CN216560675U - Floating structure, interface device, circuit board unit and semiconductor test equipment - Google Patents

Abstract

The present invention relates to a floating structure for semiconductor testing, an interface device, a circuit board unit and a semiconductor testing apparatus, the floating structure comprising: the support body, the floating plate, the locating part, the floating plate contains an output that is located the side edge, floating plate elastic assembly is on the support body, and at least can incline for the support body elasticity, with the orientation of adjusting the output at least, the output is configured to be used for installing the connector, the locating part assembly is on the support body, be provided with limit structure on the locating part, limit structure is configured to be used for forming the inclination angle scope of restriction floating plate inclination at least, the floating plate is with the spacing assembly of limit structure activity, with the elastic inclination in inclination angle scope. The floating plate can move in multiple directions relative to the frame body, after coarse positioning is met, the connector can play a flexible automatic deviation rectifying effect when being in butt joint with an interface end of external equipment, flexible matching is achieved in the alignment connection process, and automatic accurate alignment is achieved.

Description

Floating structure, interface device, circuit board unit and semiconductor test equipment

Technical Field

The present invention relates to the field of semiconductor device technology, and more particularly, to a floating structure, an interface device, a circuit board unit and a semiconductor test device for semiconductor testing.

Background

The semiconductor tester usually has a plurality of groups of circuit board units and an external device with an interface end, for example, an interface test board is used as the external device, the external device is installed on the semiconductor tester and is aligned with a plurality of groups of relatively independent circuit board units in the semiconductor tester, and when the plurality of groups of circuit board units and the external device realize the transmission of electrical signals through a connector, the test of a device to be tested on the external device can be realized.

In the prior art, external equipment and a plurality of groups of circuit board units are usually aligned in a mechanical hard connection mode, and the requirements on manufacturing tolerance of structural parts, guiding precision in a semiconductor testing machine and assembly are high. With the increase of the number of circuit board units and the improvement of the signal density of the connector, alignment deviation is easily caused, the connection is unreliable, and the existing development requirements cannot be met.

SUMMERY OF THE UTILITY MODEL

In view of the above, it is necessary to provide a floating structure for semiconductor test, an interface device, a circuit board unit, and a semiconductor test apparatus, which address the problem of misalignment of an external device and the circuit board unit.

The present invention provides a floating structure for semiconductor testing, the floating structure comprising:

a frame body;

a floating plate including an output end at a side edge, the floating plate being resiliently mounted to the frame and being at least resiliently tiltable relative to the frame to at least adjust an orientation of the output end, the output end being configured for mounting a connector;

the limiting part is assembled on the frame body, a limiting structure is arranged on the limiting part, the limiting structure is configured to be used for at least forming an inclination angle range for limiting the inclination angle of the floating plate, and the floating plate is movably assembled in a limiting mode with the limiting structure so as to elastically incline in the inclination angle range.

In one embodiment, the floating plate is configured to be elastically movable relative to the frame body to adjust the orientation of the output end and the position of the output end relative to the frame body, the limiting structure is configured to form an inclination angle range for limiting the inclination angle of the floating plate and a displacement range for limiting the movable position of the output end, and the floating plate is movably and limitedly assembled with the limiting structure to be elastically movable in the inclination angle range and the displacement range.

In one embodiment, the floating structure further comprises:

and the floating plate is elastically assembled on the frame body through the elastic piece.

In one embodiment, the frame body comprises at least a pair of wall plates, and the floating plate is elastically assembled between the pair of wall plates.

In one embodiment, the two side walls of the floating plate have a plurality of symmetrical mounting positions, each mounting position is provided with the elastic member, and the floating plate is elastically mounted with the pair of wall plates through the elastic members on the two side walls.

In one embodiment, the number of the installation positions is eight, the two side walls symmetrically arranged on the floating plate form four pairs, and the connecting lines of the four installation positions on the same side wall of the floating plate are rectangular.

In one embodiment, the retaining member is mounted between a pair of the wall plates, and the retaining member is located between the plurality of elastic members.

