving part, the contact area between the sliding part and the substrate is the lower surface of the sliding part, so that the contact area is larger, and the friction force is larger; the sliding part is attracted downwards by the driving part, and the friction force is larger due to the fact that the base is also arranged right below the sliding part, and therefore the driving force is larger.
Therefore, how to solve the above technical problems should be a great concern to those skilled in the art.
SUMMERY OF THE UTILITY MODEL
It is an object of the present application to provide a non-continuously supported drive member and MEMS switch to reduce the required drive force for the sliding member and eliminate edge effects between the sliding member and the drive member.
In order to solve the above technical problem, the present application provides a driving part of discontinuous support, including:
the supporting frame comprises oppositely arranged bases;
the sliding component is arranged on the support frame; the width of the sliding part is larger than the distance between the substrates;
the driving component is arranged in the relative range of the substrate and is not completely positioned in the relative range, the height of the driving component is less than that of the substrate, and in the initial position, the projection overlapping area of the sliding component and the driving component positioned outside the sliding component on the horizontal plane is larger than or equal to zero.
Optionally, the drive component comprises at least two drive electrodes.
Optionally, the driving part comprises three driving electrodes.
Optionally, when the number of the driving electrodes is three, the distance between adjacent driving electrodes is equal.
Optionally, the substrate includes a plurality of substrate units arranged at intervals, and the driving electrodes on two sides are located in opposite ranges of the substrate units.
Optionally, the substrate includes a plurality of substrate units arranged at intervals, and the middle driving electrode is located in an opposite range of the substrate units.
Optionally, the driving part comprises two driving electrodes, and any one of the driving electrodes is located in the opposite range of the substrate.
Optionally, the drive electrode is located in the middle of the two substrates.
Optionally, the length of the sliding component is greater than a preset threshold, where the preset threshold is the sum of the length of the driving electrode and the distance between all adjacent driving electrodes.
Optionally, the width of the sliding part is greater than the sum of the distance between the substrates and the width of the two substrates.
Optionally, the method further includes:
and the insulating layer is arranged on the upper surface of the substrate.
Optionally, the sliding member is in ultra-smooth contact with the insulating layer.
The present application further provides a MEMS switch comprising any of the above discontinuously supported drive members.
The application provides a drive component of discontinuous support includes: the supporting frame comprises oppositely arranged bases; the sliding component is arranged on the support frame; the width of the sliding part is larger than the distance between the substrates; the driving component is arranged in the relative range of the substrate and is not completely positioned in the relative range, the height of the driving component is less than that of the substrate, and the projection overlapping area of the sliding component and the driving component positioned outside the sliding component on the horizontal plane is greater than or equal to zero.
It can be seen that the driving part in the present application includes the bases which are relatively separately arranged, the sliding part is arranged on the bases, the height of the driving part is less than the height of the bases, that is, the sliding part is supported only by the supporting frame formed by the bases, so that the contact area between the bases and the sliding part is reduced, thereby reducing the friction force between the bases and the sliding part, and because the driving part is arranged in the relative range of the two bases but is not completely positioned in the relative range of the two bases, the contact area between the sliding part and the bases during moving is smaller, the friction force is further reduced, thereby reducing the driving force of the sliding part; meanwhile, the sliding component and the edge of the driving component positioned outside the sliding component are in a critical state of being just overlapped, so that the edge effect can be eliminated, and the friction force is greatly reduced.
In addition, the application also provides a MEMS switch.
