CN216387738U

CN216387738U - Photoresist spraying device

Info

Publication number: CN216387738U
Application number: CN202123101370.9U
Authority: CN
Inventors: 杨建勋
Original assignee: DANDONG ANSHUN MICROELECTRONICS CO LTD
Current assignee: DANDONG ANSHUN MICROELECTRONICS CO LTD
Priority date: 2021-12-06
Filing date: 2021-12-06
Publication date: 2022-04-26
Anticipated expiration: 2031-12-06

Abstract

The utility model relates to a photoresist spraying device which comprises a workbench, wherein a placing groove is formed in the upper end face of the workbench, a rotary table is arranged in the placing groove, an L-shaped support is arranged on the upper end face of the workbench, a nozzle is arranged at the other end of the L-shaped support, a main spray pipe and an auxiliary spray pipe are arranged in the nozzle, a glue storage tank and a conveying pump are arranged on one side of the upper end face of the workbench, a conveying pipe is arranged at the output end of the conveying pump, one end of the conveying pipe is communicated with the main spray pipe, an electronic three-way valve is arranged on the conveying pipe, a sliding block is connected to the side wall of the nozzle in a sliding mode, an electric telescopic rod is arranged at the top of the sliding block, a micro servo motor is arranged in the sliding block, a mounting disc is axially fixed at the output end of the micro servo motor, and a sealing plug is arranged on one side of the mounting disc. The design of main spray tube, vice spray tube, electron three-way valve and sealed end cap avoids the photoresist in the nozzle to contact with external environment, avoids the solvent in the photoresist to run off, guarantees to spout gluey quality, avoids the nozzle to block up.

Description

Photoresist spraying device

Technical Field

The utility model relates to the technical field of glue spraying equipment, in particular to a photoresist spraying device.

Background

At present, the existing photoresist spraying equipment has some defects, for example, when the existing photoresist spraying equipment stops spraying the photoresist, the spray head contacts with the external environment, so that the residual solvent in the photoresist in the spray head is reduced, the photoresist in the spray head is easy to crystallize and block the spray head, and the processing and the quality of the sprayed photoresist are influenced.

SUMMERY OF THE UTILITY MODEL

In view of the problems in the prior art, an object of the present invention is to provide a photoresist spraying apparatus to solve the technical problems mentioned in the background art.

In order to solve the above problems, the present invention adopts the following technical solutions.

A photoresist spraying device comprises a workbench, wherein a mounting groove is formed in the upper end face of the workbench, a rotary disc is arranged in the mounting groove, a rotary shaft is arranged on the lower end face of the rotary disc, the rotary shaft is rotatably connected in the mounting groove, a mounting cavity is formed in the workbench, a first servo motor is arranged in the mounting cavity, the output end of the first servo motor is in transmission connection with the bottom end of the rotary shaft through a set transmission, an L-shaped support is arranged on the upper end face of the workbench, one end of the L-shaped support is rotatably connected on the workbench, a nozzle is arranged at the other end of the L-shaped support, a main nozzle and an auxiliary nozzle are arranged in the nozzle, a photoresist storage tank and a conveying pump are arranged on one side of the upper end face of the workbench, the input end of the conveying pump is communicated with the bottom in the photoresist storage tank, a conveying pipe is arranged at the output end of the conveying pump, one end of the conveying pipe is communicated with the main nozzle, and an electronic three-way valve is arranged on the conveying pipe, the input and the auxiliary nozzle intercommunication of electron three-way valve, one of them output and the conveyer pipe intercommunication of electron three-way valve, be provided with the back flow on another output of electron three-way valve, the one end of back flow with deposit the bottom intercommunication in the jar of gluing, sliding connection has the slider on the lateral wall of nozzle, the top of slider is provided with electric telescopic handle, electric telescopic handle's one end is fixed on the nozzle, be provided with miniature servo motor in the slider, miniature servo motor's output axial fixity has the mounting disc, one side of mounting disc is provided with sealed end cap, sealed end cap sets up with the work end cooperation of nozzle.

