CN212713838U

CN212713838U - Single crystal growing furnace water-cooling jacket device

Info

Publication number: CN212713838U
Application number: CN202021517405.XU
Authority: CN
Inventors: 倪建刚
Original assignee: Zhejiang Haoxiang Precision Machinery Manufacturing Co ltd
Current assignee: Zhejiang Haoxiang Precision Machinery Manufacturing Co ltd
Priority date: 2020-07-28
Filing date: 2020-07-28
Publication date: 2021-03-16
Anticipated expiration: 2030-07-28

Abstract

The utility model discloses a water-cooling jacket device of a single crystal furnace, which comprises a jacket body, wherein a base is fixed at the bottom of the jacket body, the jacket body is of an annular barrel-shaped structure, a drain pipe and a water inlet pipe are communicated on the jacket body, the drain pipe is respectively communicated with one end of the water inlet pipe and a water guide pipe A and a water guide pipe B, one end of the water guide pipe A is connected with a water inlet pump, one end of the water guide pipe B is connected with a water discharge pump, the water inlet pump and the water discharge pump are both communicated with a water tank, and a refrigerating pipe of a refrigerator is; the utility model has the advantages of reasonable design, convenient to use, the interior intermediate layer of cover adopts folding alternating expression design, increases the time that rivers are detained in original space, also guarantees cold water simultaneously and is in the active state, lets heat transfer more thoroughly to at the internal wall of cover around being provided with a plurality of fin boards, every fin version fretwork and cover body intercommunication, let the interbedded cold water of cover body can enter into the fin board, thereby improve the efficiency of heat transfer.

Description

Single crystal growing furnace water-cooling jacket device

Technical Field

The utility model belongs to the technical field of single crystal growing furnace, specifically be a single crystal growing furnace water-cooling jacket device.

Background

The single crystal furnace is a device for melting polycrystalline materials such as polycrystalline silicon and the like by using a graphite heater in an inert gas (mainly nitrogen and helium) environment and growing dislocation-free single crystals by using a Czochralski method. The diameter of the single crystal can be influenced by factors such as temperature, pulling speed and rotating speed, crucible tracking speed and rotating speed, flow rate of protective gas and the like in the growth process. The existing single crystal furnace needs to be cooled by water in the using process, but the existing water-cooling jacket is single in structure, only cold water is adopted to cool in the water-cooling process, the retention time of the cold water under the action of a water pump is short, the thermal conductivity of the thicker water-cooling jacket is poor, and the overall water-cooling quality is low.

Aiming at the problems in the related art, no effective solution is provided at present, and therefore, a water cooling sleeve device of a single crystal furnace is provided.

Disclosure of Invention

Technical problem to be solved

The utility model provides a single crystal growing furnace water-cooling jacket device, which has the advantages of convenient use, high water-cooling quality and the like and solves the problem of low water-cooling quality of the existing water-cooling jacket.

(II) technical scheme

In order to achieve the above object, the utility model provides a following technical scheme: a water-cooling jacket device of a single crystal furnace comprises a jacket body, wherein a base is fixed at the bottom of the jacket body, the jacket body is of an annular cylindrical structure, a drain pipe and a water inlet pipe are communicated on the jacket body, the drain pipe and one end of the water inlet pipe are respectively communicated with a water guide pipe A and a water guide pipe B, one end of the water guide pipe A is connected with a water inlet pump, one end of the water guide pipe B is connected with a water discharge pump, the water inlet pump and the water discharge pump are both communicated with a water tank, a refrigerating pipe of a refrigerator is inserted into the water tank, lower handles are fixed on the left side and the right side of the jacket body, two screw holes are formed in the lower handles, a plurality of baffles are annularly arranged in a jacket body interlayer and are annularly and distributed and fixed on the inner ring and the outer ring inner wall of the jacket body in a staggered manner, fin plates are arranged on the, the upper handle and the lower handle are fixed through screws and nuts.

Further improved, the drain pipe with all install the valve on the inlet tube.

In a further improvement, a sealing ring is padded between the sleeve cover and the edge of the sleeve body.

In a further improvement, the height of the fin plate is the same as that of the sleeve body.

In a further improvement, the fin plate is hollow and communicated with the interlayer of the sleeve body.

In a further improvement, the water guide pipe A and the water guide pipe B are of a bending structure.

(III) advantageous effects

Compared with the prior art, the utility model provides a single crystal growing furnace water-cooling jacket device possesses following beneficial effect:

1. this kind of single crystal growing furnace water-cooling jacket device, the interior intermediate layer of cover body adopts folding alternating expression design, increases the time that rivers are detained in original space, also guarantees simultaneously that cold water is in the active condition, lets more thorough of heat transfer to at the internal wall of cover around being provided with a plurality of fin boards, every fin version fretwork and cover body intercommunication, let the interbedded cold water of cover body can enter into the fin board, thereby improve the efficiency of heat transfer.

Drawings

Fig. 1 is a schematic structural diagram of the present invention.

Fig. 2 is a top view of the utility model after the cover is removed.

Fig. 3 is a schematic view of the structure of the cover of the present invention.

In the figure: 1. covering; 2. a seal ring; 3. an upper handle; 4. a lower handle; 5. a screw; 6. a nut; 7. a sleeve body; 8. a drain pipe; 9. a water inlet pipe; 10. a valve; 11. a base; 12. a baffle plate; 13. a fin plate; 14. a screw hole; 15. a water conduit A; 16. a water guide pipe B; 17. draining pump; 18. a water inlet pump; 19. a refrigerator; 20. a water tank.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-3, the present invention provides a technical solution: the utility model provides a single crystal growing furnace water-cooling jacket device, includes the cover body 7, cover body 7 bottom is fixed with base 11, cover body 7 is annular cask column structure, the intercommunication has drain pipe 8 and inlet tube 9 on the cover body 7, drain pipe 8 with inlet tube 9 one end communicates aqueduct A15 and aqueduct B16 respectively, aqueduct A15 one end is connected with intake pump 18, aqueduct B16 one end is connected with drain pump 17, intake pump 18 with drain pump 17 all communicates with water tank 20, the refrigeration pipe of refrigerator 19 has been inserted in the water tank 20, the cover body 7 left and right sides is fixed with lower handle 4, two screws 14 have been seted up on lower handle 4, it is annular in the interlayer of cover body 7 and is provided with a plurality of baffles 12, baffle 12 is crisscross the fixing on the inner circle of cover body 7 and outer lane inner wall that annular distributes, be provided with fin board 13 in the cover body 7 inner circle outer wall, the cover body 7 is covered with the cover 1, the left side and the right side of the cover 1 are both fixed with the upper handles 3, and the upper handles 3 and the lower handles 4 are fixed through screws 5 and nuts 6.

As shown in fig. 2, the drain pipe 8 and the water inlet pipe 9 are both provided with a valve 10 for opening and closing the drain pipe 8 and the water inlet pipe 9, the fin plate 13 is as high as the sleeve body 7, the fin plate 13 is hollow and communicated with the interlayer of the sleeve body 7, so that cold water in the interlayer can enter the fin plate 13, and the water guide pipe a15 and the water guide pipe B16 are of bent structures.

As shown in fig. 1, a sealing ring 2 is padded between the edge of the sleeve cover 1 and the edge of the sleeve body 7, so that the sealing performance between the sleeve cover 1 and the sleeve body 7 is improved.

The drain pump 17 and the intake pump 18 are of QDX type.

The refrigerator 19 is model SA 9000D.

The electrical components presented in the document are electrically connected to an external master controller and 220V commercial power, and the master controller can be a conventional known device controlled by a computer or the like.

The working principle is as follows: when the water cooling jacket is used, water in the water tank 20 is cooled through the refrigerator 19, the valve 10 on the water inlet pipe 9 is opened, water is introduced into the interlayer of the jacket body 7 through the drainage pump 17, after the whole interlayer of the jacket body 7 is filled with cold water, the valve 10 on the drainage pipe 8 and the water inlet pump 18 are opened, the cold water flowing to the other side in the jacket body 7 flows back to the water tank 20 again, and then the refrigerator 19 is used for cooling the water. In the rivers in the middle of the 7 intermediate layers of cover body can enter into the fin board 13 of fretwork, utilize fin board 13 to increase the area of contact with the air, let air conditioning disperse more easily, one of intake pump 18 and drain pump 17 advances one and goes out and let rivers be in the active state all the time, owing to set up a plurality of baffles 12 in the 7 intermediate layers of cover body, baffle 12 has increased the flow and has restricted the velocity of flow, let cold water can be for a long time in the cover body 7, let the cooling effect reach the best.

To sum up, the utility model discloses rational in infrastructure, the 7 interior intermediate layers of the cover body adopt folding alternating expression design, increase the time that rivers are detained in original space, also guarantee simultaneously that cold water is in active state, let heat transfer's more thorough to at the 7 interior wall of the cover body around being provided with a plurality of fin boards 13, every fin version fretwork and the 7 intercommunications of the cover body, let 7 interbedded cold water of the cover body can enter into fin board 13, thereby improve the efficiency of heat transfer.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front end", "rear end", "both ends", "one end", "the other end" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element to which the reference is made must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The water-cooling sleeve device of the single crystal furnace comprises a sleeve body (7), and is characterized in that: the utility model discloses a refrigerator, including cover body (7), water inlet pipe (16), drain pipe (8), water inlet pipe (9), water inlet pipe (7) and water inlet pipe (9) one end intercommunication respectively have aqueduct A (15) and aqueduct B (16), aqueduct A (15) one end is connected with intake pump (18), aqueduct B (16) one end is connected with drain pump (17), intake pump (18) with drain pump (17) all communicate with water tank (20), the refrigeration pipe that has refrigerator (19) inserts in water tank (20), cover body (7) left and right sides is fixed with lower handle (4), two screw (14) have been seted up on lower handle (4), it is annular in the double-layered in situ and is provided with a plurality of baffles (12) to cover body (7), baffle (12) are the crisscross outer lane of annular distribution and fix on the inner circle and the inner wall of cover body (7), the improved sleeve is characterized in that a fin plate (13) is arranged on the outer wall of the inner ring of the sleeve body (7), the sleeve body (7) is covered with a sleeve cover (1), the left side and the right side of the sleeve cover (1) are respectively fixed with an upper handle (3), and the upper handle (3) and the lower handle (4) are fixed through screws (5) and nuts (6).

2. The water-cooling jacket device of the single crystal furnace as claimed in claim 1, wherein: the drain pipe (8) and the water inlet pipe (9) are both provided with valves (10).

3. The water-cooling jacket device of the single crystal furnace as claimed in claim 1, wherein: and a sealing ring (2) is padded between the sleeve cover (1) and the edge of the sleeve body (7).

4. The water-cooling jacket device of the single crystal furnace as claimed in claim 1, wherein: the height of the fin plate (13) is the same as that of the sleeve body (7).

5. The water-cooling jacket device of the single crystal furnace as claimed in claim 1, wherein: the fin plate (13) is hollow and communicated with the interlayer of the sleeve body (7).

6. The water-cooling jacket device of the single crystal furnace as claimed in claim 1, wherein: the water guide pipe A (15) and the water guide pipe B (16) are of a bent structure.