CN216578407U - Split type combination quartz crucible mould - Google Patents

Split type combination quartz crucible mould Download PDF

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Publication number
CN216578407U
CN216578407U CN202122825351.4U CN202122825351U CN216578407U CN 216578407 U CN216578407 U CN 216578407U CN 202122825351 U CN202122825351 U CN 202122825351U CN 216578407 U CN216578407 U CN 216578407U
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inner shell
water cooling
purity quartz
purity
spare
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CN202122825351.4U
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陈怀斌
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Jiangsu Shenhui Semiconductor Technology Co ltd
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Jiangsu Shenhui New Ceramic Material Technology Co ltd
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Abstract

A split combined quartz crucible mold comprises an inner shell formed by combining and stacking a plurality of high-purity quartz ceramic pieces, wherein a water cooling circulation sleeve is sleeved outside the inner shell, an air exhaust gap is reserved between the water cooling circulation sleeve and the outer wall of the inner shell, vacuumizing holes communicated with the air exhaust gap are formed in the high-purity quartz ceramic pieces, and a vacuumizing pipeline communicated with the air exhaust gap is fixedly communicated with the bottom of the water cooling circulation sleeve. The split combined quartz crucible mold provided by the application is of a split structure, has the advantages of small expansion coefficient and good thermal shock property, is not easy to expand and deform at high temperature, is made of high-purity silica, is free from pollution due to contact with high-purity quartz sand used as a crucible raw material, is long in service cycle of each mold, and effectively reduces the production cost of the crucible.

