CN216433359U

CN216433359U - Diffused silicon high static pressure micro differential pressure sensor

Info

Publication number: CN216433359U
Application number: CN202122459535.3U
Authority: CN
Inventors: 单森林
Original assignee: Alpha Instr Tianjin Co ltd
Current assignee: Alpha Instr Tianjin Co ltd
Priority date: 2021-10-13
Filing date: 2021-10-13
Publication date: 2022-05-03
Anticipated expiration: 2031-10-13

Abstract

The utility model provides a little differential pressure sensor of diffusion silicon high static pressure relates to little differential pressure sensor technical field, including protector and sensor body, protector's bottom inner wall and sensor body's bottom swing joint, protector includes top cap, protecting crust, carriage release lever and slide bar, the fluting has been seted up to the one end of protecting crust. The utility model discloses an increase protector, movable housing can protect the pressure input end when not using, avoid the pressure input end damaged, the pull rod conveniently removes this sensor body, it drops easily and little differential pressure sensor is damaged scheduling problem easily in the transportation to have solved the sensor body among the actual operation process, through setting up static pressure chip subassembly and differential pressure chip subassembly, the structure of two static pressure chip subassemblies and two differential pressure chip subassemblies, simple structure easily makes, can detect small differential pressure change under higher operating pressure simultaneously, and can detect high-pressure value and little differential pressure value simultaneously.

Description

Diffused silicon high static pressure micro differential pressure sensor

Technical Field

The utility model relates to a little differential pressure sensor technical field especially relates to a little differential pressure sensor of diffusion silicon high static pressure.

Background

As is well known, with the rapid development of sensor technology, a structural force-sensitive sensor is recognized as a new generation of novel high-performance sensor with wide development prospects due to a series of advantages of high precision, high stability, high reliability, low temperature coefficient, high overload resistance, excellent dynamic response characteristics, strong adaptability to severe conditions such as high temperature, radiation and strong vibration, and the like, and a silicon micro-pressure sensor is widely applied to many fields such as industrial automation control, automobile industry, aerospace industry, medical sanitation, semiconductor processing, military and the like.

However, in the prior art, the existing diffused silicon high static pressure micro differential pressure sensor is easy to drop in the actual operation process, and the diffused silicon high static pressure micro differential pressure sensor is also easy to damage in the transportation process, so that the damage of parts such as a sensor, a pressure input end and the like is caused, and the error problem of final detection data is caused.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving and having the little differential pressure sensor of current diffusion silicon high static pressure among the prior art and drop easily at the actual operation in-process, and the little differential pressure sensor of diffusion silicon high static pressure also causes the damage easily in the transportation, leads to the damage of parts such as sensor and pressure input end, leads to final detection data to produce the error problem, to the problem of above-mentioned problem, and the little differential pressure sensor of diffusion silicon high static pressure who provides.

In order to realize the purpose, the utility model adopts the following technical scheme: the utility model provides a little differential pressure sensor of high static pressure of diffusion silicon, includes protector and sensor body, protector's bottom inner wall and sensor body's bottom swing joint, protector includes top cap, protecting crust, carriage release lever and slide bar, the fluting has been seted up to the one end of protecting crust, the other end of protecting crust and the both ends fixed connection of slide bar, the both ends symmetry sliding connection of slide bar has movable shell, the outside of movable shell and the one end fixed connection of carriage release lever, the top of protecting crust and the bottom swing joint of top cap, the top both ends symmetry fixedly connected with pull rod of top cap, the inner wall both ends symmetry fixedly connected with gag lever post of protecting crust.

Preferably, the sensor body comprises a main body, a sealing cover, a connecting pipe and a connecting piece, wherein a high-pressure groove is formed in one end of the top of the main body, and a low-pressure groove is formed in the other end of the top of the main body.

Preferably, the inner wall of the high-pressure groove is fixedly connected with a static pressure chip assembly, and the inner wall of the low-pressure groove is fixedly connected with a differential pressure chip assembly.

Preferably, two ends of the sealing cover are symmetrically and movably connected with four fixing bolts, and the bottom of the sealing cover is movably connected with the top of the main body.

Preferably, the bilateral symmetry fixedly connected with of main part extends the board, the top of extending the board is run through and is seted up spacing hole, the top of gag lever post cup joints with the inner wall in spacing hole.

Preferably, the one end fixedly connected with installation pipe of main part, the one end of installation pipe and the one end threaded connection of connecting piece, the other end of connecting piece and the one end swing joint of connecting pipe.

Preferably, one end of the main body is symmetrically and fixedly connected with a pressure input end, and the outer wall of the connecting pipe is movably connected with the inner wall of the groove.

