CN216387438U - Combined micro-lens array light uniformizing structure and lens and equipment provided with same - Google Patents
Combined micro-lens array light uniformizing structure and lens and equipment provided with same Download PDFInfo
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- CN216387438U CN216387438U CN202122441206.6U CN202122441206U CN216387438U CN 216387438 U CN216387438 U CN 216387438U CN 202122441206 U CN202122441206 U CN 202122441206U CN 216387438 U CN216387438 U CN 216387438U
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Abstract
The utility model discloses a combined micro-lens array dodging structure, a lens provided with the structure and equipment, wherein the dodging structure comprises a first lens group and a second lens group; the first lens group comprises a substrate layer and a micro-lens array formed on one side surface of the substrate layer, a plurality of micro-lenses are arranged in a staggered mode to form the micro-lens array, and the micro-lenses are arranged at intervals; the second lens group comprises a biconvex lens, and the first lens group and the second lens group are oppositely arranged side by side. The light homogenizing structure disclosed by the utility model can lead the light emitted by the dot matrix light source to be converged and then diverged after passing through the micro lens array through the matching of the micro lens array and the double convex lens, thereby reducing the light-emitting aperture under the condition of ensuring a larger field angle.
Description
Technical Field
The utility model relates to the field of three-dimensional sensing, in particular to a combined micro-lens array light uniformizing structure with a larger field angle and a smaller light emitting aperture, and a lens and equipment provided with the structure.
Background
The ITOF (indirect time of flight) technique can perform three-dimensional sensing and distance measurement. The optical portion of ITOF is mainly divided into three parts: the device comprises a laser array light source, a dodging structure and an ITOF lens. The ITOF is used for emitting a light spot of a specific light field to the surface of an object through an ITOF light emitting module, and then the ITOF detector senses depth information of the object at different positions by identifying phase change of the light field reflected back to the detector.
At present, the ITOF needs to meet the trend of miniaturization of electronic equipment, and the microlens dodging structure as an important component in the ITOF light-emitting module also needs to meet the trend of miniaturization.
After protective glass is added to the existing ITOF dodging structure, if a larger field angle is to be achieved, the light-emitting aperture needs to be more than 5mm to enable all light to be emitted from the light-emitting aperture, and if the light-emitting aperture is less than 5mm, a large amount of reflected stray light is brought.
Therefore, a new technical solution is needed to solve the above problems.
SUMMERY OF THE UTILITY MODEL
In the existing uniform light device in the ITOF technology, after the light exit aperture is reduced, the field angle is also greatly reduced, which results in the reduction of the range of the perceived depth information. In order to solve the above problems, the present invention provides a combined microlens array light uniformizing structure, which has the following specific technical scheme:
a combined microlens array dodging structure comprises a first lens group and a second lens group; the first lens group comprises a substrate layer and a micro-lens array formed on one side surface of the substrate layer, a plurality of micro-lenses are arranged in a staggered mode to form the micro-lens array, and the micro-lenses are arranged at intervals; the second lens group includes a biconvex lens; the first lens group and the second lens group are arranged oppositely and side by side.
In a further aspect of the foregoing technical solution, the lenticular lens is close to the surface of the other side of the substrate layer, and the lenticular lens and the microlens array are respectively disposed on two sides of the substrate layer in an opposite manner.
Further, the lenticular lens is close to the microlens array, and the lenticular lens and the microlens array are disposed on the same side of the substrate layer.
Furthermore, the optical surface shapes of a plurality of micro lenses forming the micro lens array comprise deformed aspheric surface shapes.
Further, the second lens group includes a biconvex lens, the biconvex lens has two outer convex surfaces disposed oppositely, and the optical surface types of the two outer convex surfaces are anamorphic aspheric surface types.
Further, the range of the curvature radius of a plurality of microlenses constituting the microlens array in the lateral coordinate direction is 10 μm to 300 μm, the range of the curvature radius in the longitudinal coordinate direction is 10 μm to 300 μm, and the range of the conic coefficient of the microlenses is-0.95 to-8.
Furthermore, the curvature radius of a plurality of micro lenses forming the micro lens array ranges from 8 micrometers to 360 micrometers.
Further, one of the outer convex surfaces of the lenticular lens is a front convex surface close to the substrate layer, and the other of the outer convex surfaces of the lenticular lens is a rear convex surface away from the substrate layer.
Further, the radius of curvature of the front convex surface in the lateral coordinate direction ranges from 200 μm to 700 μm, the radius of curvature in the longitudinal coordinate direction ranges from 200 μm to 700 μm, and the conic coefficient of the front convex surface ranges from-1 to-8.
Further, the curvature radius of the rear convex surface in the lateral coordinate direction ranges from 5 μm to 500 μm, the curvature radius in the longitudinal coordinate direction ranges from 5 μm to 500 μm, and the conic coefficient of the rear convex surface ranges from-1 to-8.
Furthermore, the refractive index range of the micro lens array is 1.5-1.8.
Furthermore, the refractive index range of the biconvex lens is 1.5-1.8.
Further, the substrate layer is a light-transmitting glass substrate.