In one embodiment, the floating structure further comprises:

at least one adjusting member mounted on the floating plate and/or the wall plate, the adjusting member being configured to adjust an inclination angle of the floating plate by the elastic member.

In one embodiment, the limiting member is a cylinder member, the limiting structure is a limiting groove formed in the cylinder member, the floating plate is provided with a limiting hole, and the limiting hole is in plug-in fit with the cylinder member and is in limiting assembly in the limiting groove.

In one embodiment, the limiting groove is an annular groove which surrounds the cylinder piece for one circle, and the width of the annular groove is larger than the depth of the limiting hole;

the limiting hole and the annular groove are provided with a first movable gap in the direction parallel to the direction of the output end, the limiting hole and the annular groove are provided with a second movable gap in the direction perpendicular to the direction of the output end, and the first movable gap is smaller than or equal to the second movable gap.

The present invention also provides an interface device, comprising:

the floating structure;

a connector disposed at an output end of the floating plate, the connector configured for connection to an external device having an interface end.

The present invention also provides a circuit board unit including:

the interface device is used for connecting the interface device,

wherein the floating plate is a circuit board,

alternatively, the floating plate is configured for mounting a circuit board or indirectly mounting a circuit board through a circuit board mount,

alternatively, the mount is configured for direct mounting of a circuit board or indirect mounting of a circuit board via a circuit board mount;

the head end of the connector is configured for connection with an external device having an interface end, and the tail end of the connector is configured for electrical connection with the circuit board.

The utility model also provides a semiconductor test device which comprises the circuit board unit.

Above-mentioned floating structure, interface arrangement can provide the automatic function of rectifying under the prerequisite that satisfies the coarse positioning, when the connector is installed on the output of floating plate, because floating plate can be for the multi-direction motion of support body, so after satisfying the coarse positioning, the connector can play nimble automatic effect of rectifying when the interface end butt joint with external equipment, realize nimble matching at the connection in-process of counterpointing, automatic accurate counterpoint, it is more convenient reliable, and can reduce the machining precision of structure and the assembly requirement of test machine, have the characteristics from the centering, allow circuit board unit to realize blind insertion, satisfy circuit board unit and external equipment's effective connection.

Drawings

FIG. 1 is a schematic diagram of an interface device according to an embodiment of the present invention before docking in an ideal state;

FIG. 2 is a schematic view of an interface device according to an embodiment of the present invention before docking in an inclined angle state;

FIG. 3 is a schematic diagram illustrating an X-axis direction shift state of the interface device according to an embodiment of the present invention;

FIG. 4 is a schematic diagram illustrating an interface device according to an embodiment of the present invention after docking in an X-axis direction;

FIG. 5 is a bottom view of an interface device provided in accordance with one embodiment of the present invention;

fig. 6 is a schematic diagram of a tilting position limiting structure of an interface device according to another embodiment of the present invention;

FIG. 7 is a perspective view of an interface device provided in accordance with one embodiment of the present invention;

FIG. 8 is a plan view of an interface device provided in accordance with one embodiment of the present invention;

fig. 9 is a schematic diagram of an internal structure of an interface device according to an embodiment of the present invention.

Reference numerals:

001. a floating structure; 002. a connector; 003. a conductive member; 004. a positioning member; 005. an external device;

100. a frame body; 200. a floating plate; 300. a limiting member; 400. an elastic member; 500. an adjustment member;

110. wall plates;

210. an output end; 220. an installation position; 230. a column cap; 240. a limiting hole; 250. a first movable gap; 260. a second clearance;

310. a limiting structure; 311. a limiting groove.

Detailed Description

In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.

In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the utility model and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the utility model.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

In the present invention, unless otherwise expressly stated or limited, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through an intermediate. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a unique embodiment.

