CN215713516U - Crystal furnace with pipeline supporting function - Google Patents
Crystal furnace with pipeline supporting function Download PDFInfo
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- CN215713516U CN215713516U CN202122102132.3U CN202122102132U CN215713516U CN 215713516 U CN215713516 U CN 215713516U CN 202122102132 U CN202122102132 U CN 202122102132U CN 215713516 U CN215713516 U CN 215713516U
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Abstract
A crystal furnace with a pipeline supporting function comprises a crystal furnace body, a feeding pipe which is arranged on a top cover of the crystal furnace body in a protruding mode, and a pipeline supporting structure arranged on the top cover of the crystal furnace body; the pipeline supporting structure comprises a plurality of supporting columns vertically connected with the top cover and supporting plates connected with the tops of the supporting columns; the feeding pipe is used for being connected with an external pipeline; the shape of backup pad is semi-circular, and the centre of a circle department of backup pad has seted up the semicircular and has leaned on the mouth, and outside pipeline is connected the back with the inlet pipe and is located to lean on to mouthful department and with the backup pad butt. So be provided with the backup pad in one side of inlet pipe, the centre of a circle department of backup pad is provided with to support and leans on the mouth, can carry out spacing, hold up to leaning on, avoid the pipeline to rock, damage the pipeline of being connected with the inlet pipe.
Description
Technical Field
The utility model relates to the field of single crystal material production equipment, in particular to a crystal furnace with a pipeline supporting function.
Background
A single crystal furnace is an apparatus for growing a crystal ingot by pulling up a polycrystalline material such as polycrystalline silicon or the like in an atmosphere of an inert gas (mainly nitrogen or helium) by a graphite heater or the like and then by a Czochralski method. The crystal bar can be used for manufacturing dislocation-free single crystal materials.
Patent CN212688230U discloses a single crystal furnace, which is a cylindrical structure with a top surface provided with a feed inlet and a circumferential side wall provided with a discharge outlet. The feed inlet department needs the connecting tube, and the pipeline rocks easily under the effect of gravity action and material impact, leads to connecting unreliable, and the pipeline breaks even for the material leaks.
SUMMERY OF THE UTILITY MODEL
In view of the above, the present invention provides a crystal furnace with a pipeline supporting function, which can fix a pipeline at a feed inlet and avoid shaking and damage of the pipeline, so as to solve the above problems.
A crystal furnace with a pipeline supporting function comprises a crystal furnace body, a feeding pipe which is arranged on a top cover of the crystal furnace body in a protruding mode, and a pipeline supporting structure arranged on the top cover of the crystal furnace body; the pipeline supporting structure comprises a plurality of supporting columns vertically connected with the top cover and supporting plates connected with the tops of the supporting columns; the feeding pipe is used for being connected with an external pipeline; the shape of backup pad is semi-circular, and the centre of a circle department of backup pad has seted up the semicircular and has leaned on the mouth, and outside pipeline is connected the back with the inlet pipe and is located to lean on to mouthful department and with the backup pad butt.
Further, the radius of the abutting opening is larger than that of the feeding pipe.
Furthermore, the top cover of the crystal furnace body is provided with a plurality of mounting screw holes at one side of the feeding pipe and at positions close to the edge at intervals, external threads are arranged on the outer side of the bottom of the supporting column, and the bottom of the supporting column is in threaded connection with the mounting screw holes.
Further, an operating plane is arranged on the outer side wall of the supporting column.
Furthermore, the supporting plate is provided with mounting holes on two sides of the abutting opening respectively, a hoop is sleeved on the pipeline, and two ends of the hoop are connected with the mounting holes through fasteners.
Furthermore, the crystal furnace also comprises a discharge pipe which is arranged on one side of the crystal furnace body in a protruding way.
Furthermore, a discharge hole is formed in the middle of the discharge pipe, a third caulking groove is formed in the outer side of the discharge hole on the first end face of the discharge pipe, and a second sealing ring is arranged in the third caulking groove.
Furthermore, a plurality of connecting holes are formed in the outer side of the third caulking groove on the first end face of the discharging pipe, a nut groove is concavely formed in the position, close to the first end face, of the circumferential outer side wall of the discharging pipe, a stud penetrates through the connecting holes and then is located in the nut groove, and a nut is located in the nut groove and is in threaded connection with the stud.
Furthermore, an L-shaped reinforcing block is further arranged between the discharge pipe and the crystal furnace body, one side of the reinforcing block is welded with the discharge pipe, and the other side of the reinforcing block is welded with the crystal furnace body.
Compared with the prior art, the crystal furnace with the pipeline supporting function comprises a crystal furnace body, a feeding pipe which is arranged on the top cover of the crystal furnace body in a protruding mode, and a pipeline supporting structure arranged on the top cover of the crystal furnace body; the pipeline supporting structure comprises a plurality of supporting columns vertically connected with the top cover and supporting plates connected with the tops of the supporting columns; the feeding pipe is used for being connected with an external pipeline; the shape of backup pad is semi-circular, and the centre of a circle department of backup pad has seted up the semicircular and has leaned on the mouth, and outside pipeline is connected the back with the inlet pipe and is located to lean on to mouthful department and with the backup pad butt. So be provided with the backup pad in one side of inlet pipe, the centre of a circle department of backup pad is provided with to support and leans on the mouth, can carry out spacing, hold up to leaning on, avoid the pipeline to rock, damage the pipeline of being connected with the inlet pipe.
Drawings
Embodiments of the utility model are described below with reference to the accompanying drawings, in which:
FIG. 1 is a schematic perspective view of a crystal growing furnace with a tube support function according to the present invention.
FIG. 2 is a partial schematic view of a crystal furnace with a pipeline supporting function according to the present invention.
Fig. 3 is an enlarged schematic view of a portion a in fig. 2.
Fig. 4 is a perspective view of the tapping pipe from fig. 1.
FIG. 5 is a schematic view of a fluid pipeline of a crystal furnace with a pipeline supporting function provided by the utility model.
FIG. 6 is a schematic view of a tube support structure of a crystal furnace with tube support function according to the present invention.
Detailed Description
Specific embodiments of the present invention will be described in further detail below based on the drawings. It should be understood that the description herein of embodiments of the utility model is not intended to limit the scope of the utility model.
Referring to fig. 1 to 3, the crystal furnace with a pipe supporting function according to the present invention includes a crystal furnace body 10, a side door 20, a feeding pipe 30 and a discharging pipe 40.
The crystal furnace body 10 is substantially cylindrical in shape, and one side thereof is opened with a lateral opening in the chord direction. A connecting frame 11 is arranged on the circumferential outer side of the lateral opening of the crystal furnace body 10 in a protruding mode; the side door 20 includes a side door body 21 and a cavity 22 provided in the middle of the side door 20. The side door body 21 is abutted against the connecting frame 11, and the concave cavity part 22 is provided with an arc-shaped concave cavity in a concave manner towards one side of the crystal furnace body 10. The concave cavity and the inner cavity of the crystal furnace body 10 form a round cavity, and the flowing or moving of materials in the crystal furnace body 10 is not influenced.
The bottom of the crystal furnace body 10 is also connected with a plurality of support legs 12.
A plurality of connecting grooves 13 are formed in the two sides of the connecting frame 11 and the side door 20 along the thickness direction, and a locking mechanism 60 is partially located in the connecting grooves 13 to lock the side door 20 to the connecting frame 11.
The connecting frame 11 and the side door 20 are rotatably connected at the same side by hinges 70.
The locking mechanism 60 includes a ball support base 61 disposed on a side of the connecting groove 13 of the connecting frame 11 away from the side door 20, a ball screw 13 with one end rotatably disposed in the ball support base 61, and a lock nut 63 threadedly coupled to the ball screw 13. The lock nut 63 abuts against the side door body 21.
The ball screw 13 has a ball pivot portion rotatably disposed in the ball support base 61 and a screw portion movably disposed in the connecting groove 13.
The side door 20 is provided with first caulking groove in the circumference outside of cavity towards one side of crystal furnace body 10, and connecting frame 11 is provided with the second caulking groove in the open-ended circumference outside of side direction towards one side of side door 20, is provided with first sealing washer in first caulking groove or the second caulking groove, and locking mechanical system 60 is sealed through first sealing washer realization between side door 20 and the connecting frame 11 on locking side door 20 to connecting frame 11.
The side of the side door 20 away from the crystal furnace body 10 and the side away from the hinge 70 are provided with handles 90 for the user to operate.
The middle part of the cavity part 22 is provided with a transparent observation window 80, which is convenient for a user to observe the working state in the crystal furnace body 10.
The feeding pipe 30 is arranged on the top cover of the crystal furnace body 10 in a protruding mode, and the discharging pipe 40 is arranged on one side, far away from the side door 20, of the crystal furnace body 10 in a protruding mode.
Referring to fig. 4, a discharge hole 41 is formed in the middle of the discharge tube 40, a third caulking groove 42 is formed on the first end surface of the discharge tube 40 away from the crystal furnace body 10 and outside the discharge hole 41, a second sealing ring is disposed in the third caulking groove 42, and a plurality of connection holes 43 are formed on the first end surface of the discharge tube 40 and outside the third caulking groove 42. An outer pipe is connected to the tapping pipe 40 via flanges and screw bolts. The stud penetrates the flange and the connecting hole 43 and is in threaded connection with a nut, and when the flange abuts against the discharging pipe 40, the second sealing ring realizes sealing between the flange and the discharging pipe 40.
The circumferential outer side wall of the tapping pipe 40 is concavely provided with a nut groove 44 at a position close to the first end face, and the depth of the nut groove 44 is equivalent or equal to the distance from the third caulking groove 42 to the circumferential edge of the tapping pipe 40, so that the stud is located in the nut groove 44 after passing through the connecting hole 43. The nut is located in the nut groove 44 and is threadedly coupled to a stud passing through the flange and the coupling hole 43.
An L-shaped reinforcing block 45 is welded between the discharge pipe 40 and the crystal furnace body 10, one side of the reinforcing block 45 is welded with the discharge pipe 40, and the other side is welded with the crystal furnace body 10. The reinforcing block 45 can reinforce the connection reliability of the tapping pipe 40.
The existing crystal furnace is only provided with one heat dissipation flow channel, the heat dissipation effect of the part of the heat dissipation flow channel close to the water inlet is better, and the heat dissipation effect of the part close to the water outlet is poorer.
Referring to fig. 5, in the present embodiment, a plurality of water inlets 51 are disposed on one side of the crystal furnace body 10 with the lateral opening, a plurality of water outlets 52 are disposed on the other side of the lateral opening, a sandwich layer is disposed on the sidewall of the crystal furnace body 10, each water inlet 51 is communicated with one water outlet 52 through a fluid pipe 53, the fluid pipe 53 is disposed in the sandwich layer, and the height of each water inlet 51 is smaller than the height of the corresponding water outlet 52.
The fluid conduit 53 is spirally rising.
The water outlet 52 is connected to a water tank through a water pipe, and the water tank is connected to the water inlet 51 through a water pipe and a water pump, so that the circulation cooling is realized.
Thus, the plurality of parallel fluid pipes 53 are arranged, so that the heat dissipation pressure of each fluid pipe 53 is reduced, and the heat dissipation effect is better.
The plurality of water inlets 51 are positioned on the same side, and the plurality of water outlets 52 are positioned on the other side, so that the water pipes can be conveniently connected.
In other embodiments, a communication channel may be disposed in each of the side doors 20 corresponding to each of the fluid channels 53, and the communication channel is communicated with the fluid channels 53, so that the fluid channels 53 may be disposed around each other, and the number of turns of the fluid channels 53 may be increased, thereby improving the heat dissipation efficiency.
Referring to fig. 6, a top cover of the crystal furnace body 10 is provided with a pipeline supporting structure, which includes a plurality of supporting pillars 32 and supporting plates 33.
The top cover of the crystal furnace body 10 is provided with a plurality of mounting screw holes 31 at intervals at the position close to the edge of one side of the feeding pipe 30, the outer side of the bottom of the supporting column 32 is provided with external threads, and the bottom of the supporting column 32 is in threaded connection with the mounting screw holes 31. The outer side wall of the support column 32 is concavely provided with an operation plane 321 for facilitating the clamping of the support column 32 by a tool.
The supporting plate 33 is connected to the tops of the plurality of supporting columns 32.
The supporting plate 33 is semicircular, a semicircular abutting opening 331 is formed in the center of the supporting plate, and an external pipeline is connected with the feed pipe 30 and then located in the abutting opening 331 and abutted against the supporting plate 33.
By changing the depth of the support columns 32 in the mounting screw holes 31, the height of the support plate 33 can be adjusted to adjust the position at which the support plate 33 supports the pipe.
Furthermore, the supporting plate 33 is provided with a mounting hole 332 on each of two sides of the abutting opening 331, a hoop 34 is sleeved on the pipeline, and two ends of the hoop 34 are connected with the mounting holes 332 through fasteners. Thereby fixing the pipe to the support plate 33 and preventing the pipe from shaking. The fasteners may be screws and nuts.
