CN216426846U - Medicament neutralizing device for electric heating water washing type waste gas treatment equipment - Google Patents
Medicament neutralizing device for electric heating water washing type waste gas treatment equipment Download PDFInfo
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- CN216426846U CN216426846U CN202122413235.1U CN202122413235U CN216426846U CN 216426846 U CN216426846 U CN 216426846U CN 202122413235 U CN202122413235 U CN 202122413235U CN 216426846 U CN216426846 U CN 216426846U
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Abstract
The utility model discloses a medicament neutralization apparatus for electrical heating washing formula exhaust-gas treatment equipment, including pH test probe, pH controller, chemical tank, medicament pump, pH test probe sets up on water tank circulating water pipeline, pH test probe with the pH controller is connected, the pH controller is connected with the PLC controller, the chemical tank passes through chemical pump and medicament pipeline are connected with the water tank, the PLC controller with the chemical pump is connected. The utility model discloses a pH value of liquid in the pH test probe detection water tank, after the pH value of liquid surpassed and set for numerical value, the automatic NaOH medicament that pours into can effectively neutralize the inside acid liquid of water tank, reduces the corruption of water consumption and strong acid liquid to equipment.
Description
Technical Field
The utility model belongs to a combined apparatus for separating particles from gas or steam, in particular to a medicament neutralization device for electric heating water washing type waste gas treatment equipment.
Background
The process waste gas treatment equipment belongs to the environmental protection industry, and also belongs to special high-end intelligent accessory equipment for emerging industries such as semiconductors. In the manufacturing process of integrated circuits, some of the process flow modules (modules) are: chemical Vapor Deposition (CVD), etching (Etch), ion implantation (Implant) and Diffusion (Diffusion), as well as PECVD processes for amorphous silicon thin film solar, liquid crystal TFT-LCD thin films, and the like, all use large amounts of specialty gases. These gases, after they have participated in the process reactions, are discharged in the form of waste gases, which can be classified into: toxic (Toxic), acidic (Acid), basic (Alkali), pyrophoric (Self-ignition), Flammable (Flammable), Corrosive (Caustic/corotive), and Perfluorinated (PFCs) and Volatile Organic Compound (VOC) gases, and the like.
Some of the poisonous and harmful gases originally used as process raw materials or reaction byproducts have the danger of corroding various pipelines, some of the poisonous and harmful gases have the danger of fire explosion when meeting or accumulating high concentration with other hazards, and the poisonous gases cause the poisoning of operating personnel and destroy the atmospheric environment. In the production and manufacturing processes in these fields, a plurality of special gases are used, and the gases are often characterized by high toxicity, flammability, explosiveness and the like. Unreacted special gas is intensively introduced into an exhaust pipeline, and the special gas can be discharged only when the rear end of the pipeline is lower than the national discharge standard after being connected to process gas treatment equipment for treatment.
The electric heating water washing type waste gas treatment equipment can treat waste gas generated in etching (Etch), Diffusion (Diffusion), epitaxy (Epi), ion implantation (implantation), Chemical Vapor Deposition (CVD) and other processes. The water-soluble gas is treated by burning flammable and explosive gas mainly through electric heating and washing, and hydrochloric acid (HCl), hydrogen bromide (HBr) and nitric acid (HNO) are generated in the treatment process3) When the acid liquid is strong, along with the operation of the equipment, hydrochloric acid (HCl), hydrogen bromide (HBr) and nitric acid (HNO) in the water tank3) When the content of the strong acidic liquid is increased, the equipment needs to continuously provide fresh water, so that the water consumption is large and the operation cost is high.
SUMMERY OF THE UTILITY MODEL
The utility model aims at increasing the medicament neutralization apparatus in electrical heating washing formula exhaust-gas treatment equipment, through the pH valve of liquid in the pH test probe detection water tank, after the pH valve of liquid surpassed and set for numerical value, the automatic NaOH medicament of pouring into can effectively neutralize the inside acid liquid of water tank, reduces the water consumption and the corruption of strong acid liquid to equipment.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
the utility model provides a medicament neutralization apparatus for electrical heating washing formula exhaust-gas treatment equipment, includes pH test probe, pH controller, medicament case, medicament pump, pH test probe sets up on water tank circulating water pipeline, pH test probe with the pH controller is connected, the pH controller is connected with the PLC controller, the medicament case passes through medicament pump and medicament pipeline are connected with the water tank, the PLC controller with the medicament pump is connected.
