CN216353836U

CN216353836U - Electrical appliance box for overhauling

Info

Publication number: CN216353836U
Application number: CN202122606038.1U
Authority: CN
Inventors: 代怀志; 文莉辉
Original assignee: Beijing Naura Microelectronics Equipment Co Ltd
Current assignee: Beijing Naura Microelectronics Equipment Co Ltd
Priority date: 2021-10-27
Filing date: 2021-10-27
Publication date: 2022-04-19
Anticipated expiration: 2031-10-27

Abstract

The utility model discloses a maintenance electrical box which is used for being connected between an electronic component of semiconductor process equipment and a control module for controlling the electronic component when the semiconductor process equipment is maintained and controlling the on-off of the electronic component; the first shell is internally provided with a first inner cavity, and a first opening and a second opening which are communicated with the first inner cavity, the first electric connection part, the second electric connection part and the circuit breaker are positioned in the first inner cavity, the first electric connection part and the second electric connection part are respectively electrically connected with the circuit breaker, the circuit breaker is used for controlling the on-off of the first electric connection part and the second electric connection part, the first opening is used for a cable of an electronic component to stretch into the first inner cavity, the first electric connection part is used for being electrically connected with the cable of the electronic component, the second opening is used for the cable of the control module to stretch into the first inner cavity, and the second electric connection part is used for being electrically connected with the cable of the control module. The scheme can improve the maintenance performance.

Description

Electrical appliance box for overhauling

Technical Field

The utility model relates to the technical field of equipment maintenance, in particular to a maintenance electric box.

Background

With the rapid development of science and technology, electronic products such as smart phones and tablet computers have become indispensable products in modern life. These electronic products include a plurality of semiconductor chips therein, which are typically processed using semiconductor processing equipment.

When the semiconductor process equipment needs to be overhauled, the power supply of the semiconductor process equipment is cut off, the related valve is cut off, and the tag locking operation is carried out on the power supply and the valve, so that the semiconductor process equipment is prevented from being damaged or casualty accidents are prevented from being caused by the fact that other people mistakenly start the equipment or mistakenly open the valve.

However, in the related art, the semiconductor process equipment, whether it is a global repair or a local repair, needs to be subjected to a global power-down process. Before the power failure of the semiconductor process equipment, the semiconductor process equipment needs to be cooled firstly, the whole machine of the semiconductor process equipment can be powered off only after the working temperature of the semiconductor process equipment is reduced to the normal temperature, and the temperature of the semiconductor process equipment needs to be restored to the working temperature after the maintenance of the semiconductor process equipment is finished, so that the maintenance time of the semiconductor process equipment is longer due to the maintenance mode of the whole power failure maintenance of the semiconductor process equipment, and the maintainability of the semiconductor process equipment is poorer.

SUMMERY OF THE UTILITY MODEL

The utility model discloses an electric appliance overhauling box, which aims to solve the problem of poor maintainability of semiconductor process equipment.

In order to solve the problems, the utility model adopts the following technical scheme:

a maintenance electrical box is used for being connected between an electronic component of semiconductor process equipment and a control module for controlling the electronic component when the semiconductor process equipment is maintained and controlling the on-off of the electronic component, and comprises a first shell, a first electric connection part, a second electric connection part and a circuit breaker;

be equipped with first inner chamber in the first casing and with first trompil and the second trompil that first inner chamber homogeneous phase communicates, first electric connection portion second electric connection portion with the circuit breaker all is located in the first inner chamber, first electric connection portion with second electric connection portion respectively with the circuit breaker electricity is connected, the circuit breaker is used for control first electric connection portion with the break-make of second electric connection portion, first trompil is used for electronic components's cable stretches into in the first inner chamber, first electric connection portion be used for with electronic components's cable electricity is connected, the second trompil is used for control module's cable stretches into in the first inner chamber, second electric connection portion be used for with control module's cable electricity is connected.

