CN216274458U - Crystal furnace circulating water cooling system - Google Patents
Crystal furnace circulating water cooling system Download PDFInfo
- Publication number
- CN216274458U CN216274458U CN202122102017.6U CN202122102017U CN216274458U CN 216274458 U CN216274458 U CN 216274458U CN 202122102017 U CN202122102017 U CN 202122102017U CN 216274458 U CN216274458 U CN 216274458U
- Authority
- CN
- China
- Prior art keywords
- crystal furnace
- furnace body
- cooling system
- water
- circulating water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 88
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 83
- 238000001816 cooling Methods 0.000 title claims abstract description 28
- 239000012530 fluid Substances 0.000 claims abstract description 30
- 238000007599 discharging Methods 0.000 claims description 14
- 230000003014 reinforcing effect Effects 0.000 claims description 9
- 238000007789 sealing Methods 0.000 claims description 7
- 239000011229 interlayer Substances 0.000 claims description 6
- 230000017525 heat dissipation Effects 0.000 abstract description 16
- 230000000694 effects Effects 0.000 abstract description 9
- 239000000463 material Substances 0.000 description 5
- 239000010410 layer Substances 0.000 description 4
- 238000010079 rubber tapping Methods 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000012809 cooling fluid Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
Images
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model provides a crystal furnace circulating water cooling system, includes the crystal furnace body, is located the side door of crystal furnace body one side, sets up on the crystal furnace body and is located a plurality of water inlets of side direction open-ended one side, sets up on the crystal furnace body and is located a plurality of delivery ports of side direction open-ended opposite side to and connect a plurality of fluid pipelines of a plurality of water inlets and a plurality of delivery ports respectively, the lateral wall of crystal furnace body has the intermediate layer, the fluid pipeline sets up in the intermediate layer. Therefore, the crystal furnace body is internally provided with a plurality of fluid pipelines in parallel, and a plurality of water inlets and a plurality of water outlets are correspondingly arranged, so that the heat dissipation pressure of each fluid pipeline is reduced, and the heat dissipation effect is improved.
Description
Technical Field
The utility model relates to the field of single crystal material production equipment, in particular to a circulating water cooling system of a crystal furnace.
Background
A single crystal furnace is an apparatus for growing a crystal ingot by pulling up a polycrystalline material such as polycrystalline silicon or the like in an atmosphere of an inert gas (mainly nitrogen or helium) by a graphite heater or the like and then by a Czochralski method. The crystal bar can be used for manufacturing dislocation-free single crystal materials. The circumferential outer side of the single crystal furnace is provided with a spiral cooling channel, and cooling fluid flows in the cooling channel to cool the single crystal furnace and materials in the single crystal furnace.
Patent CN212688230U discloses a single crystal furnace, which is a cylindrical structure as a whole, and a single-in single-out cooling flow channel is arranged on the circumferential outer side of the single crystal furnace. The part of the cooling flow channel close to the water inlet has a good heat dissipation effect, and the part of the cooling flow channel close to the water outlet has a relatively hot water, so that the heat dissipation effect is poor.
SUMMERY OF THE UTILITY MODEL
In view of the above, the present invention provides a crystal furnace circulating water cooling system with multiple fluid pipelines and a good heat dissipation effect, so as to solve the above problems.
The utility model provides a crystal furnace circulating water cooling system, includes the crystal furnace body, is located the side door of crystal furnace body one side, sets up on the crystal furnace body and is located a plurality of water inlets of side direction open-ended one side, sets up on the crystal furnace body and is located a plurality of delivery ports of side direction open-ended opposite side to and connect a plurality of fluid pipelines of a plurality of water inlets and a plurality of delivery ports respectively, the lateral wall of crystal furnace body has the intermediate layer, the fluid pipeline sets up in the intermediate layer.
Furthermore, the height of each water inlet is smaller than that of the corresponding connected water outlet.
Further, the fluid conduit is helical.
Further, the fluid pipelines are parallel.
Furthermore, each water outlet is connected with a water pool through a water pipe, and the water pool is connected with the water inlet through a water pipe and a water pump.
Further, still include a discharging pipe, the discharging pipe protrusion sets up in the side of crystal growing furnace body keeping away from the side door.
Furthermore, a discharge hole is formed in the middle of the discharge pipe, a third caulking groove is formed in the outer side of the discharge hole on the first end face, far away from the crystal furnace body, of the discharge pipe, and a second sealing ring is arranged in the third caulking groove.
