CN212933023U

CN212933023U - Micro-lens array dodging structure, TOF lens and equipment

Info

Publication number: CN212933023U
Application number: CN202021859432.5U
Authority: CN
Inventors: 徐越; 罗明辉; 乔文; 朱鸣; 陈林森
Original assignee: SVG Tech Group Co Ltd
Current assignee: SVG Tech Group Co Ltd
Priority date: 2020-08-31
Filing date: 2020-08-31
Publication date: 2021-04-09
Anticipated expiration: 2030-08-31

Abstract

The utility model discloses a even light structure of miniature microlens array, TOF camera lens and equipment, including the stratum basale, and form in the even light layer on stratum basale surface, even light layer deviates from the surface of stratum basale is formed with lens array group, and a plurality of microlens dislocation is arranged and is formed lens array group, lens array group is in even light layer's surface forms continuous face, a plurality of microlens multiunit adjacent arrangement, adjacent two sets of interval group that form, adjacent two sets of interval group of a set of microlens's in two sets of curvature radius arrange to the rule of both ends grow gradually according to from the centre, and adjacent another a set of microlens's in two sets of curvature radius arranges to the rule that both ends become gradually from the centre. Even light structure constitute by the microlens of different bores and shape, destroy microlens array's periodicity, make laser array eliminate interference phenomenon after the even light of this even light structure, reduce the processing degree of difficulty of nanometer impression simultaneously.

Description

Micro-lens array dodging structure, TOF lens and equipment

Technical Field

The utility model relates to a three-dimensional perception field especially relates to a micro microlens array dodging structure, TOF camera lens and equipment.

Background

TOF (Time of flight) technology can perform three-dimensional sensing and distance measurement, and the optical part of TOF is mainly divided into three parts: the device comprises a laser array light source, a dodging structure and a TOF lens. With the fact that TOF technology is increasingly added to miniaturization equipment, TOF lenses are increasingly smaller, and the corresponding dodging structure of the TOF lens, which is an important component of the TOF technology, also needs to meet the trend of miniaturization.

In addition, the boundary between the micro-lenses of the existing micro-uniform micro-lens array structure is not clearly defined, the adopted structure depth is deep, and gray scale compensation cannot be well carried out during photoetching processing.

Moreover, the conventional micro light-homogenizing microlens array structure cannot meet the requirements of miniaturized equipment such as mobile phones and tablet computers on light-homogenizing devices, so that a technical dead zone is caused.

Therefore, a new technical solution is needed to solve the above problems.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving the problem that exists among the prior art, on the one hand, provide a micro microlens array structure of sparing light, concrete technical scheme is as follows:

a micro-lens array light uniformizing structure comprises a substrate layer and a light uniformizing layer formed on the surface of the substrate layer, wherein a lens array group is formed on the surface of the light uniformizing layer, which is far away from the substrate layer,

the micro lenses are arranged in a staggered manner to form the lens array group, the lens array group forms a continuous surface on the surface of the light homogenizing layer,

the plurality of micro-lenses are adjacently arranged, two adjacent groups form a spacing group, the curvature radius of one group of micro-lenses in the two adjacent groups is arranged according to the rule that the micro-lenses become larger gradually from the middle to the two ends, and the curvature radius of the other group of micro-lenses in the two adjacent groups is arranged according to the rule that the micro-lenses become smaller gradually from the middle to the two ends.

In a further embodiment, the substrate layer is a light-transmitting glass substrate, the refractive index of the substrate layer is greater than or equal to 1.4, and the transmittance of the substrate layer to light in the wavelength range of 930 nm-940 nm is greater than or equal to 90%,

further, the light homogenizing layer is a plastic adhesive layer, the plastic adhesive layer is adhered to the light-transmitting glass substrate,

further, the molding glue layer comprises photoresist and/or imprint glue;

further, the thickness range of the light-transmitting glass substrate is 0.3mm-0.6mm, and the thickness of the molding glue layer is 0.03mm-0.1 mm.

In a further embodiment, the microlenses constituting the lens array group are each of aspherical-surface type microlenses, and the radius of curvature of the aspherical-surface type microlenses ranges from 5 μm to 300 μm;

further, the shapes of the microlenses forming the lens array group are substantially different, and the shapes of the microlenses include one or more combinations of triangles, quadrangles, pentagons and hexagons.

In a further embodiment, the lens array group has a plurality of columns, and the center-to-center distance between two adjacent microlenses on any one of the plurality of columns is 25 μm-120 μm;

further, in one of the interval groups, the curvature radius of the microlens array group is randomly selected;

further, in one of the interval groups, the distance between the centers of two adjacent microlenses is determined by the selected curvature radius of the two corresponding microlenses and the shape of the light spot to be formed,

further, the larger the curvature radius selected by the two corresponding microlenses is, the larger the distance between the centers of the two adjacent microlenses is, the longer the length of the light spot shape in the direction of the line connecting the centers of the two adjacent microlenses is, and if the curvature radius selected by the two corresponding microlenses is predetermined and the length of the light spot shape in the direction of the line connecting the centers of the two adjacent microlenses is required to be longer, the larger the distance between the centers of the two adjacent microlenses is.

In a further embodiment, the distance between two of said spaced groups is determined by the shape of the spot required to be formed by the target and the maximum and minimum radii of curvature of the microlenses in each of said spaced groups.

In a further embodiment, if the number of microlenses in one of two adjacent groups is N, and the number of microlenses in the other of said two adjacent groups is M,

then, when N > M, the radius of curvature of the lens of the group of M microlenses is greater than the radius of curvature of the lens of the group of N microlenses;

when N < M, the radius of curvature of the lens of the group of M microlenses is smaller than the radius of curvature of the lens of the group of N microlenses;

wherein the value of M, N includes an integer within 2-10, and the value of M, N is an adjacent integer.

In a further embodiment, in one of the interval groups, the range of the curvature radius of the microlenses determines the number of microlenses in the interval group, and the larger the range of the curvature radius of the microlenses is, the larger the number of microlenses in the interval group is.

In a further embodiment, a number of the microlenses in the lens array group are subjected to a spacing process to form a continuous surface on the surface of the homogenizing layer.

In another aspect, the present invention further provides a TOF camera lens, which includes the above micro lens array dodging structure, the micro lens array dodging structure has a lens array group, and an air layer with a thickness ranging from 0.1mm to 0.5mm is provided between the lens array group and the laser array light source.

In another aspect, the present invention further provides an apparatus equipped with a TOF lens, which includes the TOF lens, wherein the TOF lens is equipped with the micro microlens array light uniformizing structure.