The technical scheme adopted by the utility model can achieve the following beneficial effects:

in the maintenance electric box disclosed by the utility model, the first electric connection part and the second electric connection part are respectively and electrically connected with the circuit breaker, and the circuit breaker can control the first electric connection part and the second electric connection part to be switched on and off. Therefore, when the semiconductor process equipment is overhauled, the overhauling electric box is connected between the electronic component to be overhauled and the control module for controlling the electronic component to be overhauled, and the on-off of the circuits of the electronic component and the control module can be controlled through the overhauling electric box. Therefore, the parts such as circuits, pipelines and the like controlled by the electronic components can be overhauled. In this embodiment, when the circuit breaker controls the first connecting portion and the second connecting portion to open the circuit, the electronic component and the control module open the circuit, and therefore the circuits and the pipelines corresponding to the electronic component are all in the open circuit state, and therefore the semiconductor process equipment does not need to be wholly powered off, so that the maintenance time of the semiconductor process equipment is shortened, and the maintainability of the semiconductor equipment is improved. The maintenance process can also be realized by controlling the circuit conduction of the electronic components and the control module through the maintenance electric box so as to verify the maintenance result.

Drawings

The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the utility model and not to limit the utility model. In the drawings:

fig. 1 and fig. 2 are schematic structural diagrams of a service electrical box disclosed in an embodiment of the present invention.

Description of reference numerals:

100-maintenance electrical box, 110-first shell, 111-first opening, 112-second opening, 113-first inner cavity, 120-first electric connection part, 121-first socket plug group, 122-first terminal group, 130-second electric connection part, 131-second socket plug group, 132-second terminal group, 140-breaker, 151-first cable fixing part, 152-second cable fixing part, 160-second shell, 161-second inner cavity, 170-lock,

210-electronic components, 220-control module.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described below with reference to the specific embodiments of the present invention and the accompanying drawings. It is to be understood that the described embodiments are merely exemplary of the utility model, and not restrictive of the full scope of the utility model. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

The technical solutions disclosed in the embodiments of the present invention are described in detail below with reference to the accompanying drawings.

As shown in fig. 1 and fig. 2, an embodiment of the utility model discloses a service electrical box 100, where the service electrical box 100 is used to be connected between an electronic component 210 of a semiconductor process equipment and a control module 220 for controlling the electronic component 210 when the semiconductor process equipment is serviced, and to control the connection and disconnection of the two. The disclosed service electrical box includes a first housing 110, a first electrical connection 120, a second electrical connection 130, and a circuit breaker 140.

The first housing 110 provides a mounting base for servicing the components of the electrical enclosure 100. The first housing 110 has a first inner cavity 113, and a first opening 111 and a second opening 112 both communicating with the first inner cavity 113. The first electrical connection portion 120, the second electrical connection portion 130, and the circuit breaker 140 are all located in the first inner cavity 113, and the first electrical connection portion 120 and the second electrical connection portion 130 are electrically connected to the circuit breaker 140, respectively. The circuit breaker 140 is used for controlling the first connection portion and the second connection portion to be powered on and powered off.

The first opening 111 is used for a cable of the electronic component 210 to extend into the first inner cavity 113, and the first electrical connection portion 120 is used for electrical connection with the cable of the electronic component 210. The second opening 112 is used for extending a cable of the control module 220 into the first inner cavity 113, and the second electrical connection portion 130 is used for electrically connecting the cable of the control module 220.

In the embodiment disclosed in the present application, the first electrical connection portion 120 and the second electrical connection portion 130 are electrically connected to the circuit breaker 140, and the circuit breaker 140 can control the first electrical connection portion 120 and the second electrical connection portion 130 to open or close the circuit. Therefore, when the semiconductor process equipment is overhauled, the overhauling electric box 100 is connected between the electronic component 210 to be overhauled and the control module 220 for controlling the electronic component 210, so that the on-off of the circuits of the electronic component 210 and the control module 220 can be controlled through the overhauling electric box 100. Therefore, the components such as circuits and pipes controlled by the electronic component 210 can be inspected. When the circuit breaker 140 controls the first connection portion and the second connection portion to be disconnected, the electronic component 210 and the control module 220 are disconnected, and therefore the circuits, pipelines and other devices corresponding to the electronic component 210 are all in a disconnected state, and therefore the whole semiconductor process equipment does not need to be powered off, the maintenance time of the semiconductor process equipment is shortened, and the maintainability of the semiconductor equipment is improved.