Compared with the prior art, the utility model has the advantages and positive effects that,

1. the utility model discloses in, through increasing protector, the gag lever post plays carries out spacing fixed effect to the sensor body, avoid the sensor table body to rock at will, the activity shell can slide in the slide bar outside, can protect pressure input end when not using, it is damaged to avoid pressure input end, can play the protecting effect to the internal sensor body with protecting crust and top cap lid tightly, the pull rod conveniently removes this sensor body, the sensor body drops easily and differential pressure sensor is damaged scheduling problem easily in the transportation in having solved the actual operation in-process, avoid the sensor body to damage.

2. The utility model discloses in, through setting up static pressure chip subassembly and differential pressure chip subassembly, high-pressure inslot wall is the static pressure chip subassembly, and low-pressure inslot wall adopts the structure of two static pressure chip subassemblies and two differential pressure chip subassemblies for the differential pressure chip subassembly, and simple structure easily makes, can detect small differential pressure change simultaneously under higher operating pressure to can detect high-pressure value and little differential pressure value simultaneously.

Drawings

FIG. 1 is a perspective view of a high static pressure micro differential pressure sensor of diffused silicon according to the present invention;

FIG. 2 is a schematic structural view of a high static pressure differential pressure sensor of diffused silicon according to the present invention;

fig. 3 is a schematic structural diagram of a sensor body of a diffused silicon high static pressure micro differential pressure sensor according to the present invention;

fig. 4 is a schematic view of the internal structure of the sensor body of the diffused silicon high static pressure micro differential pressure sensor according to the present invention;

fig. 5 is an enlarged view of a detail a in fig. 3 of a diffused silicon high static pressure micro differential pressure sensor according to the present invention.

Illustration of the drawings: 1. a guard; 2. a sensor body; 11. a top cover; 12. a pull rod; 13. a movable housing; 14. a protective shell; 15. a travel bar; 16. grooving; 17. a limiting rod; 18. a slide bar; 21. a main body; 22. a fixing bolt; 23. installing a pipe; 24. a connecting member; 25. a connecting pipe; 26. sealing the cover; 27. a pressure input; 28. an extension plate; 29. a low pressure tank; 30. a differential pressure chip assembly; 31. a high pressure tank; 32. and (4) static pressure chip assembly.

Detailed Description

In order to make the above objects, features and advantages of the present invention more clearly understood, the present invention will be further described with reference to the accompanying drawings and examples. It should be noted that the embodiments and features of the embodiments of the present application may be combined with each other without conflict.

In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, however, the present invention may be practiced in other ways than those specifically described herein, and therefore the present invention is not limited to the limitations of the specific embodiments of the present disclosure.

Embodiment 1, as shown in fig. 1-5, the utility model provides a little differential pressure sensor of diffusion silicon high static pressure, including protector 1 and sensor body 2, the bottom inner wall of protector 1 and the bottom swing joint of sensor body 2.

The specific arrangement and function of the guard 1 and the sensor body 2 will be described in detail below.

As shown in fig. 1, fig. 2, fig. 4 and fig. 5, the protection device 1 includes a top cover 11, a protection shell 14, a movable rod 15 and a sliding rod 18, one end of the protection shell 14 is provided with a slot 16, the other end of the protection shell 14 is fixedly connected with two ends of the sliding rod 18, two ends of the sliding rod 18 are symmetrically and slidably connected with a movable shell 13, the outer side of the movable shell 13 is fixedly connected with one end of the movable rod 15, the top of the protection shell 14 is movably connected with the bottom of the top cover 11, two ends of the top cover 11 are symmetrically and fixedly connected with pull rods 12, and two ends of the inner wall of the protection shell 14 are symmetrically and fixedly connected with limit rods 17.

The whole protection device 1 has the effects that the protection device 1 is additionally arranged on the outer side of the sensor body 2, the sensor body 2 is placed in the protection shell 14, the extending plates 28 on the two sides of the sensor body 2 are aligned to the limiting rod 17, the limiting rod 17 is aligned to the limiting hole of the extending plate 28, the limiting rod 17 plays a role in limiting and fixing the sensor body 2, the random shaking of the sensor meter body is avoided, the groove 16 is convenient for enabling the connecting pipe 25 of the sensor body 2 to be connected outwards, the movable shell 13 can slide towards two sides along the sliding rod 18 when the sensor body 2 is used, the movable shell 13 can be used for protecting the pressure input end 27 when the sensor body is not used, the damage of the pressure input end 27 is avoided, the movable rod 15 plays a role in facilitating the movement of the movable shell 13, and when the sensor body 2 needs to be moved, the protection shell 14 and the top cover 11 are tightly covered, this sensor body 2 is conveniently removed to pull rod 12, through setting up protector 1, has solved the easy damaged scheduling problem of sensor body 2 and little differential pressure sensor in the transportation that drops easily among the actual operation process, avoids sensor body 2 to damage.