Referring to fig. 1 to 5, an embodiment of the present invention provides a floating structure 001 for semiconductor testing, where the floating structure 001 includes: the connector comprises a frame body 100, a floating plate 200 and a limiting member 300, wherein the floating plate 200 comprises an output end 210 positioned at the side edge, the floating plate 200 is elastically assembled on the frame body 100 and can be at least elastically inclined relative to the frame body 100 so as to at least adjust the orientation of the output end 210, the output end 210 is configured to be used for installing a connector 002, the limiting member 300 is assembled on the frame body 100, a limiting structure 310 is arranged on the limiting member 300, the limiting structure 310 is configured to be used for at least forming an inclination angle range for limiting the inclination angle of the floating plate 200, and the floating plate 200 is movably assembled with the limiting structure 310 in a limiting way so as to be elastically inclined in the inclination angle range.

The floating structure 001 may be disposed between an external device and a circuit board unit of an ATE (Automatic Test Equipment, which means an Automatic integrated circuit tester) for accurate alignment of the external device and the circuit board unit, where the external device has an interface end, and may include, for example, an interface Test board or other similar Test board devices. Besides, the floating structure 001 can be applied to the scene of aligning the circuit board unit with other devices, or to the alignment of two devices which need floating connection. The connector 002 provided in the floating structure 001 may be electrically connected to the external device 005 having the interface end by fitting or contacting, and for example, the connector 002 may have a male terminal and the interface end of the external device 005 may have a female terminal, or the connector 002 may have a female terminal and the interface end of the external device 005 may have a male terminal.

The floating plate 200 of the floating structure 001 may be a common plate or may be directly configured as a circuit board, when the floating plate 200 is a common plate, the floating plate 200 may be directly connected to the circuit board, and the connector 002 may form a stable electrical connection base with the circuit board, when the floating plate 200 is a common plate, the floating plate 200 may also be connected to a circuit board fixing frame, and the connector 002 may form a stable electrical connection base with the circuit board on the circuit board fixing frame, and when the floating plate 200 directly employs a circuit board, the connector 002 may directly form an electrical connection with the circuit board, so that the electrical connection is easier. The electrical signal is transmitted from the circuit board to the connector 002, and finally, after being aligned with the interface end of the external device 005 through the connector 002, the electrical signal is transmitted to the external device 005, and the test of the external device 005 is completed.

It should be noted that, for the connection of the circuit boards, in addition to the manner that the floating plate is directly connected to the circuit board, and the floating plate is indirectly connected to the circuit board through the circuit board fixing frame, the frame body 100 may be configured to be used for directly mounting the circuit board or indirectly mounting the circuit board through other additional structures, for example, a circuit board fixing frame may be disposed on the base body 100, and the circuit board fixing frame is used as an additional structure for mounting the circuit board in the semiconductor test equipment, wherein the mounting number of the circuit boards is not limited to one or more.

The floating plate 200 is elastically mounted to the frame body 100, and is at least elastically tiltable with respect to the frame body 100, accordingly, the floating plate 200, by being elastically fitted to the frame body 100, can not only be elastically inclined with respect to the frame body 100, but also can adjust the elastic assembly to be capable of generating various movements such as elastic displacement, elastic rotation and the like relative to the frame body 100 according to requirements, so that it is possible to adjust not only the direction of the output end 210 but also various elastic movements such as a spatial movement position and a rotation direction of the output end 210 when necessary, various ways of elastically mounting the floating plate 200 on the frame body 100 are possible, and after elastically mounted on the frame body 100, it is also possible to perform various movements of the floating plate 200 with respect to the frame body 100, so that the output end 210 can move in multiple directions relative to the frame body 100, not only one motion or one direction movement.

When connector 002 is installed on output 210 of floating plate 200, because floating plate 200 can be for support body 100 multi-direction motion, so after satisfying the coarse positioning, connector 002 can play nimble automatic effect of rectifying when the interface end butt joint with external equipment 005, realize nimble matching at the connection process of counterpointing, automatic accurate counterpoint, it is more convenient reliable, and can reduce the machining precision of structure and the assembly requirement of test machine, have from the characteristics of centering, allow circuit board unit to realize blind plug, satisfy circuit board unit and external equipment's effective connection.