Drawings
For a clearer explanation of the embodiments or technical solutions of the prior art of the present application, the drawings needed for the description of the embodiments or prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a top view of a non-continuously supported drive member according to an embodiment of the present application;
FIG. 2 is a front view of the drive member of FIG. 1;
FIG. 3 is a top view of a non-continuously supported drive member with three drive electrodes according to an embodiment of the present application;
FIG. 4 is a top view of an alternative embodiment of a non-continuously supported drive member with three drive electrodes according to the present invention;
FIG. 5 is an elevation view of another non-continuously supported drive member provided in accordance with an embodiment of the present application;
FIG. 6 is an equivalent circuit diagram of two driving electrodes and a sliding member in the driving member of FIG. 1;
FIG. 7 is a graph of the driving force and normal force of the slide member of the driving member of FIG. 1 versus the distance moved;
FIG. 8 is a graph of normal force to driving force ratio versus travel distance for a sliding member of the drive member of FIG. 1;
FIG. 9 is an equivalent circuit diagram of three driving electrodes and a sliding member in the driving member of FIG. 3;
FIG. 10 is a graph showing the relationship between the driving force and the normal force of the sliding member and the moving distance when the distance between the driving electrodes in the driving member shown in FIG. 3 is 2 μm;
FIG. 11 is a graph showing the relationship between the ratio of the normal force to the driving force of the sliding member and the moving distance when the distance between the driving electrodes in the driving member shown in FIG. 3 is 2 μm;
FIG. 12 is a graph showing the relationship between the driving force and the normal force of the slide member and the moving distance when the distance between the driving electrodes in the driving member shown in FIG. 3 is 3 μm;
fig. 13 is a graph showing the relationship between the ratio of the normal force to the driving force of the sliding member and the moving distance when the distance between the driving electrodes in the driving member shown in fig. 3 is 3 μm.
Detailed Description
In order that those skilled in the art will better understand the disclosure, the following detailed description will be given with reference to the accompanying drawings. It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, but the present invention may be practiced in other ways than those specifically described and will be readily apparent to those of ordinary skill in the art without departing from the spirit of the present invention, and therefore the present invention is not limited to the specific embodiments disclosed below.
As described in the background section, the driving member of the present in-plane sliding type is provided with a driving member inside the base, and the sliding member is provided on the upper surface of the base, and the driving member has a large friction force in the process of driving the sliding member to move, so that the required driving force is large.
In view of the above, the present application provides a discontinuously supported driving part, and referring to fig. 1 and 2, the discontinuously supported driving part includes:
the supporting frame comprises substrates 1 which are oppositely arranged;
a sliding component 2 arranged on the support frame; the width of the sliding part 2 is larger than the distance between the substrates 1;
the driving component is arranged in the relative range of the substrate 1 and is not completely positioned in the relative range, the height of the driving component is less than that of the substrate 1, and in the initial position, the projection overlapping area of the sliding component 2 and the driving component positioned outside the sliding component 2 on the horizontal plane is greater than or equal to zero.
In the initial position, when the projected overlapping area of the sliding member 2 and the driving member located outside the sliding member 2 on the horizontal plane is zero, that is, the edge of the sliding member 2 and the edge of the driving member located outside the edge are in a critical state of just overlapping, as shown in fig. 1, 3 and 4, the driving force applied to the driving sliding member 2 is the largest.
It should be noted that, the driving component of the discontinuous support in this application further includes a transmission component, the type of the transmission component may be a capacitive type, or a contact type, and the like, and this application is not limited, and the specific arrangement of the transmission component is well known to those skilled in the art, and will not be described in detail herein.
The substrate 1 includes, but is not limited to, a silicon substrate, a silicon oxide substrate, a silicon nitride substrate, and the like, which are commonly used insulating substrates.
The width of the sliding part 2 is larger than the distance between the substrates 1 in order to ensure that the sliding part 2 moves on the substrate 1; the height of the driving part is smaller than that of the base 1 in order to make the sliding part 2 only contact with the base 1 in the supporting frame, and reduce the contact area.
Further, the width of the sliding member 2 is larger than the sum of the distance between the substrates 1 and the width of the two substrates 1, so as to enhance the stability of the sliding member 2.
In the present application, the driving method of the driving member is not limited, and for example, electric driving, magnetic driving, optical driving, or the like may be employed.
