CN216427409U - Liquid loading processing safety device for vertical deposition furnace tube - Google Patents

Abstract

The utility model belongs to the technical field of semiconductor preparation equipment, especially, relate to a hydrops processing safeties of vertical type deposit boiler tube, including drainage tube, collection liquid bottle and liquid level inductor, be provided with quartzy spare on the bottom furnace gate of boiler tube, the collection liquid annular has been seted up to the upper surface of quartzy spare, collection liquid annular is seted up around the circumference of quartzy spare, it has first through-hole to run through on the collection liquid annular, it has the second through-hole to run through on the furnace gate, the drainage tube passes first through-hole and second through-hole setting in proper order, collection liquid bottle sets up the below at furnace gate and drainage tube, collection liquid annular, drainage tube and collection liquid bottle communicate in proper order, the liquid level inductor sets up in collection liquid bottle. Has the advantages that: this fuse is handled to hydrops can effectively reduce the hydrops and remain, avoids corrosive liquids overflow to corrode furnace gate and pipeline, especially prevents to corrode circuit pipeline and stops the potential safety hazard, prolongs the maintenance cycle, reduction in production cost.

Description

Liquid loading processing safety device for vertical deposition furnace tube

Technical Field

The utility model belongs to the technical field of semiconductor preparation equipment, especially, relate to a hydrops processing safeties of vertical type deposit boiler tube.

Background

In a semiconductor manufacturing process flow, it is often necessary to deposit a thin film on a wafer. There are several methods for depositing thin films, one of the more common methods is chemical vapor deposition, in which reaction gas is delivered to a high temperature deposition furnace tube to react with the wafer in the deposition furnace tube under certain conditions to deposit a thin film on the surface of the wafer. The deposition furnace tube commonly used in the chemical vapor deposition method is a vertical deposition furnace tube, which is called a vertical furnace tube for short, a wafer boat is arranged in the vertical furnace tube and used for bearing wafers, a bottom furnace door is positioned below the wafer boat and used for supporting the wafer boat, a quartz piece is arranged between the wafer boat and the bottom furnace door and used for protecting the wafer boat and the wafers on the wafer boat, reaction gas required by deposition reaction is conveyed into the vertical furnace tube through a gas input tube to carry out chemical reaction, a required film layer is deposited on the wafer, and a tail gas discharge tube is used for discharging by-products or unreacted gas generated by the deposition reaction out of the vertical furnace tube.

The vertical deposition furnace tube can produce the hydrops deposit on the quartz piece of bottom furnace gate in the in-process of carrying out processes such as phosphorus doping, though quartz piece has the recess and can save a certain amount of liquid, but will overflow to the furnace gate when the hydrops accumulates to a certain degree, corrodes pipeline and circuit and produces serious potential safety hazard, causes serious economic loss.

SUMMERY OF THE UTILITY MODEL

For solving the problem of the hydrops of the vertical deposition furnace tube existing in the prior art, the utility model provides a hydrops processing safety device of the vertical deposition furnace tube.

For solving the technical problem, the utility model discloses a technical scheme as follows, a hydrops processing safeties of vertical type deposition boiler tube, including drainage tube, collection liquid bottle and liquid level inductor, be provided with quartzy spare on the bottom furnace gate of boiler tube, the collection liquid annular has been seted up to the upper surface of quartzy spare, collection liquid annular is seted up around the circumference of quartzy spare, it has first through-hole to run through on the collection liquid annular, it has the second through-hole to run through on the furnace gate, the drainage tube passes first through-hole and second through-hole setting in proper order, collection liquid bottle sets up the below at furnace gate and drainage tube, collection liquid annular, drainage tube and collection liquid bottle communicate in proper order, the liquid level inductor sets up in collection liquid bottle.

Preferably, the accumulated liquid treatment safety device further comprises a liquid return pipe, one end of the liquid return pipe is communicated with the bottom end of the liquid collection bottle, the liquid return pipe is arranged in a U shape, the other end of the liquid return pipe is higher than the liquid collection bottle, the liquid return pipe is connected with nitrogen, and the drainage pipe is communicated with a tail gas discharge pipe of the furnace pipe. The nitrogen can be passed through the original standby nitrogen branch or realized by adding another way, and the nitrogen carries accumulated liquid to be discharged from the tail gas discharge pipe by blowing the nitrogen to the liquid return pipe, so that the accumulated liquid residue can be effectively reduced, the maintenance period is prolonged, and the production cost is reduced; the liquid return pipe is U-shaped, effectively prevents that the hydrops from flowing out the nitrogen gas pipeline that pollutes the front end from liquid return pipe too much.

