CN216309306U - Improved ceramic capacitor pressure sensor - Google Patents
Improved ceramic capacitor pressure sensor Download PDFInfo
- Publication number
- CN216309306U CN216309306U CN202122517952.9U CN202122517952U CN216309306U CN 216309306 U CN216309306 U CN 216309306U CN 202122517952 U CN202122517952 U CN 202122517952U CN 216309306 U CN216309306 U CN 216309306U
- Authority
- CN
- China
- Prior art keywords
- elastic diaphragm
- ceramic
- sensor
- pressure sensor
- induction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Abstract
The utility model relates to an improved ceramic capacitor pressure sensor, which comprises a ceramic substrate with a concave cavity on one side, wherein an elastic diaphragm covering the concave cavity is bonded on one side of the ceramic substrate, a substrate electrode is arranged on the inner bottom surface of the concave cavity, a diaphragm electrode corresponding to the substrate electrode is arranged on the inner side surface of the elastic diaphragm, and a pair of centrosymmetric induction inductors is arranged on the outer side surface of the elastic diaphragm. The utility model adopts a pair of induction inductors made of metal sheets and pasted on the outer surface of the elastic diaphragm, and can effectively offset the parasitic capacitance and the uneven electric field part of the sensor element by utilizing the parasitic inductance generated by the induction inductors, thereby improving the testing precision of the sensor and greatly improving the use sensitivity of the sensor.
Description
Technical Field
The utility model relates to the technical field of sensors, in particular to an improved ceramic capacitor pressure sensor applied to engine oil pressure testing of a vehicle engine.
Background
The sensor is used as an information source of an automobile electronic control system and is a key component of the automobile electronic control system. Whether various information on the car can be accurately measured and controlled is an important factor for measuring the control level of the modern high-grade car. The ceramic capacitor technology has the advantages of moderate cost, good corrosion resistance, strong medium compatibility and the like, and the pressure sensor adopting the ceramic capacitor as the pressure-sensitive element is widely applied to pressure detection of various media such as water, gas and liquid, and is particularly suitable for severe working condition environments of automobiles.
The engine oil pressure sensor is arranged on a main oil gallery of an engine, when the engine runs, the pressure of the engine oil is detected by the pressure measuring device, a pressure signal is converted into an electric signal and sent to the signal processing circuit, the electric signal is amplified through voltage and current, the amplified pressure signal is connected to the oil pressure indicating gauge through a signal wire, the ratio of the currents passing through two coils in the oil pressure indicating gauge is changed, and therefore the engine oil pressure of the engine is indicated. Nowadays, automobile electronic technology is rapidly developed, the monitoring requirement on a sensor is higher and higher, and particularly in the sixth stage of China, an ECU (electronic control Unit) needs a more accurate absolute pressure signal to accurately control the oil injection time so as to improve the emission. Most of engine oil pressure sensors in the current market have the precision of 2% in the full temperature zone and cannot meet the requirement that the pressure error of the full temperature zone in the sixth stage of China is lower than 1%. The basic reason that the accuracy of the existing ceramic capacitance pressure sensor does not reach the standard is still the problem that the capacitive sensor is influenced by the edge effect, so that the improvement of the edge effect of the ceramic capacitance pressure sensor and the development of a ceramic pressure sensor with higher accuracy have very important practical significance.
Disclosure of Invention
The technical problem to be solved by the utility model is as follows: in order to overcome the defects in the prior art, the utility model provides an improved ceramic capacitance pressure sensor, which is used for improving the edge effect of the sensor and improving the sensitivity of a sensing system.
The technical scheme adopted by the utility model for solving the technical problems is as follows: the utility model provides an improved generation ceramic capacitor pressure sensor, has the ceramic base member of cavity including a side, a ceramic base member side bonds and has the elastic diaphragm who covers in the cavity, the cavity in the bottom surface be equipped with the base plate electrode, the elastic diaphragm medial surface is equipped with the diaphragm electrode that corresponds with the base plate electrode, the elastic diaphragm lateral surface be equipped with a pair of centrosymmetric induction inductance.
Preferably, the induction inductor is crescent and is arranged symmetrically relative to the center of the elastic diaphragm.
Furthermore, the elastic diaphragm and the side face of the ceramic substrate are bonded through a glass bonding agent.
The utility model has the beneficial effects that: the utility model adopts a pair of induction inductors made of metal sheets and pasted on the outer surface of the elastic diaphragm, and can effectively offset the parasitic capacitance and the uneven electric field part of the sensor element by utilizing the parasitic inductance generated by the induction inductors, thereby improving the testing precision of the sensor and greatly improving the use sensitivity of the sensor.
Drawings
The utility model is further described with reference to the following figures and embodiments.
Fig. 1 is a schematic structural view of the present invention.
Fig. 2 is a schematic bottom view of the structure of fig. 1.
In the figure: 1. ceramic base, 2, concave cavity, 3, elastic membrane, 4, substrate electrode, 5, membrane electrode, 6, induction inductance.
Detailed Description
The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic views illustrating only the basic structure of the present invention in a schematic manner, and thus show only the constitution related to the present invention.
As shown in fig. 1 and 2, the improved ceramic capacitor pressure sensor comprises a ceramic substrate 1 with a cavity 2 on one side, an elastic diaphragm 3 covering the cavity 2 is bonded on one side of the ceramic substrate 1 through a glass bonding agent, a substrate electrode 4 is arranged on the inner bottom surface of the cavity 2, a diaphragm electrode 5 corresponding to the substrate electrode 4 is arranged on the inner side surface of the elastic diaphragm 3, a pair of induction inductors 6 are arranged on the outer side surface of the elastic diaphragm 3, and the induction inductors 6 are crescent-shaped metal sheets and are symmetrically arranged relative to the center of the elastic diaphragm 3.