Optionally, the drive means comprises at least two drive electrodes 3. The driving electrodes 3 have the same size, that is, the length and the width of the driving electrodes 3 are respectively equal, and of course, the sizes of the different driving electrodes 3 may be different.
Preferably, the drive electrode 3 is located in the middle of the two substrates 1.
Example 1
Referring to fig. 1 and fig. 2, the driving component includes two driving electrodes 3, and any one of the driving electrodes 3 is located in the opposite range of the substrate 1, and at this time, leads are directly led from two ends of the driving electrode 3.
The length of the sliding part 2 is greater than a preset threshold value, and the preset threshold value is the sum of the length of the driving electrode 3 and the distance between all the adjacent driving electrodes 3. In the present example, i.e., when the drive electrodes 3 are the same size, the length of the slide member 2 is greater than the sum of the length of the drive electrode 3 and the distance between the two drive electrodes 3.
Example 2
Referring to fig. 3, the driving unit includes three driving electrodes 3. The substrate 1 includes a plurality of substrate units 11 arranged at intervals, and the driving electrodes 3 on both sides are located in opposite ranges of the substrate units 11. At this time, the driving electrodes 3 on both sides may be connected to the leads on both ends of the driving electrodes 3, and the driving electrode 3 in the middle may be connected to the leads at the interval from the base unit 11.
The distances between the adjacent driving electrodes 3 are equal. However, the present application is not limited to this, and the distance between adjacent driving electrodes 3 may be different.
Example 3
Referring to fig. 4, the substrate 1 includes a plurality of substrate units 11 disposed at intervals, and the driving electrodes 3 in the middle are located in opposite ranges of the substrate units 11. At this time, the driving electrodes 3 on both sides may be connected to the leads on both ends of the driving electrodes 3, and the driving electrode 3 in the middle may be connected to the leads at the interval from the base unit 11.
The distances between the adjacent driving electrodes 3 are equal. However, the present application is not limited to this, and the distance between adjacent driving electrodes 3 may be different.
The length of the sliding part 2 is greater than a preset threshold value, and the preset threshold value is the sum of the length of the driving electrode 3 and the distance between all the adjacent driving electrodes 3. In embodiment 2 and embodiment 3, when the sizes of the driving electrodes 3 are the same, the distances between the middle driving electrode 3 and the two side driving electrodes 3 are set to be a first distance and a second distance, respectively, that is, the length of the sliding member 2 is greater than the sum of the length of the driving electrodes 3, the first distance and the second distance.
The driving component comprises a substrate 1 which is arranged relatively and separately, a sliding component 2 is arranged on the substrate 1, the height of the driving component is less than that of the substrate 1, namely, the sliding component 2 is supported only by a support frame formed by the substrate 1, so that the contact area between the substrate 1 and the sliding component 2 is reduced, and the friction force between the substrate 1 and the sliding component 2 is reduced, and as the driving component is arranged in the opposite range of the two substrates 1 but is not completely positioned in the opposite range of the two substrates 1, the contact area between the sliding component 2 and the substrate 1 during moving is smaller, the friction force is further reduced, and the driving force of the sliding component 2 is reduced; meanwhile, the sliding component and the edge of the driving component positioned outside the sliding component are in a critical state of being just overlapped, so that the edge effect can be eliminated, and the friction force is greatly reduced.
In order to further reduce the friction force when the sliding member 2 slides on the substrate 1, on the basis of any of the above embodiments, in one embodiment of the present application, the sliding member 2 is in ultra-smooth contact with the substrate 1. Ultra-sliding contact means that the friction between two contact surfaces where relative sliding occurs is almost zero and the wear is zero. At least one of the lower surface of the slide member 2 and the upper surface of the substrate 1 is a single-crystal two-dimensional interface which is an atomically flat surface, and the other is a van der Waals surface. An atomically flat surface refers to a surface having a roughness of less than 1 nm.
On the basis of any one of the above embodiments, in an embodiment of the present application, the driving part further includes:
and an insulating layer 4 provided on the upper surface of the substrate 1 for insulating the sliding member 2 from the driving member. For example, the driving member includes two driving electrodes, as shown in fig. 5.
The material of the insulating layer 4 includes, but is not limited to, any one of silicon dioxide, silicon nitride, and sapphire.
Preferably, the sliding member 2 is in ultra-smooth contact with the insulating layer 4, so that the friction force between the sliding member 2 and the insulating layer 4 is almost zero and the wear is zero. At least one of the lower surface of the sliding member 2 and the upper surface of the insulating layer 4 is a single-crystal two-dimensional interface, which is an atomically flat surface, and the other is a van der waals surface.
The sliding member 2 comprises at least one superclip. The material of the super-slip sheet is preferably a graphite sheet or other material having a super-slip surface, and is preferably a material having a super-slip property, such as graphite, single-layer/few-layer graphene, or the like, attached to the lower surface. The thickness of the super-slip sheet is generally 100nm to 10 μm, and the size of the super-slip sheet is generally 1 μm to 20 μm.
When the number of the ultra-sliding pieces is multiple, the height and the bottom area of each ultra-sliding piece can be the same or different, and the ultra-sliding pieces form an ultra-sliding piece group through a connecting layer. The ultra-sliding surfaces of the ultra-sliding pieces in the ultra-sliding piece group are consistent.
The force applied to the sliding member in the driving member of the present application will be explained.
Referring to fig. 1 and 2, taking the example that the driving unit includes two driving electrodes 3, the distance between the driving electrodes 3 and the two substrates 1 is equal. The distance D between the two drive electrodes 3 was set to 2 μm, and the distance D between the drive electrodes 3 and the substrates 1 on both sides was set to 2 μm F1 μm, width D of the substrate 1S1.5 μm, distance D between two substrates 1LThe width W of the driving electrode 3 was 8 μm, the width L of the sliding member 2 was 15 μm, and the height h of the base 1 was 10 μmL1.2 μm, height h of the drive electrode 3eThe height difference d between the driving electrode 3 and the substrate 1 is 0.1 μm, and 1.1 μm.
An equivalent circuit diagram of the two drive electrodes 3 and the slide member 2 in fig. 1 and 2 is shown in fig. 6, C1Is the capacitance between the left drive electrode 3 and the slide member 2, C2In order to obtain the capacitance between the right driving electrode 3 and the sliding member 2, the two driving electrodes 3 are connected to a driving power source, both of which are provided with a certain bias voltage, and thus are equivalent to two power sources in fig. 6, and further, assuming that the negative potentials of the two power sources are 0 and the potential on the sliding member 2 is u0The potentials corresponding to the two driving electrodes 3 are u respectively1、u2The charges corresponding to the two capacitors are q1、q2Then, the capacitance and charge quantity calculation formula is:
q1+q2＝0 (3)
u1-u2＝V (4)
wherein epsilon0Is a vacuum dielectric constant of ∈rW is the width of the driving electrode 3, L is the width of the slide member 2, D is the distance between two driving electrodes 3, D is the height difference between the driving electrode 3 and the substrate 1, and x is the distance that the slide member 2 moves from the position of fig. 1 to the right, in terms of relative dielectric constant.
Electrostatic energy E between the slide member 2 and the drive electrode 3tComprises the following steps:
the driving force F of the slide member 2xComprises the following steps:
normal force F of sliding part 2yComprises the following steps:
wherein, | u1-u2|＝ΔV＝200V (10)
The friction force f to which the sliding part 2 is subjected during drivingxComprises the following steps:
fx＝μ0Fy+μyFy+F0 (11)
wherein, mu0Is an internal product of the contact interface between the sliding part 2 and the upper surfaces of the two substrates 1Coefficient of friction, mu, of the resulting frictional forceyCoefficient of friction, F, of the friction force generated at the edge of the contact interface between the sliding part 2 and the upper surfaces of the two substrates 10Is the frictional force that the slide member 2 receives when the positive pressure is 0. Mu.s0FyThe friction force generated for the in-plane contact is negligible, muyFy+F0The friction force generated for the edge contact is the main friction force.
