CN208269822U - Focusing distance measuring device in optical focusing mechanism - Google Patents
Focusing distance measuring device in optical focusing mechanism Download PDFInfo
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- CN208269822U CN208269822U CN201820952037.8U CN201820952037U CN208269822U CN 208269822 U CN208269822 U CN 208269822U CN 201820952037 U CN201820952037 U CN 201820952037U CN 208269822 U CN208269822 U CN 208269822U
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Abstract
The utility model particularly relates to a focusing distance measuring device among optical focusing mechanism, it has solved the problem that miniaturization, lightweight precision measurement system can't realize the big displacement of high-accuracy measurement. A device for measuring a focusing distance in an optical focusing mechanism comprises a sensor assembly; the sensor assembly comprises an eddy current sensor and a diamond-shaped measured piece; the focusing moving lens frame is connected with the focusing base through a guide rail, wherein the focusing moving lens frame can do linear reciprocating motion along the guide rail in the direction of an optical axis; the driving assembly is arranged on the focusing base; the driving component drives the focusing moving picture frame to do linear reciprocating motion along the guide rail in the direction of the optical axis; the diamond-shaped measured piece is fixed on the focusing movable frame, and the eddy current sensor indirectly obtains the displacement distance of the focusing movable frame along the optical axis direction by measuring the moving distance from the diamond-shaped measured piece.
Description
Technical field
The utility model is more particularly to focussing distance measuring device in a kind of optical focusing mechanism.
Background technique
At present in the high-accuracy field of measuring technique of displacement, microdisplacement measurement application, the electricity based on electricity feedback measurement method
Resistance strain-type sensor, capacitive displacement transducer, inductive displacement transducer etc. are occupied an leading position, have it is small in size,
The advantages that high sensitivity, high-resolution, low cost, but the limitation small there is also measurement range, furthermore tangent displacement sensor
Such as resistance strain type sensor is affected by temperature, sensor installation error factor；In large displacement measurement application, base
It occupies an leading position in grating displacement transducer, the two-frequency laser interferometer etc. of light feedback measurement method, there is electromagnetism interference
The advantages that ability is strong, high sensitivity, high-resolution, big measurement range, but that there is also volumes is big, weight is big, at high cost and right
The limitation of environmental pollution sensitivity.
In miniaturization, the high-accuracy measuring system of lightweight, precision is usually runed counter to large displacement measurement.To big displacement into
When row measurement, the method for sacrifice precision is generallyd use to increase the range of measurement displacement.Above-mentioned factor to measure position in selection
When the method for shifting, need choosing comprehensively precision, measuring range two indices, and can not meet simultaneously high-precision, compact, it is low at
The conditions such as sheet, large displacement measurement.Therefore, utility model is a kind of meets high-precision, compact, low cost, large displacement measurement simultaneously
Etc. the measurement methods of conditions have important practical significance.
Summary of the invention
The utility model provides focussing distance measuring device in a kind of optical focusing mechanism, solves miniaturization, light weight
Change the problem of precision measurement system cannot achieve high-accuracy measurement big displacement.
The technical solution that the utility model solves the above problems is, focussing distance measurement dress in a kind of optical focusing mechanism
It sets, the optical focusing mechanism includes focusing pedestal, focusing mobile frame and driving assembly；Focusing mobile frame by guide rail with
Pedestal of focusing is connected, and wherein focusing mobile frame can do straight reciprocating motion in optical axis direction along guide rail；Driving assembly setting is adjusted
On burnt pedestal；Driving assembly drives focusing mobile frame to do straight reciprocating motion in optical axis direction along guide rail；Its special character exists
In:
Including sensor module；
Sensor module includes current vortex sensor and diamond shape measured piece；
Current vortex sensor is fixed on focusing pedestal, and diamond shape measured piece is fixed on focusing mobile frame, and current vortex passes
Sensor be come by moving distance of the measurement away from diamond shape measured piece it is indirect obtain focusing mobile frame along optical axis direction displacement away from
From.
