CN109371464B - Directional solidification device for producing solar polycrystalline silicon - Google Patents
Directional solidification device for producing solar polycrystalline silicon Download PDFInfo
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- CN109371464B CN109371464B CN201811378264.5A CN201811378264A CN109371464B CN 109371464 B CN109371464 B CN 109371464B CN 201811378264 A CN201811378264 A CN 201811378264A CN 109371464 B CN109371464 B CN 109371464B
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B28/00—Production of homogeneous polycrystalline material with defined structure
- C30B28/04—Production of homogeneous polycrystalline material with defined structure from liquids
- C30B28/06—Production of homogeneous polycrystalline material with defined structure from liquids by normal freezing or freezing under temperature gradient
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
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Abstract
The application discloses a directional solidification device for producing solar polycrystalline silicon, which comprises a substrate, wherein a composite protective sleeve is arranged on the substrate, and a cylindrical graphite die is accommodated and placed in the composite protective sleeve; the composite protection sleeve comprises a bottom plate, a plurality of curved surface side plates and a limiting ring, wherein an installation groove is formed in the upper surface of the bottom plate along the circumferential direction, a rubber sealing gasket is arranged in the installation groove, the axial bottom ends of the curved surface side plates are embedded into the installation groove in a transition fit manner and are fixed in the installation groove, the axial side edges of any two adjacent curved surface side plates are mutually sealed and fit to enable the whole to be in a cylindrical structure, and the top of the cylindrical structure formed by the curved surface side plates is detachably sleeved with the limiting ring for fixing; the bottom plate is provided with a cooling disc which is used for being contacted with the bottom of the graphite mold. The directional solidification composite device provided by the application is very easy to assemble and disassemble the composite protective sleeve, and is convenient for removing impurities and overhauling the composite protective sleeve.
Description
Technical Field
The application relates to the technical field of polysilicon purification, in particular to a directional solidification device for producing solar polysilicon.
Background
Currently, solar energy has become the most interesting green energy source, and polysilicon is the most widely used solar cell material at present. Solar-grade polycrystalline silicon material is an important raw material of a solar cell, the solar cell can convert solar energy into electric energy, and the solar energy has huge application value at present of shortage of conventional energy. Currently, the polysilicon material for preparing solar cells worldwide is produced in large scale, and the main technical route at present is as follows:
the development of the solar photovoltaic industry relies on the purification of silicon feedstock. In the process of purifying the silicon raw material, a key and indispensable link exists, namely, the silicon raw material is directionally solidified and purified, and the directional solidification technology is widely applied to the field of metallurgical purification. By utilizing the characteristic that the segregation coefficient between silicon and metal impurities in silicon raw materials is greatly different, a Bridgman method is adopted, a water-cooling ingot pulling mechanism is utilized to slowly pull a quartz crucible out of a thermal field of an induction coil, during solidification, silicon liquid at the bottom end of the crucible is firstly solidified, impurities with small segregation coefficients are continuously diffused and separated from solidified silicon into liquid to be gathered in the liquid in order to reach segregation balance, along with continuous solidification, the concentration of the metal impurities in the liquid is higher and higher, finally the metal impurities are solidified at the top end of an ingot, after solidification is completed, the temperature is kept for a period of time at a higher temperature, all the components are fully diffused to reach segregation balance, and finally one end with higher metal impurity content is removed, so that a purified polysilicon ingot is obtained.
At present, in the directional solidification process, a protection plate is required to be additionally arranged on a graphite die for containing silicon raw materials, so that the damage to a furnace body caused by leakage flow and scattering of silicon liquid in the production process is prevented, but the existing protection sleeve is often in an integrated structure, and is not easy to disassemble and assemble and remove sundries.
Disclosure of Invention
The technical problems to be solved by the application are as follows: the existing protective sleeve with the protection function on the graphite mold is often of an integrated structure, and is not easy to disassemble, assemble and remove sundries.