Compared with the prior art, the utility model discloses have one or more among following beneficial effect:

1. the micro light homogenizing structure of the utility model is composed of a micro lens array, micro lenses with different curvature radiuses and different shapes are formed in a mode of interval arrangement, and the light homogenizing structure can be composed of micro lenses with different calibers and different shapes, so that the periodicity of the micro lens array is destroyed, and the interference phenomenon is eliminated after the laser array homogenizes light through the micro lens array light homogenizing structure;

2. through the utility model discloses a filling rate of even light structure microlens can reach 100%, and great filling rate can increase the utilization efficiency of incident light, does not have the section between microlens and the microlens for the transition between microlens and the microlens is continuous, and the shape of single microlens is similar with the facula shape that expects to reach, improves the homogeneity of facula, and it is also difficult to reduce the processing of nanometer impression to have the fault between the microlens with regard to the aspect of processing;

3. the utility model ensures the aperture shape of the micro lens in the way of interval arrangement, so that the aperture shape of the micro lens is similar to the expected shape of the formed light spot, and the laser array forms the uniform light spot with the required shape after passing through the dodging structure, so that the obtained light spot is almost consistent with the target light spot;

4. the utility model provides an interval arrangement mode, the radius of curvature of every microlens is random, but microlens center is arranged and all follows interval arrangement method with the radius of curvature of each microlens, through this kind of arrangement method, the border definition between microlens and microlens is clear, easily design, easily carries out grey level compensation when carrying out photoetching processing mother set;

5. the utility model controls the shape of the facula formed by the laser array after passing through the micro-lens array by the way of interval arrangement, and the experiment proves that the visual angle can reach 70 degrees and above;

6. the utility model provides a microlens array structure thickness is less than 0.6mm, leads to the light size and is less than 0.9mm, and the facula shape that forms leads to the light aperture shape with the microlens array is irrelevant, is applicable to miniaturized TOF model.

7. Even light structure of miniature microlens array, can apply to the TOF camera lens, eliminate the interference phenomenon behind the laser array group through the lens array to keep the good homogeneity in light field, microlens array structure filling rate is 100%, makes the utilization ratio of incident light reach the biggest, transition between the microlens is level and smooth, improves the homogeneity in light field and reduces the processing degree of difficulty of impression.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

FIG. 1-1 is a perspective view of a concave microlens array structure according to example 1;

FIGS. 1-2 are front view effect diagrams of the concave microlens array structure described in example 1;

FIGS. 1-3 are side views of the concave microlens array structure of example 1;

FIGS. 1-4 are schematic diagrams of far-field emergent light field distribution of the microlens array according to example 1, wherein FIG. 1-4(a) is a schematic diagram of far-field emergent light spots of the microlens array; FIGS. 1-4(b) are schematic diagrams of energy ratios at vertical field angles with respect to a zero degree field angle; FIGS. 1-4(c) are schematic diagrams of energy ratios at horizontal field angles with respect to a zero degree field angle;

FIGS. 1-5 are schematic effect diagrams of the overall light uniformizing structure described in example 1;

FIG. 2-1 is a perspective view of a concave microlens array structure according to example 2;

FIG. 2-2 is a front view of the concave microlens array structure of example 2;

FIGS. 2-3 are side views of the concave microlens array structure of example 2;

2-4 are schematic diagrams of far-field emergent light field distribution of the microlens array according to embodiment 2, wherein, FIG. 2-4(a) is a schematic diagram of far-field emergent light spots of the microlens array; 2-4(b) are schematic diagrams of energy ratios at vertical field angles with respect to a zero degree field angle; 2-4(c) are schematic diagrams of energy ratios at horizontal field angles with respect to a zero degree field angle; FIGS. 2-4(d) are graphs of gray scale energy ratios corresponding to the schematic diagrams of the spots shown in FIGS. 2-4 (a);

2-5 are schematic effect diagrams of the integral dodging structure described in embodiment 2;

FIG. 3-1 is a perspective view of a concave microlens array structure according to example 3;

FIG. 3-2 is a front view of the concave microlens array structure of example 3;

3-3 are side views of the concave microlens array structure of example 3;

3-4 are schematic diagrams of far-field emergent light field distribution of the microlens array according to embodiment 3, wherein, fig. 3-4(a) are schematic diagrams of far-field emergent light spots of the microlens array; 3-4(b) are schematic diagrams of energy ratios at vertical field angles with respect to a zero degree field angle; 3-4(c) are schematic diagrams of energy ratios at horizontal field angles with respect to a zero degree field angle; 3-4(d) are graphs of gray scale energy ratios corresponding to the light spot diagrams shown in FIGS. 3-4 (a);

3-5 are schematic effect diagrams of the integral dodging structure described in embodiment 3;

FIG. 4-1 is a perspective view of a concave microlens array structure according to example 4;

FIG. 4-2 is a front view of the concave microlens array structure of example 4;

4-3 are side views of the concave microlens array structure of example 4;

4-4 are schematic diagrams of far-field emergent light field distribution of the microlens array according to embodiment 4, wherein, fig. 4-4(a) is a schematic diagram of far-field emergent light spots of the microlens array; 4-4(b) are schematic diagrams of energy ratios at vertical field angles with respect to a zero degree field angle; 4-4(c) are schematic diagrams of energy ratios at horizontal field angles with respect to a zero degree field angle; 4-4(d) are graphs of gray scale energy ratios corresponding to the light spot diagrams shown in FIGS. 4-4 (a);

fig. 4-5 are schematic effect diagrams of the overall light uniformizing structure described in embodiment 4.

Fig. 5 is a schematic structural diagram of a micro microlens array dodging structure according to an embodiment of the present invention;

FIG. 6 is a schematic flow chart of a process for fabricating the micro-microlens array dodging structure according to example 5;

FIG. 7 is a schematic flow chart of a process for fabricating the micro-microlens array dodging structure according to example 6;

FIG. 8 is a schematic flow chart of a process for fabricating the micro-microlens array dodging structure according to example 7.

Detailed Description

The technical solutions of the embodiments of the present invention will be examined and fully described below with reference to the accompanying drawings of the embodiments of the present invention, and it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Example (b):

the gist of the present invention will be further explained with reference to the accompanying drawings and examples.

See fig. 5, where 01-the base layer, 02-the leveling layer, 03-the lens array group.

A micro microlens array even light structure include stratum basale 01, and be formed at the even light layer 02 on stratum basale 01 surface, even light layer 02 deviates from stratum basale 01's surface is formed with lens array group 03, does this the utility model discloses the basic structure characteristic of even light structure.