In addition, since the first electrical connection portion 120, the second electrical connection portion 130, the circuit breaker 140 and other components are located in the first housing 110, the first housing 110 can protect the first electrical connection portion 120, the second electrical connection portion 130, the circuit breaker 140 and other components, and thus prevent the first electrical connection portion 120, the second electrical connection portion 130, the circuit breaker 140 and other components from being damaged. Meanwhile, the first electrical connection portion 120, the second electrical connection portion 130, the circuit breaker 140 and other components are located in the first housing 110, so that an operator is not prone to mistakenly touching the first electrical connection portion 120, the second electrical connection portion 130, the circuit breaker 140 and other components, and therefore the situation that the operator receives an electric shock due to electric leakage of the first electrical connection portion 120, the second electrical connection portion 130, the circuit breaker 140 and other components is avoided, and life safety of a maintenance worker is improved.

In addition, in the related art, the whole semiconductor process equipment is powered off, and hanging plates need to be arranged on the powered-off parts, so that the maintenance difficulty is high. In the application, only the maintenance area is disconnected, so that other parts do not need to be locked and hung, and the maintenance difficulty of the semiconductor process equipment is low.

The maintenance electrical box 100 disclosed in the embodiment of the application is not limited by the structural layout of semiconductor process equipment, and is convenient for installation of maintenance personnel.

In the embodiment disclosed in the present application, the maintenance process may also be performed by examining and repairing the electrical box 100 to control the circuit conduction of the electronic component 210 and the control module 220, so as to verify the maintenance result,

taking an example of mounting a metal target on a semiconductor sputtering device, the semiconductor sputtering device is provided with a plurality of water paths, the water paths are controlled by a solenoid valve, and the solenoid valve is electrically connected with a Programmable Logic Controller (PLC). Therefore, the cable of the solenoid valve is separated from the cable of the PLC during maintenance, the cable of the solenoid valve extends into the first inner cavity 113 through the first opening 111 and is electrically connected with the first electrical connection portion 120, and the cable of the PLC extends into the first inner cavity 113 through the second opening 112 and is electrically connected with the second electrical connection portion 130. At this time, the circuit breaker 140 can control the solenoid valve to be disconnected from the PLC, so that it is not necessary to power off the entire semiconductor sputtering apparatus.

Optionally, the first electrical connection portion 120 and the second electrical connection portion 130 may be an electrical connection structure such as a socket, a plug, a gold finger, a terminal, or the like, and of course, other electrical connection structures may also be used, which is not limited herein.

In the above embodiment, in the process of maintenance, a maintenance worker accidentally touches the cable extending into the first inner cavity 113, which easily causes a large pulling force at the connection position of the cable and the first electrical connection portion 120 and/or the second electrical connection portion 130, and thus causes the cable to be disconnected from the first electrical connection portion 120 and/or the second electrical connection portion 130.

To this end, in another alternative embodiment, the service electrical box 100 disclosed in this embodiment may further include a cable fixing portion, which may be located in the first inner cavity 113 and may be used to fix the cable extending into the first inner cavity 113. In this scheme, the cable fixed part can be fixed the cable that stretches into first inner chamber 113 to prevent that the maintainer from touching the cable by mistake, and then make the pull power of the junction of cable and first electric connection portion 120 and/or second electric connection portion 130 less, consequently can not cause cable and first electric connection and/or second electric connection portion 130 to break off.

Alternatively, the cable fixing part may be a clip, a buckle, or other parts, and of course, the cable fixing part may also be other parts for fixing the cable, which is not limited herein.

In the above embodiment, the cable entering the first inner chamber 113 from the first opening 111 and the cable entering the first inner chamber 113 from the second opening 112 may be fixed by the same cable fixing portion, but the two cables are easily twisted.

Based on this, in another alternative embodiment, the cable fixing part may include a first cable fixing part 151 and a second cable fixing part 152, the first cable fixing part 151 is disposed between the first opening 111 and the first electrical connection part 120, and the first cable fixing part 151 is used to fix the cable extending from the first opening 111 into the first inner cavity 113.

