CN216528800U - Six-shaft inserting and detaching mechanism for low-pressure diffusion quartz boat - Google Patents
Six-shaft inserting and detaching mechanism for low-pressure diffusion quartz boat Download PDFInfo
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- CN216528800U CN216528800U CN202122728033.6U CN202122728033U CN216528800U CN 216528800 U CN216528800 U CN 216528800U CN 202122728033 U CN202122728033 U CN 202122728033U CN 216528800 U CN216528800 U CN 216528800U
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Abstract
The utility model discloses a six-axis inserting and detaching mechanism of a low-pressure diffusion quartz boat, which comprises six mechanical arms, wherein one end of each six mechanical arm is fixedly provided with a connecting frame, the bottom of each connecting frame is fixedly connected with an installation frame, the bottom of each installation frame is symmetrically provided with a sucker component, the bottom of each installation plate is fixedly connected with a plurality of vacuum suckers at equal intervals, one side of each installation plate is fixedly connected with a plurality of connecting pipes at equal intervals, two sides of the bottom of each installation plate are fixedly connected with protection plates, the plurality of vacuum suckers are positioned between the two protection plates, the top of each installation plate is fixedly connected with a fixing plate, and the top of each fixing plate is symmetrically and fixedly connected with a second connecting block. According to the utility model, the mounting frame and the two sucker components are matched for use, the two sucker components can respectively adsorb fifty silicon wafers, and the two sucker components can move and turn over at the bottom of the mounting frame, so that the silicon wafers can be conveniently grabbed and inserted on designated equipment, and the practical performance of the silicon wafers is improved.
Description
Technical Field
The utility model relates to the field of a wafer inserting and unloading mechanism, in particular to a six-axis wafer inserting and unloading mechanism of a low-pressure diffusion quartz boat.
Background
At present, 15.6 ten thousand transistors can be integrated on a silicon wafer with large grains of rice, the crystal is a crystal of multidisciplinary collaborative effort, and is a still another milestone of scientific and technical progress, the microelectronic technology is moving to aerospace, industry, agriculture and national defense, and is also moving to each family, the huge magic force of the small silicon wafer is that the predecessors cannot imagine at all, the fragment rate is high from early manual insertion, the efficiency is low, the silicon wafer is inserted from a quartz boat in an automatic gantry three-axis mode, the production requirement is met in a short time, but the defect of three-axis is highlighted, and a six-axis robot and a seventh-axis tool are urgently needed to appear as the size of the silicon wafer is larger, the silicon wafer is thinner, the capacity requirement is higher and higher, and the defect of three-axis is highlighted.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a six-axis inserting and removing mechanism of a low-pressure diffusion quartz boat, which solves the problems in the background technology.
In order to achieve the purpose, the utility model provides the following technical scheme: the six-shaft inserting and unloading mechanism of the low-pressure diffusion quartz boat comprises six mechanical arms, wherein one ends of the six mechanical arms are fixedly provided with connecting frames, the bottoms of the connecting frames are fixedly connected with mounting frames, and the bottoms of the mounting frames are symmetrically provided with sucker components;
the sucking disc subassembly includes the mounting panel, a plurality of vacuum chuck of bottom equidistance fixedly connected with of mounting panel, a plurality of connecting pipes of one side equidistance fixedly connected with of mounting panel.
Preferably, the equal fixedly connected with guard plate in both sides of mounting panel bottom, it is a plurality of vacuum chuck is located between two guard plates.
Preferably, the top fixedly connected with fixed plate of mounting panel, the top symmetry fixedly connected with second connecting block of fixed plate, the top of fixed plate is provided with two first connecting blocks.
Preferably, the inside symmetry fixedly connected with slide rail of installation frame, the outer wall slip of slide rail has cup jointed two sliders, the bottom and the first connecting block fixed connection of slider.
Preferably, a main shaft is rotatably inserted between the two corresponding first connecting blocks in a penetrating and sleeving manner, and the outer wall of the main shaft is fixedly connected with the second connecting block.
Preferably, one side of one of the first connecting blocks is fixedly connected with a servo motor, and an output end of the servo motor is in transmission connection with the spindle.