Fig. 7 shows a relationship diagram between the driving force and the normal force of the sliding member 2 and the moving distance, wherein the abscissa represents the moving distance, the ordinate represents the magnitude of the force applied to the sliding member 2, and the driving force of the sliding member 2 is gradually reduced and the normal force of the sliding member 2 is gradually increased as x increases. A graph of the relationship between the ratio of the normal force to the driving force and the moving distance of the slide member 2 is shown in fig. 8, in which the abscissa represents the moving distance and the ordinate represents the ratio of the normal force to the driving force, and the ratio of the normal force to the driving force gradually increases as x increases.
Referring to fig. 3, taking as an example that the driving part includes three driving electrodes 3, the substrate includes two substrate units 11 arranged at intervals, and the driving electrodes 3 on two sides are located in the opposite range of the substrate units 11, the distances between the driving electrodes 3 and the substrates 1 on two sides are equal. The width W of the drive electrodes 3 was set to 8 μm, the distance D between the drive electrodes 3 was set to 2 μm, the width L of the slide member 2 was set to 15 μm, and the height difference D between the drive electrodes 3 and the substrate 1 was set to 1 μm.
FIG. 9 shows an equivalent circuit diagram of three driving electrodes and the sliding member 2 in FIG. 3, C1Is the capacitance between the left drive electrode 3 and the slide member 2, C2Is the capacitance between the intermediate drive electrode 3 and the slide member 2, C3In the capacitance between the right driving electrode 3 and the sliding member 2, the three driving electrodes 3 are connected to a driving power source, and all of them have a certain bias voltage, so that they are equivalent to three power sources in fig. 9, and in addition, assuming that the negative potentials of the two power sources are 0, the potentials corresponding to the three driving electrodes 3 are u, respectively1、u2、u3The charges corresponding to the two capacitors are q1、q2、q3Then, the capacitance and charge quantity calculation formula is:
q1+q2+q3＝0 (14)
wherein epsilon0Is a vacuum dielectric constant of ∈rW is the width of the driving electrode 3, L is the width of the slide member 2, D is the distance between two driving electrodes 3, D is the height difference between the driving electrode 3 and the substrate 1, and x is the distance that the slide member 2 moves from the position of fig. 1 to the right, in terms of relative dielectric constant.
Electrostatic energy E between the slide member 2 and the drive electrode 3tComprises the following steps:
the driving force F of the slide member 2xComprises the following steps:
normal force F of sliding part 2yComprises the following steps:
when u is1＝-100V，u2＝-100V、u3Driving force F when 100VXThe maximum value is taken.
The friction force f to which the sliding part 2 is subjected during drivingxComprises the following steps:
fx＝μ0Fy+μyFy+F0 (24)
wherein, mu0Is a friction coefficient, μ, of a friction force generated inside a contact interface between the sliding member 2 and the upper surfaces of the two substrates 1yCoefficient of friction, F, for the friction force generated at the edge of the contact interface between the sliding part 2 and the upper surfaces of the two substrates 10Is the frictional force that the slide member 2 receives when the positive pressure is 0. Mu.s0FyThe friction force generated by the in-plane contact is negligible, muyFy+F0The friction force generated for the edge contact is the main friction force.
Fig. 10 shows a relationship diagram between the driving force and the normal force of the sliding member 2 and the moving distance, where the abscissa represents the moving distance, and the ordinate represents the magnitude of the force applied to the sliding member 2, and as x increases, the driving force of the sliding member 2 gradually decreases, and the normal force of the sliding member 2 gradually increases. A graph of the relationship between the ratio of the normal force to the driving force and the moving distance of the slide member 2 is shown in fig. 11, in which the abscissa represents the moving distance and the ordinate represents the ratio of the normal force to the driving force, and the ratio of the normal force to the driving force gradually increases as x increases.