In an embodiment, the lens array group 03 is composed of a plurality of microlenses, the curvature radii and the shapes of the plurality of microlenses are different, the plurality of microlenses are arranged in a staggered manner to form the lens array group 03, the lens array group 03 forms a continuous surface on the surface of the light uniformizing layer 02, the continuous surface can form a whole continuous surface or a plurality of discontinuous surfaces, and the plurality of discontinuous surfaces cover the light uniformizing layer 02 to achieve a certain optical effect, but the optical effect is good because no lens array group 03 can completely cover the light uniformizing layer 02, the manufactured relatively fine light uniformizing structure is provided, and the filling rate of the lens array group 03 on the light uniformizing layer 02 can reach 100%.

Lens array group accessible following structural feature combine to obtain:

the microlenses are arranged at intervals to form a matrix, two adjacent columns of the matrix form an interval group, two columns forming the interval group can be respectively called as an interval, one interval (namely one column) comprises the microlenses, the curvature radius of the microlenses in one column (namely one interval in one interval group) in the two adjacent columns is arranged according to a rule that the curvature radius is gradually increased from the middle to two ends, and the curvature radius of the microlenses in the other column (namely the other interval in the interval group) in the two adjacent columns is arranged according to a rule that the curvature radius is gradually decreased from the middle to two ends.

If the number of the microlenses in one of the two adjacent columns is N, and the number of the microlenses in the other of the two adjacent columns is M,

then, when N > M, the lens radius of curvature of the column with M microlenses is greater than the lens radius of curvature of the column with N microlenses;

when N < M, the lens radius of curvature of the column of M microlenses is smaller than the lens radius of curvature of the column of N microlenses;

the value of M, N includes integers within 2-10, and the value of M, N is an adjacent integer, for example, M takes 4, N takes 5, M takes 2, N takes 3, M takes 7, N takes 8, and the like.

It should be noted that the column mentioned herein should not be construed as a limitation of the present invention, and those skilled in the art can also understand or see this as a corresponding "row" in practical application.

The micro lenses are arranged at intervals to form a matrix, two adjacent columns of the matrix form an interval group, two columns forming the interval group can be respectively called as an interval, in one interval, the numerical range of the curvature radius of the micro lenses determines the number of the micro lenses in the interval, and the larger the numerical range of the curvature radius of the micro lenses is, the more the number of the micro lenses in the interval is.

In one embodiment, the lens array group 03 has several columns, and the center-to-center distance between two adjacent microlenses in any one of the several columns is 25 μm to 120 μm.

In one embodiment, the substrate layer 01 may be a light-transmitting glass substrate, the refractive index of the substrate layer 01 is greater than or equal to 1.4, and the transmittance of the substrate layer 01 to light in the wavelength range of 930 nm-940 nm is greater than or equal to 90%,

the light homogenizing layer 02 is a molding adhesive layer, the molding adhesive layer is adhered to the light-transmitting glass substrate, the molding adhesive layer comprises photoresist and/or impression glue, and the molding adhesive layer is preferably also a transparent layer;

the thickness range of the light-transmitting glass substrate is 0.3mm-0.6mm, the thickness of the molding glue layer is 0.03mm-0.1mm, and the size structural characteristics enable the size of the whole light homogenizing structure to be reduced and the applicability to be stronger.

In one embodiment, each of the microlenses forming the lens array group 03 is an aspheric microlens, and the range of the curvature radius of the aspheric microlens is 5 μm to 300 μm, wherein the value of the curvature radius of the microlens array group 03 is random within one interval group.

Even light structure is when using, be provided with the air bed that the thickness scope is 0.1mm ~ 0.5mm between lens array group 03 and the laser array light source.

The microlens array that a plurality of radius of curvature and shape are all different forms lens array group 03, interval processing is done to a plurality of microlens in lens array group 03, the microlens in lens array group 03 forms continuous face, the packing rate on even light layer 02 surface of a plurality of microlens is 100%, goes the interval and handles the back, constitutes the shape of a plurality of microlens of lens array group 03 is all different, including the combination of triangle-shaped, quadrangle, pentagon, hexagon or above multiple shape. The shapes of the microlenses after the de-spacing process are random, and various shapes are possible, and the various shapes of the microlenses are all in order to adapt to the optical characteristics required by the whole dodging structure, so that the shapes of the microlenses after the de-spacing process can be any polygon.

In an embodiment, the distance between two interval groups is decided by the maximum curvature radius and the minimum curvature radius of the light spot formed by the target requirement and the micro lens in each interval group, the curvature radius of the micro lens forming one interval group is different, and the micro lens with the same curvature radius does not exist between each interval group, and two micro lenses with the same shape and the same curvature radius do not exist in the whole lens array group. Certainly, the structure of dodging of miniature microlens array belong to and receive the structure a little, whole lens array group also probably appears a plurality of microlenses that the shape is the same in the manufacturing process, for example, under a situation, the equal different microlens of a plurality of radius of curvature is after going the interval processing, the shape of every microlens probably is arbitrary anomalous polygon, and the completely different microlens of these shapes can form a continuous face. It is also possible that several microlenses of the same shape may occasionally appear after the de-spacing process.

In one embodiment, the spacing between the center of each microlens and the center of each microlens in a spacing group is determined by the radius of curvature selected for the respective two microlenses and the desired shape of the formed light spot,

the larger the curvature radius is, the larger the distance between the center of the microlens and the center of the microlens is, the longer the length of the light spot shape in the direction of the line connecting the centers of the two adjacent microlenses is, and if the curvature radius is predetermined and the length of the light spot shape in the direction of the line connecting the centers of the two adjacent microlenses is required to be longer, the larger the distance between the center of the microlens and the center of the microlens is.

Example 1:

the utility model provides a micro-lens array light homogenizing structure, please refer to fig. 1-1 to 1-5, wherein, 10-laser array light source; 11-lens array group.

In this embodiment, the laser array light source 10 irradiates the micro microlens array light uniformizing structure (the surface of the lens array group 11 faces the light source) and then emits the light through the substrate layer, as shown in fig. 1 to 5, the distance between the laser array light source 10 and the lens array group 11 is 0.3mm, the intermediate medium is air, the lens array group 11 is a concave single-layer structure, the thickness of the substrate layer and the light uniformizing layer (the surface of which is adhered with the lens array group 11) is 0.5mm, the arrangement of the microlenses in the lens array group 11 follows an interval arrangement method, the center of the microlenses is determined by the interval arrangement method, in this embodiment, the number M of the microlenses in one row of the lens array group 11 arranged at intervals is 5, and the number N of the microlenses in the other row is 4. Referring to fig. 1-2, the rightmost column of fig. 1-2 has 10 microlenses, the rightmost penultimate column has 8 microlenses, and the lens array group in fig. 1-2 can be divided into upper and lower parts from the middle position of the rightmost column (or from the middle position of the leftmost column) according to the position of the center point of the curvature radius of the microlenses in the figure, i.e., from the rightmost column of the microlenses, the number of lenses in an interval in the upper half part of the lens array group is 5, 4; 5. 4; 5. 4; 5. 4. The number of lenses in an interval in the lower half part of the corresponding lens array group is also 5 and 4; 5. 4; 5. 4; 5. 4 (number of columns from the rightmost column to the leftmost column).