As shown in fig. 1, 3 and 5, the sensor body 2 includes a main body 21, a sealing cover 26, a connecting pipe 25 and a connecting member 24, wherein one end of the top of the main body 21 is provided with a high pressure groove 31, the other end of the top of the main body 21 is provided with a low pressure groove 29, the inner wall of the high pressure groove 31 is fixedly connected with a static pressure chip assembly 32, the inner wall of the low pressure groove 29 is fixedly connected with a differential pressure chip assembly 30, two ends of the sealing cover 26 are symmetrically and movably connected with four fixing bolts 22, the bottom of the sealing cover 26 is movably connected with the top of the main body 21, two sides of the main body 21 are symmetrically and fixedly connected with extending plates 28, the top of the extending plates 28 is provided with a limiting hole in a penetrating manner, the top of the limiting rod 17 is sleeved with the inner wall of the limiting hole, one end of the main body 21 is fixedly connected with a mounting pipe 23, one end of the mounting pipe 23 is in threaded connection with one end of the connecting member 24, the other end of the connecting member 24 is movably connected with one end of the connecting pipe 25, one end of the main body 21 is symmetrically and fixedly connected with a pressure input end 27, and the outer wall of the connecting pipe 25 is movably connected with the inner wall of the slot 16.

The whole sensor body 2 has the advantages that the fixing bolt 22 can fix the sealing cover 26 at the top of the main body 21, the connecting pipe 25 and the connecting piece 24 are movably installed, then the connecting piece 24 and the installing pipe 23 are fixed in a threaded mode, the installing pipe 23 and the main body 21 are connected in a welding mode, the stability is guaranteed, and meanwhile, the sealing effect is achieved, the high-pressure groove 31 and the low-pressure groove 29 are respectively formed in two ends of the main body 21, the inner wall of the high-pressure groove 31 is a static pressure chip assembly 32, the inner wall of the low-pressure groove 29 is a differential pressure chip assembly 30, the structure of the two static pressure chip assemblies 32 and the two differential pressure chip assemblies 30 is adopted, the structure is simple and easy to manufacture, meanwhile, small differential pressure changes can be detected under high working pressure, and high-pressure values and micro differential pressure values can be detected at the same time.

The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention in other forms, and any person skilled in the art may use the above-mentioned technical contents to change or modify the equivalent embodiment into equivalent changes and apply to other fields, but any simple modification, equivalent change and modification made to the above embodiments according to the technical matters of the present invention will still fall within the protection scope of the technical solution of the present invention.

Claims

1. The utility model provides a little differential pressure sensor of diffusion silicon high static pressure, includes protector (1) and sensor body (2), its characterized in that: the bottom inner wall of protector (1) and the bottom swing joint of sensor body (2), protector (1) includes top cap (11), protecting crust (14), carriage release lever (15) and slide bar (18), fluting (16) have been seted up to the one end of protecting crust (14), the other end of protecting crust (14) and the both ends fixed connection of slide bar (18), the both ends symmetry sliding connection of slide bar (18) has movable shell (13), the outside of movable shell (13) and the one end fixed connection of carriage release lever (15), the top of protecting crust (14) and the bottom swing joint of top cap (11), the top both ends symmetry fixedly connected with pull rod (12) of top cap (11), the inner wall both ends symmetry fixedly connected with gag lever post (17) of protecting crust (14).

2. The diffused silicon high static pressure micro differential pressure sensor according to claim 1, wherein: the sensor body (2) comprises a main body (21), a sealing cover (26), a connecting pipe (25) and a connecting piece (24), wherein a high-pressure groove (31) is formed in one end of the top of the main body (21), and a low-pressure groove (29) is formed in the other end of the top of the main body (21).

3. The diffused silicon high static pressure micro differential pressure sensor according to claim 2, wherein: the inner wall of the high-pressure groove (31) is fixedly connected with a static pressure chip assembly (32), and the inner wall of the low-pressure groove (29) is fixedly connected with a differential pressure chip assembly (30).

4. The diffused silicon high static pressure micro differential pressure sensor according to claim 2, wherein: two ends of the sealing cover (26) are symmetrically and movably connected with four fixing bolts (22), and the bottom of the sealing cover (26) is movably connected with the top of the main body (21).

5. The diffused silicon high static pressure micro differential pressure sensor according to claim 2, wherein: the bilateral symmetry fixedly connected with of main part (21) extends board (28), the top of extending board (28) is run through and has been seted up spacing hole, the top of gag lever post (17) cup joints with the inner wall in spacing hole.

6. The diffused silicon high static pressure micro differential pressure sensor according to claim 2, wherein: the one end fixedly connected with installation pipe (23) of main part (21), the one end of installation pipe (23) and the one end threaded connection of connecting piece (24), the other end of connecting piece (24) and the one end swing joint of connecting pipe (25).

7. The diffused silicon high static pressure micro differential pressure sensor according to claim 2, wherein: one end of the main body (21) is symmetrically and fixedly connected with a pressure input end (27), and the outer wall of the connecting pipe (25) is movably connected with the inner wall of the groove (16).