The above are the basic structures of the utility model, are based on the basic structure, and the utility model is also made following optimization and changed
Into:
Further, above-mentioned current vortex sensor includes a pair of of probe and a fore-lying device, and a pair of probe is divided into the first spy
Head and the second probe, a pair of probe are symmetrically mounted in probe fixing seat, and probe fixing seat is fixed on focusing pedestal, diamond shape quilt
It surveys part to be located between a pair of of probe, and the angle between the tested surface of diamond shape measured piece and the normal plane of a pair of of center probe line is
θ, θ are acute angle.
Further, above-mentioned focusing pedestal is equipped with temperature sensor.
Further, above-mentioned driving assembly is motor.
Further, above-mentioned driving assembly is connect with focusing mobile frame by screw pair.
In addition, the invention also discloses focussing distance measurement method in a kind of optical focusing mechanism, special character
It is, comprising the following steps:
1) mobile microscope group being fixed on focusing mobile frame, focusing mobile frame is connected by guide rail with focusing pedestal,
Wherein focusing mobile frame can be along guide rail and focusing pedestal linear relative movement；Driving assembly and focusing mobile frame pass through lead screw
Mobile microscope group straight reciprocating motion is realized in pair of nut connection；
2) diamond shape measured piece is fixed on focusing mobile frame；
3) probe fixing seat is fixed on focusing pedestal；
4) when the first probe of sensor module is A at a distance from the M point on diamond shape measured piece, the first probe is fixed
In probe fixing seat, mobile diamond shape measured piece is located at the M point on its diamond shape measured piece on the axis of the first probe；
The axis for making the axis of the second probe pop one's head in first is overlapped, at this point, the N point on diamond shape measured piece is in the second probe
Axis on, the second probe is moved along its axis, is fixed on when the output voltage of fore-lying device is zero, then by the second probe
In fixing seat of popping one's head in；
Wherein, the straight line MN that M, N point are constituted at the center of the tested surface of diamond shape measured piece two sides, M, N two o'clock line respectively
It is parallel with two short side faces up and down of diamond shape measured piece, and be equidistant；
5) sensor module is demarcated:
5.1) prism of corner cube is adhesive in the upper end of diamond shape measured piece, double-frequency laser interference is set in prism of corner cube corresponding position
Instrument, the host computer interface of two-frequency laser interferometer shows the distance between prism of corner cube and two-frequency laser interferometer this moment at this time；
5.2) make focusing mobile frame along guide rail direction moving distance X0, fore-lying device output voltage V at this time0；
5.3) step (5.2) are repeated, measures one group of data { (X0, V0)、(X1, V1)……(Xn, Vn)}；
5.4) data are fitted using least square method, obtain a calibration curve；
5.5) whole device is put into temperature controlled compartment, by adjusting temperature, repeats step 5.2), 5.3), 5.4), in this way
Just the calibration curve under different temperatures is obtained, such as { (- 50 DEG C~-30 DEG C) calibration curve 1, (- 30 DEG C~-10 DEG C) calibration are bent
Line 2 ... ... (30 DEG C~50 DEG C) calibration curve 5 }, wherein temperature range can change according to the actual situation；
6) according to the output voltage values for measuring fore-lying device, environment temperature is judged by temperature sensor, recalls and works as front ring
Calibration curve in the temperature range of border obtains the displacement along optical axis direction of diamond shape measured piece to get to the displacement for moving microscope group
Amount.
The advantages of the utility model:
1, focussing distance measuring device in a kind of optical focusing mechanism of the utility model, have high-precision, compact, it is low at
Originally, the advantages that large displacement measurement, by designing different installation interfaces, it can be widely applied to all kinds of aerospace O-E Payloads
In.
