CN216514086U

CN216514086U - Evaporation container

Info

Publication number: CN216514086U
Application number: CN202123154265.1U
Authority: CN
Inventors: 崔君信
Original assignee: LG Display Optoelectronics Technology China Co Ltd
Current assignee: LG Display Optoelectronics Technology China Co Ltd
Priority date: 2021-12-14
Filing date: 2021-12-14
Publication date: 2022-05-13
Anticipated expiration: 2031-12-14

Abstract

The utility model discloses an evaporation container which comprises a pot body, a heating element, a plurality of nozzles and a plurality of heat conducting elements, wherein the nozzles are arranged on the top surface of the pot body, the heating element is arranged on the side surface of the pot body, the heat conducting elements comprise a first heat conducting body and a second heat conducting body, the first heat conducting body is connected with the side surface of the nozzles, the second heat conducting body comprises a first section and a second section which are connected in an included angle mode, two ends of the first section are respectively connected with the first heat conducting body and the second section, and one end, far away from the first section, of the second section is connected with the heating element. The side of first heat-conducting body and nozzle is connected, realizes heat-conduction under the prerequisite that does not disturb the normal work of nozzle, because nozzle and heating member set up respectively on the different faces of the pot body, the second heat-conducting body is including being first segmentation and the second segmentation that the contained angle is connected for first segmentation couples together first heat-conducting body and second segmentation, maintains the nozzle temperature at higher level, effectively avoids the condition that the nozzle takes place to block up, the normal clear of guarantee coating by vaporization operation.

Description

Evaporation container

Technical Field

The utility model relates to the technical field of display panel manufacturing, in particular to an evaporation container.

Background

The OLED evaporation equipment is equipment for carrying out evaporation film formation on an organic material and manufacturing a light-emitting device, and the OLED evaporation is an important process technology in an OLED production process link and is a key factor for restricting the productivity. The organic material needs to be filled in the crucible, and then the crucible is put into the OLED evaporation equipment for evaporation operation. As shown in fig. 1, a conventional evaporation container includes a pot body 1, a heating member 2 and a plurality of nozzles 3, the nozzles 3 are disposed on the top of the pot body 1, and the heating member 2 is disposed on the side of the pot body 1. The defects of the prior art are as follows: since the opening of the nozzle 3 is small and the nozzle 3 is not sufficiently heated by the heating member 2, the volatilized organic material is easily condensed again at the nozzle 3 having a low temperature, so that the nozzle 3 is blocked, which affects the normal operation of the vapor deposition operation.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a vapor deposition container which can avoid the blockage of a nozzle.

In order to achieve the purpose, the utility model adopts the following technical scheme:

the utility model provides an evaporation container, including the pot body, heating member, a plurality of nozzle and a plurality of heat-conducting member, the nozzle set up in the top surface of the pot body, the heating member set up in the side of the pot body, the heat-conducting member includes first heat-conducting body and second heat-conducting body, first heat-conducting body with the side of nozzle is connected, the second heat-conducting body is including being the first segmentation and the second segmentation that the contained angle is connected, the both ends of first segmentation respectively with first heat-conducting body with the second segmentation is connected, the second segmentation is kept away from the one end of first segmentation with the heating member is connected.

As a preferable aspect of the evaporation container of the present invention, the first heat conductor is sleeved on a side surface of the nozzle, an inner surface of the first heat conductor is attached to the side surface of the nozzle, and the first segment is connected to an outer surface of the first heat conductor.

In a preferred embodiment of the vapor deposition container according to the utility model, an end of the second segment remote from the first segment is in contact with the heating member.

As a preferable scheme of the evaporation container of the present invention, the first segment is attached to the top surface of the pot body, and the second segment is attached to the side surface of the pot body.

In a preferred embodiment of the vapor deposition container of the present invention, a top surface of the nozzle is flush with a top surface of the first heat conductor.

As a preferred scheme of the evaporation container of the present invention, the heating member includes an upper heating member and a lower heating member which are independent of each other, the upper heating member is close to the top surface of the pot body, the lower heating member is close to the bottom surface of the pot body, and the heat conducting member is connected to the upper heating member.