After the floating plate 200 and the limiting structure 310 are movably and limitedly assembled, the limiting structure 310 can limit the actual movement of the floating plate 200 relative to the frame body 100, so that the floating plate 200 can move within a controllable range, which not only meets the requirement of abutting joint with the upper interface end of the external device 005, but also can keep the stability of the movement. The limitation of the floating plate 200 by the limiting structure 310 may include at least limitation of the inclination angle of the floating plate 200 when the floating plate 200 is elastically inclined, and in addition, when the floating plate 200 has other various movements, it does not limit other movements of the floating plate 200 to be controllably limited by the limiting structure 310.

In one embodiment, the floating plate 200 is configured to be elastically movable with respect to the frame 100 to adjust the orientation of the output end 210 and the position of the output end 210 with respect to the frame 100, the limiting structure 310 is configured to form an inclination angle range for limiting the inclination angle of the floating plate 200 and a displacement range for limiting the movable position of the output end 210, and the floating plate 200 is movably limited and assembled with the limiting structure 310 to be elastically movable in the inclination angle range and the displacement range.

The position of the output end 210 relative to the rack body 100 may be determined according to the rack body 100, for example, when the relative position of the output end 210 is determined, a certain position of the rack body 100 may be selected as a reference, and a certain position on the output end 210 is used as an active point, and the relative position of the active point relative to the reference is determined, so that the relative position of the output end 210 relative to the rack body 100 is relatively determined, and when a certain position is selected on the rack body 100 and the output end 210, the central position or any other position on the rack body 100 may be selected, as long as the relative position of the output end 210 can be determined according to the rack body 100, which is not limited herein.

In this embodiment, the elastic movement of the floating plate 200 relative to the frame body 100 is determined to be capable of adjusting not only the orientation of the output end 210, but also the position relative to the frame body 100, so that after the position and orientation of the output end 210 can be adjusted, the output end 210 can realize multi-angle and multi-directional movement in a three-dimensional space relative to the frame body 100, thereby further improving the flexibility of the movement of the output end 210, and realizing a flexible deviation rectifying effect in the docking process after coarse positioning is satisfied.

The elastic assembly of the floating plate 200 to the frame body 100 is not limited to the assembly of a single elastic member or a plurality of members for achieving an elastic effect, and for example, the floating structure 001 includes at least one elastic member 400, the floating plate 200 is elastically assembled to the frame body 100 through the elastic member 400, the floating plate 200 may be elastically assembled to the frame body 100 at one side wall of the floating plate 200 when one elastic member 400 is provided, and the floating plate 200 may be selectively elastically assembled to the frame body 100 at one side wall or both side walls of the floating plate 200 when two or more elastic members 400 are provided. The elastic member 400 may be a spring, a wire rope, or other elastically deformable structure. Alternatively, the floating plate 200 may be formed of a material by itself, and an elastic effect may be formed by integrating a portion of the elastic material, so as to be elastically assembled on the frame body 100, instead of using the separate elastic member 400, which may be provided as required by those skilled in the art and is not limited herein.

The structure of the shelf body 100 may be various structures, for example, the shelf body 100 may be formed by combining a plurality of plate-shaped members, or the shelf body 100 may be a shell-shaped structure, etc., and in one embodiment, the shelf body 100 includes at least a pair of wall plates 110, but in addition to the pair of wall plates 110, the pair of wall plates 110 is not limited to form a stable assembly connection by other members, the floating plate 200 is elastically assembled between the pair of wall plates 110, in this case, the floating plate 200 may be maintained in a substantially parallel state with the pair of wall plates 110, or at least in an elastically stable state, the floating plate 200 may be maintained in a substantially parallel state with the pair of wall plates 110, because the output end 210 is formed on the side edge of the floating plate 200, the orientation of the output end 210 is mainly determined by the inclination angle of the floating plate 200, the inclination angle may be various directions including inclination around the x-axis, the y-axis and the z-axis, and both side walls of the floating plate 200 face the pair of wall plates 110, for resilient assembly with a pair of wall panels 110.