Preferably, a gear ring is fixed on the outer side of one end of the L-shaped support, a second servo motor is arranged on the upper end face of the workbench, a gear is axially fixed at the top output end of the second servo motor, and the gear is meshed with the gear ring.

In any one of the above embodiments, preferably, a protective cover is provided outside the second servo motor, and the protective cover is bolted to the upper end surface of the table.

Preferably in any one of the above schemes, an access hole is formed in the side wall of the workbench and communicated with the installation cavity, an access cover is connected to the access hole through a bolt, and a buckle is arranged on the access cover.

In any of the above schemes, preferably, the access cover is provided with a heat dissipation through hole, and a heat dissipation fan is arranged on the inner side of the access cover corresponding to the position of the heat dissipation through hole.

It is preferred in any one of the above-mentioned schemes, deposit and be provided with the gliding closing plate of vertical direction in the jar of gluing, the closing plate will deposit the jar of gluing and separate into last air cavity and deposit the sap cavity down, and the up end of depositing the jar of gluing is provided with the air inlet, and air inlet and last air cavity intercommunication are provided with the fluid infusion pipe on depositing the lateral wall of jar of gluing, and the fluid infusion pipe deposits the sap cavity intercommunication down, is provided with the control valve on the fluid infusion pipe.

In any of the above schemes, preferably, a dustproof mesh cloth is arranged in the air inlet.

In any of the above schemes, preferably, the upper end surface of the workbench is provided with a shell, the shell is inserted into the upper end surface of the workbench, the shell is provided with an opening, and the opening is rotatably connected with an operation door leaf.

In any of the above aspects, preferably, a handle is provided on the operating door leaf.

In any of the above schemes, preferably, four corners of the lower end surface of the workbench are respectively provided with a foot pad.

Compared with the prior art, the utility model has the advantages that:

the utility model relates to a design of a main nozzle, an auxiliary nozzle, an electronic three-way valve and a sealing plug, wherein when glue is normally sprayed, the sealing plug can be opened, a conveying pipe is respectively communicated with the main nozzle and the auxiliary nozzle by controlling the electronic three-way valve, glue is sprayed simultaneously through the main nozzle and the auxiliary nozzle, after the glue spraying is finished, the working end of the nozzle can be plugged by the sealing plug, the spraying end of the main nozzle is communicated with the spraying end of the auxiliary nozzle, then the electronic three-way valve is controlled, the other end of the auxiliary nozzle is communicated with a return pipe through the electronic three-way valve, the conveying pipe, the main nozzle, the auxiliary nozzle, the return pipe and a glue storage tank form a loop, photoresist in the glue storage tank is circularly conveyed in the loop through a conveying pump, the photoresist in the nozzle is prevented from contacting with the external environment when the glue spraying is stopped, the loss of a solvent in the photoresist is avoided, the concentration change of the photoresist is reduced, and the crystallization in the photoresist is avoided, the glue spraying quality is ensured, and the nozzle blockage is avoided.

Drawings

FIG. 1 is a schematic diagram of an overall structure of a photoresist spraying apparatus according to the present invention;

fig. 2 is a partially enlarged view of the area a in fig. 1.

The reference numbers in the figures illustrate:

1. a work table; 2. a placing groove; 3. a turntable; 4. a rotating shaft; 5. a mounting cavity; 6. a first servo motor; 7. an L-shaped bracket; 8. a nozzle; 9. a main nozzle; 10. a secondary nozzle; 11. a glue storage tank; 12. a delivery pump; 13. a delivery pipe; 14. an electronic three-way valve; 15. a return pipe; 16. a slider; 17. an electric telescopic rod; 18. a micro servo motor; 19. mounting a disc; 20. sealing the plug; 21. a ring gear; 22. a second servo motor; 23. a gear; 24. a protective cover; 25. an access hole; 26. an access cover; 27. buckling a handle; 28. a heat dissipating through hole; 29. a heat radiation fan; 30. a sealing plate; 31. an upper air inlet cavity; 32. a lower liquid storage cavity; 33. an air inlet; 34. a liquid supplementing pipe; 35. a control valve; 36. dustproof mesh cloth; 37. a housing; 38. an opening; 39. operating the door leaf; 40. a handle; 41. and (5) a foot pad.

Detailed Description

The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention; it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and all other embodiments obtained by those skilled in the art without any inventive work are within the scope of the present invention.

Example (b):

referring to fig. 1 to 2, a photoresist spraying device comprises a workbench 1, wherein a mounting groove 2 is formed on the upper end surface of the workbench 1, a rotary table 3 is arranged in the mounting groove 2, a rotary shaft 4 is arranged on the lower end surface of the rotary table 3, the rotary shaft 4 is rotatably connected in the mounting groove 2, a mounting cavity 5 is arranged in the workbench 1, a first servo motor 6 is arranged in the mounting cavity 5, the output end of the first servo motor 6 is in transmission connection with the bottom end of the rotary shaft 4 through a transmission, an L-shaped bracket 7 is arranged on the upper end surface of the workbench 1, one end of the L-shaped bracket 7 is rotatably connected to the workbench 1, a nozzle 8 is arranged at the other end of the L-shaped bracket 7, a main nozzle 9 and an auxiliary nozzle 10 are arranged in the nozzle 8, a photoresist storage tank 11 and a delivery pump 12 are arranged on one side of the upper end surface of the workbench 1, the input end of the delivery pump 12 is communicated with the bottom of the photoresist storage tank 11, and a delivery pipe 13 is arranged at the output end of the delivery pump 12, one end of the conveying pipe 13 is communicated with the main spray pipe 9, an electronic three-way valve 14 is arranged on the conveying pipe 13, the input end of the electronic three-way valve 14 is communicated with the auxiliary spray pipe 10, one output end of the electronic three-way valve 14 is communicated with the conveying pipe 13, a return pipe 15 is arranged on the other output end of the electronic three-way valve 14, one end of the return pipe 15 is communicated with the bottom in the glue storage tank 11, a sliding block 16 is connected to the side wall of the nozzle 8 in a sliding mode, an electric telescopic rod 17 is arranged at the top of the sliding block 16, one end of the electric telescopic rod 17 is fixed on the nozzle 8, a micro servo motor 18 is arranged in the sliding block 16, a mounting disc 19 is axially fixed at the output end of the micro servo motor 18, a sealing plug 20 is arranged on one side of the mounting disc 19, and the sealing plug 20 is matched with the working end of the nozzle 8.

In the embodiment, a gear ring 21 is fixed on the outer side of one end of the L-shaped bracket 7, a second servo motor 22 is arranged on the upper end surface of the workbench 1, a gear 23 is axially fixed on the top output end of the second servo motor 22, and the gear 23 is meshed with the gear ring 21; and a protective cover 24 is arranged on the outer side of the second servo motor 22, and the protective cover 24 is connected to the upper end face of the workbench 1 through bolts. The design of second servo motor 22, the automatic rotation of realization L type support 7 of accessible second servo motor 22, it is more laborsaving convenient.

In this embodiment, be provided with access hole 25 on the lateral wall of workstation 1, access hole 25 with installation cavity 5 intercommunication, bolted connection has access cover 26 on access hole 25, is provided with attacker 27 on access cover 26. The design of access hole 25 can conveniently overhaul each equipment in installation cavity 5, guarantees the normal use of each equipment in installation cavity 5.

In this embodiment, the access cover 26 is provided with a heat dissipating through hole 28, and a heat dissipating fan 29 is provided on the inner side of the access cover 26 at a position corresponding to the heat dissipating through hole 28. The design of the heat dissipating through holes 28 and the heat dissipating fan 29 can ensure normal operating temperature in the installation cavity 5 and prevent over-high temperature in the installation cavity 5.

In this embodiment, a sealing plate 30 which can slide along a vertical direction is arranged in the glue storage tank 11, the sealing plate 30 divides the glue storage tank 11 into an upper air inlet cavity 31 and a lower liquid storage cavity 32, an air inlet 33 is arranged on the upper end surface of the glue storage tank 11, the air inlet 33 is communicated with the upper air inlet cavity 31, a liquid replenishing pipe 34 is arranged on the side wall of the glue storage tank 11, the liquid replenishing pipe 34 is communicated with the lower liquid storage cavity 32, and a control valve 35 is arranged on the liquid replenishing pipe 34; and a dustproof mesh cloth 36 is arranged in the air inlet 33. Through the design, the contact between the photoresist in the photoresist storage tank 11 and the air in the external environment can be avoided, and the crystallization of the photoresist in the photoresist storage tank 11 is prevented.

In this embodiment, a housing 37 is disposed on an upper end surface of the workbench 1, the housing 37 is inserted into the upper end surface of the workbench 1, an opening 38 is disposed on the housing 37, and an operation door leaf 39 is rotatably connected to the opening 38; a handle 40 is provided on the operating door leaf 39. The design of the housing 37 avoids the effects of external light and other adverse factors on the machining area.

In this embodiment, four corners of the lower end surface of the working table 1 are respectively provided with a foot pad 41. The foot pad 41 is designed to prevent the lower end surface of the worktable 1 from directly contacting with the supporting object to cause abrasion.

The working process of the utility model is as follows:

an operator can inject photoresist into the lower liquid storage cavity 32, then an external controller and a power supply are connected, an operation door leaf 39 is opened, a component to be processed is placed on the rotary disc 3, then the operation door leaf 39 is closed, the first servo motor 6 and the delivery pump 12 are opened, the rotary disc 3 drives the component to be processed to rotate, then the delivery pump 12 is opened to deliver the photoresist in the photoresist storage tank 11 to the main spray pipe 9 and the auxiliary spray pipe 10 through the delivery pipe 13, the photoresist is sprayed onto the component to be processed through the nozzle 8, after the photoresist spraying is finished, the electric telescopic rod 17 is started, the electric telescopic rod 17 is extended and then the micro servo motor 18 is started, the micro servo motor 18 rotates the sealing plug 20 to the lower part of the nozzle 8, then the electric telescopic rod 17 is reset, the sealing plug 20 is plugged on the nozzle 8, and the spraying end of the main spray pipe 9 is communicated with the spraying end of the auxiliary spray pipe 10, then, the electronic three-way valve 14 is controlled to communicate the other end of the auxiliary nozzle 10 with the return pipe 15 through the electronic three-way valve 14, so that the delivery pipe 13, the main nozzle 9, the auxiliary nozzle 10, the return pipe 15 and the glue storage tank 11 form a loop, and the photoresist in the glue storage tank 11 is circulated and delivered in the loop through the delivery pump 12. The main spray pipe 9, the auxiliary spray pipe 10, the electronic three-way valve 14 and the sealing plug 20 are designed, when the glue is normally sprayed, the sealing plug 20 can be opened, the conveying pipe 13 is respectively communicated with the main spray pipe 9 and the auxiliary spray pipe 10 by controlling the electronic three-way valve 14, the glue is sprayed simultaneously through the main spray pipe 9 and the auxiliary spray pipe 10, after the glue spraying is finished, the working end of the nozzle 8 can be plugged by the sealing plug 20, the spraying end of the main spray pipe 9 is communicated with the spraying end of the auxiliary spray pipe 10, then the electronic three-way valve 14 is controlled, the other end of the auxiliary spray pipe 10 is communicated with the return pipe 15 through the electronic three-way valve 14, the conveying pipe 13, the main spray pipe 9, the auxiliary spray pipe 10, the return pipe 15 and the glue storage tank 11 form a loop, the photoresist in the glue storage tank 11 is circularly conveyed in the loop through the conveying pump 12, when the glue spraying is stopped, the photoresist in the nozzle 8 is contacted with the external environment, the solvent in the photoresist is prevented from being lost, the concentration change of the photoresist is reduced, the crystallization in the photoresist is avoided, the photoresist spraying quality is ensured, and the blockage of the nozzle 8 is avoided.

The foregoing is only a preferred embodiment of the present invention; the scope of the utility model is not limited thereto. Any person skilled in the art should be able to cover the technical scope of the present invention by equivalent or modified solutions and modifications within the technical scope of the present invention.

Claims

1. The utility model provides a photoresist spraying device, includes the workstation, its characterized in that: the upper end surface of the workbench is provided with a placing groove, a turntable is arranged in the placing groove, the lower end surface of the turntable is provided with a rotating shaft, the rotating shaft is rotatably connected in the placing groove, a mounting cavity is arranged in the workbench, a first servo motor is arranged in the mounting cavity, the output end of the first servo motor is in transmission connection with the bottom end of the rotating shaft through an arranged speed changer, the upper end surface of the workbench is provided with an L-shaped support, one end of the L-shaped support is rotatably connected on the workbench, the other end of the L-shaped support is provided with a nozzle, a main nozzle and an auxiliary nozzle are arranged in the nozzle, one side of the upper end surface of the workbench is provided with a glue storage tank and a delivery pump, the input end of the delivery pump is communicated with the bottom in the glue storage tank, the output end of the delivery pump is provided with a delivery pipe, one end of the delivery pipe is communicated with the main nozzle, an electronic three-way valve is arranged on the delivery pipe, and the input end of the electronic three-way valve is communicated with the auxiliary nozzle, one of them output and the conveyer pipe intercommunication of electron three-way valve, be provided with the back flow on another output of electron three-way valve, the one end of back flow with deposit the bottom intercommunication in the jar of gluing, sliding connection has the slider on the lateral wall of nozzle, the top of slider is provided with electric telescopic handle, electric telescopic handle's one end is fixed on the nozzle, be provided with miniature servo motor in the slider, miniature servo motor's output axial fixity has the mounting disc, one side of mounting disc is provided with sealed end cap, sealed end cap sets up with the work end cooperation of nozzle.

2. The photoresist spraying apparatus according to claim 1, wherein: a gear ring is fixed on the outer side of one end of the L-shaped support, a second servo motor is arranged on the upper end face of the workbench, a gear is axially fixed at the top output end of the second servo motor, and the gear is meshed with the gear ring.

3. The photoresist spraying apparatus according to claim 2, wherein: the outside of second servo motor is provided with the safety cover, and safety cover bolted connection is in the up end of workstation.

4. The photoresist spraying apparatus according to claim 1, wherein: be provided with the access hole on the lateral wall of workstation, the access hole with the installation cavity intercommunication, bolted connection has the access cover on the access hole, and the access is covered and is provided with the attacker.

5. The photoresist spraying apparatus according to claim 4, wherein: the maintenance cover is provided with a heat dissipation through hole, and a heat dissipation fan is arranged on the inner side of the maintenance cover corresponding to the position of the heat dissipation through hole.

6. The photoresist spraying apparatus according to claim 1, wherein: deposit and be provided with the gliding closing plate of vertical direction in the jar of gluing, the closing plate will deposit the jar of gluing and separate into last air cavity and deposit the liquid chamber down, and the up end of depositing the jar of gluing is provided with the air inlet, and air inlet and last air cavity intercommunication are provided with the fluid infusion pipe on depositing the lateral wall of jar of gluing, and the fluid infusion pipe deposits liquid chamber intercommunication down with, is provided with the control valve on the fluid infusion pipe.

7. The photoresist spraying apparatus according to claim 6, wherein: and a dustproof mesh cloth is arranged in the air inlet.

8. The photoresist spraying apparatus according to claim 1, wherein: the upper end face of workstation is provided with the shell, and the shell is pegged graft the up end of workstation is provided with the opening on the shell, rotates on the opening and is connected with the operation door leaf.

9. The photoresist spraying apparatus according to claim 8, wherein: and a handle is arranged on the operating door leaf.

10. The photoresist spraying apparatus according to claim 1, wherein: four corners of the lower end face of the workbench are respectively provided with a foot pad.