In the embodiment, the lateral length of the micro lens is 75 to 115 micrometers, the longitudinal length of the micro lens is 61 to 94 micrometers, the curvature radius and the cone coefficient of the corresponding micro lens are correspondingly changed along with the size change of the micro lens, and the curvature radius is changed in the range of 24 to 54 micrometers.

In this embodiment, the height of the joint between adjacent microlenses is the same, the joint has no cross section, and the filling rate is 100%.

In this embodiment, each microlens in the lens array group 11 is a quadrangle, a pentagon, a hexagon or other polygons, each microlens has a different shape and a different curvature radius, and the microlenses are closely arranged, and the shapes of the microlenses are random, and various shapes are possible, and the various shapes of the microlenses are optical characteristics required for adapting to the whole light homogenizing structure.

Referring to fig. 1-4, fig. 1-4(a) shows a light spot formed at a distance of 250mm from the dodging structure, and the energy ratio of each field angle with respect to the zero-degree field angle is obtained according to tan (θ/2) ═ h/L, h is the half height of the light spot, and L is the position of the dodging structure, as shown in fig. 1-4(b) and fig. 1-4 (c). In this embodiment, the horizontal field angle achieved by the concave microlens array is greater than 70 degrees, and the vertical field angle is greater than 60 degrees, wherein the scattering energy of the horizontal field angle reaches a peak value at 60 degrees, the light intensity at 68 degrees is reduced to 80% of the central intensity, and the method is suitable for a TOF module of a portable device, is convenient for algorithm identification, and the scattering energy of the vertical field angle reaches a peak value at 50 degrees.

Example 2:

the utility model provides a micro-lens array light homogenizing structure, please refer to fig. 2-1 to 2-5, wherein, 20-laser array light source; 21-lens array group.

In this embodiment, the laser array light source 20 irradiates the micro microlens array light equalizing structure (the surface of the lens array group 21 faces the light source) and then emits the light through the substrate layer, as shown in fig. 2-5, the distance between the laser array light source 20 and the lens array group 21 is 0.2mm, the intermediate medium is air, the lens array group 21 is a concave single-layer structure, the total thickness of the substrate layer and the light equalizing layer is 0.5mm, the arrangement of the microlenses in the lens array group 21 follows an interval arrangement method, the center of the microlenses is determined by the interval arrangement method, in this embodiment, the number M of the microlenses in one row of the lens array group 21 arranged at intervals is 5, and the number N of the microlenses in the other row is 4.

In the embodiment, the transverse length of the micro lens is between 30 and 70 micrometers, the longitudinal length of the micro lens is between 24.5 micrometers and 58 micrometers, the curvature radius of the micro lens and the cone coefficient are correspondingly changed along with the change of the size of the micro lens, and the curvature radius is changed in a range of 8 micrometers to 18 micrometers.

In this embodiment, each microlens in the lens array group 21 is a quadrangle, a pentagon, a hexagon or other polygons, each microlens has a different shape and a different curvature radius, and the microlenses are closely arranged, and the shapes of the microlenses are random, and various shapes are possible, and the various shapes of the microlenses are optical characteristics required for adapting to the whole light homogenizing structure.

Referring to fig. 2-4(a) -fig. 2-4(d), the number of microlenses at each interval in the interval arrangement and the distance between microlenses can be changed according to the interval arrangement method, and the distance between different microlenses, the ratio of the two distances in the vertical and horizontal directions to the distance determines the size and ratio of the vertical and horizontal field angles of the emergent light under the condition that the surface types of a group of microlenses are the same. The horizontal field angle achieved by the concave microlens array in the present embodiment is greater than 70 degrees, and the vertical field angle is greater than 60 degrees, wherein the scattering energy at the horizontal field angle peaks at 60 degrees, and the scattering energy at the vertical field angle peaks at 50 degrees.

Example 3:

the utility model provides a micro-lens array light homogenizing structure, please refer to fig. 3-1 to 3-5, wherein, 30-laser array light source; 31-lens array group.

In this embodiment, the laser array light source 30 irradiates the micro microlens array light uniformizing structure (the surface of the lens array group 31 faces the light source) and then emits the light through the substrate layer, as shown in fig. 3-5, the distance between the laser array light source 30 and the lens array group 31 is 0.3mm, the intermediate medium is air, the lens array group 31 is a concave single-layer structure, the thickness is 0.5mm, the arrangement of the microlenses in the lens array group 31 follows an interval arrangement method, the center of the microlenses is determined by the interval arrangement method, in this embodiment, the number M of the microlenses in one row of the lens array group 31 arranged at intervals is 3, and the number N of the microlenses in the other row is 2, and similarly, the determination method of the number of the microlenses is the same as the determination method in fig. 1-2, which is not repeated herein.

In the embodiment, the lateral length of the micro lens is 70 to 120 micrometers, the longitudinal length of the micro lens is 45 to 80 micrometers, the curvature radius of the micro lens and the cone coefficient are correspondingly changed along with the size change of the micro lens, and the curvature radius is in the range of 25 to 40 micrometers.

In this embodiment, each microlens in the lens array group 31 is a quadrangle, a pentagon, a hexagon, or other polygons, each microlens has a different shape, has a different curvature radius, and is kept closely arranged, and the shapes of the microlenses are random, and various shapes are possible, and the various shapes of the microlenses are optical characteristics required for adapting to the whole dodging structure.

The horizontal field angle achieved by the concave microlens array in this embodiment is greater than 70 degrees, and the vertical field angle is greater than 50 degrees, wherein the scattering energy at the horizontal field angle peaks at 58 degrees and the scattering energy at the vertical field angle peaks at 40 degrees.

Example 4:

the utility model provides a micro-lens array light homogenizing structure, please refer to fig. 4-1 to 4-5, wherein, 40-laser array light source; 41-lens array group.

In this embodiment, the laser array light source 40 irradiates the micro microlens array light uniformizing structure (the surface of the lens array group 41 faces the light source) and then emits the light through the substrate layer, as shown in fig. 4-5, the distance between the laser array light source 40 and the lens array group 41 is 0.3mm, the intermediate medium is air, the lens array group 41 is a concave single-layer structure, the thickness is 0.5mm, the arrangement of the microlenses in the lens array group 41 follows an interval arrangement method, the center of the microlenses is determined by the interval arrangement method, in this embodiment, the number M of the microlenses in one row of the lens array group 41 arranged at intervals is 3, and the number N of the microlenses in the other row is 2, and similarly, the determination method of the number of the microlenses is the same as the determination method in fig. 1-2, which is not repeated herein.