In a preferred embodiment of the vapor deposition container according to the present invention, the vapor deposition container further includes a first contact piece provided on a surface of the second section, the first contact piece being in contact with the heating member.

As a preferable mode of the vapor deposition container of the present invention, the vapor deposition container further includes a second contact piece, the second contact piece is disposed on the heating member, and the first contact piece and the second contact piece are partially attached to each other.

As a preferable embodiment of the evaporation container of the present invention, the heating members are disposed on two opposite side surfaces of the pot body, the heat-conducting member includes one first heat-conducting body and one second heat-conducting body, and two adjacent heat-conducting members are respectively connected to the heating members on different sides.

As a preferable scheme of the evaporation container of the present invention, the heating elements are disposed on two opposite side surfaces of the pot body, the heat conducting element includes one first heat conductor and two second heat conductors, and the two second heat conductors are symmetrically disposed on two sides of the first heat conductor.

The utility model has the beneficial effects that:

according to the utility model, the first heat conductor is connected with the side surface of the nozzle, so that heat conduction is realized on the premise of not interfering the normal work of the nozzle, the nozzle and the heating element are respectively arranged on different surfaces of the pot body, the second heat conductor comprises the first section and the second section which are connected in an included angle, so that the first section connects the first heat conductor with the second section, and the heat of the heating element can be transferred to the first heat conductor from the second section, so that the temperature of the nozzle is maintained at a higher level, the condition that the nozzle is blocked is effectively avoided, and the normal operation of evaporation operation is ensured.

Drawings

The utility model is explained in more detail below with reference to the figures and examples.

Fig. 1 is a perspective view of a conventional evaporation container;

fig. 2 is a perspective view of a vapor deposition container according to an embodiment of the present invention;

fig. 3 is a perspective view of a vapor deposition container according to another embodiment of the present invention;

fig. 4 is a perspective view of a heat conductive member, first contact, second contact and heating member (in part) in accordance with one embodiment of the present invention;

fig. 5 is a perspective view of a heat-conducting member according to another embodiment of the present invention.

In the figure:

1. a pan body; 2. a heating member; 21. an upper heating body; 22. a lower heating body; 3. a nozzle; 4. a heat conductive member; 41. a first heat conductor; 42. a second heat conductor; 421. a first segment; 422. a second section; 5. a first contact piece; 6. a second contact.

Detailed Description

Advantages and features of the present invention and methods of accomplishing the same will become apparent with reference to the following detailed description of the embodiments taken in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various forms, which are provided only to complete the disclosure of the present invention and make those skilled in the art sufficiently understand the scope of the present invention, and the present invention is limited only by the scope of the claims. Like reference numerals denote like constituent elements throughout the specification.

Hereinafter, the present invention is described in detail with reference to the accompanying drawings.

As shown in fig. 2, the evaporation container of an embodiment includes a pot body 1, a heating element 2, a plurality of nozzles 3 and a plurality of heat conducting members 4, the nozzles 3 are disposed on the top surface of the pot body 1, the heating element 2 is disposed on the side surface of the pot body 1, the heat conducting members 4 include a first heat conducting body 41 and a second heat conducting body 42, the first heat conducting body 41 is connected to the side surface of the nozzles 3, the second heat conducting body 42 includes a first segment 421 and a second segment 422 connected at an included angle, two ends of the first segment 421 are respectively connected to the first heat conducting body 41 and the second segment 422, and one end of the second segment 422, which is far away from the first segment 421, is connected to the heating element 2.

The evaporation container of this embodiment utilizes first heat-conducting body 41 to be connected with the side of nozzle 3, realize heat-conduction under the prerequisite that does not disturb the normal work of nozzle 3, because nozzle 3 and heating member 2 set up respectively on the different faces of pot body 1, second heat-conducting body 42 is including being first segmentation 421 and the second segmentation 422 that the contained angle is connected, make first segmentation 421 couple together first heat-conducting body 41 and second segmentation 422, the heat of heating member 2 can be followed second segmentation 422 and transmitted to first heat-conducting body 41, thereby make nozzle 3 temperature maintain at higher level, effectively avoid nozzle 3 to take place the condition of jam, the normal clear of guarantee evaporation operation. The reason why the first heat conductor 41 connected to the nozzle 3 is separately provided is that since the nozzle 3 has a small size, if the second heat conductor 42 is directly in contact with the nozzle 3, it is difficult to achieve good heat conduction, which is not favorable for transferring the heat of the heating member 2 to the nozzle 3.

