CN216434427U

CN216434427U - Infrared temperature measurement long wave light filter

Info

Publication number: CN216434427U
Application number: CN202123012972.7U
Authority: CN
Inventors: 王继平; 汪晓冬; 汪星星; 连国忠
Original assignee: Zhejiang Bode Photoelectric Technology Co ltd
Current assignee: Zhejiang Bode Photoelectric Technology Co ltd
Priority date: 2021-12-02
Filing date: 2021-12-02
Publication date: 2022-05-03
Anticipated expiration: 2031-12-02

Abstract

The utility model discloses an infrared temperature measurement long wave optical filter, which takes a germanium sheet as a substrate, takes germanium (Ge) and zinc sulfide (ZnS) as film materials, and adopts the preparation of an ion source auxiliary coating method in a physical vapor deposition mode under the high vacuum heating condition; one side of the film adopts a long-wave pass film system structure, and the other side of the film is matched with a high-transmittance anti-reflection film system, so that the film has excellent signal-to-noise ratio and can well inhibit interference; the optical filter is one of the core components of the infrared thermometer, is suitable for batch production, can well meet the actual use requirements of the optical performance and the physical strength of the product, and is widely applied to the fields of medical diagnosis, food processing and the like.

Description

Infrared temperature measurement long wave light filter

Technical Field

The utility model relates to a light filter technical field, in particular to infrared temperature measurement long wave light filter.

Background

With the development of science and technology, the traditional contact type temperature measurement mode can not meet the temperature measurement requirements in some modern fields, and the requirements on non-contact type and remote temperature measurement technology are increasingly large. The infrared temperature sensor is adopted, and has the advantages of high temperature resolution, high response speed, no disturbance on the temperature distribution field of the measured target, high measurement precision and good stability.

The infrared temperature measurement long wave optical filter is used as a core component of the infrared temperature sensor, the yield is low in a long time, and most of the infrared temperature measurement long wave optical filter is purchased from foreign countries. The infrared temperature measurement long-wave optical filter produced by the design and manufacturing technology of the patent can be compared with foreign devices in spectral transmittance, wavelength positioning precision, productivity efficiency and the like, and can well meet the relevant requirements of the market.

SUMMERY OF THE UTILITY MODEL

Not enough to prior art exists, the utility model aims to provide an infrared temperature measurement long wave light filter.

The above technical purpose of the present invention can be achieved by the following technical solutions:

an infrared thermometry long wave filter, comprising:

the germanium sheet with the diameter of about 25mm and the thickness of about 2mm is used as the substrate, and the surface finish is superior to 40/20;

selecting germanium Ge and zinc sulfide ZnS as coating materials, and respectively depositing a plurality of layers of interference films on the surfaces of the two sides of the substrate;

the main film adopts a band-pass film system structure and is matched with a high-transmittance anti-reflection film system structure, and the anti-reflection film system adopts Sub | HLHLHLHLHLHL | Air; the long-wave band-pass membrane system is designed by adopting the following structure:

Sub|a(0.5HL0.5H)^x+b(0.5HL0.5H)^x…+c(0.5LH0.5L)^x… | Air; the meaning of the symbols in the membrane system is respectively as follows: sub is substrate, Air, H is lambda/4 Ge film, L is lambda/4 Zn sulfide film, and lambda is 2000nmA, b, c, etc. in the structure are the thickness coefficients of the film stack, and the index x in the structure is the number of cycles accumulated for the film stack.

More preferably, the out-of-band inhibition range of each channel is 0.3-7 μm, and the out-of-band inhibition rate is less than or equal to 0.1%.

Wherein, the related evaporation process conditions are as follows:

heating and baking at 130 ℃ in a high vacuum (the vacuum degree is less than or equal to 10 < -3 > Pa), and performing ion source assisted film coating by adopting a physical vapor deposition mode.

The germanium and the zinc sulfide are evaporated by adopting an electron gun, and the evaporation rate is controlled within 5 nm/S.

To sum up, the utility model discloses the beneficial effect who contrasts in prior art does:

1. the optical filter achieves excellent technical indexes: the waveform rectangularity is good, the transmittance in a working spectrum band exceeds 90%, the out-of-band rejection depth is less than 0.1%, and the wavelength positioning precision is less than 0.1 mu m, so that background interference signals can be well suppressed, and an excellent signal-to-noise ratio is obtained.

2. The optical filter has the advantages of stable and mature process, batch production and reliable performance, and can well meet the requirements of the infrared temperature sensor.

3. The optical filter has advantages in the aspects of wavelength positioning precision, in-band transmittance, out-of-band rejection rate, price and the like compared with foreign similar products.

Drawings

FIG. 1 is a measured graph of an example.

Detailed Description

The following provides a more detailed description of the present invention with reference to the accompanying drawings.

An infrared temperature measurement long wave optical filter, comprising:

Sub|a(0.5HL0.5H)^x+b(0.5HL0.5H)^x…+c(0.5LH0.5L)^x… | Air; the meaning of the symbols in the membrane system is respectively as follows: sub is the substrate, Air, H is the lambda/4 germanium film layer, L is the lambda/4 zinc sulfide film layer, lambda is 2000nm, a, b, c, etc. in the structure are the thickness coefficient of the film stack, and the index x in the structure is the number of cycles of the film stack integration.

According to the application, the optical filter adopts a long-wave through film system plated on one surface, so that the working spectrum section is ensured to have high transmittance and waveform rectangularity; and the other side is plated with an anti-reflection film system with high transmittance, so that the requirements of maximization of in-band signals and minimization of out-band signals of a working spectrum section are met.

Tests were performed using an agilent Carry7000 spectrometer and a fourier spectrometer, and with reference to fig. 1, it was confirmed that the optical performance meets the following requirements:

1. the positioning precision of the whole wavelength is less than 0.1 μm;

2. the transmittance in the working spectrum is more than or equal to 90 percent;

3. 0.3-7 μm, and the out-of-band inhibition rate is less than or equal to 0.1%.

The above description is only an exemplary embodiment of the present invention, and is not intended to limit the scope of the present invention, which is defined by the appended claims.

Claims

1. An infrared temperature measurement long wave optical filter is characterized by comprising:

Sub|a(0.5HL0.5H)^x+b(0.5HL0.5H)^x…+c(0.5LH0.5L)^x… | Air; the meaning of the symbols in the membrane system is respectively as follows: sub is a substrate, Air is Air, H is a lambda/4 germanium film layer, L is a lambda/4 zinc sulfide film layer, lambda is 2000nm, a, b and c in the structure are thickness coefficients of the film stack, and an index x in the structure is the accumulated period number of the film stack.

2. The long-wave filter for infrared temperature measurement according to claim 1, wherein the out-of-band rejection range of each channel is 0.3 μm to 7 μm, and the out-of-band rejection rate is less than or equal to 0.1%.