The ceramic capacitance pressure sensor belongs to a parallel plate capacitor, and the electric field of the ceramic capacitance pressure sensor is uniformly distributed in a space enclosed by two plates of a substrate electrode 4 and a diaphragm electrode 5, but the ideal situation is only an assumption after capacitance calculation is simplified. The edge part of the actual electric field is not uniform and is easily influenced by the edge effect, and the sensitivity of the actual sensor is lower than the theoretical condition.
In an ideal situation, the electric field of the conventional parallel plate capacitor is uniformly distributed, but in practical use, the electric field of the parallel plate capacitor is only uniformly distributed in the middle part of the parallel plate, while at the edge of the capacitor, the electric lines of the electric field are bent and dispersed, the phenomenon that the dispersed electric field exists at the edge of the capacitor is called the fringe effect of the capacitor, L is called fringe scattering electric field line width, and generally, the larger L is, the more obvious the fringe effect is. Due to the existence of the capacitor fringe effect, an edge additional capacitance exists in the parallel plates, namely the actual capacitance value of the parallel plates is larger than the capacitance value calculated theoretically, and the fringe effect becomes a main limiting factor for the use of the capacitance sensor.
In order to overcome the edge effect, the utility model adopts the mode that the pair of induction inductors 6 made of metal sheets are pasted on the outer surface of the elastic diaphragm 3, and the parasitic inductance generated by the induction inductors 6 can effectively offset the parasitic capacitance and the uneven electric field part of the sensor element, thereby greatly improving the sensitivity.
Through test comparison of the sensor with the structure, the edge parasitic capacitance of the sensor is obviously improved, the edge effect is greatly reduced after the induction inductor 6 is added, the test precision of the sensor is effectively improved, the average pressure deviation is reduced from 1% to 2.5% per thousand, the probability that the pressure deviation of a single sensor exceeds 1% is less than 60PPM, and the design requirement is met.
In light of the foregoing description of the preferred embodiment of the present invention, many modifications and variations can be made by the worker in the light of the above teachings without departing from the spirit of the utility model. The technical scope of the present invention is not limited to the content of the specification, and must be determined according to the scope of the claims.
Claims (3)
1. The utility model provides an improved generation ceramic capacitor pressure sensor, includes that a side has the ceramic base member of cavity, a side bonding of ceramic base member has the elastic diaphragm who covers in the cavity, characterized by: the bottom surface in the cavity is provided with a substrate electrode, the inner side surface of the elastic membrane is provided with a membrane electrode corresponding to the substrate electrode, and the outer side surface of the elastic membrane is provided with a pair of centrosymmetric induction inductors.
2. The improved ceramic capacitive pressure transducer of claim 1, wherein: the induction inductor is crescent and is arranged symmetrically relative to the center of the elastic diaphragm.
3. The improved ceramic capacitive pressure transducer of claim 1, wherein: the elastic diaphragm is bonded with the side face of the ceramic substrate through a glass bonding agent.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122517952.9U CN216309306U (en) | 2021-10-19 | 2021-10-19 | Improved ceramic capacitor pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122517952.9U CN216309306U (en) | 2021-10-19 | 2021-10-19 | Improved ceramic capacitor pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216309306U true CN216309306U (en) | 2022-04-15 |
Family
ID=81115248
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122517952.9U Active CN216309306U (en) | 2021-10-19 | 2021-10-19 | Improved ceramic capacitor pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216309306U (en) |
-
2021
- 2021-10-19 CN CN202122517952.9U patent/CN216309306U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR102305128B1 (en) | Device for detecting residual braking torque in a vehicle with disc brakes | |
| US6810746B2 (en) | Sensor arrangement with pressure detector and sensor circuit | |
| CN209166695U (en) | A kind of three backup pressure sensors | |
| CN202886050U (en) | Process fluid pressure measuring system | |
| CN207366110U (en) | A kind of high sensibility pressure transducer | |
| CN212807437U (en) | Core body of differential pressure sensor | |
| CN207636232U (en) | A kind of strain-type differential pressure pickup | |
| CN102323004A (en) | A kind of switching value differential pressure pick-up | |
| CN216309306U (en) | Improved ceramic capacitor pressure sensor | |
| CN212779682U (en) | Capacitive pressure sensor | |
| CN112477839A (en) | Reluctance type automobile brake pad thickness detection structure | |
| CN115979497B (en) | Small-diameter high-pressure sensor, manufacturing method thereof and sensor diameter reduction method | |
| CN2802486Y (en) | High-temp anti-corrosion flat-die micro-pressure transmitter | |
| CN201464117U (en) | Electronic oil pressure sensor | |
| CN202126325U (en) | Switching value differential pressure sensor | |
| CN201803816U (en) | Combined transducer force-measuring device | |
| TWI382583B (en) | Diagnosis system for internal state of fuel cell | |
| CN110608779A (en) | Low-power consumption ultrasonic water meter design realized based on resistance strain gauge | |
| CN202533212U (en) | Electronic oil pressure sensor with dynamic equivalent mode | |
| CN204881935U (en) | Capacitanc pressure sensing device | |
| CN2426821Y (en) | Fluid media pressure sensor for vehicle and ship | |
| CN219675140U (en) | Engine oil pressure and temperature sensor | |
| CN203629635U (en) | Oil level detecting device | |
| CN217483635U (en) | Sensor for measuring temperature and pressure of water meter | |
| CN207557754U (en) | A kind of detection device of electronic type vacuum pressure controller |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |