CN216577390U - Tweezers for clamping wafers - Google Patents
Tweezers for clamping wafers Download PDFInfo
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- CN216577390U CN216577390U CN202122087163.6U CN202122087163U CN216577390U CN 216577390 U CN216577390 U CN 216577390U CN 202122087163 U CN202122087163 U CN 202122087163U CN 216577390 U CN216577390 U CN 216577390U
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- forceps
- connecting rod
- wafer
- circular arc
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Abstract
The utility model discloses a tweezers for clamping a wafer, wherein the tweezers comprise: the forceps comprise a first forceps arm, a second forceps arm, a first clamping piece and a second clamping piece; one end of the first forceps arm is fixedly connected with one end of the second forceps arm; one end of the first clamping piece is connected with the other end of the first forceps arm, and a first circular arc sheet is arranged at the other end of the first clamping piece; one end of the second clamping piece is connected with the other end of the second forceps arm, a second circular arc piece is arranged at the other end of the second clamping piece, and the first circular arc piece and the second circular arc piece are arranged in a matched mode. According to the technical scheme, the first forceps arm, the second forceps arm, the first clamping piece, the second clamping piece, the first arc piece and the second arc piece are adopted, so that the contact area of the tweezers for clamping the wafer is increased, the included angle between the two farthest contact points on the contact area is increased, the force in the vertical direction of the wafer is reduced, and the probability of damaging the front surface of the wafer is reduced.
Description
Technical Field
The utility model relates to the technical field of semiconductor processing, in particular to tweezers for clamping a wafer.
Background
In the wafer production process, the whole crystal is cut into wafers and then is usually stored in a wafer chuck, and the chuck plays an extremely important role as a production tool for temporary storage and transfer transition in the wafer production process.
At present, tools for taking out the wafer from the card plug are mainly a vacuum suction pen and hard rubber tweezers; when a vacuum suction pen is used for sucking the wafer, because the direction of the wafer placed in the clamping plug is uncertain, when the front side of the wafer is placed on the outer side, a suction nozzle of the vacuum suction pen can be contacted with the front side of the wafer when the vacuum suction pen sucks the wafer, and the front side of the wafer is easily scratched; when using rigid plastic tweezers, wafer breakage may occur if the force is light and the wafer may be pinched if the force is high.
SUMMERY OF THE UTILITY MODEL
The utility model mainly aims to provide tweezers for clamping a wafer, and aims to increase the contact area of the tweezers for clamping the wafer, reduce the force in the vertical direction of the wafer and reduce the probability of damaging the front surface of the wafer.
In order to achieve the above object, the present invention provides a pair of tweezers for picking up a wafer, the tweezers comprising:
a first forceps arm;
one end of the first forceps arm is fixedly connected with one end of the second forceps arm;
one end of the first clamping piece is connected with the other end of the first forceps arm, and a first circular arc sheet is arranged at the other end of the first clamping piece;
the one end of second holder with the other end of second tweezers arm is connected, the other end of second holder is provided with the second circular arc piece, first circular arc piece with the relative cooperation setting of second circular arc piece.
Optionally, a blocking piece is arranged on the peripheral wall of the first arc piece.
Optionally, the blocking piece is provided in a circular arc shape.
Optionally, the blocking piece is perpendicular to the first arc piece.
Optionally, the first clamping piece is detachably connected with the first forceps arm, and the second clamping piece is detachably connected with the second forceps arm.
Optionally, the first clamping piece further comprises a first connecting rod and a second connecting rod, one end of the first connecting rod is fixedly connected with one end of the second connecting rod, the other end of the first connecting rod is fixedly connected with one end of the first arc sheet, and the other end of the second connecting rod is fixedly connected with the other end of the first arc sheet.
Optionally, the second clamping piece further comprises a third connecting rod and a fourth connecting rod, one end of the third connecting rod is fixedly connected with one end of the fourth connecting rod, the other end of the third connecting rod is fixedly connected with one end of the second arc piece, and the other end of the fourth connecting rod is fixedly connected with the other end of the second arc piece.
Optionally, the other end of the first forceps arm is provided with a first connecting piece, the other end of the second forceps arm is provided with a second connecting piece, the first connecting piece is detachably connected with the first clamping piece, and the second connecting piece is detachably connected with the second clamping piece.
Optionally, a plurality of protrusions are arranged on the inner side of the second arc piece, and the protrusions are made of rubber.
Optionally, the peripheral wall of the first circular arc piece is provided with at least one positioning pin, and the peripheral wall of the second circular arc piece is provided with a positioning hole corresponding to the positioning pin.
According to the technical scheme, the first forceps arm, the second forceps arm, the first clamping piece, the second clamping piece, the first arc piece and the second arc piece are adopted, so that the contact area of the tweezers for clamping the wafer is increased, the included angle between the two farthest contact points on the contact area is increased, the force in the vertical direction of the wafer is reduced, and the probability of damaging the front surface of the wafer is reduced.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.
FIG. 1 is a schematic diagram of the structure of an embodiment of the forceps of the present invention;
FIG. 2 is a schematic structural view of another embodiment of the forceps of the present invention;
FIG. 3 is an enlarged view of a portion of FIG. 2 at A;
fig. 4 is a schematic structural view of a forceps of the utility model according to yet another embodiment.
The reference numbers illustrate:
| reference numerals | Name (R) | Reference numerals | Name (R) |
| 110 | |
120 | |
| 130 | |
131 | |
| 140 | |
141 | |
| 132 | |
133 | First connecting |
| 134 | Second connecting |
142 | Third connecting |
| 143 | Fourth connecting |
111 | First connecting |
| 121 | Second connecting |
144 | |
| 135 | Locating |
145 | Locating hole |
The implementation, functional features and advantages of the objects of the present invention will be further explained with reference to the accompanying drawings.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that, if directional indications (such as up, down, left, right, front, and back … …) are involved in the embodiment of the present invention, the directional indications are only used to explain the relative positional relationship between the components, the movement situation, and the like in a specific posture (as shown in the drawing), and if the specific posture is changed, the directional indications are changed accordingly.
In addition, if there is a description relating to "first", "second", etc. in the embodiments of the present invention, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, technical solutions between various embodiments may be combined with each other, but must be realized by a person skilled in the art, and when the technical solutions are contradictory or cannot be realized, such a combination should not be considered to exist, and is not within the protection scope of the present invention.
In an embodiment of the utility model, as shown in fig. 1-4, the forceps comprise: a first forceps arm 110, a second forceps arm 120, a first gripper 130, and a second gripper 140; one end of the first forceps arm 110 is fixedly connected with one end of the second forceps arm 120; one end of the first clamping piece 130 is connected with the other end of the first forceps arm 110, and the other end of the first clamping piece 130 is provided with a first arc sheet 131; one end of the second clamping piece 140 is connected with the other end of the second forceps arm 120, the other end of the second clamping piece 140 is provided with a second arc piece 141, and the first arc piece 131 and the second arc piece 141 are arranged in a relatively matched manner. When the wafer needs to be clamped, the first arc piece 131 is in contact with the back surface of the wafer, the second arc piece 141 is in contact with the front surface of the wafer, the first forceps arm 110 and the second forceps arm 120 are pressed tightly, pressure is respectively applied to the first arc piece 131 and the second arc piece 141 through the first forceps arm 110 and the second forceps arm 120, the first arc piece 131 and the second arc piece 141 respectively apply pressure to the back surface and the front surface of the wafer, friction force is generated between the first arc piece 131 and the back surface of the wafer and friction force is generated between the second arc piece 141 and the front surface of the wafer, and the wafer is taken out of the clamping plug through the friction force between the front surface and the back surface of the wafer. The radius of the first arc piece 131 and the radius of the second arc piece 141 are the same as the radius of the clamped wafer, so that the contact area between the tweezers and the wafer can be increased.
According to the technical scheme, the first forceps arm 110, the second forceps arm 120, the first clamping piece 130, the second clamping piece 140, the first arc piece 131 and the second arc piece 141 are adopted, so that the contact area of the forceps when the wafers are clamped is increased, the included angle between the two farthest contact points on the contact area is increased, the force in the vertical direction of the wafers is reduced, and the probability of damaging the front surfaces of the wafers is reduced.
Specifically, in order to determine the wafer clamping position, fix the wafer better, prevent the wafer from being damaged, and prevent the tweezers from contacting the wafer except for the first arc piece 131 and the second arc piece 141, a blocking piece 132 is arranged on the outer peripheral wall of the first arc piece 131. Wherein, the height of the baffle plate is less than the thickness of the wafer.
Specifically, the stopper 132 is formed in an arc shape in order to determine the wafer gripping position more accurately.
Specifically, in order to better determine the wafer clamping position, the blocking piece 132 is perpendicular to the first arc piece 131.
Specifically, in order to facilitate replacement of the first holding member 130 and the second holding member 140 in time and save the cost of the forceps, the first holding member 130 is detachably connected to the first forceps arm 110, and the second holding member 140 is detachably connected to the second forceps arm 120.
Specifically, in order to reduce the weight of the tweezers, save the manufacturing material of the tweezers, and save the cost of the tweezers, the first clamping member 130 further includes a first connecting rod 133 and a second connecting rod 134, one end of the first connecting rod 133 is fixedly connected to one end of the second connecting rod 134, the other end of the first connecting rod 133 is fixedly connected to one end of the first arc piece 131, and the other end of the second connecting rod 134 is fixedly connected to the other end of the first arc piece 131.
