CN216246107U - High-precision calibration device for spectrum confocal nonlinear dispersion range - Google Patents
High-precision calibration device for spectrum confocal nonlinear dispersion range Download PDFInfo
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- CN216246107U CN216246107U CN202121784520.8U CN202121784520U CN216246107U CN 216246107 U CN216246107 U CN 216246107U CN 202121784520 U CN202121784520 U CN 202121784520U CN 216246107 U CN216246107 U CN 216246107U
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Abstract
The utility model relates to a high-precision calibration device for a spectrum confocal nonlinear dispersion range, which comprises a bottom plate, a grating sensor, a spectrum confocal sensor and a moving mechanism, wherein a first sensor bracket and a second sensor bracket are arranged on the bottom plate, and the second sensor bracket and the first sensor bracket form a test space; the first sensor support is provided with a first clamp for fixing the grating sensor, and the second sensor support is provided with a second clamp for fixing the spectrum confocal sensor. The utility model has the advantages that: after the spectrum confocal sensor moves a fixed distance each time, the subsequent spectrograph records the peak wavelength value of the corresponding position, so that the one-to-one correspondence relationship between the wavelength and the displacement can be obtained, the accurate displacement value of any position point in the measuring range can be obtained, and the measurement is convenient.
Description
Technical Field
The utility model relates to a high-precision calibration device for a spectrum confocal nonlinear dispersion range, and belongs to the technical field of precision measurement.
Background
Because the spectrum confocal measurement system has manufacturing and assembling errors in the manufacturing process, the measurement system has non-linearity of dispersion distribution in the measuring range direction, corresponding position points in the measuring range cannot correspond to wavelengths one by one, the corresponding wavelength values of the corresponding position points need to be found out through a calibration device, and the existing measurement tool cannot meet the actual requirement.
SUMMERY OF THE UTILITY MODEL
In order to overcome the defects of the prior art, the utility model provides a high-precision calibration device for a spectrum confocal nonlinear dispersion range, and the technical scheme of the utility model is as follows:
a high-precision calibration device for spectrum confocal nonlinear dispersion measuring range comprises a bottom plate, a grating sensor, a spectrum confocal sensor and a moving mechanism, wherein a first sensor bracket and a second sensor bracket are mounted on the bottom plate, and the second sensor bracket and the first sensor bracket form a test space; a first clamp for fixing the grating sensor is arranged on the first sensor bracket, a second clamp for fixing the spectrum confocal sensor is arranged on the second sensor bracket, the spectrum confocal sensor and the grating sensor are coaxially arranged, and the moving mechanism is fixedly arranged on the bottom plate and is close to the first sensor bracket and the second sensor bracket; the spectrum confocal sensor is connected with the spectrometer, and the grating sensor and the spectrometer are connected with the control panel.
The moving mechanism comprises a moving mechanism which comprises a direct current servo motor and a crossed roller displacement table, the crossed roller displacement table is installed on a bottom plate between the first sensor support and the second sensor support, a lead screw driving mechanism is installed on the lower portion of the crossed roller displacement table and driven by the direct current servo motor, the crossed roller displacement table is driven by the direct current servo motor to reciprocate between the grating sensor and the spectrum confocal sensor, and a workpiece installation area to be measured is formed on the upper portion of the crossed roller displacement table.
The utility model has the advantages that: after the spectrum confocal sensor moves a fixed distance each time, the subsequent spectrograph records the peak wavelength value of the corresponding position, so that the one-to-one correspondence relationship between the wavelength and the displacement can be obtained, the accurate displacement value of any position point in the measuring range can be obtained, and the measurement is convenient.
Drawings
Fig. 1 is a schematic view of the main structure of the present invention.
Detailed Description
The utility model will be further described with reference to specific embodiments, and the advantages and features of the utility model will become apparent as the description proceeds. These examples are illustrative only and do not limit the scope of the present invention in any way. It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the utility model, and that such changes and modifications may be made without departing from the spirit and scope of the utility model.
Referring to fig. 1, the utility model relates to a high-precision calibration device for spectrum confocal nonlinear dispersion measuring range, which comprises a bottom plate 1, a grating sensor 2, a spectrum confocal sensor 5 and a moving mechanism, wherein a first sensor bracket 8 and a second sensor bracket 4 are arranged on the bottom plate 1, and the second sensor bracket 4 and the first sensor bracket 8 form a test space; a first clamp 3 for fixing the grating sensor 2 is arranged on the first sensor support 8, a second clamp 5 for fixing the spectrum confocal sensor 6 is arranged on the second sensor support 4, the spectrum confocal sensor 6 and the grating sensor 2 are coaxially arranged, and the moving mechanism is fixedly arranged on the bottom plate 1 and is close to the first sensor support 8 and the second sensor support 4; the spectrum confocal sensor 6 is connected to the spectrometer, and the grating sensor and the spectrometer are both connected to the control panel.
The moving mechanism comprises a moving mechanism which comprises a direct current servo motor 9 and a crossed roller displacement table 7, the crossed roller displacement table 7 is installed on a bottom plate between a first sensor support 8 and a second sensor support 4, a lead screw driving mechanism (prior art) is installed on the lower portion of the crossed roller displacement table 7, the lead screw driving mechanism is driven by the direct current servo motor 9, the crossed roller displacement table is driven by the direct current servo motor 9 to reciprocate between a grating sensor 2 and a spectrum confocal sensor 6, and a workpiece installation area to be tested is formed on the upper portion of the crossed roller displacement table 7.
The working principle of the utility model is as follows: mounting a test board 9 at a workpiece mounting area on the upper part of a crossed roller displacement table, mounting a grating sensor on a first clamp, and pressing the grating sensor on the test board; and mounting the spectral confocal sensor to be calibrated on a second fixture, and adjusting the working distance of the spectral confocal sensor to enable the nearest measuring range to be the distance from the test board to the end face of the spectral confocal sensor. After the device is installed, the direct current servo motor drives the crossed roller displacement table to move in a stepping mode towards the direction of the grating sensor, the crossed roller displacement table moves a fixed distance each time, the moved accurate displacement value is recorded by the high-precision grating sensor, meanwhile, after the spectrum confocal sensor to be calibrated moves a fixed distance each time, the wave peak wavelength value of the corresponding position is recorded by the subsequent spectrograph, and therefore the one-to-one correspondence relationship between the wavelength and the displacement can be obtained. The spectrum confocal sensor interpolates the corresponding relation between the wavelength and the displacement obtained in the calibration process to obtain the accurate displacement value of any position point in the measuring range.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and equivalent alternatives or modifications according to the technical solution of the present invention and the inventive concept thereof should be covered by the scope of the present invention.
Claims (2)
1. A high-precision calibration device for a spectrum confocal nonlinear dispersion range is characterized by comprising a bottom plate, a grating sensor, a spectrum confocal sensor and a moving mechanism, wherein a first sensor bracket and a second sensor bracket are mounted on the bottom plate, and the second sensor bracket and the first sensor bracket form a test space; a first clamp for fixing the grating sensor is arranged on the first sensor bracket, a second clamp for fixing the spectrum confocal sensor is arranged on the second sensor bracket, the spectrum confocal sensor and the grating sensor are coaxially arranged, and the moving mechanism is fixedly arranged on the bottom plate and is close to the first sensor bracket and the second sensor bracket; the spectrum confocal sensor is connected with the spectrometer, and the grating sensor and the spectrometer are connected with the control panel.
2. The device of claim 1, wherein the moving mechanism comprises a dc servo motor and a cross roller displacement stage, the cross roller displacement stage is mounted on the bottom plate between the first sensor holder and the second sensor holder, a lead screw driving mechanism is mounted on the lower portion of the cross roller displacement stage, the lead screw driving mechanism is driven by the dc servo motor, the cross roller displacement stage reciprocates between the grating sensor and the spectral confocal sensor under the driving of the dc servo motor, and the upper portion of the cross roller displacement stage forms a workpiece mounting area to be measured.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121784520.8U CN216246107U (en) | 2021-08-02 | 2021-08-02 | High-precision calibration device for spectrum confocal nonlinear dispersion range |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121784520.8U CN216246107U (en) | 2021-08-02 | 2021-08-02 | High-precision calibration device for spectrum confocal nonlinear dispersion range |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216246107U true CN216246107U (en) | 2022-04-08 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121784520.8U Active CN216246107U (en) | 2021-08-02 | 2021-08-02 | High-precision calibration device for spectrum confocal nonlinear dispersion range |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216246107U (en) |
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2021
- 2021-08-02 CN CN202121784520.8U patent/CN216246107U/en active Active
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