For the elastic assembly between the floating plate 200 and the pair of wall plates 110, both sidewalls of the floating plate 200 may have a plurality of symmetrical mounting locations 220, and each of the mounting locations 220 is mounted with the elastic member 400, so that the floating plate 200 may be elastically assembled with the pair of wall plates 110 by the elastic members 400 on both sidewalls. The number of mounting locations 220 is not limited, but the number of mounting locations 220 on floating plate 200 should be the same as the number of connection locations for connecting elastic members 400 on a pair of wall plates 110, for example, the number of connection locations for connecting elastic members 400 on a pair of wall plates 110, and the number of mounting locations 220 and connection locations should be the same.

The number of the installation sites 220 may be six, eight, ten, twelve, fourteen, etc., for example, the number of the installation sites 220 is eight, two sidewalls symmetrically disposed on the floating plate 200 form four pairs, and the connection lines of the four installation sites 220 on the same sidewall of the floating plate 200 are rectangular. Therefore, four pairs of the eight mounting locations 220 may provide elastic balance control of the floating plate 200 at four positions on the floating plate 200, so that the floating plate 200 is elastically mounted on the frame body 100, and then the balance adjustment of the inclination angle of the floating plate 200 may be achieved through the four pairs of mounting locations 220.

The stopper 300 is assembled between a pair of the wall plates 110, and the stopper 300 is located between the elastic members 400, and the stopper 300 may be integrally formed with the wall plates 110 or may be a separate structure. The number of the position-limiting members 300 may be one or more, the position-limiting members 300 may include, but are not limited to, position-limiting posts, and may also be pins, the position-limiting members 300 may be located between a plurality of or a part of the elastic members 400, and may cooperate with a plurality of elastic members 400 that are elastically balanced in a central region, an edge region, and the like of the floating plate 200 to stably position the floating plate 200 in a state where the floating plate 200 is stably moved.

Referring to fig. 6, the floating structure 001 further includes at least one adjusting member 500 mounted on the floating plate 200 or the wall plate 110, the adjusting member 500 being configured to adjust the tilting angle of the floating plate 200 by means of the elastic member 400. The adjusting member 500 may be a single adjusting member or an adjusting assembly formed by combining a plurality of members, because the elastic member 400 has elastic expansion and contraction performance, when the elastic expansion and contraction degrees of the elastic member 400 are different, the actual length of the elastic member 400 and the external generated elastic force are different, so that the adjusting member 500 may apply a suitable external force to the elastic member 400, so as to change the actual length of the elastic member 400 and the external generated elastic force, and thus adjust the elastic acting force of the elastic member 400 on the floating plate 200, so that the tilt angle of the floating plate 200 may be finely adjusted, and is not limited to the adjustment of the floating plate 200 in the elastic stable state or the elastic movement state.

The adjusting member 500 can be implemented by using a simple nut, in which case, the floating plate 200 and the wall plate 110 are both provided with studs 230, the studs 230 are provided at positions on the floating plate 200 and the wall plate 110 for connecting the elastic member 400, such as mounting positions 220 or connecting positions, the elastic member 400 is a spring, the spring has a hollow inner cavity, two ends of the spring are respectively sleeved with the studs 230 on the floating plate 200 and the wall plate 110, at least one of the studs 230 has an external thread, when the adjusting member 500 is a nut, the nut can be screwed on the stud 230 having the external thread, and the spring matched with the stud 230 having the external thread can be sleeved on one end of the stud 230 and elastically abuts against the end surface of the nut after being sleeved. When the adjusting nut is screwed on the thread of the column head 230, the nut can axially move on the column head 230, so that the degree of force applied to the spring in the axial direction is adjusted, the length of the spring after being stressed or the elastic force generated outwards is changed, and the inclination angle of the floating plate 200 can be adjusted.

The adjusting function of the adjusting member 500 may be automatically controlled and adjusted by an external control device, and the tilt angle of the floating plate 200 may be initially positioned as required, for example, position information of the floating plate 200 may be first acquired, whether the floating plate 200 is at a predetermined initial equilibrium position may be determined according to the position information, when it is determined that the floating plate 200 is not at the initial equilibrium position, length information of all the elastic members 400 may be acquired, and the elastic force of the elastic member 400 having the shortest length may be adjusted according to the length information, so that the floating plate 200 is at the initial equilibrium position.