The second cable fixing part 152 may be disposed between the second opening 112 and the second electrical connection part 130, and the second cable fixing part 152 may be used to fix a cable extending from the second opening 112 into the first inner cavity 113.

In this embodiment, the cable entering the first cavity 113 through the first opening 111 can be fixed by the first cable fixing part 151, and the cable entering the first cavity 113 through the second opening 112 can be fixed by the second cable fixing part 152, at this time, the two cables are separately fixed, so that the two cables are prevented from being wound.

In order to further improve the safety and reliability of servicing the electrical box 100, in another optional embodiment, the servicing electrical box 100 disclosed herein may further include a second housing 160, the second housing 160 may be located within the first housing 110, a second inner cavity 161 is provided within the second housing 160, the circuit breaker 140 may be located in the second inner cavity 161, and the first electrical connection 120 and the second electrical connection 130 are provided on the second housing 160. In this scheme, second casing 160 can further play the effect of protection to first electric connection portion 120, second electric connection portion 130 and circuit breaker 140, has further improved the security and the reliability of examining and repairing electrical box 100.

Since the circuit breaker 140 is a core component of the service electrical box 100, in another optional embodiment, the service electrical box 100 disclosed herein may further include a third housing, the third housing may be located in the second inner cavity 161, the third housing may be opened with a third inner cavity, and the circuit breaker 140 may be located in the third inner cavity. This scheme can further protect circuit breaker 140 to the security and the reliability that the maintenance electrical apparatus was reached have further been improved.

Further, the third housing may be locked to prevent an irrelevant person from breaking the breaker 140.

In an alternative embodiment, the first electrical connection portion 120 may include a first socket plug set 121 and a first terminal set 122, the second housing 160 may be provided with a first mounting hole, the first socket plug set 121 is disposed in the first mounting hole, the first terminal set 122 is disposed in the second inner cavity 161, the first socket plug set 121 and the first terminal set 122 may be electrically connected, the first terminal set 122 may be electrically connected to the circuit breaker 140, and a cable extending from the first opening 111 is plugged into and electrically connected to the first socket plug set 121.

In the related art, the cable of the electronic component 210 and the cable of the control module 220 are usually provided with a socket and a plug, and the socket and the plug are in plugging and matching, so that the connection is convenient, and therefore, in this embodiment, the first socket-plug set 121 matches with the cable connection mode of the electronic component 210, and the connection modes of the socket and the plug are both adopted, so that the connection mode of the maintenance electric box 100 and the electronic component 210 is simpler.

In addition, the socket and the plug belong to standard devices, so that separate manufacture is not needed, and the manufacture cost for overhauling the electric box 100 can be reduced.

In addition, the first terminal set 122 has a simple structure, and the first terminal set 122 is easily connected to the first receptacle plug set 121 and the circuit breaker 140.

In another alternative embodiment, the second electrical connection portion 130 may include a second socket plug group 131 and a second terminal group 132, the second housing 160 may be provided with a second mounting hole, the second socket plug group 131 may be disposed in the second mounting hole, and the second terminal group 132 may be disposed in the second inner cavity 161. The second socket plug set 131 may be electrically connected to the second terminal set 132, the second terminal set 132 may be electrically connected to the circuit breaker 140, and the cable extending from the second opening 112 is plugged into and electrically connected to the second socket plug set 131. The structure of the second electrical connection portion 130 in this embodiment is the same as the structure of the first electrical connection portion 120 in the above embodiment, so that the same effects as in the above embodiment can be achieved, and details are not repeated herein.

In another alternative embodiment, the first opening 111 and the second opening 112 may be respectively disposed on two opposite sidewalls of the first housing 110, in which case two cables extend from two opposite sides of the first housing 110. The first mounting hole and the second mounting hole are respectively opened on two opposite side walls of the second housing 160, and at this time, the first socket plug group 121 and the second socket plug group 131 are disposed on two opposite sides of the second housing 160. The first opening 111 is disposed opposite to the first mounting hole, and the second mounting hole is disposed opposite to the second opening 112.

