CN216574401U - Ultrahigh-pressure fine particle spraying system for cleaning glass substrate - Google Patents
Ultrahigh-pressure fine particle spraying system for cleaning glass substrate Download PDFInfo
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- CN216574401U CN216574401U CN202023220604.7U CN202023220604U CN216574401U CN 216574401 U CN216574401 U CN 216574401U CN 202023220604 U CN202023220604 U CN 202023220604U CN 216574401 U CN216574401 U CN 216574401U
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Abstract
The utility model relates to an ultrahigh pressure fine particle spraying system for cleaning a glass substrate, which comprises a gas-liquid mixer, a pump, a filter and a plurality of nozzles, wherein carbon dioxide and pure water are introduced into the gas-liquid mixer through a pipeline to form cleaning liquid, the liquid outlet end of the gas-liquid mixer is connected with the pump, the cleaning liquid is pressurized by the pump and then is introduced into the filter, and the water outlet side of the filter is respectively connected with the nozzles. The cleaning line can effectively improve the cleaning ability, shorten the length of the cleaning line and save the consumption of pure water.
Description
Technical Field
The utility model relates to an ultrahigh pressure fine particle spraying system for cleaning a glass substrate.
Background
In the field of panels, glass substrates, mask plates or semiconductor wafers and other panel substrates need to be rinsed by soaking in deionized water (DIW) or by spraying after being cleaned by liquid medicine, and as the technology in the field of panel display is continuously updated and advanced, the cleaning process also plays an increasingly important role. In the cleaning process, the common cleaning technology is difficult to remove the tiny particles on the glass substrate completely, even if the water spraying pressure is increased, the particles are difficult to remove, and the glass substrate can be broken and damaged due to the excessive water pressure.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide an ultrahigh-pressure fine particle spraying system for cleaning a glass substrate, which can effectively improve the cleaning force, shorten the length of a cleaning line and save the consumption of pure water.
In order to achieve the purpose, the utility model adopts the technical scheme that:
the utility model provides an ultrahigh pressure fine particle spraying system for cleaning a glass substrate, which comprises a gas-liquid mixer, a pump, a filter and a plurality of nozzles, wherein carbon dioxide and pure water are introduced into the gas-liquid mixer through a pipeline to form cleaning liquid, the liquid outlet end of the gas-liquid mixer is connected with the pump, the cleaning liquid is pressurized by the pump and then is introduced into the filter, and the water outlet side of the filter is respectively connected with the nozzles.
Optionally, the system further comprises an analog quantity pressure gauge and an exhaust valve, wherein the analog quantity pressure gauge and the exhaust valve are arranged at the high-pressure pump, the analog quantity pressure gauge is used for measuring the pressure of the pipeline, and the start and stop of the exhaust valve are adjusted according to the pressure in the pipeline.
Optionally, a bypass valve and a safety valve are further provided at the front end piping of the high pressure pump.
Optionally, the gas-liquid mixer is a bubbler.
Due to the application of the technical scheme, compared with the prior art, the utility model has the following advantages:
according to the ultrahigh-pressure fine particle spraying system for cleaning the glass substrate, pure water and carbon dioxide are mixed into a gas-liquid mixer through a pipeline to form cleaning liquid containing rich carbon dioxide, the cleaning liquid is pressurized and pumped into a filter through a high-pressure pump, the cleaning liquid is finally sprayed out through high-pressure nozzles uniformly distributed on a spray pipe after being filtered by the filter to clean the surface of the glass substrate, carbon dioxide bubbles are contained in the cleaning liquid, when the high-pressure liquid is sprayed onto the glass substrate, the bubbles collide with the surface of the glass substrate to be broken, the generated force can further enhance the cleaning capacity, and the removal efficiency of particles on the surface of the glass substrate is improved.
Drawings
Some specific embodiments of the utility model will be described in detail hereinafter, by way of illustration and not limitation, with reference to the accompanying drawings. The same reference numbers in the drawings identify the same or similar elements or components. Those skilled in the art will appreciate that the drawings are not necessarily drawn to scale. In the drawings:
fig. 1 is a schematic structural diagram of an ultra-high pressure fine particle spray system according to an embodiment of the present invention.