Further, the first heat conductor 41 is sleeved on the side surface of the nozzle 3, the inner surface of the first heat conductor 41 is attached to the side surface of the nozzle 3, and the first segment 421 is connected to the outer surface of the first heat conductor 41. The first heat conductor 41 surrounds the side surface of the nozzle 3 and has a larger contact area with the nozzle 3, so that the heat conduction efficiency between the first heat conductor and the nozzle is higher, and the connection mode can also play a role in limiting the heat conduction piece 4. If the nozzle 3 is cylindrical, the first heat conductor 41 is annular; if the nozzle 3 has a rectangular parallelepiped shape, the first heat conductor 41 has a square frame shape. In short, the form of the first heat conductor 41 is changed according to the form of the side surface of the nozzle 3. The inner surface of the first heat conductor 41 can be tightly fitted to the side surface of the nozzle 3, and the heat conducting member 4 is fixed to the nozzle 3 by friction, thereby eliminating the fixing work for the heat conducting member 4.

Further, an end of the second segment 422 remote from the first segment 421 abuts the heating member 2. Because the heat conducting member 4 can be fixed on the nozzle 3 more stably through the first heat conductor 41, the end of the second segment 422 far away from the first segment 421 can be only abutted against the heating member 2, and only a sufficient contact area needs to be ensured, and a complex connection mode does not need to be adopted, so that the heat conducting member 4 can be detached conveniently.

In this embodiment, the first section 421 is attached to the top surface of the pot body 1, and the second section 422 is attached to the side surface of the pot body 1, so that the second heat conductor 42 can also exert a limiting effect, and after the heat conductor 4 is installed, the heat conductor 4 can be stably fixed on the pot body 1 without moving.

In this embodiment, the top surface of the nozzle 3 is flush with the top surface of the first heat conductor 41, and the first heat conductor 41 does not interfere with the normal operation of the nozzle 3 while the maximum contact area between the nozzle 3 and the first heat conductor 41 is realized.

In this embodiment, the two opposite sides of the pot body 1 are respectively provided with the heating members 2, the heat-conducting members 4 comprise a first heat-conducting body 41 and a second heat-conducting body 42, and two adjacent heat-conducting members 4 are respectively connected with the heating members 2 on different sides. The connection mode ensures that the quantity of the heat-conducting members 4 loaded on each heating member 2 is the same or basically the same, and the heat-conducting members 4 on each heating member 2 are uniformly distributed on the heating members 2, so that the heating of the pot body 1 by the heating members 2 cannot be obviously and adversely affected due to the arrangement of the heat-conducting members 4.

As shown in fig. 3, in another embodiment, the heating member 2 includes an upper heating body 21 and a lower heating body 22 which are independent of each other, the upper heating body 21 is adjacent to the top surface of the pot body 1, the lower heating body 22 is adjacent to the bottom surface of the pot body 1, and the heat conductive member 4 is connected to the upper heating body 21. Because last heating member 21 and lower heating member 22 are independent each other, can separately heat the pot body 1 inside to carry out more accurate control to the coating by vaporization process, the heat-conducting member 4 of being connected with last heating member 21 also can carry out more accurate control by temperature change and handle, thereby with the temperature control of nozzle 3 in more reasonable interval. For example, when the temperature inside the pot body 1 in the previous embodiment is too high, the power of the heating member 2 needs to be reduced, and since the heating member 2 is a whole, the heat received by the nozzle 3 can be reduced only synchronously, and then the nozzle 3 is easy to be blocked. However, in the present embodiment, it is only necessary to adjust the power of the lower heating body 22, and the power of the upper heating body 21 can be kept constant or even increased, so as to avoid the occurrence of the clogging of the nozzle 3.