Furthermore, a plurality of connecting holes are formed in the outer side of the third caulking groove on the first end face of the discharging pipe, a nut groove is concavely formed in the position, close to the first end face, of the circumferential outer side wall of the discharging pipe, a stud penetrates through the connecting holes and then is located in the nut groove, and a nut is located in the nut groove and is in threaded connection with the stud.
Furthermore, an L-shaped reinforcing block is further arranged between the discharge pipe and the crystal furnace body, one side of the reinforcing block is welded with the discharge pipe, and the other side of the reinforcing block is welded with the crystal furnace body.
Compared with the prior art, the crystal furnace circulating water cooling system comprises a crystal furnace body, a side door positioned on one side of the crystal furnace body, a plurality of water inlets arranged on the crystal furnace body and positioned on one side of a lateral opening, a plurality of water outlets arranged on the crystal furnace body and positioned on the other side of the lateral opening, and a plurality of fluid pipelines respectively connected with the plurality of water inlets and the plurality of water outlets, wherein the side wall of the crystal furnace body is provided with an interlayer, and the fluid pipelines are arranged in the interlayer. Therefore, the crystal furnace body is internally provided with a plurality of fluid pipelines in parallel, and a plurality of water inlets and a plurality of water outlets are correspondingly arranged, so that the heat dissipation pressure of each fluid pipeline is reduced, and the heat dissipation effect is improved.
Drawings
Embodiments of the utility model are described below with reference to the accompanying drawings, in which:
FIG. 1 is a schematic perspective view of a circulating water cooling system of a crystal furnace according to the present invention.
FIG. 2 is a partial schematic view of a circulating water cooling system of a crystal furnace provided by the utility model.
Fig. 3 is an enlarged schematic view of a portion a in fig. 2.
FIG. 4 is a schematic structural diagram of a discharge pipe of the circulating water cooling system of the crystal furnace provided by the utility model.
FIG. 5 is a schematic view of a circulating water cooling system of a crystal furnace provided by the utility model.
Detailed Description
Specific embodiments of the present invention will be described in further detail below based on the drawings. It should be understood that the description herein of embodiments of the utility model is not intended to limit the scope of the utility model.
Referring to fig. 1 to 3, the circulating water cooling system of a crystal furnace provided by the present invention includes a crystal furnace body 10, a side door 20, a feeding pipe 30 and a discharging pipe 40.
The crystal furnace body 10 is substantially cylindrical in shape, and one side thereof is opened with a lateral opening in the chord direction. A connecting frame 11 is arranged on the circumferential outer side of the lateral opening of the crystal furnace body 10 in a protruding mode; the side door 20 includes a side door body 21 and a cavity 22 provided in the middle of the side door 20. The side door body 21 is abutted against the connecting frame 11, and the concave cavity part 22 is provided with an arc-shaped concave cavity in a concave manner towards one side of the crystal furnace body 10. The concave cavity and the inner cavity of the crystal furnace body 10 form a round cavity, and the flowing or moving of materials in the crystal furnace body 10 is not influenced.
The bottom of the crystal furnace body 10 is also connected with a plurality of support legs 12.
A plurality of connecting grooves 13 are formed in the two sides of the connecting frame 11 and the side door 20 along the thickness direction, and a locking mechanism 60 is partially located in the connecting grooves 13 to lock the side door 20 to the connecting frame 11.
The connecting frame 11 and the side door 20 are rotatably connected at the same side by hinges 70.
The locking mechanism 60 includes a ball support base 61 disposed on a side of the connecting groove 13 of the connecting frame 11 away from the side door 20, a ball screw 13 with one end rotatably disposed in the ball support base 61, and a lock nut 63 threadedly coupled to the ball screw 13. The lock nut 63 abuts against the side door body 21.
The ball screw 13 has a ball pivot portion rotatably disposed in the ball support base 61 and a screw portion movably disposed in the connecting groove 13.
The side door 20 is provided with first caulking groove in the circumference outside of cavity towards one side of crystal furnace body 10, and connecting frame 11 is provided with the second caulking groove in the open-ended circumference outside of side direction towards one side of side door 20, is provided with first sealing washer in first caulking groove or the second caulking groove, and locking mechanical system 60 is sealed through first sealing washer realization between side door 20 and the connecting frame 11 on locking side door 20 to connecting frame 11.
The side of the side door 20 away from the crystal furnace body 10 and the side away from the hinge 70 are provided with handles 90 for the user to operate.
The middle part of the cavity part 22 is provided with a transparent observation window 80, which is convenient for a user to observe the working state in the crystal furnace body 10.
The feeding pipe 30 is arranged on the top surface of the crystal furnace body 10 in a protruding way, and the discharging pipe 40 is arranged on one side of the crystal furnace body 10 far away from the side door 20 in a protruding way.
Referring to fig. 4, a discharge hole 41 is formed in the middle of the discharge tube 40, a third caulking groove 42 is formed on the first end surface of the discharge tube 40 away from the crystal furnace body 10 and outside the discharge hole 41, a second sealing ring is disposed in the third caulking groove 42, and a plurality of connection holes 43 are formed on the first end surface of the discharge tube 40 and outside the third caulking groove 42. An outer pipe is connected to the tapping pipe 40 via flanges and screw bolts. The stud penetrates the flange and the connecting hole 43 and is in threaded connection with a nut, and when the flange abuts against the discharging pipe 40, the second sealing ring realizes sealing between the flange and the discharging pipe 40.
The circumferential outer side wall of the tapping pipe 40 is concavely provided with a nut groove 44 at a position close to the first end face, and the depth of the nut groove 44 is equivalent or equal to the distance from the third caulking groove 42 to the circumferential edge of the tapping pipe 40, so that the stud is located in the nut groove 44 after passing through the connecting hole 43. The nut is located in the nut groove 44 and is threadedly coupled to a stud passing through the flange and the coupling hole 43.
An L-shaped reinforcing block 45 is welded between the discharge pipe 40 and the crystal furnace body 10, one side of the reinforcing block 45 is welded with the discharge pipe 40, and the other side is welded with the crystal furnace body 10. The reinforcing block 45 can reinforce the connection reliability of the tapping pipe 40.
The existing crystal furnace is only provided with one heat dissipation flow channel, the heat dissipation effect of the part of the heat dissipation flow channel close to the water inlet is better, and the heat dissipation effect of the part close to the water outlet is poorer.
Referring to fig. 5, in the present embodiment, a plurality of water inlets 51 are disposed on one side of the crystal furnace body 10 with the lateral opening, a plurality of water outlets 52 are disposed on the other side of the lateral opening, a sandwich layer is disposed on the sidewall of the crystal furnace body 10, each water inlet 51 is communicated with one water outlet 52 through a fluid pipe 53, the fluid pipe 53 is disposed in the sandwich layer, and the height of each water inlet 51 is smaller than the height of the corresponding water outlet 52.
The fluid conduit 53 is spirally rising.
The water outlet 52 is connected to a water tank through a water pipe, and the water tank is connected to the water inlet 51 through a water pipe and a water pump, so that the circulation cooling is realized.
Thus, the plurality of parallel fluid pipes 53 are arranged, so that the heat dissipation pressure of each fluid pipe 53 is reduced, and the heat dissipation effect is better.
The plurality of water inlets 51 are positioned on the same side, and the plurality of water outlets 52 are positioned on the other side, so that the water pipes can be conveniently connected.
In other embodiments, a communication channel may be disposed in each of the side doors 20 corresponding to each of the fluid channels 53, and the communication channel is communicated with the fluid channels 53, so that the fluid channels 53 may be disposed around each other, and the number of turns of the fluid channels 53 may be increased, thereby improving the heat dissipation efficiency.
Compared with the prior art, the crystal furnace circulating water cooling system comprises a crystal furnace body 10, a side door 20 positioned on one side of the crystal furnace body 10, a plurality of water inlets 51 arranged on the crystal furnace body 10 and positioned on one side of a lateral opening, a plurality of water outlets 52 arranged on the crystal furnace body 10 and positioned on the other side of the lateral opening, and a plurality of fluid pipelines 53 respectively connected with the plurality of water inlets 51 and the plurality of water outlets 52, wherein an interlayer is arranged on the side wall of the crystal furnace body 10, and the fluid pipelines 53 are arranged in the interlayer. Therefore, the crystal furnace body 10 is provided with a plurality of fluid pipelines 53 in parallel, a plurality of water inlets 51 and a plurality of water outlets 52 correspondingly, so that the heat dissipation pressure of each fluid pipeline 53 is reduced, and the heat dissipation effect is improved.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the scope of the present invention, and any modifications, equivalents or improvements that are within the spirit of the present invention are intended to be covered by the following claims.
Claims (9)
1. The utility model provides a crystal growing furnace circulating water cooling system which characterized in that: the crystal furnace comprises a crystal furnace body, a side door positioned on one side of the crystal furnace body, a plurality of water inlets arranged on the crystal furnace body and positioned on one side of a side opening, a plurality of water outlets arranged on the crystal furnace body and positioned on the other side of the side opening, and a plurality of fluid pipelines respectively connected with the water inlets and the water outlets, wherein the side wall of the crystal furnace body is provided with an interlayer, and the fluid pipelines are arranged in the interlayer.
