CN216359229U

CN216359229U - Chip product cleaning device

Info

Publication number: CN216359229U
Application number: CN202123209788.1U
Authority: CN
Inventors: 陈建鸿; 陈慧贞; 陈宜萱; 林圆香; 陈尹臻
Original assignee: Hefei Qiangyou Technology Co ltd
Current assignee: Hefei Qiangyou Technology Co ltd
Priority date: 2021-12-20
Filing date: 2021-12-20
Publication date: 2022-04-22
Anticipated expiration: 2031-12-20

Abstract

The utility model discloses a chip product cleaning device, and relates to the technical field of chip cleaning. The utility model comprises a cleaning pool, a driving mechanism arranged on the cleaning pool, and a cleaning mechanism connected with the driving mechanism; the cleaning mechanism comprises a vibration assembly arranged on the driving mechanism and a clamping assembly connected to the vibration assembly; the vibration assembly comprises a cleaning arm, a plurality of vibration springs and a vibration motor, wherein the cleaning arm is transversely connected to the driving mechanism, the plurality of vibration springs are connected between the cleaning arm and the clamping assembly, and the vibration motor is arranged on the clamping assembly. The efficiency of cleaning the chip is greatly improved.

Description

Chip product cleaning device

Technical Field

The utility model belongs to the technical field of chip cleaning, and particularly relates to a chip product cleaning device.

Background

In the manufacturing process of the semiconductor chip, the manufacturing steps of the chip are as follows: the method comprises the steps of firstly cutting a copper sheet into required rectangular specifications, then polishing the upper surface, the lower surface and the edge of the copper sheet, cleaning a chip after polishing, bending the copper sheet after cleaning, and finally welding pins on the copper sheet.

The cleaning process is carried out in a wet cleaning table device comprising a plurality of tanks for providing different chemical substance solutions and ammonia water/hydrogen peroxide mixed solutions. At present, in the cleaning procedure of the chip, manual brushing is mostly adopted, and the working efficiency is not high.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a chip product cleaning device, which solves the problems in the technical background.

In order to solve the technical problems, the utility model is realized by the following technical scheme:

the utility model relates to a chip product cleaning device which comprises a cleaning pool, a driving mechanism arranged on the cleaning pool, and a cleaning mechanism connected to the driving mechanism;

the cleaning mechanism comprises a vibration assembly arranged on the driving mechanism and a clamping assembly connected to the vibration assembly;

the vibration assembly comprises a cleaning arm, a plurality of vibration springs and a vibration motor, wherein the cleaning arm is transversely connected to the driving mechanism, the plurality of vibration springs are connected between the cleaning arm and the clamping assembly, and the vibration motor is arranged on the clamping assembly.

Furthermore, the clamping assembly comprises a connecting plate connected to the vibration spring, guide posts arranged at two ends of the connecting plate, and a plurality of clamping plates sleeved on the guide posts.

Furthermore, two symmetrical side surfaces of the clamping plate are provided with placing grooves, magnets are arranged in the placing grooves, and the two magnets are opposite in magnetism.

Further, wash inside being provided with of pond a plurality of baffles and will wasing that pond is inside to be divided into a plurality of son and wash the pond.

Further, the driving mechanism comprises two driving assemblies with the same structure, wherein one driving assembly is horizontally kept with the cleaning pool, and the other driving assembly is vertically kept with the cleaning pool.

Furthermore, the driving assembly comprises two connecting columns which are arranged flatly, fixing plates connected to two ends of each connecting column, a screw rod with two ends respectively movably connected to the two fixing plates, moving blocks respectively sleeved on the screw rod and the connecting columns, and a servo motor arranged on one of the servo motors and used for driving the screw rod to rotate.

Furthermore, a fixing bolt used for fixedly connecting the clamping plates is connected to the guide column.

The utility model has the following beneficial effects:

according to the utility model, through a cleaning mechanism, the cleaning mechanism comprises a vibration assembly arranged on a driving mechanism and a clamping assembly connected to the vibration assembly; the vibration assembly comprises a cleaning arm transversely connected to the driving mechanism, a plurality of vibration springs connected between the cleaning arm and the clamping assembly, and a vibration motor arranged on the clamping assembly; the chip cleaning device has the advantages that the chip is cleaned by the movement of the driving assembly driving the cleaning mechanism, and meanwhile, the vibration is generated through the vibration assembly, so that the chip is cleaned more cleanly, and the cleaning efficiency of the chip is greatly improved.

Of course, it is not necessary for any product in which the utility model is practiced to achieve all of the above-described advantages at the same time.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.

FIG. 1 is a schematic structural diagram of a chip product cleaning apparatus;

FIG. 2 is an enlarged view of portion A of FIG. 1;

FIG. 3 is a schematic view of a clamping assembly according to the present invention;

FIG. 4 is a schematic view of a clamping plate according to the present invention;

FIG. 5 is a schematic view of the driving assembly of the present invention;

in the drawings, the components represented by the respective reference numerals are listed below:

1. a cleaning tank; 2. a partition plate; 3. a drive mechanism; 4. a drive assembly; 5. cleaning the arm; 6. a clamping assembly; 7. a drain valve; 8. a connecting plate; 9. a guide post; 10. a clamping plate; 11. a fixing bolt; 12. a vibration spring; 13. a vibration motor; 14. a moving block; 15. a servo motor; 16. a screw rod; 17. connecting columns; 18. a fixing plate; 19. and a magnet.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1, the present invention is a chip product cleaning apparatus, including a cleaning tank 1, a driving mechanism 3 disposed on the cleaning tank 1, and a cleaning mechanism connected to the driving mechanism 3, wherein the cleaning mechanism is driven by a driving assembly to move to the interior of the cleaning tank 1 for cleaning the chip.

The wiper mechanism is including locating vibration subassembly on the actuating mechanism 3, and connect and be in centre gripping subassembly 6 on the vibrations subassembly, centre gripping subassembly 6 is used for fixed chip, and the vibration subassembly is used for producing to make the chip wash 1 inside abluent cleaner in washing pond.

As shown in fig. 2, the vibration assembly includes a cleaning arm 5 transversely connected to the driving mechanism 3, a plurality of vibration springs 12 connected between the cleaning arm 5 and the clamping assembly 6, and a vibration motor 13 disposed on the clamping assembly 6, and the vibration springs 12 ensure that the clamping assembly has enough space to generate vibration by the vibration motor 13 to make the clamping assembly vibrate.

As shown in fig. 3, the clamping assembly 6 includes a connecting plate 8 connected to the vibrating spring 12, guide posts 9 disposed at two ends of the connecting plate 8, and a plurality of clamping plates 10 sleeved on the guide posts 9, and the chips are placed between the two clamping plates 10, so that the chips can be integrally fixed and cleaned at the same time, which is beneficial to increasing the cleaning efficiency.

As shown in fig. 4, two symmetrical side surfaces of the clamping plates 10 are provided with a placing groove, a magnet 19 is arranged in the placing groove, and the two magnets 19 have opposite magnetism, so that when a chip is fixed, the two clamping plates 10 are attached to each other by the attraction generated by the two magnets 19, and the chip is preliminarily clamped.

Wherein, wash 1 inside being provided with a plurality of baffles 2 in the pond and will wash 1 inside being divided into a plurality of son and wash the pond, inside the pond is washd to the son of difference, places different washing liquids, makes the chip remove respectively to the inside core of the clean pond of son of difference and wash through actuating mechanism's drive, all is connected with a flowing back valve 7 on every son clean pond and is used for saying the washing liquid and discharge.

The driving mechanism 3 comprises two driving assemblies 4 with the same structure, wherein one driving assembly 4 is horizontal to the cleaning pool 1, the other driving assembly 4 is vertical to the cleaning pool 1, and the two driving assemblies 4 respectively drive the cleaning assemblies to vertically move and horizontally move so as to move to the inside of different sub cleaning pools.

The driving assembly 4 comprises two connecting columns 17 which are arranged in a flat mode, fixing plates 18 which are connected to two ends of each connecting column 17, a screw rod 16 of which two ends are respectively movably connected to the two fixing plates 18, moving blocks 14 which are respectively sleeved on the screw rod 16 and the connecting columns 17, and a servo motor 15 which is arranged on one servo motor 15 and used for driving the screw rod 16 to rotate, wherein the moving blocks 14 are in threaded connection with the screw rod 16, the servo motor 15 is driven to drive the screw rod 16 to move, the moving blocks 14 are driven to move along the two connecting columns, and therefore the two driving assemblies 4 are matched to drive the cleaning mechanism to move.

The guide post 9 is connected with a fixing bolt 11 for fixedly connecting the plurality of clamping plates 10, and after the chip on the clamping plate 10 is fixed, the fixing bolt 11 is connected onto the guide post 9 to lock the plurality of clamping plates 10, so that the chip is fixed in one step.

In the description herein, references to the description of "one embodiment," "an example," "a specific example" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The preferred embodiments of the utility model disclosed above are intended to be illustrative only. The preferred embodiments are not intended to be exhaustive or to limit the utility model to the precise embodiments disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the utility model and the practical application, to thereby enable others skilled in the art to best utilize the utility model. The utility model is limited only by the claims and their full scope and equivalents.

Claims

1. A chip product belt cleaning device which characterized in that: the cleaning device comprises a cleaning pool (1), a driving mechanism (3) arranged on the cleaning pool (1), and a cleaning mechanism connected to the driving mechanism (3);

the cleaning mechanism comprises a vibration assembly arranged on the driving mechanism (3) and a clamping assembly (6) connected to the vibration assembly;

the vibration assembly comprises a cleaning arm (5) which is transversely connected to the driving mechanism (3), a plurality of vibration springs (12) which are connected between the cleaning arm (5) and the clamping assembly (6), and a vibration motor (13) which is arranged on the clamping assembly (6).

2. A chip product cleaning device according to claim 1, wherein the clamping assembly (6) comprises a connecting plate (8) connected to the vibration spring (12), guide posts (9) provided at both ends of the connecting plate (8), and a plurality of clamping plates (10) sleeved on the guide posts (9).

3. A chip product cleaning device according to claim 2, characterized in that the holding plate (10) is provided with a placing groove on two symmetrical sides, a magnet (19) is arranged in the placing groove, and the two magnets (19) have opposite magnetism.

4. The chip product cleaning device according to claim 1, wherein a plurality of partition plates (2) are arranged inside the cleaning tank (1) to divide the inside of the cleaning tank (1) into a plurality of sub-cleaning tanks.

5. A chip product cleaning device according to claim 1, characterized in that the drive mechanism (3) comprises two drive assemblies (4) of identical construction, wherein one drive assembly (4) is held horizontally to the cleaning tank (1) and the other drive assembly (4) is held vertically to the cleaning tank (1).

6. The chip product cleaning device according to claim 5, wherein the driving assembly (4) comprises two connecting columns (17) which are horizontally arranged, fixing plates (18) which are connected to two ends of the connecting columns (17), a screw rod (16) which is movably connected to the two fixing plates (18) at two ends respectively, a moving block (14) which is sleeved on the screw rod (16) and the connecting columns (17) respectively, and a servo motor (15) which is arranged on one servo motor (15) and is used for driving the screw rod (16) to rotate.

7. A chip product cleaning apparatus according to claim 2, wherein fixing pins (11) for fixedly connecting a plurality of said holding plates (10) are attached to said guide posts (9).