In a specific embodiment, as shown in fig. 4, the evaporation vessel further includes a first contact piece 5, the first contact piece 5 is disposed on the surface of the second section 422, and the first contact piece 5 abuts against the heating member 2. The first contact piece 5 is thin and elastic, so that the heat conduction efficiency can be increased, and even if the form of the heating member 2 is complex, the first contact piece 5 can be in contact with the heating member 2. And the form of the first contact piece 5 can be correspondingly changed according to the form of the heating element 2, so that a larger contact area is realized.

Further, the evaporation plating container further comprises a second contact piece 6, the second contact piece 6 is arranged on the heating element 2, and the first contact piece 5 is partially attached to the second contact piece 6. The second contact piece 6 and the first contact piece 5 have a large contact area, and the heat transfer efficiency between the heating member 2 and the heat conducting member 4 can be further improved by providing the second contact piece 6.

In a specific embodiment, as shown in fig. 5, the heat conducting member 4 comprises a first heat conducting body 41 and two second heat conducting bodies 42, wherein the two second heat conducting bodies 42 are symmetrically arranged on two sides of the first heat conducting body 41. This type of heat-conducting member 4 is also used in the case where the heating members 2 are provided on both opposite sides of the pot body 1, so that each first heat-conducting body 41 can absorb heat from both heating members 2 and transfer it to one nozzle 3, and the temperature of the nozzle 3 can be raised more quickly.

Although the embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to the above embodiments, but may be manufactured in various forms, and those skilled in the art will appreciate that the present invention may be embodied in other specific forms without changing the technical spirit or essential features of the utility model. It is therefore to be understood that the above described embodiments are illustrative and not restrictive in all respects.

Claims

1. The utility model provides an evaporation container, includes the pot body, adds heat-insulating material and a plurality of nozzle, the nozzle set up in the top surface of the pot body, add the heat-insulating material set up in the side of the pot body, its characterized in that still includes a plurality of heat-conducting members, heat-conducting member includes first heat-conducting body and second heat-conducting body, first heat-conducting body with the side of nozzle is connected, the second heat-conducting body is including being the first segmentation and the second segmentation that the contained angle is connected, the both ends of first segmentation respectively with first heat-conducting body with the second segmentation is connected, the second segmentation is kept away from the one end of first segmentation with it is connected to add the heat-insulating material.

2. The evaporation container according to claim 1, wherein the first heat conductor is fitted over a side surface of the nozzle, an inner surface of the first heat conductor is fitted to the side surface of the nozzle, and the first segment is connected to an outer surface of the first heat conductor.

3. A deposition vessel according to claim 2, wherein an end of the second section remote from the first section abuts the heating element.

4. The evaporation container of claim 3, wherein the first section is attached to a top surface of the pan body, and the second section is attached to a side surface of the pan body.

5. The vapor deposition vessel of claim 2, wherein a top surface of the nozzle is flush with a top surface of the first thermal conductor.

6. The evaporation container as claimed in claim 1, wherein the heating member comprises an upper heating member and a lower heating member which are independent of each other, the upper heating member is disposed near the top surface of the pot body, the lower heating member is disposed near the bottom surface of the pot body, and the heat conductive member is connected to the upper heating member.

7. The vapor deposition container according to claim 1, further comprising a first contact piece provided on a surface of the second segment, the first contact piece abutting against the heating member.

8. The evaporation vessel according to claim 7, further comprising a second contact piece provided on said heating member, said first contact piece being partially attached to said second contact piece.

9. A vapor deposition container according to claim 1, wherein said heating members are provided on opposite sides of said pan body, said thermal conduction members comprise a first thermal conductor and a second thermal conductor, and two adjacent thermal conduction members are connected to said heating members on different sides, respectively.

10. The evaporation container as claimed in claim 1, wherein said heating member is provided on both opposite sides of said pan body, and said heat-conducting member comprises one of said first heat-conducting bodies and two of said second heat-conducting bodies symmetrically provided on both sides of said first heat-conducting body.