Preferably, a check valve is arranged on the medicament pipeline.
Preferably, a manual valve is arranged on the medicament pipeline.
Preferably, a medicament injection opening is formed in the top of the medicament box and is sealed through a plug.
Preferably, the device further comprises a medicament box bracket, and the medicament box is placed on the medicament box bracket.
Preferably, the medicament box is barrel-shaped or square barrel-shaped.
Compared with the prior art, the beneficial effects of the utility model are that:
1. the utility model discloses can effectively reduce the water consumption, change according to the pH value of liquid in the water tank, automatic injection chemical agent, like the NaOH medicament, reduce equipment running cost.
2. The utility model discloses an it can effectively neutralize the inside acid liquid of water tank to pour into the NaOH medicament into, reduces the corruption of strong acid liquid to equipment.
3. The utility model discloses can also solve the difficult problem that there is not pickling bath to handle acid liquid among colleges and universities and other scientific research institutions research and development processes, utilize the NaOH medicament directly in the equipment water tank with, reduce scientific research cost, satisfy the customer demand.
Drawings
Fig. 1 is a schematic structural diagram of a first embodiment of the present invention;
fig. 2 is a schematic view of an electrically heated water scrubbing type exhaust gas treatment apparatus.
In the figure: 1-pH detection probe; 2-a pH controller; 3-a kit holder; 4-a kit; 5-agent injection port; 6-a medicament pump; 7-a pipeline; 8-pipeline; 9-a one-way valve; 10-a pipeline; 11-manual valve; 12-a water tank; 13-an interface; 14-an air inlet; 15-a ceramic heater; 16-a vortex device; 17-a water washing tower; 18-an air outlet; 19-PLC controller.
Detailed Description
The following embodiments are provided for clear and complete description of the technical solution of the present invention, and it should be noted that the following embodiments are only used for explaining the technical solution of the present invention and should not be interpreted as limiting the present invention.
Example one
Referring to fig. 2, the electric heating water washing type exhaust gas treatment apparatus includes an air inlet 14, a ceramic heater 15, a vortex device 16, a water tank 12, a water washing tower 17, and an air outlet 18, the air inlet 14 is provided on the ceramic heater 15, the ceramic heater 15 is provided on the vortex device 16, the vortex device 16 and the water washing tower 17 are provided on the water tank 12, and the air outlet 18 is provided on an upper portion of the water washing tower 17. Waste gas enters from the gas inlet 14, flows through the ceramic heater 15, the temperature can reach about 1000 ℃, flammable and explosive gas is completely treated, then the flammable and explosive gas sequentially flows through the vortex device 16, the water tank 12 and the washing tower 17, strong acidic liquids such as by-products of hydrochloric acid (HCl), hydrogen bromide (HBr) and nitric acid (HNO3) are generated after three-stage spraying and washing treatment, and the treated gas flows into a plant-end pipeline from the gas outlet 18. The utility model discloses the strong acid accessory substance that produces among the mainly used processing washing process reduces the equipment water consumption and the strong acid corrodes scheduling problem to electric heating washing formula exhaust-gas treatment equipment.
Referring to fig. 1, a medicament neutralization apparatus for electric heating washing formula exhaust-gas treatment equipment, including pH test probe 1, pH controller 2, chemical tank 4, medicament pump 6, pH test probe 1 sets up on water tank circulating water pipeline, and pH test probe 1 is connected with pH controller 2, and pH controller 2 is connected with PLC controller 19, and chemical tank 4 passes through chemical pump 6 and is connected with water tank 12 with the medicament pipeline, and PLC controller 19 is connected with chemical pump 6.
Along with the operation of the electric heating water washing type waste gas treatment equipment, the pH value of liquid in the water tank 12 is gradually reduced, the change of the pH value in the water tank is monitored in real time through the pH detection probe 1, the monitored pH value data is transmitted to the pH controller 2, and the PLC 19 reads the pH value data from the pH controller in real time. When the pH value is less than or equal to 3, the PLC 19 starts the medicament pump 6 to pump out the NaOH medicament in the medicament box 4 and send the NaOH medicament into the water tank 12 through a medicament pipeline, and the NaOH medicament neutralizes the strong acid liquid in the water tank. When the pH value is more than or equal to 8, the PLC controller closes the medicament pump. The medicament neutralization device operates in a circulating way, so that the dosage of fresh water can be effectively reduced, and the problems of corrosion of strong acid liquid to electric heating water washing type waste gas treatment equipment and the like are solved. The medicament lines include line 7, line 8 and line 10. One end of the medicament pipeline is connected with the medicament pump, and the other end of the medicament pipeline is connected with the connector 13 of the water tank.