In the embodiment, the lateral length of the micro lens is between 30 micrometers and 50 micrometers, the longitudinal length of the micro lens is between 20 micrometers and 34 micrometers, the curvature radius of the micro lens and the cone coefficient are correspondingly changed along with the size change of the micro lens, and the curvature radius is changed in the range of 8 micrometers to 20 micrometers.

In this embodiment, each microlens in the lens array group 41 is a quadrangle, a pentagon, a hexagon, or other polygons, each microlens has a different shape, has a different curvature radius, and is kept closely arranged, and the shapes of the microlenses are random, and various shapes are possible, and the various shapes of the microlenses are optical characteristics required for adapting to the whole light uniformizing structure.

The horizontal field angle and the vertical field angle of the concave microlens array expected to be achieved in the embodiment are larger than 70 degrees and larger than 50 degrees, wherein the scattering energy of the horizontal field angle reaches a peak value at 58 degrees, and the scattering energy of the vertical field angle reaches a peak value at 40 degrees.

Synthesize embodiment 1 ~ 4, the utility model provides a micro microlens array structure of sparing through interval arrangement's mode, forms the microlens of different curvature radius different shapes, and this kind of structure of sparing comprises the microlens of different bores, different shapes to destroy microlens array's periodicity, eliminate interference phenomenon after making laser array sparing through this microlens array structure of sparing.

Through the packing rate of even light structure microlens is 100%, increases the utilization efficiency of incident light, does not have the section between microlens and the microlens, and the transition between microlens and the microlens is continuous, and the shape of single microlens is similar with the facula shape that expects to reach, has improved the homogeneity of facula, and does not have the fault between the microlens, reduces the processing degree of difficulty of nanometer impression.

The utility model provides an interval arrangement mode, the radius of curvature of every microlens is all random, but the microlens center is arranged and is followed interval arrangement method with the radius of curvature of each microlens, and through this kind of arrangement method, the border definition between microlens and microlens is clear, and easy design easily carries out grey level compensation when carrying out the photoetching processing mother set.

The utility model discloses a mode of interval arrangement, the facula shape that forms behind the control laser array through the microlens array, the experiment proves can reach the angle of vision of 70 and above.

The utility model provides a microlens array structure thickness is less than 0.6mm, leads to the light size and is less than 0.9mm, and the facula shape that forms leads to the light aperture shape with the microlens array is irrelevant, is applicable to miniaturized TOF model.

Comparing fig. 1-4, 2-4, 3-4 and 4-4 with examples 1-4, it can be verified that the surface shape of the microlenses, the distance between the microlenses, and the distance between the microlenses arranged in the vertical and horizontal directions of the microlenses all affect the property of forming the light spot. When the microlenses in the two intervals of the present invention have the same surface type (each interval is composed of microlenses with different surface types), the larger the distance between the two intervals is, the longer the light spot length in the distance direction is; the distances among the micro lenses are the same, and the larger the surface curvature is, the larger the integral size of the light spot is; the pitches of the micro lenses are the same, so that the larger the conic coefficient of the surface type is, the narrower the light spot peak value is, and the stronger the energy at the peak value is.

Arrangement method change the ratio of vertical and horizontal direction of a certain row of microlens the utility model discloses an it is same the interval group is through the ratio of the length that changes two vertical adjacent microlens center lines and the length of two horizontal adjacent microlens center lines to change the length-width ratio of facula.

The light spot of fig. 1-4(a) is substantially the same as the light spot of fig. 2-4(a) because M is 4 and N is 5 in the spaced arrangement, and the light spot of fig. 3-4(a) is substantially the same as the light spot of fig. 4-4(a) because M is 2 and N is 3 in the spaced arrangement. The shape and size of the formed light spot and the position and width of the bright ring are determined by the arrangement mode, the value of M, N in interval arrangement, the curvature of the micro-lens, the cone coefficient, the micro-lens distance, the length of the central connecting line of two horizontally adjacent micro-lenses and the length of the central connecting line of two vertically adjacent micro-lenses.

The utility model discloses still provide a manufacturing approach of miniature microlens array dodging structure, borrow the attached drawing of embodiment 5 ~ 6 here, see figure 6, the manufacturing approach of dodging structure includes:

providing a substrate layer 53, wherein the substrate layer 53 is a light-transmitting glass sheet;

providing a pattern forming template 51, wherein a first pattern structure is formed on the surface of the pattern forming template 51, the first pattern structure is opposite to the structure of the micro-microlens array pattern, and the first pattern structure is called as an inverse micro-microlens pattern 52;

providing a plastic adhesive, namely an imprinting adhesive, molding the plastic adhesive on the substrate layer 53 by imprinting with the pattern molding template 51 as a mold, and forming the micro microlens array pattern on the surface of the substrate layer 53 to obtain a micro microlens array light uniformizing structure;

the micro lens array pattern comprises a plurality of micro lenses which are arranged without intervals;

the refractive index of the plastic glue is more than or equal to 1.4.

In an embodiment, referring to fig. 7, the method for manufacturing a pattern forming template of the present invention specifically includes:

providing a pattern forming layer 61, and forming a second pattern structure on the surface of the pattern forming layer 61, wherein the second pattern structure is consistent with the micro-microlens array pattern structure and is called as a positive micro-microlens pattern 63;

providing a pattern transfer layer 64, molding a molding compound on the pattern transfer layer 64 by imprinting with the pattern formation layer 61 as a template, and forming a first pattern structure opposite to the micro microlens array pattern structure, namely an inverse micro microlens pattern 52, on the surface of the pattern transfer layer 64 to obtain the pattern molding template 69;

the plastic glue is made of resin.

In one embodiment, the present invention forms the pattern forming template 69 by turning with diamond turning technology to form the first pattern structure, i.e., the reverse micro microlens pattern 52;

the pattern forming template is a metal template.

In one embodiment, the present invention forms a second pattern structure, i.e. a positive micro-lens pattern 63 on the surface of the pattern forming layer 61 by diamond turning.

In one embodiment, the present invention forms a second pattern structure on the surface of the pattern forming layer 61, which specifically includes:

uniformly spin-coating photoresist on the surface of the pattern forming layer to form a photoresist layer 62, wherein the thickness of the photoresist layer 62 is 5-50 μm,

the photoresist layer 62 is exposed for a plurality of times with different gray scales and compensated for gray scales, and the second pattern structure, i.e. the forward micro microlens pattern 63, is formed on the surface of the pattern forming layer 61.