In this scheme, two strands of cables stretch into from the relative both sides of first casing 110, therefore two strands of cables are far away apart, are difficult to take place to twine, and two strands of cables are difficult to take place phenomenon such as electric of twining simultaneously. In addition, the first socket plug group 121 and the second socket plug group 131 are disposed on two opposite sides of the second housing 160, and the first socket plug group 121 and the second socket plug group 131 are distributed far away from each other, so that interference is not easily generated.

In order to improve the compatibility of the service electrical box 100, in another alternative embodiment, the first socket plug group 121 may include a plurality of plugs and a plurality of sockets, the plurality of plugs and the plurality of sockets may be arranged at intervals, the types of the plurality of plugs may be different, and the types of the plurality of sockets may be different. In this scheme, the first socket plug group 121 includes a plurality of plugs and sockets of different types, and thus can be connected to a plurality of different cables, so that compatibility of the service electrical box 100 can be improved.

In another alternative embodiment, the second socket plug group 131 may include a plurality of plugs and a plurality of sockets, the plurality of plugs and the plurality of sockets may be arranged at intervals, the types of the plurality of plugs may be different, and the types of the plurality of sockets may be different. The effect of this scheme is the same as that of the above scheme, and therefore, the detailed description thereof is omitted.

The plugs and sockets in the first socket plug group 121 and the second socket plug group 131 may be plugs and sockets commonly used in semiconductor process equipment.

The service electrical box 100 disclosed herein may further include a lock 170, and a user of the lock 170 locks the first housing 110, thereby preventing non-service personnel from opening the first housing 110.

When there are a plurality of maintainers, in the maintenance operation process, because do not carry out effectual communication between the maintainer, first casing 110 is opened to one of them maintainer mistake, makes the maintenance operation have great risk easily.

To this end, in another alternative embodiment, the service electrical box 100 may include a plurality of latches 170, and the plurality of latches 170 may be provided at intervals on an outer sidewall of the first housing 110. In this scheme, a plurality of locksets 170 lock the first housing 110 simultaneously, and the key of opening each lockset 170 can be distributed to corresponding operating personnel, that is, one person locks, so that a single service person cannot open the first housing 110, and thus the safety and reliability of servicing the electrical box 100 are further improved.

The lock 170 in the above embodiment may also be a combination lock, each service person corresponds to one password, and the passwords corresponding to all the service persons are the passwords for unlocking the combination lock.

In the above embodiment, the side walls of the first and

second openings

111 and 112 easily scrape the cable extending into the first cavity 113. Based on this, in another alternative embodiment, the first opening 111 and the second opening 112 may be provided with a scratch prevention member therein, and the scratch prevention member may be used to prevent the cable from being scratched.

Optionally, the scratch-proof member may be a structure such as a foam, a plastic plate, or the like, and of course, the scratch-proof member may also be made of other materials, which is not limited herein.

Based on the overhaul electrode box of any one of the embodiments of the utility model, the embodiment of the utility model also discloses a semiconductor process equipment assembly, and the semiconductor process equipment assembly is provided with the overhaul electric box of any one of the embodiments.

In the above embodiments of the present invention, the difference between the embodiments is mainly described, and different optimization features between the embodiments can be combined to form a better embodiment as long as they are not contradictory, and further description is omitted here in view of brevity of the text.

The above description is only an example of the present invention, and is not intended to limit the present invention. Various modifications and alterations to this invention will become apparent to those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the scope of the claims of the present invention.

Claims

1. The overhauling electric box is characterized in that the overhauling electric box (100) is used for being connected between an electronic component (210) of semiconductor process equipment and a control module (220) for controlling the electronic component (210) and controlling the on-off of the electronic component (210) when the semiconductor process equipment is overhauled, and the overhauling electric box (100) comprises a first shell (110), a first electric connection part (120), a second electric connection part (130) and a circuit breaker (140);

a first inner cavity (113) and a first opening (111) and a second opening (112) which are communicated with the first inner cavity (113) are arranged in the first shell (110), the first electric connection part (120), the second electric connection part (130) and the circuit breaker (140) are all positioned in the first inner cavity (113), the first electric connection part (120) and the second electric connection part (130) are respectively and electrically connected with the circuit breaker (140), the circuit breaker is used for controlling the connection and disconnection of the first electric connection part (120) and the second electric connection part (130), the first opening (111) is used for enabling a cable of the electronic component (210) to extend into the first inner cavity (113), the first electric connection part (120) is used for electrically connecting with the cable of the electronic component (210), and the second opening (112) is used for enabling the cable of the control module (220) to extend into the first inner cavity (113), the second electrical connection (130) is for electrical connection with a cable of the control module (220).