The agent neutralizing device can be arranged outside the electric heating water washing type waste gas treatment equipment or inside the electric heating water washing type waste gas treatment equipment according to the requirements of customers. Wherein, the medicament box 4 can adopt a barrel shape or a square barrel shape, the top of the medicament box 4 is provided with a medicament injection opening 5, and the medicament injection opening 5 is sealed by a plug, thereby being convenient for the supplement of NaOH medicament and the repeated use.
Referring to fig. 1, preferably, the medicament line is provided with a one-way valve 9. The check valve 9 prevents the reverse flow of the NaOH solution and the inflow of the exhaust gas into the chemical tank.
Referring to fig. 1, preferably, a manual valve 11 is provided on the medicine line. After the electric heating water washing type waste gas treatment equipment is stopped or works abnormally, the medicament pipeline is closed through the manual valve 11.
Referring to fig. 1, it is preferable that a medicine tank holder 3 is further included, and a medicine tank 4 is placed on the medicine tank holder 3.
Fresh water of the existing electric heating water washing type waste gas treatment equipment continuously flows in for 24 hours, circulating water is continuously discharged, the equipment is used for neutralizing the pH value in a water tank, and the fresh water can be replaced once a week or even for a longer time by adding a medicament neutralizing device.
The agent neutralizing device reduces corrosion of strong acid liquid to the electric heating water washing type waste gas treatment equipment, prolongs the service life of the electric heating water washing type waste gas treatment equipment, improves the utilization rate of the electric heating water washing type waste gas treatment equipment, and reduces the operation cost of the electric heating water washing type waste gas treatment equipment.
The strong acid liquid generated by the electric heating water washing type waste gas treatment equipment is directly neutralized in the water tank by using the medicament neutralizing device, so that the discharge of sewage is reduced.
The utility model discloses can also solve the difficult problem that there is not pickling bath to handle acid liquid among colleges and universities and other scientific research institutions research and development processes, utilize the NaOH medicament directly in the equipment water tank with, reduce scientific research cost, expand customer crowd.
The above, only be the embodiment of the preferred of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the design of the present invention, which is omitted, replaced equally or changed, all should be covered within the protection scope of the present invention.
Claims (5)
1. The utility model provides a medicament neutralization apparatus for electric heating washing formula exhaust-gas treatment equipment, a serial communication port, including pH test probe (1), pH controller (2), chemical tank (4), chemical pump (6), pH test probe (1) sets up on water tank circulating water pipeline, pH test probe (1) with pH controller (2) are connected, pH controller (2) are connected with PLC controller (19), chemical tank (4) pass through chemical pump (6) and chemical pipeline are connected with water tank (12), PLC controller (19) with chemical pump (6) are connected, be equipped with check valve (9) on the chemical pipeline.
2. The chemical neutralizing device for an electrically heated water washing type exhaust gas treating apparatus according to claim 1, wherein a manual valve (11) is provided on the chemical line.
3. The chemical neutralizing device for the electrically heated water washing type exhaust gas treating apparatus according to claim 1, wherein a chemical injection port (5) is provided at the top of the chemical tank (4), and the chemical injection port (5) is sealed by a plug.
4. The chemical neutralizing device for the electrically heated water washing type exhaust gas treating apparatus according to claim 1, further comprising a chemical tank bracket (3), wherein the chemical tank (4) is placed on the chemical tank bracket (3).
5. The chemical neutralizing device for electrically heated water washing type exhaust gas treating apparatus according to claim 1, wherein said chemical tank (4) is in the shape of a barrel or a barrel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122413235.1U CN216426846U (en) | 2021-10-08 | 2021-10-08 | Medicament neutralizing device for electric heating water washing type waste gas treatment equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122413235.1U CN216426846U (en) | 2021-10-08 | 2021-10-08 | Medicament neutralizing device for electric heating water washing type waste gas treatment equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216426846U true CN216426846U (en) | 2022-05-03 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122413235.1U Active CN216426846U (en) | 2021-10-08 | 2021-10-08 | Medicament neutralizing device for electric heating water washing type waste gas treatment equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216426846U (en) |
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2021
- 2021-10-08 CN CN202122413235.1U patent/CN216426846U/en active Active
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