Description

Split type combination quartz crucible mould
Technical Field
The utility model relates to the technical field of crucible molds, in particular to a split combined quartz crucible mold.
Background
Along with the national standard-reaching requirement of carbon neutralization, solar energy develops and progresses day by day, and the solar energy has unique advantages. Along with the development of solar energy, the development of a single crystal solar energy technology is particularly rapid and has a leading position, the yield and the cost performance of solar single crystals are also greatly improved, the size of a monocrystalline silicon crucible is gradually increased from 10 inches in the 90 th year to 36-40 inches till now, and the problem of a mould for producing the monocrystalline silicon crucible is also gradually shown along with the gradual increase of the size of the monocrystalline silicon crucible.
The material used for the monocrystalline silicon quartz crucible mold is graphite, the graphite mold has high cost, oxidation and shedding at high temperature pollute the high-purity quartz sand, but the produced high-purity quartz sand is purified about 8000 yuan per ton after being polluted, and the graphite crucible mold has high cost and great pollution; later, the silicon single crystal quartz crucible mold belongs to a large-size silicon single crystal quartz crucible mold, but the silicon single crystal quartz crucible mold is high in cost and easy to deform at high temperature, the silicon single crystal quartz crucible mold can react with high-purity quartz sand to be polluted at the same high temperature, the polluted high-purity quartz sand is difficult to purify, the silicon single crystal quartz crucible mold is heavy and inconvenient to operate, the two molds have high cost and low cost performance, the polluted high-purity quartz sand is purified by about 8000 yuan per ton, and the environmental pollution is greatly increased.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem of providing a split combined quartz crucible mold with good thermal shock property and no pollution aiming at the defects of the prior art.
The technical problem to be solved by the present invention is achieved by the following technical means. The utility model relates to a split type combined quartz crucible mold, which comprises an inner shell formed by combining and stacking a plurality of high-purity quartz ceramic parts, wherein a water cooling circulating sleeve is sleeved outside the inner shell, an air exhaust gap is reserved between the water cooling circulating sleeve and the outer wall of the inner shell, vacuumizing holes communicated with the air exhaust gap are formed in each high-purity quartz ceramic part, and a vacuumizing pipeline communicated with the air exhaust gap is fixedly communicated with the bottom of the water cooling circulating sleeve.
The technical problem to be solved by the utility model can be further realized by the following technical scheme that for the split combined quartz crucible mold, a plurality of supporting legs are fixedly arranged at the bottom of the inner shell, a supporting tube matched with the supporting legs is welded at the bottom of the water cooling circulating sleeve, one end of the supporting tube extends into the air exhaust gap, the other end of the supporting tube extends to the outer side of the water cooling circulating sleeve and is screwed with a sealing bolt, and a supporting spring matched with the supporting legs is also arranged in the supporting tube.
The technical problem to be solved by the utility model can be further solved by adopting the following technical scheme that for the split combined quartz crucible mold, the inner shell comprises a disc-shaped part at the bottom, a cylinder-shaped part at the middle part and a ring-shaped part at the top, the disc-shaped part is of an integral structure made of high-purity quartz ceramic parts, and the cylinder-shaped part and the ring-shaped part are of split structures formed by combining and stacking the high-purity quartz ceramic parts.
The technical problem to be solved by the utility model can be further solved by adopting the following technical scheme that for the split combined quartz crucible mold, the tops of the disc-shaped part and the cylinder-shaped part are respectively provided with a convex edge, the bottoms of the cylinder-shaped part and the ring-shaped part are respectively provided with a groove, one side of the high-purity quartz ceramic part forming the cylinder-shaped part and one side of the high-purity quartz ceramic part forming the ring-shaped part are respectively provided with a convex edge, and the other side of the high-purity quartz ceramic part forming the cylinder-shaped part and the other side of the high-purity quartz ceramic part forming the ring-shaped part are respectively provided with a groove.
The technical problem to be solved by the utility model can be further realized by the following technical scheme that for the split combined quartz crucible mold, the vacuumizing hole is conical, and the smaller end of the vacuumizing hole is arranged at one side close to the vacuumizing gap.
The technical problem to be solved by the utility model can be further realized by the following technical scheme that quartz cotton or quartz ceramic filter elements are filled in the vacuumizing holes of the split combined quartz crucible mold.
The technical problem to be solved by the utility model can be further realized by the following technical scheme that for the split combined quartz crucible mold, the porosity of the high-purity quartz ceramic piece is 5-15, the width of the upper part of the air extraction gap is 30-50 mm, and the width of the bottom of the air extraction gap is 100-150 mm.
Compared with the prior art, the mold provided by the utility model adopts a split structure, is built by combining and stacking a plurality of high-purity quartz ceramic pieces, and has the advantages of high temperature resistance, small expansion coefficient, good thermal shock resistance, heat insulation and good heat preservation performance, moreover, the high-purity quartz ceramic pieces are made of high-purity silicon dioxide, are free from pollution when being in contact with high-purity quartz sand used as crucible raw materials, the service cycle of each mold is long, and the production cost of the crucible is effectively reduced.
Drawings
FIG. 1 is a schematic structural diagram of the present invention;
FIG. 2 is a schematic structural view of the inner case of the present invention;
FIG. 3 is a schematic view of the structure of the disc of the present invention;
FIG. 4 is a schematic view of the construction of the cartridge of the present invention;
FIG. 5 is a schematic view of the ring of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings of the present invention. All other embodiments, which can be obtained by a person skilled in the art without making any creative effort based on the embodiments in the present invention, belong to the protection scope of the present invention.
Referring to fig. 1 to 5, the split combined quartz crucible mold comprises an inner shell 1 formed by combining and stacking a plurality of high-purity quartz ceramic parts, a water cooling circulating sleeve 2 is sleeved outside the inner shell 1, an air exhaust gap 3 is reserved between the water cooling circulating sleeve 2 and the outer wall of the inner shell 1, vacuumizing holes 9 communicated with the air exhaust gap 3 are formed in the high-purity quartz ceramic parts, and a vacuumizing pipeline 8 communicated with the air exhaust gap 3 is fixedly communicated with the bottom of the water cooling circulating sleeve 2. The inner shell 1 is used for containing high-purity quartz sand for quartz crucible production, the high-purity quartz sand is centrifugally hot-melted when rotating along with the water cooling circulating sleeve 2 to obtain the quartz crucible, and the shape of the inner shell 1 is consistent with that of the quartz crucible; the inner shell 1 is formed by combining and stacking high-purity quartz ceramic pieces, can relieve expansion deformation at high temperature and is not easy to deform; the water cooling circulation sleeve 2 is matched with the inner shell 1, so that the inner shell 1 can be conveniently driven to rotate, an air exhaust gap 3 can be formed between the water cooling circulation sleeve and the inner shell 1, high-purity quartz sand in the inner shell 1 is adsorbed to the inner wall of the inner shell 1 through the vacuumizing hole 9, a quartz crucible is formed through hot melting, and meanwhile, cooling water can be circularly introduced to perform cooling treatment;
fixing holes are formed in the tops of the inner shell 1 and the water cooling circulation sleeve 2, so that the inner shell 1 and the water cooling circulation sleeve 2 can be fixedly connected by using fixing bolts;
in order to prevent the quartz sand in the inner shell 1 from entering the air exhaust gap 3 from the vacuumizing hole 9, air permeable materials such as quartz cotton or quartz ceramic filter elements are filled in the vacuumizing hole 9, so that the quartz sand can be blocked without influencing vacuumizing treatment;
in practical application, the vacuumizing hole 9 can be designed to be conical, and the smaller end of the vacuumizing hole 9 is arranged on one side close to the vacuumizing gap 3, so that the vacuumizing hole 9 has certain taper, the quartz cotton or quartz ceramic filter element and other breathable materials are not easy to suck out from the vacuumizing position, and the firmness is ensured.
A plurality of supporting legs 4 are fixedly installed at the bottom of the inner shell 1, supporting tubes 5 matched with the supporting legs 4 are welded at the bottom of the water cooling circulating sleeve 2, one ends of the supporting tubes 5 extend into the air exhaust gap 3, the other ends of the supporting tubes 5 extend to the outer side of the water cooling circulating sleeve 2 and are provided with sealing bolts 7 in a screwed mode, and supporting springs 6 matched with the supporting legs 4 are further installed in the supporting tubes 5. When the inner shell 1 is placed in the water cooling circulation sleeve 2, the supporting legs 4 are inserted into the supporting tubes 5, the supporting springs 6 tightly support and fix the supporting legs 4, stable installation of the inner shell 1 is achieved, and meanwhile, when the subsequent inner shell 1 is heated to expand, the supporting springs 6 can play a certain buffering role; the sealing bolt 7 is also sleeved with a sealing gasket for sealing the supporting tube 5, and meanwhile, the length of the sealing bolt 7 can be set to adjust the elasticity of the supporting spring 6 to the supporting leg 4, so that the mounting and fixing of the inner shell 1 can be better realized;
in practical application, a cylindrical guide isolation block can be arranged in the supporting tube 5 between the supporting spring 6 and the sealing bolt 7, so that the sealing bolt 7 can be used for supporting the supporting spring 6 conveniently, an isolation effect can be achieved in the supporting tube 5, the sealing bolt 7 is prevented from being in direct contact with the supporting spring 6, and the sealing bolt 7 is prevented from being deformed and damaged by high temperature as much as possible; preferably, the guide isolation block is made of graphite material;
the inner shell 1 comprises a disc-shaped part 10 at the bottom, a cylinder-shaped part 12 in the middle and a ring-shaped part 14 at the top, wherein the disc-shaped part 10 is of an integral structure made of high-purity quartz ceramic parts, and the cylinder-shaped part 12 and the ring-shaped part 14 are of split structures formed by combining and stacking the high-purity quartz ceramic parts. The supporting legs 4 are arranged at the bottom of the disc-shaped part 10, the number of the supporting legs is 3-4, the supporting legs are uniformly distributed along the circumferential direction of the disc-shaped part 10, the cylindrical part 12 and the annular part 14 are of split structures and can be divided into 3-4 sections, so that the replacement and the maintenance are convenient, when one section of high-purity quartz ceramic part is damaged, only the high-purity quartz ceramic part at the position needs to be replaced, the integral replacement is not needed, and the cost is reduced;
in order to improve the reliability of the connection and installation of the disc-shaped element 10, the cylinder-shaped element 12 and the ring-shaped element 14, the tops of the disc-shaped element 10 and the cylinder-shaped element 12 are respectively provided with a convex edge 11, the bottoms of the cylinder-shaped element 12 and the ring-shaped element 14 are respectively provided with a groove 13, one side of the high-purity quartz ceramic element forming the cylinder-shaped element 12 and one side of the high-purity quartz ceramic element forming the ring-shaped element 14 are respectively provided with a convex edge 11, the other side of the high-purity quartz ceramic element forming the cylinder-shaped element 12 and the other side of the high-purity quartz ceramic element forming the ring-shaped element 14 are respectively provided with a groove 13, when the inner shell 1 is assembled, the disc-shaped element 10, the cylinder-shaped element 12 and the ring-shaped element 14 can be stacked by matching the convex edges 11 and the grooves 13, and an integral inner shell 1 is formed;
preferably, the fixing holes of the inner shell 1 are arranged on the ring-shaped member 14;
the porosity of the high-purity quartz ceramic piece is 5-15, the width of the upper part of the air exhaust gap 3 is 30-50 mm, the width of the bottom of the air exhaust gap 3 is 100-150 mm, the diameter of one end of the vacuumizing hole 9 is 10-30mm, and the diameter of the other end of the vacuumizing hole is 3-10 mm.
When the device is used, the inner shell 1 is placed in the water cooling circulating sleeve 2, one side of a high-purity quartz ceramic part forming the inner shell 1 is combined and piled, the high-purity quartz ceramic part is fixed by the fixing hole and the supporting tube 5, then the assembled inner shell 1 and the water cooling circulating sleeve 2 are placed on an external rotating device, quartz sand for quartz crucible production is placed in the inner shell 1, then electric arc hot melting is carried out on the quartz sand, the water cooling circulating sleeve 2 is rotated at the same time, axial vacuum treatment is carried out on the air exhaust gap 3 by the vacuumizing pipeline 8, the quartz sand is attached to the inner wall of the inner shell 1, and the quartz crucible is formed by hot melting;
subsequently, cooling water can be circularly introduced by utilizing the water cooling circulating sleeve 2 to cool the quartz crucible;
meanwhile, the air exhaust gap 3 is evacuated into a vacuum cavity, so that the heat insulation performance is good, and the thermal field of the arc quartz crucible is released from inside to outside, so that the effect of temperature leakage can be achieved, and the temperature is reduced for water cooling outside the mold;
high-purity quartz ceramic spare adopts high-purity silica to make, and the quartz sand contact of production usefulness with quartz crucible under high temperature is pollution-free, and simultaneously, inner shell 1 is split type structure, and not only the coefficient of expansion is little, and non-deformable can used repeatedly many times under high temperature, and certain part damages moreover, only needs to change this part, need not carry out the whole change, and is with low costs, is favorable to reducing quartz crucible's manufacturing cost.

Claims (7)

1. The utility model provides a split type combination quartz crucible mould which characterized in that: the high-purity quartz ceramic piece vacuum pumping device comprises an inner shell formed by combining and stacking a plurality of high-purity quartz ceramic pieces, a water cooling circulation sleeve is sleeved outside the inner shell, an air pumping gap is reserved between the water cooling circulation sleeve and the outer wall of the inner shell, vacuum pumping holes communicated with the air pumping gap are formed in the high-purity quartz ceramic pieces, and a vacuum pumping pipeline communicated with the air pumping gap is fixedly communicated with the bottom of the water cooling circulation sleeve.
2. The split type combined quartz crucible mold according to claim 1, wherein: the bottom of the inner shell is fixedly provided with a plurality of supporting legs, the bottom of the water cooling circulating sleeve is welded with a supporting tube matched with the supporting legs, one end of the supporting tube extends into the air exhaust gap, the other end of the supporting tube extends to the outer side of the water cooling circulating sleeve and is provided with a sealing bolt in a screwing mode, and a supporting spring matched with the supporting legs is further arranged in the supporting tube.
3. The split type combined quartz crucible mold according to claim 1, wherein: the inner shell comprises a disc-shaped part at the bottom, a cylindrical part in the middle and an annular part at the top, the disc-shaped part is of an integral structure made of high-purity quartz ceramic parts, and the cylindrical part and the annular part are of split structures formed by combining and stacking the high-purity quartz ceramic parts.
4. The split type combined quartz crucible mold according to claim 3, wherein: all be provided with the bead at the top of disk and tube-shape spare, all be provided with the recess in the bottom of tube-shape spare and cyclic annular spare, all be provided with the bead at the high-purity quartz ceramic spare of constituteing the tube-shape spare and the high-purity quartz ceramic spare of constituteing the cyclic annular spare one side, all be provided with the recess at the high-purity quartz ceramic spare of constituteing the tube-shape spare and the high-purity quartz ceramic spare of constituteing the cyclic annular spare opposite side.
5. The split type combined quartz crucible mold according to claim 1, wherein: the vacuumizing hole is conical, and the smaller end of the vacuumizing hole is arranged on one side close to the air exhaust gap.
6. The split type combined quartz crucible mold according to claim 1 or 5, wherein: quartz cotton or quartz ceramic filter elements are filled in the vacuumizing holes.
7. The split type combined quartz crucible mold according to claim 1, wherein: the porosity of the high-purity quartz ceramic piece is 5-15, the width of the upper part of the pumping gap is 30-50 mm, and the width of the bottom of the pumping gap is 100-150 mm.
CN202122825351.4U 2021-11-18 2021-11-18 Split type combination quartz crucible mould Active CN216578407U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202122825351.4U CN216578407U (en) 2021-11-18 2021-11-18 Split type combination quartz crucible mould

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202122825351.4U CN216578407U (en) 2021-11-18 2021-11-18 Split type combination quartz crucible mould

Publications (1)

Publication Number Publication Date
CN216578407U true CN216578407U (en) 2022-05-24

Family

ID=81646342

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202122825351.4U Active CN216578407U (en) 2021-11-18 2021-11-18 Split type combination quartz crucible mould

Country Status (1)

Country Link
CN (1) CN216578407U (en)

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Address after: 222000 plant 5, No. 938, Jingdu Avenue East Road, Donghai Economic Development Zone, Donghai County, Lianyungang City, Jiangsu Province

Patentee after: Jiangsu Shenhui Semiconductor Technology Co.,Ltd.

Address before: 222000 plant 5, No. 938, Jingdu Avenue East Road, Donghai Economic Development Zone, Donghai County, Lianyungang City, Jiangsu Province

Patentee before: Jiangsu Shenhui new ceramic material technology Co.,Ltd.

CP01 Change in the name or title of a patent holder