The utility model has the technical effects and advantages that:
(1) according to the utility model, the mounting frame and the two sucker components are matched for use, the two sucker components can respectively adsorb fifty silicon wafers, and the two sucker components can move and turn over at the bottom of the mounting frame, so that the silicon wafers can be conveniently grabbed and inserted on a designated device, and the practical performance of the silicon wafers is improved;
(2) the six-axis mechanical arm can drive the mounting frame to move in a certain space by utilizing the matching use of the six-axis mechanical arm, the mounting frame and the two sucker components, so that the six-axis mechanical arm can drive the sucker components to operate in the certain space.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention.
Fig. 2 is a schematic view of the overall structure of the mounting frame of the present invention.
FIG. 3 is a schematic view of the overall structure of the chuck assembly of the present invention.
In the figure: 1. a six-axis robot arm; 2. a connecting frame; 3. a mounting frame; 4. a sucker component; 41. mounting a plate; 42. a protection plate; 43. a vacuum chuck; 44. a connecting pipe; 5. a fixing plate; 6. a slider; 7. a first connection block; 8. a main shaft; 9. and a second connecting block.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The utility model provides a six-axis inserting and detaching mechanism of a low-pressure diffusion quartz boat as shown in figures 1-3, which comprises six mechanical arms 1, wherein one end of each of the six mechanical arms 1 is fixedly provided with a connecting frame 2, the bottom of each connecting frame 2 is fixedly connected with an installation frame 3, two sides of each installation frame 3 are fixedly provided with chain wheels, so that pipes and cables required by the operation of the installation frame 3 are protected, and the bottom of each installation frame 3 is symmetrically provided with sucker components 4.
The sucking disc subassembly 4 includes mounting panel 41, a plurality of vacuum chuck 43 of bottom equidistance fixedly connected with of mounting panel 41, the shape of vacuum chuck 43 is similar with silicon chip product shape, a plurality of connecting pipes 44 of one side equidistance fixedly connected with of mounting panel 41, connecting pipe 44 communicates with outside air supply, thereby connecting pipe 44 extracts the inside air of vacuum chuck 43, just can make vacuum chuck 43 adsorb the silicon chip, the equal fixedly connected with guard plate 42 in both sides of mounting panel 41 bottom, guard plate 42 passes through fixing bolt and mounting panel 41 fixed connection, and guard plate 42's shape is the same with vacuum chuck 43 shape, thereby can protect it, and carry out the position to vacuum chuck 43 and prescribe a limit to, a plurality of vacuum chuck 43 are located between two guard plate 42.
The top of the mounting plate 41 is fixedly connected with a fixing plate 5, the top of the fixing plate 5 is symmetrically and fixedly connected with a second connecting block 9, the top of the fixing plate 5 is provided with two first connecting blocks 7, the inside of the mounting frame 3 is symmetrically and fixedly connected with a slide rail, the outer wall of the slide rail is sleeved with two sliding blocks 6 in a sliding manner, two sides of the mounting frame 3 are both provided with air cylinders, the output end of each air cylinder is in transmission connection with a positioning plate, the positioning plate is fixedly connected with the two corresponding sliding blocks 6, so that the air cylinders can drive the two corresponding sliding blocks 6 to move, further the two corresponding sliding blocks 6 can drive the sucker component 4 to move through the first connecting blocks 7, the main shaft 8, the second connecting block 9 and the fixing plate 5, the bottom of each sliding block 6 is fixedly connected with the first connecting blocks 7, the main shaft 8 is rotatably and alternately sleeved between the two corresponding first connecting blocks 7, and the outer wall of the main shaft 8 is fixedly connected with the second connecting block 9, one side fixedly connected with servo motor of one of them first connecting block 7, servo motor drive main shaft 8 rotates, just can rotate through second connecting block 9 to make sucking disc subassembly 4 overturn, thereby make sucking disc subassembly 4 be in parallel state or vertical state and carry out the operation, servo motor's output and main shaft 8 transmission are connected.
The air cylinder and the servo motor are respectively electrically connected with an external power supply through an external air cylinder switch and a servo motor switch.