The application is realized by the following technical scheme:
the directional solidification device for producing the solar polycrystalline silicon comprises a substrate, wherein a composite protective sleeve is arranged on the substrate, and a cylindrical graphite mold is accommodated and placed in the composite protective sleeve; the composite protection sleeve comprises a bottom plate, a plurality of curved surface side plates and a limiting ring, wherein an installation groove is formed in the upper surface of the bottom plate along the circumferential direction, a rubber sealing gasket is arranged in the installation groove, the axial bottom ends of the curved surface side plates are embedded into the installation groove in a transition fit manner and are fixed in the installation groove, the axial side edges of any two adjacent curved surface side plates are mutually sealed and fit to enable the whole to be in a cylindrical structure, and the top of the cylindrical structure formed by the curved surface side plates is detachably sleeved with the limiting ring for fixing; the bottom plate is provided with a cooling disc which is used for being contacted with the bottom of the graphite mold.
The working principle of the application is as follows: firstly, placing a graphite mold into a composite protective sleeve, adding a silicon raw material into the graphite mold, and then placing the composite protective sleeve and a substrate into a hearth for directional solidification reaction; the composite protection sleeve body is composed of a bottom plate, a plurality of curved surface side plates and a limiting ring, the bottom plate is the bottom of the composite protection sleeve, the side wall of the composite protection sleeve is formed by splicing the curved surface side plates, the bottom of the spliced curved surface side plates is embedded into a mounting groove on the bottom plate to be internally fixed, a rubber sealing gasket is arranged in the mounting groove to play a fastening role on the curved surface side plates, meanwhile, the joint of the curved surface side plates and the bottom plate is sealed, and the top is clamped and fixed with the curved surface side plates through the limiting ring, so that the curved surface side plates after being spliced are in a stable integrated structure. Thus, the composite protective sleeve is very easy to assemble and disassemble, and the impurity is conveniently removed and overhauled for the composite protective sleeve.
Preferably, the clamping grooves and the flanges which are mutually matched are formed in the side edges of the plurality of curved side plates along the axial direction, and the adjacent two curved side plates are sealed at the joint of the clamping grooves and the flanges through rubber gaskets.
Through set up draw-in groove or flange on the side of each curved surface curb plate, through draw-in groove and flange concatenation adaptation between two adjacent curved surface curb plate contact sides, increase contact nep to play good sealed effect through rubber seal pad.
Preferably, the end face of the limiting ring, which faces the bottom plate, is provided with a positioning ring groove along the circumferential direction, the curved side plate is embedded into the positioning ring groove, and the positioning ring groove is used for clamping the top end of the curved side plate.
Through seting up the locating ring groove on the bottom end face of spacing ring, can play good fixed action to a plurality of curved surface curb plates on the one hand, on the other hand also makes the spacing ring fix at the top of curved surface curb plate, prevents to take place axial displacement and influences overall stability.
Preferably, two symmetrically distributed limit grooves are formed in the inner wall of the limit ring, and the extending direction of the limit grooves is parallel to the axis direction of the limit ring; two limiting blocks matched with the limiting grooves are symmetrically arranged on the side wall of the top of the graphite die, and lifting clamp grooves are formed in the limiting blocks.
Through offer the spacing groove on spacing ring inner wall, and with the stopper embedding spacing inslot on the graphite mould, play certain fixed, spacing effect to the graphite mould, prevent that the graphite mould from taking place to rotate, remove for the protection sleeve, influence the heating effect.
Preferably, a fixed ring is arranged on the bottom surface of the cooling disc along the circumferential direction, a fixed ring groove matched with the fixed ring is concavely arranged on the upper plate surface of the bottom plate, a sealing rubber pad is arranged on the side wall of the fixed ring, and the sealing rubber pad is in transition fit and is tightly pressed between the fixed ring and the fixed ring groove.
The cooling disc is matched with the fixed ring groove in a transition way through the fixed ring, so that the cooling disc can be detachably and hermetically installed on the bottom plate.