Specifically, when the floating plate 200 is detected to be in the predetermined initial equilibrium position, such as when the floating plate 200 is not parallel to the wall plate 1103, the length information of all the elastic members 400 can be compared to find the elastic member 400 with the minimum length, and then the elastic member 400 with the minimum length can be adjusted. One way is to adjust the length of the elastic member 400, such as adjusting the position of the elastic member 400 using a nut, so that the spring is compressed more, to shorten the actual distance between the floating plate 200 and the wall plate 110, and to push the floating plate 200 to move to the opposite side, to achieve the position adjustment of the floating plate 200. Another way to adjust the elastic force of the elastic member 400 is to adjust the elastic coefficient of the elastic member 400, for example, replace the elastic member 400 having a more suitable elastic coefficient, so as to adjust the position of the floating plate 200 to the initial equilibrium position.

The position limiting member 300 may take various structural forms, for example, it may be a single position limiting member or a position limiting assembly composed of a plurality of members, in one embodiment, the position limiting member 300 is a cylindrical member, the cylindrical member may be a cylinder or a prism, the position limiting structure 310 is a position limiting groove 311 formed on the cylindrical member, the floating plate 200 is formed with a position limiting hole 240, the size and shape of the position limiting groove 311 and the position limiting hole 240 may be determined according to the assembling relationship of the two, the position limiting hole 240 is in inserted fit with the cylindrical member and is in position-limiting fit in the position limiting groove 311, the position limiting hole 240 may change the position or angle relative to the position limiting groove 311 through various movements of the floating plate 200, so that the movement of the floating plate 200 may be indirectly limited through the movement limiting groove 311, and the limitation is not limited to the above mentioned inclination angle range or displacement range, in addition, the rotation range of the floating plate 200 may be set.

The limiting groove 311 is an annular groove surrounding the cylinder member for one circle, the width of the annular groove is greater than the depth of the limiting hole 240, and at this time, the portion of the annular groove having a width greater than the depth of the limiting hole 240 allows the limiting hole 240 to move in the width direction of the annular groove, which may be expressed as the X-axis direction, which also allows the floating plate 200 to move in the X-axis direction between the pair of wall plates 110. Meanwhile, since the limiting groove 311 is an annular groove, the limiting hole 240 may actually have a foundation of rotating around the annular groove, as long as the annular groove is configured to not limit the rotation of the limiting hole 240.

The stopper hole 240 has a first movable gap 250 with the annular groove in a direction parallel to the direction of the output end 210, which may be referred to as a Z-axis direction, so that the floating plate 200 is allowed to reciprocate in the Z-axis direction to adjust the position of the output end 210 in the Z-axis direction, and the stopper hole 240 has a second movable gap 260 with the annular groove in a direction perpendicular to the direction of the output end 210, which may be referred to as a Y-axis direction, so that the floating plate 200 is allowed to reciprocate in the Y-axis direction to adjust the position of the output end 210 in the Y-axis direction. When the movement of the floating plate 200 along the Y-axis or the Z-axis is limited, the first movable gap 250 may be smaller than or equal to the second movable gap 260, so that the floating plate 200 may move more flexibly in the Y-axis direction and relatively limited in the Z-axis direction, and besides, those skilled in the art may set the actual width dimensions of the first movable gap 250, the second movable gap 260 and the limiting groove 311 as required, so as to reasonably limit the movement of the floating plate 200 in the X-axis, the Y-axis and the Z-axis directions.

Therefore, the floating plate 200 can move in the X-axis, Y-axis and Z-axis directions by limiting the widths of the first movable gap 250, the second movable gap 260 and the limiting groove 311, and can move in a three-dimensional space, so that the position of the floating plate 200 and the output end 210 thereof relative to the frame body 100 can be changed, and the displacement range can be limited by the widths of the first movable gap 250, the second movable gap 260 and the limiting groove 311, wherein the limiting hole can be oval or track-shaped.