Furthermore, the drainage tube and the liquid collection bottle are made of quartz. Effectively prevent the liquid loading processing safety device from polluting the wafer.

Has the advantages that: the utility model discloses a hydrops processing safeties of vertical type deposit boiler tube, the hydrops deposit in the boiler tube is in collecting the liquid annular, and discharge into the collection liquid bottle through the drainage tube from collecting the liquid annular and keep in, when the hydrops in the collection liquid bottle reaches the warning value, the liquid level inductor is reported to the police in time, reminds to empty the maintenance, can effectively reduce the hydrops and remain, avoids corrosive liquids overflow corrosion furnace gate and pipeline, especially prevents to corrode circuit pipeline and stop the potential safety hazard, prolongs the maintenance cycle, reduction in production cost; the utility model discloses a hydrops processing safeties of vertical type deposit boiler tube, simple structure utilizes original structure to be convenient for realize ingeniously, and the cost is lower.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the description below are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.

FIG. 1 is a schematic perspective view of a furnace door and a quartz piece of the liquid loading safety device of the vertical deposition furnace of the present invention;

FIG. 2 is a schematic sectional view of the effusion treatment safety device of the vertical deposition furnace tube of the present invention;

in the figure: 1. drainage tube, 2, liquid collecting bottle, 3, liquid level inductor, 4, liquid return pipe, 5, furnace door, 51, second through-hole, 6, quartz piece, 61, liquid collecting ring groove, 62, first through-hole.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses. Based on the embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative efforts belong to the protection scope of the present invention.

Example 1

As shown in FIG. 1 and FIG. 2, a liquid loading safety device for vertical deposition furnace tube comprises a drainage tube 1, a liquid loading bottle 2 and a liquid level sensor 3, a quartz piece 6 is arranged on a bottom furnace door 5 of the furnace tube, a liquid collecting ring groove 61 is arranged on the upper surface of the quartz piece 6, the liquid collecting ring groove 61 is arranged around the circumference of the quartz piece 6, the original groove of the quartz piece 6 can be used as a liquid collecting ring groove 61, a first through hole 62 is penetrated on the liquid collecting ring groove 61, a second through hole 51 penetrates through the furnace door 5, the drainage tube 1 sequentially penetrates through the first through hole 62 and the second through hole 51, the original hole of the furnace door 5 can be used as a second through hole 51 for passing through the drainage tube 1, the liquid collecting bottle 2 is arranged below the furnace door 5 and the drainage tube 1, the liquid collecting ring groove 61, the drainage tube 1 and the liquid collecting bottle 2 are communicated in sequence, and the liquid level sensor 3 is arranged in the liquid collecting bottle 2.

In order to automatically discharge the accumulated liquid, in this embodiment, the accumulated liquid treatment safety device further includes a liquid return pipe 4, one end of the liquid return pipe 4 is communicated with the bottom end of the liquid collection bottle 2, the liquid return pipe 4 is connected with nitrogen, the nitrogen can be passed through the original standby nitrogen shunt, or another way is added, the drainage pipe 1 is communicated with a tail gas discharge pipe of the furnace pipe, and the nitrogen blows the nitrogen to the liquid return pipe 4, so that the nitrogen carries the accumulated liquid to be discharged from the tail gas discharge pipe, which can effectively reduce the accumulated liquid residue, prolong the maintenance period, and reduce the production cost; liquid return pipe 4 is the U-shaped setting, liquid return pipe 4's the other end is higher than the setting of collecting bottle 2, prevents effectively that the hydrops from flowing out the nitrogen gas pipeline that pollutes the front end from liquid return pipe 4 too much.

In order to avoid the contamination of the effusion processing safety device to the wafer, the drainage tube 1 and the liquid collection bottle 2 of the embodiment are made of quartz.