The working principle of the utility model is as follows: when inserting the silicon wafer, firstly, the six-axis mechanical arm 1 drives the connecting frame 2, the mounting frame 3 and the sucker component 4 to move to the designated position, so that the sucker component 4 takes the silicon wafer, even if the sucker component 4 moves to two sides of the silicon wafer, then the cylinder switch is opened, the cylinder drives the sucker component 4 to move through the sliding block 6, the first connecting block 7, the spindle 8, the second connecting block 9 and the fixing plate 5, so that the plurality of vacuum suckers 43 on the sucker component 4 correspond to the silicon wafer and suck the silicon wafer, then the six-axis mechanical arm 1 drives the connecting frame 2, the mounting frame 3 and the sucker component 4 adsorbing the silicon wafer to move the silicon wafer processing area, then the servo motor switch is opened, so that the servo motor drives the spindle 8 to rotate, the spindle 8 drives the second connecting block 9 to rotate, so that the sucker component 4 is turned over, and then the cylinder drives the cylinder to move through the sliding block 6, the second connecting block 9 and the silicon wafer processing area, The first connecting block 7, the main shaft 8, the second connecting block 9 and the fixing plate 5 drive the sucker assemblies 4 to move, so that the two sucker assemblies 4 are in a parallel state and a certain distance, the six-axis mechanical arm 1 drives the silicon wafer to descend, the silicon wafer is inserted into a specified position, then the vacuum sucker 43 loosens the silicon wafer, then the six-axis mechanical arm 1 drives the sucker assemblies 4 to restore to the original position, and the silicon wafer is grabbed again.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments or portions thereof without departing from the spirit and scope of the utility model.
Claims (6)
1. The six-shaft inserting and unloading mechanism for the low-pressure diffusion quartz boat comprises six mechanical arms (1), and is characterized in that one ends of the six mechanical arms (1) are fixedly provided with connecting frames (2), the bottom of each connecting frame (2) is fixedly connected with an installation frame (3), and the bottom of each installation frame (3) is symmetrically provided with sucker components (4);
sucking disc subassembly (4) include mounting panel (41), a plurality of vacuum chuck (43) of bottom equidistance fixedly connected with of mounting panel (41), a plurality of connecting pipes (44) of one side equidistance fixedly connected with of mounting panel (41).
2. The six-axis inserting and removing plate mechanism for the low-pressure diffusion quartz boat as claimed in claim 1, wherein two sides of the bottom of the mounting plate (41) are fixedly connected with protection plates (42), and a plurality of vacuum suction cups (43) are positioned between the two protection plates (42).
3. The six-axis inserting and removing mechanism for the low-pressure diffusion quartz boat as claimed in claim 1, wherein a fixed plate (5) is fixedly connected to the top of the mounting plate (41), a second connecting block (9) is symmetrically and fixedly connected to the top of the fixed plate (5), and two first connecting blocks (7) are arranged on the top of the fixed plate (5).
4. The six-axis inserting and unloading mechanism for the low-pressure diffusion quartz boat as claimed in claim 1, wherein slide rails are symmetrically and fixedly connected to the inside of the mounting frame (3), two slide blocks (6) are slidably sleeved on the outer walls of the slide rails, and the bottoms of the slide blocks (6) are fixedly connected to the first connecting block (7).
5. The six-axis inserting and removing mechanism for the low-pressure diffusion quartz boat as claimed in claim 4, wherein a main shaft (8) is rotatably inserted and sleeved between the two corresponding first connecting blocks (7), and the outer wall of the main shaft (8) is fixedly connected with the second connecting block (9).
6. The six-axis inserting and removing mechanism for the low-pressure diffusion quartz boat as claimed in claim 4, wherein a servo motor is fixedly connected to one side of one of the first connecting blocks (7), and the output end of the servo motor is in transmission connection with the spindle (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122728033.6U CN216528800U (en) | 2021-11-09 | 2021-11-09 | Six-shaft inserting and detaching mechanism for low-pressure diffusion quartz boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122728033.6U CN216528800U (en) | 2021-11-09 | 2021-11-09 | Six-shaft inserting and detaching mechanism for low-pressure diffusion quartz boat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216528800U true CN216528800U (en) | 2022-05-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122728033.6U Active CN216528800U (en) | 2021-11-09 | 2021-11-09 | Six-shaft inserting and detaching mechanism for low-pressure diffusion quartz boat |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216528800U (en) |
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2021
- 2021-11-09 CN CN202122728033.6U patent/CN216528800U/en active Active
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