Specifically, in order to further reduce the weight of the tweezers, save the manufacturing material of the tweezers, and save the cost of the tweezers, the second clamping member 140 further includes a third connecting rod 142 and a fourth connecting rod 143, one end of the third connecting rod 142 is fixedly connected to one end of the fourth connecting rod 143, the other end of the third connecting rod 142 is fixedly connected to one end of the second arc piece 141, and the other end of the fourth connecting rod 143 is fixedly connected to the other end of the second arc piece 141.
The other end of the first forceps arm 110 is provided with a first connecting piece 111, the other end of the second forceps arm 120 is provided with a second connecting piece 121, the first connecting piece 111 is detachably connected with the first clamping piece 130, and the second connecting piece 121 is detachably connected with the second clamping piece 140.
Specifically, in order to prevent the second arc piece 141 from damaging the front surface of the wafer when the wafer is gripped, a plurality of protrusions 144 are disposed on the inner side of the second arc piece 141, and the protrusions 144 are made of rubber.
Specifically, in order to fix the wafer better, at least one positioning pin 135 is disposed on the outer circumferential wall of the first circular arc piece 131, and a positioning hole 145 corresponding to the positioning pin 135 is disposed on the outer circumferential wall of the second circular arc piece 141.
According to the technical scheme, the first forceps arm 110, the second forceps arm 120, the first clamping piece 130, the second clamping piece 140, the first arc piece 131 and the second arc piece 141 are adopted, so that the contact area of the forceps when the wafers are clamped is increased, the included angle between the two farthest contact points on the contact area is increased, the force in the vertical direction of the wafers is reduced, and the probability of damaging the front surfaces of the wafers is reduced.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, and all equivalent structural changes made by using the contents of the specification and drawings, or any other related technical fields, which are directly or indirectly applied to the present invention, are included in the scope of the present invention.
Claims (10)
1. A forceps for grasping a wafer, the forceps comprising:
a first forceps arm;
one end of the first forceps arm is fixedly connected with one end of the second forceps arm;
one end of the first clamping piece is connected with the other end of the first forceps arm, and a first arc piece is arranged at the other end of the first clamping piece;
the one end of second holder with the other end of second tweezers arm is connected, the other end of second holder is provided with the second circular arc piece, first circular arc piece with the relative cooperation setting of second circular arc piece.
2. The forceps of claim 1, wherein the outer peripheral wall of the first circular arc piece is provided with a stop piece.
3. The forceps of claim 2, wherein the flap is configured in a circular arc.
4. The forceps of claim 3, wherein the stop tab is perpendicular to the first circular arc tab.
5. The forceps of any of claims 1 to 4, wherein the first gripper is removably coupled to the first forceps arm and the second gripper is removably coupled to the second forceps arm.
6. The tweezers of claim 5, wherein the first clamping member further comprises a first connecting rod and a second connecting rod, one end of the first connecting rod is fixedly connected with one end of the second connecting rod, the other end of the first connecting rod is fixedly connected with one end of the first arc sheet, and the other end of the second connecting rod is fixedly connected with the other end of the first arc sheet.
7. The forceps according to claim 5, wherein the second holding member further comprises a third connecting rod and a fourth connecting rod, one end of the third connecting rod is fixedly connected with one end of the fourth connecting rod, the other end of the third connecting rod is fixedly connected with one end of the second circular arc piece, and the other end of the fourth connecting rod is fixedly connected with the other end of the second circular arc piece.
8. The forceps according to claim 5, wherein a first attachment tab is provided at the other end of the first forceps arm, a second attachment tab is provided at the other end of the second forceps arm, the first attachment tab is removably connected to the first holding member, and the second attachment tab is removably connected to the second holding member.
9. The forceps according to any one of claims 1 to 4, wherein a plurality of protrusions are arranged on the inner side of the second circular arc piece, and the protrusions are made of rubber.
10. The forceps according to any one of claims 1 to 4, wherein the outer peripheral wall of the first circular arc piece is provided with at least one positioning pin, and the outer peripheral wall of the second circular arc piece is provided with a positioning hole corresponding to the positioning pin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122087163.6U CN216577390U (en) | 2021-08-31 | 2021-08-31 | Tweezers for clamping wafers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122087163.6U CN216577390U (en) | 2021-08-31 | 2021-08-31 | Tweezers for clamping wafers |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216577390U true CN216577390U (en) | 2022-05-24 |
Family
ID=81637558
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122087163.6U Active CN216577390U (en) | 2021-08-31 | 2021-08-31 | Tweezers for clamping wafers |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216577390U (en) |
-
2021
- 2021-08-31 CN CN202122087163.6U patent/CN216577390U/en active Active
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