The working principle is as follows:

the accumulated liquid in the furnace tube is deposited in the liquid collecting ring groove 61 and is discharged into the liquid collecting bottle 2 from the liquid collecting ring groove 61 through the drainage tube 1 for temporary storage, and the liquid return tube 4 is U-shaped, and the other end of the liquid return tube 4 is higher than the liquid collecting bottle 2, so that the accumulated liquid is effectively prevented from flowing out of the liquid return tube 4 to pollute a nitrogen pipeline at the front end, and when the tail gas discharge operation of the furnace tube is carried out, nitrogen can be blown to the liquid return tube 4 at the same time, and the accumulated liquid carried by the nitrogen is discharged from the tail gas discharge tube; when the accumulated liquid in the liquid collecting bottle 2 reaches a warning value, the liquid level sensor 3 gives an alarm in time to remind that nitrogen is required to be blown to the liquid return pipe 4 or the accumulated liquid treatment safety device needs maintenance; if some furnace tubes are allergic to nitrogen blowback and do not allow accumulated liquid to flow back to the furnace tubes, the liquid is collected by the liquid collecting bottle 2, and when a certain amount is reached, the liquid level sensor 3 gives an alarm in time to remind of pouring and maintaining.

It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present application. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise.

Unless specifically stated otherwise, the relative arrangement of parts and steps, numerical expressions, and numerical values set forth in these embodiments do not limit the scope of the present invention. Meanwhile, it should be understood that the sizes of the respective portions shown in the drawings are not drawn in an actual proportional relationship for the convenience of description. Techniques, methods, and apparatus known to those of ordinary skill in the relevant art may not be discussed in detail but are intended to be part of the specification where appropriate. In all examples shown and discussed herein, any particular value should be construed as merely illustrative, and not limiting. Thus, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, further discussion thereof is not required in subsequent figures.

In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the orientation words such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" etc. are usually based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplification of description, and in the case of not making a contrary explanation, these orientation words do not indicate and imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore, should not be interpreted as limiting the scope of the present invention; the terms "inner and outer" refer to the inner and outer relative to the profile of the respective component itself.

Spatially relative terms, such as "above … …", "above … …", "above … …", "above", and the like, may be used herein for ease of description to describe one device or feature's spatial relationship to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if a device in the figures is turned over, devices described as "above" or "on" other devices or configurations would then be oriented "below" or "under" the other devices or configurations. Thus, the exemplary term "above … …" can include both an orientation of "above … …" and "below … …". The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

It should be noted that the terms "first", "second", and the like are used to define the components, and are only used for convenience of distinguishing the corresponding components, and if not stated otherwise, the terms have no special meaning, and therefore, the scope of the present invention should not be construed as being limited.

Above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the design of the present invention, equivalent replacement or change should be covered within the protection scope of the present invention.

Claims (3)

1. The utility model provides a hydrops processing safeties of vertical type deposition furnace tube which characterized in that: including drainage tube (1), liquid collecting bottle (2) and liquid level inductor (3), be provided with quartzy spare (6) on the bottom furnace door (5) of boiler tube, liquid collecting ring groove (61) have been seted up to the upper surface of quartzy spare (6), liquid collecting ring groove (61) are seted up around the circumference of quartzy spare (6), it has first through-hole (62) to run through on liquid collecting ring groove (61), it has second through-hole (51) to run through on furnace door (5), drainage tube (1) passes first through-hole (62) and second through-hole (51) setting in proper order, liquid collecting bottle (2) set up the below at furnace door (5) and drainage tube (1), liquid collecting ring groove (61), drainage tube (1) and liquid collecting bottle (2) communicate in proper order, liquid level inductor (3) set up in liquid collecting bottle (2).

2. The deposition solution processing safety device of claim 1, wherein: this hydrops processing safeties still includes back liquid pipe (4), the one end of returning liquid pipe (4) and the bottom intercommunication of collecting liquid bottle (2), it is the setting of U-shaped to return liquid pipe (4), the other end that returns liquid pipe (4) is higher than collecting liquid bottle (2) and sets up, return liquid pipe (4) and insert nitrogen gas, drainage tube (1) and the tail gas discharge pipe intercommunication of boiler tube.

3. The deposition safety device of claim 1 or 2, wherein: the drainage tube (1) and the liquid collection bottle (2) are made of quartz.

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