In an embodiment, referring to fig. 8, the present invention forms a second pattern structure on the surface of the pattern forming layer 71, which specifically includes:

the pattern forming layer 71 is immersed in a photosensitive resin 72, and the second pattern structure, i.e., the forward micro microlens pattern 63, is formed on the surface of the pattern forming layer 71 by exposing the photosensitive resin 72 to light of different gray scales a plurality of times.

In one embodiment, the thickness of the substrate layer 76 of the present invention ranges from 0.3mm to 0.6mm,

the refractive index of the substrate layer 76 is greater than or equal to 1.4, and the transmittance of the substrate layer 76 to light rays with wavelength ranges of 930nm to 940nm is greater than or equal to 90%.

Example 5:

the utility model also provides a method for manufacturing the micro lens array dodging structure, please refer to fig. 6, wherein, 51-pattern forming template; 52-reverse micro microlens pattern (i.e., first pattern structure); 53-a base layer; 54-positive micro-lens pattern (i.e. second pattern structure).

In this embodiment, the manufacturing method includes:

providing a pattern forming template 51, and forming an inverse micro-lens pattern 52 on the surface of the pattern forming template 51.

In one embodiment, the inverse micro-microlens pattern 52 is formed on the surface of the pattern forming template 51 by a diamond turning technique.

A base layer 53 is provided, and the forward micro microlens pattern 54 is formed on the base layer 53 by imprinting a pattern forming template 51 having the reverse micro microlens pattern 52 formed on the surface thereof.

In one embodiment, the pattern forming template 51 is used as a mold, and a resin material is hot-pressed onto the substrate layer 53 by a mold pressing method to form the designed microlens array structure, i.e. the forward micro microlens pattern 54.

Example 6:

the present invention further provides a method for manufacturing a micro microlens array light uniformizing structure, please refer to fig. 7, in which a 61-pattern forming layer is formed; 62-a photoresist layer; 63-positive micro-lens pattern; 64-a pattern transfer layer; 65-reverse micro microlens pattern (i.e., first pattern structure); 66-a base layer; 67-forward micro-lens pattern (i.e. second pattern structure); 68-micro lens array dodging structure; 69-pattern forming template.

In this embodiment, the manufacturing method includes:

a pattern forming layer 61 is provided, and a positive micro-lens pattern 63 is formed on the surface of the pattern forming layer 61.

In an embodiment, a photoresist is uniformly spin-coated on the pattern forming layer 61 to form a photoresist layer 62, the thickness of the photoresist layer 62 is 5 μm to 50 μm, the photoresist layer 62 is then photo-etched by a gray scale exposure method to form a forward micro microlens pattern 63 on the surface of the photoresist layer 62, and the photoresist layer 62 is exposed at different gray scales by the gray scale exposure method, the exposure is divided into a plurality of times, and gray scale compensation is performed, so that the manufacturing accuracy of the micro microlens array can be improved.

Providing a pattern transfer layer 64, and embossing the pattern transfer layer 64 through the pattern forming layer 61 with the forward micro-lens pattern 63 formed on the surface, so as to form a reverse micro-lens pattern 65 on the pattern transfer layer 64;

in one embodiment, the forward micro-microlens pattern 63 on the surface of the pattern forming layer 61 is nanoimprinted, and the reverse micro-microlens pattern 65 is formed on the surface of the pattern transferring layer 64 by nanoimprint.

A base layer 66 is provided, and the pattern transfer layer 64 having the reverse micro-lens pattern 65 formed on the surface thereof is embossed to form the forward micro-lens pattern 67 on the base layer 66.

In one embodiment, the reverse micro-microlens pattern 65 on the surface of the pattern transfer layer 64 is nanoimprinted, and the forward micro-microlens pattern 67 is formed on the surface of the substrate layer 66 by nanoimprint to obtain the micro-microlens array dodging structure 68.

Example 7:

the present invention further provides a method for manufacturing a micro microlens array light uniformizing structure, please refer to fig. 8, in which 71-a pattern forming layer; 72-a photosensitive resin; 73-positive micro-lens pattern (i.e. second pattern structure); 74-a pattern transfer layer; 75-inverse micro-microlens pattern (i.e., first pattern structure); 76-a base layer; 77-positive micro-lens pattern (i.e. second pattern structure); 78-micro-lens array dodging structure.

In this embodiment, the manufacturing method includes:

a pattern forming layer 71 is provided, and a forward micro microlens pattern 73 is formed on the surface of the pattern forming layer 71.

In one embodiment, the pattern forming layer 71 is immersed in a photosensitive resin 72, and the positive micro-lens pattern 73 is formed on the surface of the pattern forming layer 71 by exposing the photosensitive resin 72 to light with different gray scales for a plurality of times. The exposure of different gray scales is carried out on the photosensitive resin 72 by a gray scale exposure method, the exposure is carried out for multiple times, and gray scale compensation is carried out, so that the manufacturing precision of the micro-lens array can be improved.

Providing a pattern transfer layer 74, and embossing the pattern transfer layer 74 through a pattern forming layer 71 with the forward micro-lens pattern 73 formed on the surface, so as to form a reverse micro-lens pattern 75 on the pattern transfer layer 74;

in one embodiment, the forward micro-microlens pattern 73 on the surface of the pattern forming layer 71 is nano-imprinted, and the reverse micro-microlens pattern 75 is formed on the surface of the pattern transferring layer 74 by nano-imprinting.

A base layer 76 is provided, and the forward micro microlens pattern 77 is formed on the base layer 76 by imprinting the pattern transfer layer 74 having the reverse micro microlens pattern 75 formed on the surface thereof.

In one embodiment, the reverse micro-microlens pattern 75 on the surface of the pattern transfer layer 74 is nanoimprinted, and the forward micro-microlens pattern 77 is formed on the surface of the substrate layer 76 by nanoimprint to obtain the micro-microlens array dodging structure 78.

Synthesize embodiment 5 ~ 7, a miniature microlens array dodging structure suitable for small-size TOF lens module, can reduce dodging thickness and the size of structure, satisfy miniaturized equipment like cell-phone, panel computer to the demand of small-size dodging device, compare in regular type microlens array, microlens array microlens shape and camber based on the interval arrangement method satisfy random distribution, can eliminate the interference phenomenon that forms behind the microlens array.

The manufacturing method can process the pattern forming layer that forms the microlens array through diamond turning technique, photosensitive resin curing technique, grey scale lithography technique etc to carry out the manufacturing of microlens array through the method of nanometer impression, make microlens array thickness keep at 0.3mm to 0.5mm, do not have the section between microlens and the microlens, reduce the processing degree of difficulty of nanometer impression, improve the machining precision.

The even light structure of microlens, the bore shape of each microlens is irregular, and radius of curvature, microlens central point etc. arrange at random through interval arrangement's method, the border definition is clear between the microlens, easily design, transition between the microlens is continuous, improves the homogeneity in emergent light field, easily carries out grey level compensation when adopting lithography processing mother set.

Even light structure of miniature microlens array, can apply to small-size TOF, eliminate the interference phenomenon behind the laser array through even light array to keep the good homogeneity in light field, microlens array structure filling rate is 100%, makes the utilization ratio of incident light reach the biggest, transition between the microlens is level and smooth, improves the homogeneity in light field and reduces the processing degree of difficulty of impression.

Under an embodiment, the utility model also provides a TOF camera lens, it includes the even light structure of foretell miniature microlens array.

Under an embodiment, the utility model provides an equipment of installing TOF camera lens, it includes the TOF camera lens, install foretell miniature microlens array dodging structure on the TOF camera lens.

In one embodiment, the method for designing a micro microlens array pattern of the present invention may specifically include:

arranging a plurality of groups of microlenses adjacently, wherein two adjacent groups form a spacing group, the curvature radius of the microlenses of one of the two adjacent groups is arranged according to a rule that the curvature radius is gradually increased from the middle to the two ends, and the curvature radius of the microlenses of the other of the two adjacent groups is arranged according to a rule that the curvature radius is gradually decreased from the middle to the two ends;

if the number of the microlenses in one of the two adjacent groups is N and the number of the microlenses in the other of the two adjacent groups is M,

the value of M, N includes integers within 2-10, and is an adjacent integer, for example, M takes 4, N takes 5, M takes 2, N takes 3, M takes 7, N takes 8, and the like.

Further, the lens array group comprises a plurality of the interval groups, the interval groups form a lens array group, the center distance between two adjacent micro lenses in one interval group is 25-120 μm,

the micro lenses are arranged in a gap to form a matrix, and the connecting lines of the centers of any one row of micro lenses in the matrix form a straight line.

And carrying out de-spacing treatment on a plurality of micro lenses which are arranged at intervals to form a matrix, wherein the shapes of the micro lenses subjected to the de-spacing treatment are basically different, and the micro lenses with basically different shapes are staggered and closely arranged on the surface of the light homogenizing layer to form a continuous surface.

Further, the shape of the plurality of microlenses subjected to the de-spacing process may be any polygon; the step of performing de-spacing processing is to perform union processing on a plurality of groups of microlenses, so that each microlens is seamlessly connected, and the remaining microlenses can be arranged in sequence after a starting point is selected, so that all the microlenses form a continuous surface.

In one embodiment, the interval arrangement of the present invention may specifically include:

and determining the central position of the micro lens according to an interval arrangement method, and determining the central positions of different micro lenses according to different curvature radiuses of the micro lenses. Each group of spaced micro lenses is divided into two rows, the curvature radius of one row of micro lens array is largest according to the middle curvature, the curvature radius of the other row of micro lens array is sequentially reduced towards the two sides according to the middle curvature, and the curvature radius of the other row of micro lens array is smallest according to the middle curvature, and the curvature radius of the other row of micro lens array is sequentially increased towards the two sides. The centers of each row of micro lenses are all on a straight line, the distance between the centers of each row of micro lenses is different, the distance between the micro lenses is determined according to the curvature radius of the micro lenses and the required formed light spot shape, the curvature radius of each micro lens is random, the curvature radius is 5-300 mu m, and the center position of each micro lens is determined according to the curvature radius of the corresponding micro lens and the expected formed light spot shape.

More specifically, will through the interval arrangement mode lens array group forms the matrix, and a certain curvature radius interval (assume to be first curvature radius interval) and another curvature radius interval (assume to be second curvature radius interval) constitute an interval.

N curvature radiuses are randomly selected in the first curvature radius interval, the curvature radiuses of the microlenses are arranged according to the rule that the curvature radiuses gradually increase from the middle to the two ends, M curvature radiuses are randomly selected in the second curvature radius interval, the curvature radiuses of the microlenses are arranged according to the rule that the curvature radiuses gradually decrease from the middle to the two ends, and two groups of the curvature radiuses are arranged to form an interval. Correspondingly, the next interval also randomly takes N curvature radiuses in the first curvature radius interval, if M is larger than N, the curvature radius selected in the M arrangement is smaller than the curvature radius selected in the N arrangement, if N is larger than M, the curvature radius selected in the M arrangement is larger than the curvature radius selected in the N arrangement, the curvature radiuses of the microlenses are arranged according to the rule that the curvature radiuses of the microlenses gradually increase from the middle to the two ends, M curvature radiuses are randomly taken in the second curvature radius interval, the M curvature radiuses are different from the curvature radiuses taken in the first interval, the curvature radiuses of the microlenses are arranged according to the rule that the curvature radiuses of the microlenses gradually decrease from the middle to the two ends, and the distance between the two intervals is determined according to the required light spot shape and the maximum curvature radius and the minimum curvature radius of the microlenses taken in each interval.

According to the interval arrangement method, when single interval arrangement is carried out, the distance between the centers of the two microlenses, the curvature radius selected by the two corresponding microlenses and the required formed light spot shape are determined, the larger the curvature radius is, the larger the distance between the center of the two microlenses and the center of the two adjacent microlenses is, the longer the light spot shape is in the direction of the connecting line of the centers of the two adjacent microlenses is, and if the curvature radius is determined and the length of the light spot shape in the direction of the connecting line of the centers of the two adjacent microlenses is required to be longer, the larger the distance between the centers of the two adjacent microlenses is.

Furthermore, when the arrangement of the single interval is carried out, no matter how the centers of the micro lenses are arranged according to the arrangement rule of the curvature radii of the micro lenses, the curvature radii of the micro lenses are randomly selected within the variation range of the curvature radii of the interval, and the selection range is from 5 micrometers to 300 micrometers.

Further, the third interval, the fourth interval and the nth interval are carried out by adopting the method, the distance between every two intervals is determined according to the maximum curvature radius and the minimum curvature radius of the micro-lenses taken in the corresponding intervals and the shape of the light spot required to be formed, and the curvature radii taken by the micro-lenses in all the intervals are different (the curvature radii of the micro-lenses in the same group of intervals are different, and the curvature radii of the micro-lenses in the intervals are different from the curvature radii of the micro-lenses in the intervals.

Furthermore, the range of the curvature radius of the microlenses at the same interval is specific, the range of the curvature radius of the microlenses at the interval determines the number of the microlenses which can be taken by the interval, and the larger the range of the curvature radius of the microlenses is, the larger the number of the microlenses which can be taken by the corresponding interval is.

After the micro-lens array is arranged by the interval arrangement method, the curvature radius of each micro-lens is different and random within 5-300 mu m; the shapes of the micro lenses are different, the shapes of the micro lenses can be changed into triangles, quadrangles, pentagons, hexagons, heptagons, octagons or other polygons, the whole micro lens array is composed of the micro lenses in different shapes, the periodicity of the micro lens array can be completely destroyed by the micro lens structure, and the interference phenomenon generated after the light-homogenizing structure passes through light is eliminated.