Wherein the reference numerals are as follows:
1. gas-liquid mixer, 2, pump, 3, filter, 4, nozzle, 5, analog pressure gauge, 6, exhaust valve, 7, bypass valve, 8, safety valve.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
The embodiment describes a super-high pressure fine particle spraying system for cleaning a glass substrate, which comprises a gas-liquid mixer 1, a pump 2 (preferably adopting a high-pressure pump 2), a filter 3 and a plurality of nozzles 4, wherein carbon dioxide and pure water are introduced into the gas-liquid mixer 1 through a pipeline to form cleaning liquid, the liquid outlet end of the gas-liquid mixer 1 is connected with the pump 2, the cleaning liquid is introduced into the filter 3 after the pump 2 is pressurized, and the water outlet side of the filter 3 is connected with the nozzles 4 respectively. The gas-liquid mixer 1 employs a bubbler.
Optionally, the system further comprises an analog pressure gauge 5 and an exhaust valve 6, wherein the analog pressure gauge 5 and the exhaust valve 6 are arranged at the high-pressure pump 2, the analog pressure gauge 5 is used for measuring the pressure of the pipeline, and the start and stop of the exhaust valve 6 are adjusted according to the pressure in the pipeline.
In summary, according to the ultrahigh pressure fine particle spraying system for cleaning the glass substrate, pure water and carbon dioxide are mixed through a pipeline into a gas-liquid mixer 1 to form cleaning liquid containing rich carbon dioxide, the cleaning liquid is pressurized and pumped into a filter 3 through a high pressure pump 2, the cleaning liquid is filtered by the filter 3 and is finally sprayed out through high pressure nozzles 4 uniformly distributed on a spray pipe to clean the surface of the glass substrate, carbon dioxide bubbles are contained in the cleaning liquid, when the high pressure liquid is sprayed onto the glass substrate, the bubbles collide with the surface of the glass substrate to be broken, the generated force can further enhance the cleaning capability, and the removal efficiency of particles on the surface of the glass substrate is improved.
The above embodiments are merely illustrative of the technical concept and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the content of the present invention and implement the utility model, and not to limit the scope of the utility model, and all equivalent changes or modifications made according to the spirit of the present invention should be covered by the scope of the present invention.
Claims (4)
1. The utility model provides a be used for abluent superfine granule spray system of superhigh pressure of glass substrate, its characterized in that, includes gas-liquid mixer, pumping, filter and a plurality of nozzle, and carbon dioxide and pure water let in through the pipeline the gas-liquid mixer forms the washing liquid, the play liquid end of gas-liquid mixer with the pumping links to each other, the washing liquid warp insert behind the pumping pressurization the filter, the play water side of filter again with a plurality of nozzle links to each other respectively.
2. The ultrahigh-pressure fine particle spraying system for cleaning the glass substrate as claimed in claim 1, further comprising an analog pressure gauge and an exhaust valve, wherein the analog pressure gauge and the exhaust valve are arranged at the high-pressure pump, the analog pressure gauge is used for measuring the pressure of the pipeline, and the start and stop of the exhaust valve are adjusted according to the pressure in the pipeline.
3. The system of claim 2, wherein a bypass valve and a safety valve are further disposed at a front end pipeline of the high pressure pump.
4. The ultra-high pressure fine particle spray system for cleaning a glass substrate according to any one of claims 1 to 3, wherein the gas-liquid mixer is a bubbler.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023220604.7U CN216574401U (en) | 2020-12-28 | 2020-12-28 | Ultrahigh-pressure fine particle spraying system for cleaning glass substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202023220604.7U CN216574401U (en) | 2020-12-28 | 2020-12-28 | Ultrahigh-pressure fine particle spraying system for cleaning glass substrate |
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| Publication Number | Publication Date |
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| CN216574401U true CN216574401U (en) | 2022-05-24 |
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| CN202023220604.7U Active CN216574401U (en) | 2020-12-28 | 2020-12-28 | Ultrahigh-pressure fine particle spraying system for cleaning glass substrate |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115055435A (en) * | 2022-07-08 | 2022-09-16 | 南京华易泰电子科技有限公司 | Water jet cleaning system utilizing ultrahigh water pressure and carbon dioxide |
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2020
- 2020-12-28 CN CN202023220604.7U patent/CN216574401U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115055435A (en) * | 2022-07-08 | 2022-09-16 | 南京华易泰电子科技有限公司 | Water jet cleaning system utilizing ultrahigh water pressure and carbon dioxide |
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