In the configuration shown in fig. 3, when the width W of the driving electrode 3 is set to 8 μm, the distance D between the driving electrodes 3 is set to 3 μm, the width L of the sliding member 2 is set to 15 μm, and the height difference D between the driving electrode 3 and the substrate 1 is set to 1 μm, the relationship between the driving force and the normal force of the sliding member 2 and the moving distance is shown in fig. 12, where the abscissa is the moving distance, the ordinate is the magnitude of the force applied to the sliding member 2, and the driving force of the sliding member 2 is gradually reduced and the normal force of the sliding member 2 is gradually increased as x increases. A graph of the relationship between the ratio of the normal force to the driving force and the moving distance of the slide member 2 is shown in fig. 13, in which the abscissa represents the moving distance and the ordinate represents the ratio of the normal force to the driving force, and the ratio of the normal force to the driving force gradually increases as x increases.
The present application further provides a MEMS switch including a non-continuously supported drive member as in any of the embodiments above.
The embodiments are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same or similar parts among the embodiments are referred to each other. The device disclosed by the embodiment corresponds to the method disclosed by the embodiment, so that the description is simple, and the relevant points can be referred to the method part for description.
The discontinuously supported actuation components and MEMS switches provided herein are described in detail above. The principles and embodiments of the present application are explained herein using specific examples, which are provided only to help understand the method and the core idea of the present application. It should be noted that, for those skilled in the art, without departing from the principle of the present application, the present application can also make several improvements and modifications, and those improvements and modifications also fall into the protection scope of the claims of the present application.
Claims (13)
1. A non-continuously supported drive component, comprising:
the supporting frame comprises oppositely arranged bases;
the sliding component is arranged on the support frame; the width of the sliding part is larger than the distance between the substrates;
the driving component is arranged in the relative range of the substrate and is not completely positioned in the relative range, the height of the driving component is less than that of the substrate, and in the initial position, the projection overlapping area of the sliding component and the driving component positioned outside the sliding component on the horizontal plane is larger than or equal to zero.
2. The drive component of claim 1, wherein the drive component comprises at least two drive electrodes.
3. The drive component of claim 2, wherein the drive component comprises three of the drive electrodes.
4. The driving section according to claim 3, wherein when the number of the driving electrodes is three, the distances between adjacent driving electrodes are equal.
5. The drive component of claim 3, wherein the substrate comprises a plurality of spaced apart substrate elements, the drive electrodes on either side being located within opposing extents of the substrate elements.
6. The drive component of claim 3, wherein the substrate comprises a plurality of spaced apart substrate elements, the intermediate drive electrodes being located within opposing extents of the substrate elements.
7. The drive component of claim 2, wherein the drive component comprises two of the drive electrodes, any one of the drive electrodes being located within an opposing extent of the substrate.
8. The drive component of claim 2, wherein the drive electrode is located intermediate two of the substrates.
9. The drive component of claim 2, wherein the length of the sliding component is greater than a predetermined threshold, the predetermined threshold being the sum of the length of the drive electrode and the spacing of all adjacent drive electrodes.
10. The drive component of claim 1, wherein the width of the sliding component is greater than the sum of the distance between the substrates and the width of both of the substrates.
11. The drive component of any one of claims 1 to 10, further comprising:
and the insulating layer is arranged on the upper surface of the substrate.
12. The drive component of claim 11, wherein the sliding component is in ultra-smooth contact with the insulating layer.
13. A MEMS switch comprising a discontinuously supported drive member as recited in any of claims 1 through 12.
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| CN202122979612.8U CN216648554U (en) | 2021-11-30 | 2021-11-30 | Driving part with discontinuous support and MEMS switch |
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