Preferably, the cooling disc comprises a disc-shaped shell, the water inlet pipe penetrates through the bottom of the shell and stretches into the shell, and the free end of the stretching-in part is in sealing contact with the inner top surface of the shell. The side wall of the pipe section of the water inlet pipe extending into the shell is provided with a plurality of through holes; a plurality of heat conducting clapboards are radially distributed in the shell by taking the water inlet pipe as the center of a circle, the plate surface direction of the heat conducting clapboards is vertical to the axis direction of the shell, and the upper side and the lower side of the heat conducting clapboards are respectively in contact connection with the inner bottom surface and the top surface of the shell; the length of the heat conducting partition plate along the radiation direction is smaller than the linear distance between the outer wall of the water inlet pipe and the inner wall of the shell; a plurality of drain holes are formed in the shell along the bottom of the edge of the side wall; the output ends of the plurality of water discharge holes are communicated with the water discharge main pipe.
When the cooling device is used, cooling water is led in from the input end of the water inlet pipe, flows into the pipe section of the water inlet pipe positioned in the shell and enters the shell through the through holes on the side wall of the water inlet pipe, and the shell is divided into a plurality of cooling water circulation cavities which are uniformly distributed in a radiation way through a plurality of heat conducting partition boards which are distributed in a radiation way, and the cooling water flows out from the through holes, is uniformly distributed into the corresponding cooling water circulation cavities, flows to the edge of the shell and is finally discharged through the drain holes; the heat transfer area is greatly increased by the plurality of heat transfer clapboards, and the plurality of cooling water circulation cavities are arranged to be beneficial to increasing the disturbance effect of cooling water flow and improving the heat transfer efficiency, so that the cooling plate provided by the application has good heat transfer effect and uniform cooling.
Preferably, a collecting chamber is arranged at the bottom of the shell, the output end of the water drain hole is communicated with the input end of the collecting chamber, and the output end of the collecting chamber is communicated with the water drain pipe.
Through setting up the collecting chamber, the cooling water after the heat transfer of the interior exhaust of every wash port directly gets into the collecting chamber, guarantees that rivers circulation is unblocked.
Preferably, a plurality of travelling wheels are arranged below the base plate.
The travelling wheels are arranged to facilitate the moving of the integral structure into and out of the hearth.
Preferably, the composite protective sleeve is made of high-temperature resistant steel materials, corundum or ceramics.
Preferably, a heat conducting cover plate is arranged at the top of the composite protective sleeve, and an air inlet pipe is arranged on the heat conducting cover plate.
The application has the following advantages and beneficial effects:
1. the working principle of the application is as follows: firstly, placing a graphite mold into a composite protective sleeve, adding a silicon raw material into the graphite mold, and then placing the composite protective sleeve and a substrate into a hearth for directional solidification reaction; the composite protection sleeve body is composed of a bottom plate, a plurality of curved surface side plates and a limiting ring, the bottom plate is the bottom of the composite protection sleeve, the side wall of the composite protection sleeve is formed by splicing the curved surface side plates, the bottom of the spliced curved surface side plates is embedded into a mounting groove on the bottom plate to be internally fixed, a rubber sealing gasket is arranged in the mounting groove to play a fastening role on the curved surface side plates, meanwhile, the joint of the curved surface side plates and the bottom plate is sealed, and the top is clamped and fixed with the curved surface side plates through the limiting ring, so that the curved surface side plates after being spliced are in a stable integrated structure. Thus, the composite protective sleeve is very easy to assemble and disassemble, and the impurity removal and maintenance operations on the composite protective sleeve are convenient;
2. according to the application, the clamping grooves or the flanges are arranged on the side edges of each curved side plate, the adjacent two curved side plates are spliced and matched with each other through the clamping grooves and the flanges, so that the contact neps are enlarged, and a good sealing effect is achieved through the rubber sealing gasket. The positioning ring groove is formed in the bottom end face of the limiting ring, so that a good fixing effect can be achieved on the plurality of curved side plates, and the limiting ring is fixed on the top of the curved side plates to prevent the integral stability from being affected by axial movement;
3. when the cooling device is used, cooling water is led in from the input end of the water inlet pipe, flows into the pipe section of the water inlet pipe positioned in the shell and enters the shell through the through holes on the side wall of the water inlet pipe, and the shell is divided into a plurality of cooling water circulation cavities which are uniformly distributed in a radiation way through a plurality of heat conducting partition boards which are distributed in a radiation way, and the cooling water flows out from the through holes, is uniformly distributed into the corresponding cooling water circulation cavities, flows to the edge of the shell and is finally discharged through the drain holes; the heat transfer area is greatly increased by the plurality of heat transfer clapboards, and the plurality of cooling water circulation cavities are arranged to be beneficial to increasing the disturbance effect of cooling water flow and improving the heat transfer efficiency, so that the cooling plate provided by the application has good heat transfer effect and uniform cooling.
Drawings
The accompanying drawings, which are included to provide a further understanding of embodiments of the application and are incorporated in and constitute a part of this specification, illustrate embodiments of the application and together with the description serve to explain the principles of the application. In the drawings:
FIG. 1 is a schematic overall elevational cross-sectional structure of the present application;
FIG. 2 is a schematic top view of the base plate of the present application;
FIG. 3 is a schematic view of a radial cross-section structure of a plurality of curved side plates in a state of being in fit connection;
FIG. 4 is a schematic perspective view of a stop collar according to the present application;
FIG. 5 is a schematic cross-sectional elevation of a cooling disk of the present application;
fig. 6 is a schematic view of a radial cross-sectional structure of a housing of a cooling disk of the present application.
In the drawings, the reference numerals and corresponding part names: the device comprises a 1-substrate, a 2-composite protective sleeve, a 3-graphite mold, a 4-cooling disc, a 5-limiting block, a 6-lifting clamp groove, a 7-fixing ring, an 8-fixing ring groove, a 9-shell, a 10-water inlet pipe, an 11-heat conducting partition plate, a 12-water draining hole, a 13-water draining main pipe, a 14-collecting chamber, a 15-travelling wheel, a 201-bottom plate, a 202-curved side plate, a 203-limiting ring, a 204-mounting groove, a 205-clamping groove, a 206-flange, a 207-positioning ring groove and a 208-limiting groove.
Detailed Description
For the purpose of making apparent the objects, technical solutions and advantages of the present application, the present application will be further described in detail with reference to the following examples and the accompanying drawings, wherein the exemplary embodiments of the present application and the descriptions thereof are for illustrating the present application only and are not to be construed as limiting the present application.
Example 1
The embodiment provides a directional solidification device for producing solar polycrystalline silicon, which comprises a substrate 1, wherein a composite protective sleeve 2 is arranged on the substrate 1, and a cylindrical graphite mold 3 is arranged in the composite protective sleeve 2 in a holding manner; the composite protection sleeve 2 comprises a bottom plate 201, a plurality of curved surface side plates 202 and a limiting ring 203, wherein an installation groove 204 is formed in the upper surface of the bottom plate 201 along the circumferential direction, a rubber sealing gasket is arranged in the installation groove 204, the axial bottom ends of the curved surface side plates 202 are embedded into the installation groove 204 in a transition fit manner and fixed, the axial side edges of any two adjacent curved surface side plates 202 are mutually sealed and matched so that the whole is in a cylindrical structure, and the top of the cylindrical structure formed by the curved surface side plates 202 is detachably sleeved with the limiting ring 203 for fixing; the bottom plate 201 is provided with a cooling plate 4, and the cooling plate 4 is used for contacting with the bottom of the graphite mold 3.
Example 2
Based on the further improvement of embodiment 1, the side edges of the curved side plates 202 along the axial direction are provided with clamping grooves 205 and flanges 206 which are mutually matched, and the adjacent two curved side plates 202 are sealed by rubber gaskets at the joint of the clamping grooves 205 and the flanges 206. A positioning ring groove 207 is formed in the end surface of the limiting ring 203 facing the bottom plate 201 along the circumferential direction, and the positioning ring groove 207 is used for clamping the top end of the curved side plate 202; two symmetrically distributed limit grooves 208 are formed in the inner wall of the limit ring 203, and the extending direction of the limit grooves 208 is parallel to the axis direction of the limit ring 203; two limiting blocks 5 matched with the limiting grooves 208 are symmetrically arranged on the side wall of the top of the graphite mold 3, and lifting clamp grooves 6 are arranged on the limiting blocks 5.
Example 3
Based on embodiment 2, the bottom surface of the cooling disk 4 is provided with a fixing ring 7 along the circumferential direction, the upper plate surface of the bottom plate 201 is concavely provided with a fixing ring groove 8 adapted to the fixing ring 7, the side wall of the fixing ring 7 is provided with a sealing rubber pad, and the sealing rubber pad is in transition fit and pressed between the fixing ring 7 and the fixing ring groove 8.
Example 4
Based on a further development of embodiment 3, the cooling disk 4 comprises a disk-shaped housing 9, wherein the water inlet pipe 10 extends into the housing 9 through the bottom of the housing 9, and wherein the free end of the extending portion is in sealing contact with the inner top surface of the housing 9. The side wall of the pipe section of the water inlet pipe 10 extending into the shell 9 is provided with a plurality of through holes; a plurality of heat conducting clapboards 11 are radially distributed in the shell 9 by taking the water inlet pipe 10 as the center of a circle, the plate surface direction of the heat conducting clapboards 11 is vertical to the axis direction of the shell 9, and the upper side and the lower side of the heat conducting clapboards 11 are respectively in contact connection with the inner bottom surface and the top surface of the shell 9; the length of the heat conducting partition plate 11 along the radiation direction is smaller than the linear distance between the outer wall of the water inlet pipe 10 and the inner wall of the shell 9; a plurality of drain holes 12 are formed in the shell 9 along the bottom of the edge of the side wall; the output ends of the plurality of drain holes 12 are communicated with a drain header 13. The bottom of the shell 9 is provided with a collecting chamber 14, the output end of the drain hole 12 is communicated with the input end of the collecting chamber 14, and the output end of the collecting chamber 14 is communicated with a drain pipe 13.
Example 5
Further improvement based on the embodiment 1, a plurality of travelling wheels 15 are arranged below the base plate 1; the composite protective sleeve 2 is made of high-temperature resistant steel materials, corundum or ceramics; the top of the composite protective sleeve 2 is provided with a heat-conducting cover plate, and an air inlet pipe is arranged on the heat-conducting cover plate.
The foregoing description of the embodiments has been provided for the purpose of illustrating the general principles of the application, and is not meant to limit the scope of the application, but to limit the application to the particular embodiments, and any modifications, equivalents, improvements, etc. that fall within the spirit and principles of the application are intended to be included within the scope of the application.
Claims (6)
1. The directional solidification device for producing the solar polycrystalline silicon comprises a substrate (1), and is characterized in that a composite protective sleeve (2) is arranged on the substrate (1), and a cylindrical graphite die (3) is accommodated and placed in the composite protective sleeve (2); the composite protection sleeve (2) comprises a bottom plate (201), a plurality of curved surface side plates (202) and a limiting ring (203), wherein an installation groove (204) is formed in the upper surface of the bottom plate (201) along the circumferential direction, a rubber sealing gasket is arranged in the installation groove (204), the axial bottom ends of the curved surface side plates (202) are in transition fit and embedded into the installation groove (204) to be fixed, the axial side edges of any two adjacent curved surface side plates (202) are in sealing fit with each other to enable the whole to be in a cylindrical structure, the top of the cylindrical structure formed by the curved surface side plates (202) is detachably sleeved with the limiting ring (203) to be fixed, clamping grooves (205) and flanges (206) which are mutually matched are formed in the side edges of the curved surface side plates (202) along the axial direction, the adjacent two curved surface side plates (202) are sealed at the joint of the clamping grooves (205) and the flanges (206) through rubber gaskets, a positioning ring groove (207) is formed in the circumferential direction towards the end face of the bottom plate (201), and the positioning ring groove (207) is used for clamping the top end of the curved surface side plates (202);