To illustrate the use of the floating structure 001, referring to fig. 1, the connector 002 can be precisely mated with the external device 005 under ideal conditions, but referring to fig. 2, in case the external device 005 is inclined at a small angle, for example, the interface end of the external device 005 is shifted by an angle a toward the-Z axis, the connector 002 can be roughly positioned by the positioning member 004, and the floating plate 200 can be elastically deflected toward the + X axis during the insertion of the positioning member 004 into the interface end.

As shown in fig. 3 and 4, when the interface end of the external device 005 is shifted to the X-axis with respect to the floating structure 001, after the positioning element 004 of the connector 002 is roughly aligned, the floating plate 200 has a tendency to move in the-X direction under the elastic action, and the floating plate 200 can move in the-X axis direction along the limiting element 300 through the positioning guiding action of the limiting element 300, so that the interface end of the external device 005 is accurately aligned.

The present invention, as shown in fig. 7 to 9, also provides an interface device comprising the floating structure 001, a connector 002, the connector 002 being arranged at the output end 210 of the floating plate 200, the connector 002 being configured for connecting an external device 005 having an interface end. Since the detailed structure, functional principle and technical effect of the floating structure 001 are described in detail in the foregoing, detailed description is omitted here, and any technical content related to the floating structure 001 can refer to the above description.

The connector 002 may include a connector circuit board and a high-density connector electrically connected to the connector circuit board in a stacked manner, the high-density connector may have a large number of embedded reeds or pogo pins to form a structure for mating with the interface end of the external device 005, and the reeds or pogo pins have elasticity, so that flexible mating may be formed, and flexible displacement may be generated when the interface device is mated with the interface end. The connector 002 may be another type of electrical connector 002, optical communication connector 002, fluid connector 002, etc., and is not limited thereto.

The structural shape of high density connector and connector circuit board can be confirmed as required, for example for square board or circular board etc, can set up setting element 004 on the connector 002, for example adopt the locating pin as setting element 004, setting element 004 is as the part with external equipment 005 location fit, can connect on high density connector, or form simultaneously with high density connector and connector circuit board and be connected, setting element 004 keeps away from connector 002 one end and can sets up the apex of cone, the initial self-centering when external equipment and interface arrangement are connected to the counterpoint can be realized through the conical surface of apex of cone.

The tail end of the connector 002 can be electrically connected with a circuit board through the conductive part 003, the conductive part 003 can be a conductive structure in any form, and in order to meet stable electrical conduction, the conductive part 003 can be a conductive cable which is electrically connected with the connector 002 through a cable connector 002, or the conductive part 003 can also be a flexible printed board which is electrically connected with the connector 002.

The utility model also provides a circuit board unit, which includes an interface device, the interface device includes the floating structure 001, the floating board is a circuit board, or the floating board is configured to be used for mounting a circuit board, or indirectly mounting a circuit board through a circuit board fixing frame, or the frame body 100 is configured to be used for directly mounting a circuit board or mounting a circuit board through a circuit board fixing frame, the circuit board fixing frame is configured to be used for mounting at least one circuit board, the number of the specific mountable circuit boards can be one or more, the floating board 200 is provided with a connector 002, the head end of the connector 002 is configured to be connected with an external device 005 with an interface end, and the tail end of the connector 002 is configured to be electrically connected with the circuit board.

The following steps can be adopted when semiconductor testing is carried out according to the circuit board unit: installing at least one circuit board in the circuit board fixing frame, where the number of the installed circuit boards may be one or more, that is, one circuit board fixing frame may be installed with one circuit board, and may also be installed with a plurality of stacked circuit boards, where each circuit board is electrically connected to at least one interface device, or a circuit board is installed on the frame body, the circuit board is electrically connected to at least one interface device, or a circuit board is installed on the floating plate, and the circuit board is electrically connected to at least one interface device, or a plurality of interface devices are prepared, where the floating plate is a circuit board, the circuit board is electrically connected to the connector, and the circuit board is electrically connected to the connector; the plurality of interface devices are electrically connected to the plurality of interface terminals of the external device 005 at the same time, so that a structure for synchronizing a large number of tests can be realized, and the test efficiency can be effectively improved.