Further, a plurality of microlenses are arranged in a staggered manner to form the microlens array, and the microlens array specifically comprises:
after a plurality of micro lenses are arranged in a dot matrix manner, each micro lens is randomly arranged in a staggered manner within a preset distance range along the transverse direction and/or the longitudinal direction;
after the plurality of microlenses are arranged in a dot matrix manner, the distance range of the lens center points of two adjacent combined microlenses is 5-60 mu m;
the preset distance range is n times of the distance between the lens center points of two adjacent combined microlenses, and the value range of n is 8-20%.
Based on the combined microlens array light uniformizing structure, the utility model also provides an ITOF lens, which comprises the combined microlens array light uniformizing structure, wherein the combined microlens array light uniformizing structure is provided with a microlens array, and an air layer with the thickness ranging from 0.1mm to 0.5mm is arranged between the microlens array and a laser array light source.
Based on the combined microlens array dodging structure, the utility model further provides equipment provided with the ITOF lens, which comprises the ITOF lens, and the combined microlens array dodging structure is mounted on the ITOF lens.
Compared with the prior art, the utility model has one or more of the following beneficial effects:
1. the utility model provides a combined microlens array dodging structure, which comprises a first lens group and a second lens group which are oppositely arranged, wherein the first lens group comprises a microlens array, the second lens group comprises a biconvex lens, the microlens array plays a role in limiting the shape of light spots and destroying a light source image of a dot matrix light source, and the biconvex lens plays a role in forming a larger field angle and forming expected light field distribution.
2. The combined microlens array light homogenizing structure provided by the utility model can control the formed light field distribution by adjusting the microlens surface type parameters and the biconvex lens surface type parameters in the microlens array, so that coherent light emitted by array laser forms an expected light field pattern; the light-emitting aperture of the light homogenizing structure can be reduced through the combination of the micro lens array and the double convex lens, so that the miniaturization requirement of the existing electronic product is met, the interference phenomenon caused by array laser is eliminated through the randomly arranged micro lens array, and the light emitted by the laser array can reach a larger divergence angle after passing through the micro lens array and the double convex lens.
3. The light homogenizing structure provided by the utility model can better eliminate array light source images and interference fringes by combining the micro lens array and the double convex lens, experiments prove that the divergence angle of the light homogenizing structure to light source beams is more than 90 degrees, and the size of the light outlet aperture is less than 2.5mm if the light outlet aperture is arranged at a position 1.05mm away from the rear convex surface of the double convex lens of the light homogenizing structure, compared with the phenomenon that a large amount of reflected stray light is caused when the light outlet aperture is less than 5mm in the prior art, the light outlet aperture is reduced and the diffusion angle is enlarged by the light homogenizing structure provided by the utility model, and the defects in the prior art are overcome.
4. Compared with the manufacturing method in the prior art, the manufacturing method of the combined microlens array dodging structure reduces the processing difficulty of the microlens dodging structure, and increases adjustable parameters to enable the light field distribution of expected light spots to be achieved more easily.
5. In the combined microlens array dodging structure, faults do not exist between every two adjacent microlenses in the microlenses forming the microlens array of the first lens group, the two adjacent microlenses are in smooth transition, and the imprinting difficulty is reduced.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
FIG. 1 is a schematic structural diagram of a light uniformizing structure of a combined micro-lens array according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of the mounting position of the combined microlens array structure and laser array light source according to the present invention in one embodiment;
FIG. 3 is a surface structure view of the microlens array shown in FIG. 2;
FIG. 4 is a ray path diagram of the combined microlens array structure of FIG. 2;
FIG. 5 is a diagram illustrating a far field emergent light field distribution of the light homogenizing structure of the combined micro-lens array shown in FIG. 2;
FIG. 6 is a schematic view of the light exit aperture at a distance of 1.05mm from the back convex surface of the biconvex lens in the light uniformizing structure of the combined microlens array shown in FIG. 2;
FIG. 7 is a schematic view of the mounting position of the combined micro-lens array structure and the laser array light source according to another embodiment of the present invention;
FIG. 8 is a surface structure view of the microlens array shown in FIG. 7;
FIG. 9 is a ray path diagram of the combined microlens array structure of FIG. 7;
FIG. 10 is a diagram illustrating a far field emergent light field distribution of the light homogenizing structure of the combined micro-lens array shown in FIG. 7;
FIG. 11 is a schematic view of the light exit aperture at a distance of 1.05mm from the back convex surface of the biconvex lens in the light uniformizing structure of the combined microlens array shown in FIG. 7;
FIG. 12 is a schematic view of the mounting position of the combined microlens array structure and laser array light source according to the present invention in yet another embodiment;
FIG. 13 is a surface structure view of the microlens array shown in FIG. 12;
FIG. 14 is a ray path diagram of the combined microlens array structure of FIG. 12;
FIG. 15 is a diagram illustrating a far field emergent light field distribution of the light homogenizing structure of the combined micro-lens array shown in FIG. 12;
FIG. 16 is a schematic view of the light exit aperture at a distance of 1.05mm from the back convex surface of the biconvex lens in the light uniformizing structure of the combined microlens array shown in FIG. 12;
FIG. 17 is a schematic view of the mounting position of the combined microlens array structure and laser array light source of the present invention in one embodiment;
FIG. 18 is a surface structure view of the microlens array shown in FIG. 17;
FIG. 19 is a ray path diagram of the combined microlens array structure of FIG. 17;
FIG. 20 is a diagram illustrating a far field emergent light field distribution of the light homogenizing structure of the combined micro-lens array shown in FIG. 17;
FIG. 21 is a schematic view of the light exit aperture at a distance of 1.05mm from the back convex surface of the biconvex lens in the light uniformizing structure of the combined microlens array shown in FIG. 17
FIG. 22 is a flow chart illustrating a master for making a composite microlens array light uniformizing structure in accordance with the present invention in one embodiment;
FIG. 23 is a flow chart of fabricating a light uniformizing structure for a combined micro-lens array according to the present invention in one embodiment.
Detailed Description
The technical solutions of the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings of the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The gist of the present invention will be further explained below with reference to the accompanying drawings and examples.
Example 1
The utility model provides a combined microlens array dodging structure, which comprises a first lens group and a second lens group which are oppositely arranged, wherein the first lens group comprises a microlens array, the second lens group comprises a biconvex lens, the microlens array plays a role in limiting the shape of light spots and destroying a light source image of a dot matrix light source, and the biconvex lens plays a role in forming a larger field angle and forming expected light field distribution.
Referring to fig. 1, fig. 1 schematically shows a combined microlens array dodging structure. The lens comprises a 100-combined microlens array dodging structure, 110-a first lens group, 111-a substrate layer, 112-a microlens array, 120-a second lens group, 121-a front convex surface and 122-a rear convex surface.
In one embodiment, a combined microlens array dodging structure according to the present invention may include a first lens group 110 and a second lens group 120, which are disposed side by side. With continued reference to fig. 1, the first lens group 110 includes a substrate layer 111, and a microlens array 112 formed on one surface of the substrate layer 111, the microlens array 112 including a plurality of microlenses, a plurality of the microlenses being arranged without a space. The second lens group 120 may be a biconvex lens including two outer convex surfaces disposed opposite to each other: a front convex surface 121 adjacent the base layer and a rear convex surface 122 facing away from the base layer. A schematic cross-sectional structure diagram of a light uniformizing structure of a combined micro-lens array in one embodiment is schematically shown in FIG. 1. The combined microlens array light uniformizing structure in fig. 1 is formed by combining two lens groups arranged oppositely side by side, in a specific application scene, a microlens array of a first lens group faces a laser array light source, light rays emitted from the laser array light source sequentially pass through the microlens array of the first lens group, a basal layer and a biconvex lens serving as a second lens group, and the light rays are diverged and emitted from an outer convex surface of the biconvex lens, which is far away from the basal layer. The light is limited in spot shape after passing through the micro-lens array and is damaged in the light source image of the light source, and the light is diffused to form a larger field angle after passing through the double convex lens to form expected light field distribution.
The combined microlens array light homogenizing structure provided by the utility model can control the formed light field distribution by adjusting the microlens surface type parameters and the biconvex lens surface type parameters in the microlens array, so that coherent light emitted by array laser forms an expected light field pattern; the light-emitting aperture of the light homogenizing structure can be reduced through the combination of the micro lens array and the double convex lens, so that the miniaturization requirement of the existing electronic product is met, the interference phenomenon caused by array laser is eliminated through the randomly arranged micro lens array, and the light emitted by the laser array can reach a larger divergence angle after passing through the micro lens array and the double convex lens.
The combined microlens array light homogenizing structure can be directly simplified and is formed by a microlens array and a biconvex lens, wherein the microlenses forming the microlens array are formed by deformed aspheric microlenses, and two outer convex surfaces of the biconvex lens are formed by double-sided deformed aspheric surfaces. In one embodiment, the reference formula for the anamorphic aspherical surface profile is as follows:
wherein Z is the rise of the microlens, CxIs the curvature of the microlens in the X direction, CyIs the curvature of the microlens in the y-direction, A2nAnd B2nThe aspheric coefficients of the deformed aspheric surfaces.
In a preferred embodiment, the microlenses making up the microlens array have a radius of curvature in the X direction of from 10 microns to 300 microns, a conic index of from-0.95 to-8; the radius of curvature in the Y direction is 10 to 300 microns, and the cone coefficient is-0.95 to-8.
In one embodiment, the optical surface of the biconvex lens is an anamorphic aspheric surface, and the reference formula of the anamorphic aspheric surface is as follows:
wherein Z is the rise of the outer convex surface of the biconvex lens, CxIs the curvature of the outer convex surface of the lenticular lens in the X direction, CyThe curvature of the outer convex surface of the biconvex lens in the y direction, A2nAnd B2nThe aspheric coefficients of the deformed aspheric surfaces.
Referring to fig. 1, the biconvex lens (the second lens group) of the present invention has two outer convex surfaces disposed opposite to each other, both of the optical surface types of the two outer convex surfaces are anamorphic aspheric surface types, one of the outer convex surfaces of the biconvex lens is a front convex surface 121 close to the substrate layer 111, and the other of the outer convex surfaces of the biconvex lens is a rear convex surface 122 away from the substrate layer 111.
In a preferred embodiment, the front convex surface 121 of the lenticular lens has a radius of curvature in the X direction of 200 to 700 μm, a conic index of-1 to-8; the curvature radius in the Y direction is 200 to 700 microns, and the cone coefficient is-1 to-8; the curvature radius of the rear convex surface 122 of the biconvex lens in the X direction is 5 micrometers to 500 micrometers, and the cone coefficient is-1 to-8; the radius of curvature in the Y direction is from 5 microns to 500 microns and the cone coefficient is from-1 to-8.
In one embodiment, the preferred microlens array of the present invention has a material refractive index in the range of 1.5 to 1.8 and the lenticular lens has a material refractive index in the range of 1.5 to 1.8.
In one embodiment, the number of microlenses in the microlens array of the first lens group of the present invention follows the following random arrangement rule:
firstly, a plurality of microlenses are arrayed, the distance between the central points of two adjacent combined microlenses is marked as L after the arrayed arrangement, each microlens is respectively displaced by n X L on an X axis and a Y axis by taking the respective central point after the arrayed arrangement as an initial point so as to complete the random arrangement of each microlens, and then the randomly arranged microlenses are subjected to union processing to obtain a randomly arranged microlens array. Wherein n ranges from 8% to 20%, and L ranges from 5 micrometers to 60 micrometers.
In an embodiment, the array arrangement of the microlenses may be a dot array arrangement, or a matrix, or other dot arrays (in this step, a specific regular arrangement is performed, the distance between the lens center points of two adjacent microlenses after the dot array arrangement is L, the value range of L is 5 to 60 micrometers), after the dot array arrangement of a plurality of microlenses, each microlens is randomly staggered in a preset distance range along the transverse direction and/or the longitudinal direction (each microlens is shifted by n × L along the X axis and the Y axis with the respective center point after the array arrangement as an initial point), the staggered microlenses form a continuous surface after the previous spacing process, the previous spacing process may be performed by merging the microlenses with a coincident portion between the merged microlenses to remove the coincident portion, the multiple micro lenses are ensured to be positioned on the same horizontal plane and form a continuous plane.
In one embodiment, the area-type random arrangement of the plurality of microlenses constituting the microlens array of the present invention follows the following random arrangement rule: firstly, a mother lens array which can enable the whole module to reach the target light field distribution is determined, the surface type of the micro lens of the mother lens array is determined, other surface type parameters are unchanged, the curvature radius of the micro lens in the mother lens array is used as the initial curvature radius R, the curvature radius of the random micro lens is generated to be N R, and therefore the surface type parameters of the micro lens used for manufacturing the micro lens array are determined. As a preferred embodiment, the range of R is 10 to 300 microns, and the range of N is 80 to 120%.
The light homogenizing structure provided by the utility model can better eliminate array light source images and interference fringes by combining the micro lens array and the double convex lens, experiments prove that the divergence angle of the light homogenizing structure to light source beams is more than 90 degrees, and the size of the light outlet aperture is less than 2.5mm if the light outlet aperture is arranged at a position 1.05mm away from the rear convex surface of the double convex lens of the light homogenizing structure, compared with the phenomenon that a large amount of reflected stray light is caused when the light outlet aperture is less than 5mm in the prior art, the light outlet aperture is reduced and the diffusion angle is enlarged by the light homogenizing structure provided by the utility model, and the defects in the prior art are overcome.
Example 2
The present embodiment provides a combined microlens array dodging structure, and with reference to fig. 2 to 6, fig. 2 is a schematic view illustrating an installation position of the combined microlens array structure and a laser array light source according to an embodiment of the present invention; FIG. 3 is a surface structure view of the microlens array shown in FIG. 2; FIG. 4 is a ray path diagram of the combined microlens array structure of FIG. 2; FIG. 5 is a diagram illustrating a far field emergent light field distribution of the light homogenizing structure of the combined micro-lens array shown in FIG. 2; fig. 6 is a schematic diagram of the light exit aperture at a distance of 1.05mm from the back convex surface of the biconvex lens in the combined microlens array light uniformizing structure shown in fig. 2.
The optical lens comprises a 100-combined microlens array dodging structure, 110-a first lens group, 111-a substrate layer, 112-a microlens array, 120-a second lens group, 121-a front convex surface, 122-a rear convex surface and 130-a laser array light source.
In this embodiment, the combined microlens array dodging structure of the present invention includes a first lens group 110 and a second lens group 120 disposed side by side, where the first lens group 110 includes a microlens array 112, and the second lens group 120 includes a biconvex lens. The refractive indexes of the microlens array and the biconvex lens are both 1.52, and with reference to fig. 2 to 6, the initial distance between two adjacent microlenses in the microlens array is 10 micrometers, the optical surface type of the microlens is a deformed aspheric surface, the curvature radius in the X direction is 33 micrometers, the cone coefficient is-1.5, the curvature radius in the Y direction is 33 micrometers, the cone coefficient is-1.5, the double-sided surface type of the biconvex lens is a deformed aspheric surface, the curvature radius in the X direction close to the microlens array surface (front convex surface 121) is 476 micrometers, the cone coefficient is-2.5, the curvature radius in the Y direction is 476 micrometers, the cone coefficient is-2.5, the curvature radius in the X direction away from the microlens array surface (rear convex surface 122) is 50 micrometers, the cone coefficient is-3.8, the curvature radius in the Y direction is 50 micrometers, and the cone coefficient is-4.55.
In the embodiment, the light spot formed after the light passes through the dodging microlens array reaches a peak value at 56 degrees in the X direction, the peak energy is 120% of the central energy, the peak energy is 121% of the central energy at 48 degrees in the Y direction, the energy is reduced to 80% of the central energy at 68 degrees in the X direction, and the field angle is 92 ° when the energy is reduced to 0; the energy of 56 degrees in the Y direction is reduced to 80% of the central energy, and the field angle is 72 degrees when the energy is reduced to 0; the light-emitting aperture of 1.05mm away from the rear surface of the lens in the microlens array and the double-convex lens light homogenizing module is 2.4 mm. (FIG. 5 shows projected spots obtained in one embodiment, where the spot linear quantities are converted into angular quantities, and the gray scale values at the angular quantities are analyzed to obtain the energy peak information described in this embodiment).
Example 3
In this embodiment, a combined microlens array dodging structure is provided, and with reference to fig. 7 to 11, fig. 7 is a schematic view illustrating an installation position of a combined microlens array structure and a laser array light source according to another embodiment of the present invention; FIG. 8 is a surface structure view of the microlens array shown in FIG. 7;
FIG. 9 is a ray path diagram of the combined microlens array structure of FIG. 7; FIG. 10 is a diagram illustrating a far field emergent light field distribution of the light homogenizing structure of the combined micro-lens array shown in FIG. 7; fig. 11 is a schematic view of the light exit aperture at a distance of 1.05mm from the back convex surface of the biconvex lens in the light uniformizing structure of the combined microlens array shown in fig. 7.
The light source comprises a 200-combined microlens array dodging structure, a 210-first lens group, a 211-substrate layer, a 212-microlens array, a 220-second lens group, a 221-front convex surface, a 222-rear convex surface and a 230-laser array light source.
In this embodiment, the combined microlens array dodging structure of the present invention includes a first lens group 210 and a second lens group 220 arranged side by side, where the first lens group 210 includes a microlens array 212, and the second lens group 220 includes a biconvex lens. In this embodiment, the refractive indexes of the microlens array and the lenticular lens are both 1.52, and with reference to fig. 7 to 11, the initial distance between two adjacent microlenses in the microlens array is 10 micrometers, the optical surface of each microlens is a deformed aspheric surface, the radius of curvature in the X direction is 33 micrometers, the cone coefficient is-1.5, the radius of curvature in the Y direction is 33 micrometers, the cone coefficient is-1.5, the double-sided surface of the lenticular lens is a deformed aspheric surface, the radius of curvature in the X direction near the microlens array surface is 476 micrometers, the cone coefficient is-2.5, the radius of curvature in the Y direction is 476 micrometers, the cone coefficient is-2.5, the radius of curvature in the X direction far from the microlens array surface is 50 micrometers, the cone coefficient is-6, the radius of curvature in the Y direction is 50 micrometers, and the cone coefficient is-7.
In the embodiment, the light spot formed after the light passes through the dodging microlens array reaches a peak value at 48 degrees in the X direction, the peak energy is 163% of the central energy, the peak energy reaches a peak value at 38 degrees in the Y direction, the peak energy is 140% of the central energy, the energy in the X direction is reduced to 80% of the central energy at 58 degrees, and the field angle is 76 ° when the energy is reduced to 0; the energy is reduced to 80% of the central energy at 47 degrees in the Y direction, and the field angle is 60 degrees when the energy is reduced to 0; the light-emitting aperture of 1.05mm away from the rear surface of the lens in the microlens array and the double-convex lens light homogenizing module is 2 mm.
Example 4
This embodiment provides a combined microlens array dodging structure, and with reference to fig. 12 to 16, fig. 12 is a schematic view illustrating an installation position of a combined microlens array structure and a laser array light source according to another embodiment of the present invention; FIG. 13 is a surface structure view of the microlens array shown in FIG. 12; FIG. 14 is a ray path diagram of the combined microlens array structure of FIG. 12; FIG. 15 is a diagram illustrating a far field emergent light field distribution of the light homogenizing structure of the combined micro-lens array shown in FIG. 12; fig. 16 is a schematic view of the light exit aperture at a distance of 1.05mm from the back convex surface of the biconvex lens in the light uniformizing structure of the combined microlens array shown in fig. 12.
The light source comprises a 300-combined microlens array dodging structure, 310-a first lens group, 311-a substrate layer, 312-a microlens array, 320-a second lens group, 321-a front convex surface, 322-a rear convex surface and 330-a laser array light source.
In this embodiment, the combined microlens array dodging structure of the present invention includes a first lens group 310 and a second lens group 320 disposed side by side, where the first lens group 310 includes a microlens array 312, and the second lens group 320 includes a biconvex lens. In this embodiment, the refractive indexes of the microlens array and the lenticular lens are both 1.52, and with reference to fig. 12 to 16, the initial distance between two adjacent microlenses in the microlens array is 10 micrometers, the optical surface of each microlens is an anamorphic aspheric surface, the radius of curvature in the X direction is 33 micrometers, the cone coefficient is-1.5, the radius of curvature in the Y direction is 33 micrometers, the cone coefficient is-1.5, the double-sided surface of the lenticular lens is an anamorphic aspheric surface, the radius of curvature in the X direction near the microlens array surface is 476 micrometers, the cone coefficient is-3.5, the radius of curvature in the Y direction is 476 micrometers, the cone coefficient is-3.5, the radius of curvature in the X direction far from the microlens array surface is 50 micrometers, the cone coefficient is-3.8, the radius of curvature in the Y direction is 50 micrometers, and the cone coefficient is-4.55.
In the embodiment, the light spot formed after the light passes through the dodging microlens array reaches a peak value at 55 degrees in the X direction, the peak energy is 163% of the central energy, the peak energy reaches a peak value at 46 degrees in the Y direction, the peak energy is 156% of the central energy, the energy in the X direction is reduced to 80% of the central energy at 68 degrees, and the field angle is 89 ° when the energy is reduced to 0; the energy of the Y direction is reduced to 80% of the central energy at 57 degrees, and the field angle is 68 degrees when the energy is reduced to 0; the light-emitting aperture of 1.05mm away from the rear surface of the lens in the microlens array and the double-convex lens light homogenizing module is 2.2 mm.
The following conclusions can be drawn in conjunction with examples 2 to 4:
1. the light homogenizing structure composed of the micro lens array and the double convex lens can well eliminate the light source image of the array.
2. The light homogenizing structure (also called a light homogenizing module) can well eliminate interference fringes.
3. The light homogenizing structure can reach a divergence angle of more than 90 degrees.
4. If the light outlet hole is arranged at a position 1.05mm away from the rear surface of the biconvex lens of the light homogenizing structure, the size of the light outlet aperture is less than 2.5 mm.
5. In the dodging structure, the cone coefficient of the surface type parameter of the biconvex lens far away from the micro-lens array is reduced, the field angle of the obtained corresponding light spot is increased, the peak value is reduced, the cone coefficient is increased, the field angle of the obtained corresponding light spot is reduced, and the peak value is improved.
6. In the dodging structure, the cone coefficient in the area type parameter of the biconvex lens close to the micro-lens array is reduced, the obtained corresponding light spot view angle is increased, the peak value is reduced, the energy is reduced from the peak value to cut-off, the proportion of the difference value of the view angle is reduced, the cone coefficient is increased, the obtained corresponding light spot view angle is reduced, the peak value is improved, the energy is reduced from the peak value to cut-off, the proportion of the difference value of the view angle is increased, and the corresponding view angle at the light spot peak value is basically unchanged no matter whether the cone coefficient in the area type parameter of the biconvex lens close to the micro-lens array is increased or reduced.
Example 5
In this embodiment, a combined microlens array dodging structure is provided, with reference to fig. 17 to 21, fig. 17 is a schematic view illustrating an installation position of a combined microlens array structure and a laser array light source according to an embodiment of the present invention; FIG. 18 is a surface structure view of the microlens array shown in FIG. 17;
FIG. 19 is a ray path diagram of the combined microlens array structure of FIG. 17; FIG. 20 is a diagram illustrating a far field emergent light field distribution of the light homogenizing structure of the combined micro-lens array shown in FIG. 17; fig. 21 is a schematic view of the light exit aperture at a distance of 1.05mm from the back convex surface of the biconvex lens in the combined microlens array dodging structure shown in fig. 17.
The light source comprises a 400-combined microlens array dodging structure, a 410-first lens group, a 411-substrate layer, a 412-microlens array, a 420-second lens group, a 421-front convex surface, a 422-rear convex surface and a 430-laser array light source.
In this embodiment, the combined microlens array light uniformizing structure of the utility model includes a first lens group 410 and a second lens group 420 that are disposed side by side, where the first lens group 410 includes a microlens array 412, and the second lens group 420 includes a biconvex lens, which is different from embodiments 1 to 4, in the light uniformizing structure shown in this embodiment, the microlens array 412 and the biconvex lens are located on the same side of the substrate layer, and the light beam passes through the substrate layer first, then passes through the microlens array 412, and then passes through the biconvex lens. In this embodiment, the refractive indexes of the microlens array and the lenticular lens are both 1.52, and with reference to fig. 17 to 21, the initial distance between two adjacent microlenses in the microlens array is 10 micrometers, the optical surface of each microlens is an anamorphic aspheric surface, the radius of curvature in the X direction is 33 micrometers, the cone coefficient is-1.5, the radius of curvature in the Y direction is 33 micrometers, the cone coefficient is-1.5, the double-sided surface of the lenticular lens is an anamorphic aspheric surface, the radius of curvature in the X direction near the microlens array surface is 476 micrometers, the cone coefficient is-2.5, the radius of curvature in the Y direction is 476 micrometers, the cone coefficient is-2.5, the radius of curvature in the X direction far from the microlens array surface is 50 micrometers, the cone coefficient is-3.8, the radius of curvature in the Y direction is 50 micrometers, and the cone coefficient is-4.55.
In this embodiment, the light spot formed after the light passes through the dodging microlens array reaches a peak value at 57 degrees in the X direction, the peak energy is 117% of the central energy, the peak energy reaches a peak value at 43 degrees in the Y direction, the peak energy is 121% of the central energy, the energy in the X direction is reduced to 80% of the central energy at 70 degrees, and the field angle is 94 ° when the energy is reduced to 0; the energy is reduced to 80% of the central energy at 56 degrees in the Y direction, and the field angle is 73 degrees when the energy is reduced to 0; the light-emitting aperture of 1.05mm away from the rear surface of the lens in the microlens array and the double-convex lens light homogenizing module is 2.7 mm.
Example 6
The embodiment provides a method for manufacturing a combined microlens array dodging structure, a microlens array in the combined microlens array dodging structure can be manufactured by a method of transferring and imprinting a mother plate, the mother plate used in the manufacturing process can be processed by a photoetching method, a photosensitive material layer is attached to a glass substrate, different exposure quantities are added at different positions of the photosensitive material layer, when a template is manufactured, the depth of exposure reaching by different laser energy is controlled according to the feature structure of the microlens array in a target combined microlens array dodging structure and a layered photoetching method, the manufacturing of the mother plate of the microlens array dodging structure with a good surface structure is finished at one time, and the feature structure of the microlens array on the mother plate is consistent with the feature structure of the target microlens array.
Referring now to fig. 22, there is shown a flow chart of a microlens array master for a combined microlens array dodging structure according to the present invention, wherein: 60-a layer of photosensitive material; 61-microlens arrays formed by layered lithography that conform to the topography of the target microlens array. As can be seen from fig. 22, the master is made by layered lithography, different exposure amounts are added to different positions of the photosensitive material layer according to the topography of the microlens array pattern during fabrication, and the photosensitive material layer is exposed to form the second pattern structure on the photosensitive material layer, which is consistent with the structure of the microlens array pattern.
The photosensitive material layer is divided into a plurality of layers according to the exposure depth formed after exposure, and the exposure quantity of each layer is in a nonlinear relation with the exposure depth. And accurately controlling the exposure of each layer of the photoetching equipment to manufacture the micro-lens array master mask by different layers of different exposures. The micro lens array master plate is manufactured by a layered photoetching method, and the batch manufacturing of the micro lens array can be completed by processing by a nano-imprinting method.
In one embodiment, the fabrication of the microlens array of the combined microlens array dodging structure using the prepared master includes the following steps, as shown in fig. 23, wherein 62-a substrate layer, 63-a pattern forming template, 64-a first pattern structure, 65-a plastic, 66-a microlens array pattern, 67-a pattern forming layer, 68-a second pattern structure, 69-a pattern transfer layer:
providing a substrate layer 62, wherein the substrate layer 62 is a light-transmitting glass layer, and the substrate layer 62 is a carrier of a micro lens array;
providing a pattern forming template 63, wherein a first pattern structure 64 is formed on the surface of the pattern forming template 63, and the first pattern structure 64 is opposite to the structure of the microlens array pattern 66;
providing plastic glue, using the pattern forming template 63 as a mold, forming the plastic glue on the substrate layer 62 through imprinting, and forming the microlens array pattern 66 on the surface of the substrate layer 62 to obtain the microlens array light uniformizing structure.
In one embodiment, the manufacturing method of the pattern forming template 63 specifically includes the following steps:
providing a pattern forming layer 67, and forming a second pattern structure 68 on the surface of the pattern forming layer 67, wherein the second pattern structure 68 is consistent with the structure of the microlens array pattern 66;
providing a pattern transfer layer 69, using the pattern forming layer 67 as a template, molding a molding compound on the pattern transfer layer 69 by imprinting, and forming the first pattern structure 64 on the surface of the pattern transfer layer 69 to obtain the pattern molding template 63.
Fig. 23 shows a schematic diagram of the above-mentioned manufacturing process, and because the manufacturing process proposed in this embodiment involves transfer and imprinting, there are a plurality of borrowing and sharing phenomena in fig. 23, but it can be understood that after the microlens array pattern is transferred onto the pattern transfer layer 69, it becomes the pattern forming template 63.
The biconvex lens of the combined microlens array light homogenizing structure can be manufactured in batches by an optical lens compression molding technology.
The combined microlens array dodging structure is manufactured in batches by a nano-imprinting method, a transfer printing glue layer is attached to a resin substrate, a reverse structure of a master plate is transferred to the transfer printing glue layer in an imprinting mode, an imprinting glue layer is attached to a glass substrate, and a structure on the transfer printing glue layer on the resin substrate is transferred to the imprinting glue layer in an imprinting mode, so that batch manufacturing of the combined microlens array dodging structure is completed.
The combined microlens array light homogenizing structure manufactured by the manufacturing method can eliminate interference fringes of obtained light spots, meets the requirement of an ITOF receiving end, can be manufactured in large batch, and reduces the processing difficulty.
Further, based on the combined microlens array light uniformizing structure, the utility model also provides an ITOF lens, which comprises the combined microlens array light uniformizing structure, wherein the combined microlens array light uniformizing structure is provided with a microlens array, and an air layer with the thickness ranging from 0.1mm to 0.5mm is arranged between the microlens array and a laser array light source.
Further, based on the above ITOF lens, the present invention also provides an apparatus equipped with an ITOF lens, which includes the above ITOF lens, and the ITOF lens is mounted with the combined microlens array dodging structure according to the above.
The light homogenizing structure composed of the micro lens array and the biconvex lens can eliminate interference fringes of obtained light spots through random arrangement of the micro lenses in the micro lens array, and meets the requirement of an ITOF receiving end; the light homogenizing structure combining the micro lens array and the double convex lens can reduce the size of the light-emitting aperture to a greater degree, and the size of the light-emitting aperture is reduced under the condition of ensuring a larger angle of view of light emission; by the light homogenizing structure combining the micro lens array and the double convex lens, the micro lens in the micro lens array can reach a larger field angle by a lower curvature, so that a larger ITOF detection range is reached.
By the light homogenizing structure combining the micro lens array and the biconvex lens, the micro lens array and the biconvex lens can perform different modulation effects on an optical field, so that the modulation variable is increased, and the difficulty in master mask manufacturing is reduced.
The light homogenizing structure combining the micro lens array and the biconvex lens can well destroy a light source image formed by a dot matrix light source through the biconvex lens through the micro lens array to form a smooth light spot. According to the light homogenizing structure combining the micro lens array and the double convex lens, no fault exists between the micro lens array and the micro lens, smooth transition is realized, the light transmittance is increased, and the imprinting difficulty is reduced.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example" or "some examples" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples described in this specification can be combined and combined by one skilled in the art.
While embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and not to be construed as limiting the present invention, and that changes, modifications and variations may be made therein by those of ordinary skill in the art within the scope of the present invention.
Claims (11)
1. A combined microlens array dodging structure is characterized by comprising a first lens group and a second lens group;
the first lens group comprises a substrate layer and a micro-lens array formed on one side surface of the substrate layer, a plurality of micro-lenses are arranged in a staggered mode to form the micro-lens array, and the micro-lenses are arranged at intervals;
the second lens group includes a biconvex lens;
the first lens group and the second lens group are arranged oppositely and side by side.
2. The light uniformizing structure of the combined micro lens array according to claim 1,
the lenticular lens is close to the surface of the other side of the substrate layer, and the lenticular lens and the micro lens array are respectively oppositely arranged on two sides of the substrate layer.
3. The light uniformizing structure of the combined micro lens array according to claim 1,
the lenticular lens is close to the microlens array, and the lenticular lens and the microlens array are arranged on the same side of the substrate layer.
4. The light uniformizing structure of the combined micro lens array according to claim 1,
the optical surface shapes of a plurality of micro lenses forming the micro lens array comprise deformed aspheric surface shapes;
the second lens group comprises a biconvex lens, the biconvex lens is provided with two outer convex surfaces which are oppositely arranged, and the optical surface types of the two outer convex surfaces are deformed aspheric surface types.
5. The light uniformizing structure of the combined micro lens array according to claim 1,
the range of the curvature radius of a plurality of micro lenses forming the micro lens array in the transverse coordinate direction is 10-300 mu m, the range of the curvature radius in the longitudinal coordinate direction is 10-300 mu m, and the range of the cone coefficient of the micro lenses is-0.95-8.
6. The light uniformizing structure of the combined micro lens array according to claim 1,
the curvature radius of a plurality of micro lenses forming the micro lens array ranges from 8 mu m to 360 mu m.
7. The light uniformizing structure of the combined micro lens array according to claim 4,
one of the outer convex surfaces of the lenticular lens is a front convex surface close to the substrate layer, the other of the outer convex surfaces of the lenticular lens is a rear convex surface away from the substrate layer,
the range of the curvature radius of the front convex surface in the transverse coordinate direction is 200-700 mu m, the range of the curvature radius in the longitudinal coordinate direction is 200-700 mu m, and the range of the cone coefficient of the front convex surface is-1-8;
the range of the curvature radius of the rear convex surface in the transverse coordinate direction is 5-500 mu m, the range of the curvature radius in the longitudinal coordinate direction is 5-500 mu m, and the range of the conic coefficient of the rear convex surface is-1-8.
8. The light uniformizing structure of the combined micro lens array according to claim 1,
the refractive index range of the micro lens array is 1.5-1.8;
the refractive index range of the biconvex lens is 1.5-1.8;
the substrate layer is a light-transmitting glass substrate.
9. The light uniformizing structure of the combined micro lens array according to claim 1,
a plurality of microlens dislocation arrangement forms the microlens array specifically includes:
after a plurality of micro lenses are arranged in a dot matrix manner, each micro lens is randomly arranged in a staggered manner within a preset distance range along the transverse direction and/or the longitudinal direction;
after the plurality of microlenses are arranged in a dot matrix manner, the distance range of the lens center points of two adjacent combined microlenses is 5-60 mu m;
the preset distance range is n times of the distance between the lens center points of two adjacent combined microlenses, and the value range of n is 8-20%.
10. An ITOF lens, comprising the combined microlens array dodging structure as claimed in any one of claims 1 to 9, wherein the combined microlens array dodging structure has a microlens array, and an air layer with a thickness ranging from 0.1mm to 0.5mm is disposed between the microlens array and a laser array light source.
11. An apparatus equipped with an ITOF lens, comprising the ITOF lens of claim 10, on which the combined microlens array dodging structure according to any one of claims 1 to 9 is mounted.
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