the bottom plate (201) is provided with a cooling disc (4), the cooling disc (4) is used for being in contact with the bottom of the graphite mold (3), the cooling disc (4) comprises a disc-shaped shell (9), a water inlet pipe (10) penetrates through the bottom of the shell (9) and stretches into the shell (9), and the free end of the stretching part is in sealing contact with the inner top surface of the shell (9); the side wall of the pipe section of the water inlet pipe (10) extending into the shell (9) is provided with a plurality of through holes; a plurality of heat conducting clapboards (11) are radially distributed in the shell (9) by taking the water inlet pipe (10) as a circle center, the plate surface direction of the heat conducting clapboards (11) is vertical to the axis direction of the shell (9), and the upper side and the lower side of the heat conducting clapboards (11) are respectively in contact connection with the inner bottom surface and the top surface of the shell (9); the length of the heat conduction partition plate (11) along the radiation direction is smaller than the linear distance between the outer wall of the water inlet pipe (10) and the inner wall of the shell (9); a plurality of drain holes (12) are formed in the shell (9) along the bottom of the edge of the side wall; the output ends of the plurality of drain holes (12) are communicated with a drain header pipe (13);
the cooling plate is characterized in that a fixing ring (7) is arranged on the bottom surface of the cooling plate (4) along the circumferential direction, a fixing ring groove (8) matched with the fixing ring (7) is concavely formed in the upper plate surface of the bottom plate (201), a sealing rubber pad is arranged on the side wall of the fixing ring (7), and the sealing rubber pad is in transition fit and is tightly pressed between the fixing ring (7) and the fixing ring groove (8).
2. The directional solidification device for producing solar polycrystalline silicon according to claim 1, wherein two symmetrically distributed limit grooves (208) are formed on the inner wall of the limit ring (203), and the extending direction of the limit grooves (208) is parallel to the axis direction of the limit ring (203); two limiting blocks (5) matched with the limiting grooves (208) are symmetrically arranged on the side wall of the top of the graphite die (3), and lifting clamp grooves (6) are formed in the limiting blocks (5).
3. The directional solidification device for producing solar polycrystalline silicon according to claim 1, characterized in that the bottom of the housing (9) is provided with a collection chamber (14), the output end of the drain hole (12) is communicated with the input end of the collection chamber (14), and the output end of the collection chamber (14) is communicated with the drain header pipe (13).
4. The directional solidification device for producing solar polycrystalline silicon according to claim 1, characterized in that a plurality of travelling wheels (15) are arranged below the base plate (1).
5. The directional solidification apparatus for producing solar polycrystalline silicon according to claim 1, wherein the composite protective sleeve (2) is made of high temperature resistant steel material or ceramic.
6. The directional solidification device for producing solar polycrystalline silicon according to claim 1, wherein a heat conducting cover plate is arranged at the top of the composite protective sleeve (2), and an air inlet pipe is arranged on the heat conducting cover plate.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811378264.5A CN109371464B (en) | 2018-11-19 | 2018-11-19 | Directional solidification device for producing solar polycrystalline silicon |
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| CN201811378264.5A CN109371464B (en) | 2018-11-19 | 2018-11-19 | Directional solidification device for producing solar polycrystalline silicon |
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| CN109371464B true CN109371464B (en) | 2023-08-11 |
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| CN114720306B (en) * | 2022-04-07 | 2022-12-02 | 水利部交通运输部国家能源局南京水利科学研究院 | Experimental method for silt starting and nutrient salt migration by bottom shear force |
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| KR101139845B1 (en) * | 2010-04-29 | 2012-04-30 | 한국화학연구원 | A high-throughput apparatus for manufacturing silicon ingots for the polycrystalline silicon solar cell |
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| CN101089537A (en) * | 2006-06-13 | 2007-12-19 | 台达电子工业股份有限公司 | Radiation module and its heat pipe |
| CN103924293A (en) * | 2013-01-10 | 2014-07-16 | 浙江精功科技股份有限公司 | Bottom-enhanced cooling device and cooling method |
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