The utility model also provides a semiconductor test device which comprises the circuit board unit. Since the specific structures, functional principles and technical effects of the floating structure 001, the interface device and the circuit board unit are described in detail in the foregoing, further description is omitted here.

All possible combinations of the technical features of the above embodiments may not be described for the sake of brevity, but should be considered as within the scope of the present disclosure as long as there is no contradiction between the combinations of the technical features.

The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the utility model. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.

Claims (13)

1. A floating structure for semiconductor testing, the floating structure comprising:

a frame body;

a floating plate including an output end at a side edge, the floating plate being resiliently mounted to the frame and being at least resiliently tiltable relative to the frame to at least adjust an orientation of the output end, the output end being configured for mounting a connector;

the limiting part is assembled on the frame body, a limiting structure is arranged on the limiting part, the limiting structure is configured to be used for at least forming an inclination angle range for limiting the inclination angle of the floating plate, and the floating plate is movably assembled in a limiting mode with the limiting structure so as to elastically incline in the inclination angle range.

2. The floating structure according to claim 1, wherein the floating plate is configured to be elastically movable with respect to the frame body to adjust the orientation of the output end and the position with respect to the frame body, the stopper structure is configured to form an inclination angle range for limiting the inclination angle of the floating plate and a displacement range for the movable position of the output end, and the floating plate is movably fitted with the stopper structure to be elastically movable within the inclination angle range and the displacement range.

3. The floating structure according to claim 1, characterized in that it comprises:

and the floating plate is elastically assembled on the frame body through the elastic piece.

4. The floating structure according to claim 3, wherein the frame body comprises at least a pair of wall plates, and the floating plate is elastically fitted between the pair of wall plates.

5. The floating structure according to claim 4, wherein both side walls of the floating plate have a plurality of symmetrical mounting locations each having the elastic member mounted thereon, and the floating plate is elastically mounted to a pair of the wall plates by the elastic members on both side walls.

6. The floating structure according to claim 5, wherein the number of the installation sites is eight, and the two sidewalls symmetrically disposed on the floating plate form four pairs, and the connection line of the four installation sites on the same sidewall of the floating plate is rectangular.

7. The floating structure according to claim 5, wherein said retainer is fitted between a pair of said wall plates, and said retainer is located between a plurality of said elastic members.

8. The floating structure according to claim 5, further comprising:

at least one adjusting member mounted on the floating plate and/or the wall plate, the adjusting member being configured to adjust an inclination angle of the floating plate by the elastic member.

9. The floating structure according to any one of claims 1 to 8, wherein the limiting member is a cylindrical member, the limiting structure is a limiting groove formed in the cylindrical member, and the floating plate is provided with a limiting hole, the limiting hole is in plug-in fit with the cylindrical member and is in limiting fit in the limiting groove.

10. The floating structure according to claim 9, wherein the retaining groove is an annular groove that surrounds the column member around its circumference, the annular groove having a width that is greater than a depth of the retaining hole;

the limiting hole and the annular groove are provided with a first movable gap in the direction parallel to the direction of the output end, the limiting hole and the annular groove are provided with a second movable gap in the direction perpendicular to the direction of the output end, and the first movable gap is smaller than or equal to the second movable gap.

11. An interface device, characterized in that the interface device comprises:

the floating structure of any one of claims 1-10;

a connector disposed at an output end of the floating plate, the connector configured for connection to an external device having an interface end.

12. A circuit board unit, characterized in that the circuit board unit comprises:

the interface device as claimed in claim 11,

wherein the floating plate is a circuit board,

alternatively, the floating plate is configured for mounting a circuit board or indirectly mounting a circuit board through a circuit board mount,

alternatively, the mount is configured for direct mounting of a circuit board or indirect mounting of a circuit board via a circuit board mount;

the head end of the connector is configured for connection with an external device having an interface end, and the tail end of the connector is configured for electrical connection with the circuit board.

13. A semiconductor test apparatus characterized by comprising the circuit board unit according to claim 12.

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