2. The crystal furnace circulating water cooling system as claimed in claim 1, wherein: the height of each water inlet is smaller than that of the corresponding connected water outlet.
3. The crystal furnace circulating water cooling system as claimed in claim 2, wherein: the fluid conduit is helical.
4. The crystal furnace circulating water cooling system of claim 3, wherein: the fluid pipelines are parallel to each other.
5. The crystal furnace circulating water cooling system as claimed in claim 1, wherein: each water outlet is connected with a water pool through a water pipe, and the water pool is connected with the water inlet through a water pipe and a water pump.
6. The crystal furnace circulating water cooling system as claimed in claim 1, wherein: the crystal furnace further comprises a discharge pipe, and the discharge pipe is arranged on one side of the crystal furnace body far away from the side door in a protruding mode.
7. The crystal furnace circulating water cooling system of claim 6, wherein: the middle part of the discharging pipe is provided with a discharging port, a third caulking groove is arranged on the outer side of the discharging port on the first end face of the discharging pipe, which is far away from the crystal furnace body, and a second sealing ring is arranged in the third caulking groove.
8. The crystal furnace circulating water cooling system of claim 7, wherein: a plurality of connecting holes are formed in the first end face of the discharging pipe and outside the third caulking groove, a nut groove is concavely formed in the position, close to the first end face, of the circumferential outer side wall of the discharging pipe, a stud penetrates through the connecting holes and then is located in the nut groove, and a nut is located in the nut groove and in threaded connection with the stud.
9. The crystal furnace circulating water cooling system of claim 6, wherein: and an L-shaped reinforcing block is further arranged between the discharge pipe and the crystal furnace body, one side of the reinforcing block is welded with the discharge pipe, and the other side of the reinforcing block is welded with the crystal furnace body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122102017.6U CN216274458U (en) | 2021-09-02 | 2021-09-02 | Crystal furnace circulating water cooling system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122102017.6U CN216274458U (en) | 2021-09-02 | 2021-09-02 | Crystal furnace circulating water cooling system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216274458U true CN216274458U (en) | 2022-04-12 |
Family
ID=81062746
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122102017.6U Expired - Fee Related CN216274458U (en) | 2021-09-02 | 2021-09-02 | Crystal furnace circulating water cooling system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216274458U (en) |
-
2021
- 2021-09-02 CN CN202122102017.6U patent/CN216274458U/en not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN210318610U (en) | Ultrahigh pressure jacket heat-insulation ball valve for heat-insulation pipeline | |
| CN216274458U (en) | Crystal furnace circulating water cooling system | |
| CN210739414U (en) | Pipeline flow control device | |
| CN215925140U (en) | Crystal furnace with side door | |
| CN209977499U (en) | Indoor water supply and drainage pipeline connecting structure | |
| CN215713516U (en) | Crystal furnace with pipeline supporting function | |
| CN110804732A (en) | Plasma CVD apparatus | |
| CN213147008U (en) | Heat collection water tank structure for pressure-bearing solar water heater | |
| CN206319848U (en) | A kind of vortex tube is incubated Sampling driller | |
| CN212713838U (en) | Single crystal growing furnace water-cooling jacket device | |
| CN214036921U (en) | Make things convenient for flow control's low temperature stop valve | |
| CN214645205U (en) | Plastic tubing water cooling plant | |
| CN111692438A (en) | Integral double-circuit vacuum tube | |
| CN102927604B (en) | Header cold water pipe open communication heat absorption heat exchanger and manufacturing process thereof | |
| CN221518496U (en) | Cooling device for raw material belt production | |
| CN211925135U (en) | Novel steel pipe joint | |
| CN220417506U (en) | High-efficient air-cooler with even exhaust function | |
| CN219425449U (en) | Pipeline liquid nitrogen expanding and welding seam stress relieving equipment | |
| CN219568880U (en) | Large-volume concrete foundation heat dissipation structure with steel structure | |
| CN212564790U (en) | Integral double-circuit vacuum tube | |
| CN217502725U (en) | No dead angle runner stop valve body | |
| CN221461347U (en) | Integrated intelligent direct-connection water supply equipment | |
| CN221640036U (en) | Gate valve installation is with supplementary counterpoint structure | |
| CN212563801U (en) | Mounting structure of vertical multistage centrifugal pump mouth of pipe flange | |
| CN212006318U (en) | Special steel pipe structure of air conditioner reservoir |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20220412 |