The utility model discloses in, same interval microlens interaentric spacing is 25 microns to 120 microns, and microlens curvature radius is 5 microns to 300 microns, and adjacent interval spacing is by the value range of microlens curvature radius in the corresponding interval and the facula shape decision that required formation.

The micro-lens array structure arranges all micro-lenses at corresponding positions according to an interval arrangement method, each micro-lens has a curvature radius corresponding to each micro-lens, the micro-lens array is subjected to interval removal treatment after arrangement is finished, namely merging is carried out, all the micro-lenses before merging is carried out are round apertures, all the micro-lenses are intersected with the surrounding micro-lenses, the shapes of all the micro-lenses after merging are changed into polygons, no cross section exists at the connecting part between every two adjacent polygons, the filling rate can reach 100%, the utilization efficiency of incident light is improved, and the processing difficulty of nano-imprinting is reduced due to the fact that no cross section exists in the micro-lens array.

In one embodiment, the thickness of the substrate layer 01 of the present invention is 0.3mm to 0.6mm, and the thickness of the light homogenizing layer 02 is 0.03mm to 0.1 mm. The utility model provides a current even light device lead to the shortcoming that the light back interference phenomenon is obvious, the great unsuitable miniaturized equipment of volume, provide a miniature microlens structure of little volume. The structure is suitable for a miniaturized TOF model, can be applied to portable small electronic equipment such as mobile phones and tablet computers, and can well eliminate interference fringes generated after a light homogenizing structure passes through light and improve uniformity of light spots on an illuminated surface compared with a traditional periodic micro-lens array.

The utility model discloses a space arrangement's mode, the facula shape that forms behind the control laser array through the microlens array can reach 70 and above angle of vision.

The utility model discloses an interval arrangement mode for there is not the section between microlens and the microlens, transition between microlens and the microlens is continuous, and the shape of single microlens is similar with the facula shape that expects to reach, has improved the homogeneity of facula.

The utility model provides a curvature radius of every microlens is random in the interval arrangement mode, but the microlens center is arranged and is followed the interval arrangement method with the curvature radius of each microlens, and through this kind of arrangement method, the border definition between microlens and microlens is clear, and easy design easily carries out grey compensation when carrying out the photoetching processing mother set.

The utility model provides a lens array group 03's thickness is less than 0.6mm, and the thickness of even photosphere 02 (photoresist layer) is less than 0.1mm, leads to the light size and is less than 0.9mm, and the facula shape that forms is irrelevant with the clear aperture shape that microlens array constitutes, satisfies miniaturized equipment and to the thickness requirement of even light device, is applicable to miniaturized TOF model.

Microlens interaxial distance among the lens array group 03 is decided by the radius of curvature that corresponds two microlenses because microlens is aspheric surface structure, decides should be decided by radius of curvature and aspheric surface coefficient of microlens face type, and facula shape and light distribution behind microlens interaxial distance, microlens radius of curvature, microlens aspheric surface coefficient decide laser array passing through microlens array structure jointly.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example" or "some examples" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples described in this specification can be combined and combined by one skilled in the art.

While embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications and changes may be made to the above embodiments by those of ordinary skill in the art within the scope of the present invention.

Claims

1. A micro-lens array light uniformization structure is characterized by comprising a substrate layer and a light uniformization layer formed on the surface of the substrate layer, wherein a lens array group is formed on the surface of the light uniformization layer, which is far away from the substrate layer,

2. The micro-lens array dodging structure of claim 1,

the basal layer is a transparent glass basal layer, the refractive index of the basal layer is more than or equal to 1.4, the transmittance of the basal layer to the light with the wavelength range of 930 nm-940 nm is more than or equal to 90 percent,

the light homogenizing layer is a plastic adhesive layer, the plastic adhesive layer is adhered to the light-transmitting glass substrate,

the molding glue layer comprises photoresist and/or imprinting glue;

the thickness range of the light-transmitting glass substrate is 0.3mm-0.6mm, and the thickness of the molding glue layer is 0.03mm-0.1 mm.

3. The micro-lens array dodging structure of claim 1,

the microlenses forming the lens array group are all aspheric surface type microlenses, and the curvature radius of the aspheric surface type microlenses ranges from 5 micrometers to 300 micrometers;

the shapes of a plurality of micro lenses forming the lens array group are basically different, and the shapes of the micro lenses comprise one or more combinations of triangles, quadrangles, pentagons and hexagons.

4. The micro-lens array dodging structure of claim 1,

the lens array group is provided with a plurality of columns, and the center distance between two adjacent micro lenses on any one of the columns is 25-120 mu m;

in one of the interval groups, the curvature radius of the microlens array group is randomly selected;

the distance between the centers of two adjacent micro lenses in one of the interval groups is determined by the selected curvature radius of the two micro lenses and the required formed light spot shape,

the larger the curvature radius selected by the two corresponding microlenses is, the larger the distance between the centers of the two adjacent microlenses is, and the longer the length of the light spot shape in the direction of the connecting line of the centers of the two adjacent microlenses is, and if the curvature radius selected by the two corresponding microlenses is predetermined and the length of the light spot shape in the direction of the connecting line of the centers of the two adjacent microlenses is required to be longer, the larger the distance between the centers of the two adjacent microlenses is.

5. The micro-lens array dodging structure of claim 1,

the distance between two said interval groups is determined by the shape of the light spot required to be formed by the target and the maximum and minimum curvature radius of the micro lens in each said interval group.

6. The micro-lens array dodging structure of claim 1,

if the number of the microlenses in one of the two adjacent groups is N, and the number of the microlenses in the other of the two adjacent groups is M,

7. The micro-lens array dodging structure of claim 1,

in one of the interval groups, the number of the microlenses in the interval group is determined by the value range of the curvature radius of the microlenses, and the larger the value range of the curvature radius of the microlenses is, the larger the number of the microlenses in the interval group is.

8. The micro-lens array dodging structure of claim 1,

and after the interval treatment is carried out on a plurality of micro lenses in the lens array group, a continuous surface is formed on the surface of the light homogenizing layer.

9. A TOF lens, which comprises the micro microlens array dodging structure as claimed in any one of claims 1 to 8, wherein the micro microlens array dodging structure is provided with a lens array group, and an air layer with the thickness ranging from 0.1mm to 0.5mm is arranged between the lens array group and a laser array light source.

10. An apparatus equipped with a TOF lens, comprising the TOF lens according to claim 9, on which the micro-microlens array dodging structure according to any one of claims 1 to 8 is mounted.