Compared with the prior art, the crystal furnace with the pipeline supporting function comprises a crystal furnace body 10, a feeding pipe 30 which is arranged on the top cover of the crystal furnace body 10 in a protruding mode, and a pipeline supporting structure arranged on the top cover of the crystal furnace body 10; the pipeline supporting structure comprises a plurality of supporting columns 32 vertically connected with the top cover and supporting plates 33 connected with the tops of the supporting columns 32; the feeding pipe 30 is used for connecting with an external pipeline; the shape of supporting plate 33 is semi-circular, and semicircular support mouth 331 is seted up in the centre of a circle department of supporting plate 33, and outside pipeline is located support mouth 331 department and supports with supporting plate 33 butt after being connected with feed pipe 30. So be provided with backup pad 33 in one side of inlet pipe 30, the centre of a circle department of backup pad 33 is provided with and supports and lean on mouth 331, can carry on spacingly, support to, avoid the pipeline to rock, damage with inlet pipe 30 connected.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the scope of the present invention, and any modifications, equivalents or improvements that are within the spirit of the present invention are intended to be covered by the following claims.
Claims (9)
1. A crystal furnace with pipeline supporting function is characterized in that: the device comprises a crystal furnace body, a feeding pipe which is arranged on a top cover of the crystal furnace body in a protruding mode, and a pipeline supporting structure arranged on the top cover of the crystal furnace body; the pipeline supporting structure comprises a plurality of supporting columns vertically connected with the top cover and supporting plates connected with the tops of the supporting columns; the feeding pipe is used for being connected with an external pipeline; the shape of backup pad is semi-circular, and the centre of a circle department of backup pad has seted up the semicircular and has leaned on the mouth, and outside pipeline is connected the back with the inlet pipe and is located to lean on to mouthful department and with the backup pad butt.
2. The crystal growing furnace with the pipe supporting function according to claim 1, wherein: the radius of the abutting opening is larger than that of the feeding pipe.
3. The crystal growing furnace with the pipe supporting function according to claim 1, wherein: the top cap of crystal growing furnace body is equipped with a plurality of installation screws in one side of inlet pipe and the position interval that is close to the edge, and the bottom outside of support column is provided with the external screw thread, the bottom and the installation screw threaded connection of support column.
4. The crystal growing furnace with the pipe supporting function according to claim 3, wherein: and an operating plane is arranged on the outer side wall of the supporting column.
5. The crystal growing furnace with the pipe supporting function according to claim 1, wherein: the supporting plate is provided with mounting holes on two sides of the abutting opening respectively, a hoop is sleeved on the pipeline, and two ends of the hoop are connected with the mounting holes through fasteners.
6. The crystal growing furnace with the pipe supporting function according to claim 1, wherein: the crystal furnace also comprises a discharge pipe which is arranged on one side of the crystal furnace body in a protruding way.
7. The crystal growing furnace with the pipe supporting function according to claim 6, wherein: the middle part of the discharging pipe is provided with a discharging port, a third caulking groove is arranged on the first end face of the discharging pipe and outside the discharging port, and a second sealing ring is arranged in the third caulking groove.
8. The crystal growing furnace with the pipe supporting function according to claim 7, wherein: a plurality of connecting holes are formed in the first end face of the discharging pipe and outside the third caulking groove, a nut groove is concavely formed in the position, close to the first end face, of the circumferential outer side wall of the discharging pipe, a stud penetrates through the connecting holes and then is located in the nut groove, and a nut is located in the nut groove and in threaded connection with the stud.
9. The crystal growing furnace with the pipe supporting function according to claim 6, wherein: and an L-shaped reinforcing block is further arranged between the discharge pipe and the crystal furnace body, one side of the reinforcing block is welded with the discharge pipe, and the other side of the reinforcing block is welded with the crystal furnace body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122102132.3U CN215713516U (en) | 2021-09-02 | 2021-09-02 | Crystal furnace with pipeline supporting function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122102132.3U CN215713516U (en) | 2021-09-02 | 2021-09-02 | Crystal furnace with pipeline supporting function |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215713516U true CN215713516U (en) | 2022-02-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122102132.3U Active CN215713516U (en) | 2021-09-02 | 2021-09-02 | Crystal furnace with pipeline supporting function |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215713516U (en) |
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2021
- 2021-09-02 CN CN202122102132.3U patent/CN215713516U/en active Active
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