2. The service electrical box of claim 1, further comprising a cable retention portion in the first interior cavity for retaining a cable extending into the first interior cavity.

3. The service electrical box of claim 2, wherein the cable fixing portion comprises a first cable fixing portion (151) and a second cable fixing portion (152), the first cable fixing portion (151) being disposed between the first opening (111) and the first electrical connection portion (120), the first cable fixing portion (151) being for fixing a cable extending from the first opening (111) into the first inner cavity (113);

the second cable fixing part (152) is arranged between the second opening hole (112) and the second electric connection part (130), and the second cable fixing part (152) is used for fixing a cable extending into the first inner cavity (113) from the second opening hole (112).

4. The service electrical box of claim 1, wherein the service electrical box (100) further comprises a second housing (160), the second housing (160) being located within the first housing (110), a second interior cavity (161) being located within the second housing (160), the circuit breaker (140) being located in the second interior cavity (161), the first electrical connection (120) and the second electrical connection (130) being disposed on the second housing (160).

5. The service electrical box according to claim 4, wherein the first electrical connection portion (120) comprises a first receptacle plug set (121) and a first terminal set (122), the second housing (160) is provided with a first mounting hole, the first receptacle plug set (121) is disposed in the first mounting hole, the first terminal set (122) is disposed in the second inner cavity (161), the first receptacle plug set (121) is electrically connected with the first terminal set (122), the first terminal set (122) is electrically connected with the circuit breaker (140), and a cable extending from the first opening (111) is plugged into and electrically connected with the first receptacle plug set (121); and/or the presence of a gas in the gas,

the second electric connection portion (130) comprises a second socket plug group (131) and a second terminal group (132), the second housing (160) is provided with a second mounting hole, the second socket plug group (131) is arranged in the second mounting hole, the second terminal group (132) is arranged in the second inner cavity (161), the second socket plug group (131) is electrically connected with the second terminal group (132), the second terminal group (132) is electrically connected with the circuit breaker (140), and a cable extending into the second opening (112) is plugged into the second socket plug group (131) and is electrically connected with the second socket plug group.

6. Service electrical box according to claim 5, characterized in that said first opening (111) and said second opening (112) are provided on two opposite side walls of said first casing (110), respectively, said first mounting hole and said second mounting hole are provided on two opposite side walls of said second casing (160), respectively, said first opening (111) being provided opposite said first mounting hole, said second mounting hole being provided opposite said second opening (112).

7. Service electrical box according to claim 5, characterized in that said first group of socket plugs (121) comprises a plurality of plugs and a plurality of sockets, said plurality of plugs and said plurality of sockets being arranged at intervals and said plurality of plugs being of different types and said plurality of sockets being of different types; and/or the presence of a gas in the gas,

the second socket plug group (131) comprises a plurality of plugs and a plurality of sockets, the plugs and the sockets are arranged at intervals, the types of the plugs are different, and the types of the sockets are different.

8. The service appliance box of claim 1, wherein the service appliance box (100) comprises a plurality of locks (170), the plurality of locks (170) being spaced apart from an outer sidewall of the first housing (110), the locks (170) being configured to lock the first housing (110).

9. The service electrical box of claim 4, wherein the service electrical box (100) further comprises a third housing, the third housing being located in the second interior cavity (161), the third housing opening a third interior cavity, the circuit breaker (140) being located in the third interior cavity.

10. Service electrical box according to claim 1, characterized in that a scratch protection is provided in both the first (111) and the second (112) opening for preventing the cables from scratching.