2, focussing distance measuring device in a kind of optical focusing mechanism of the utility model, using current vortex sensor and diamond shape
Measured piece is used cooperatively, using the high-precision measurement advantage of current vortex sensor, the defect for overcoming its linearity range measurement range small,
Focussing distance is obtained by detecting the moving distance of diamond shape measured piece, not by temperature, sensor installation error, environmental pollution
The influence of (such as greasy dirt, dust factor), improves environmental suitability.
Detailed description of the invention
Fig. 1 is the three-dimensional structure diagram of focussing distance measuring device in the utility model optical focusing mechanism；
Fig. 2 is the top view of Fig. 1；
Fig. 3 is the rearview of Fig. 1；
Fig. 4 is focussing distance measuring device operation principle schematic diagram in the utility model optical focusing mechanism；
Fig. 5 is the scaling method schematic diagram of focussing distance measuring device in the utility model optical focusing mechanism；
Fig. 6 is affected by temperature for diamond shape measured piece in focussing distance measuring device in the utility model optical focusing mechanism to be shown
It is intended to；
Fig. 7 is that diamond shape measured piece is missed by setting angle in focussing distance measuring device in the utility model optical focusing mechanism
Differential is intended to；
Fig. 8 is that diamond shape measured piece is missed by installation displacement in focussing distance measuring device in the utility model optical focusing mechanism
Differential is intended to.
Wherein, 1- focusing pedestal；2- focusing mobile frame；3- driving assembly；4- current vortex sensor；
41- first pops one's head in；42- second pops one's head in；43- fore-lying device；5,11,12,13,14- diamond shape measured piece；
6- probe fixing seat；7- temperature sensor；8- prism of corner cube；9- two-frequency laser interferometer；16 first probe pressing plates,
The probe pressing plate of 17- second；18- guide rail；19- screw pair.
Specific embodiment
It is illustrated below in conjunction with preferred embodiment of the attached drawing to the utility model, it should be understood that described herein excellent
It selects embodiment to be only used for describing and explaining the present invention, is not used to limit the utility model.
Referring to figure 1, figure 2 and figure 3, focussing distance measuring device in a kind of optical focusing mechanism, the optical focusing mechanism
Including the pedestal 1, focusing mobile frame 2, driving assembly 3 of focusing；Focussing distance measuring device includes sensor module.
Sensor module includes current vortex sensor 4 and diamond shape measured piece 5；Moving lens are fixed on focusing mobile frame 2
Group；Focusing mobile frame 2 is connected by guide rail 18 with focusing pedestal 1, and wherein focusing mobile frame 2 can be along guide rail 18 in optical axis side
To straight reciprocating motion is done, driving assembly 3 is connect with focusing mobile frame 2 by screw pair 19, it can be achieved that mobile microscope group
Straight reciprocating motion；Current vortex sensor 4 is fixed on focusing pedestal 1, and diamond shape measured piece 5 is fixed on focusing mobile frame 2,
Current vortex sensor 4 is used to measure the displacement of diamond shape measured piece 5.Current vortex sensor 4 includes a pair of of probe and a fore-lying device
43, a pair of probe is divided into the first probe 41 and the second probe 42, and a pair of probe is symmetrically mounted in probe fixing seat 6, and probe is solid
Reservation 6 is fixed on focusing pedestal 1, and diamond shape measured piece 5 is located between a pair of of probe, and the tested surface of diamond shape measured piece 5 and one
It is θ to the angle between the normal plane of center probe line, θ is acute angle.Temperature sensor 7 is additionally provided on focusing pedestal 1.Current vortex
Sensor can be using the current vortex sensor of the model KD-5100 of U.S. KAMAN company production.
Fore-lying device 43 is an E-signal processor, includes oscillator, bridge circuit, detecting circuit, amplifier, pressure stabilizing
Device and linear/temperature drift compensation circuit etc..The working principle of the focussing distance measuring device of the utility model is as shown in Figure 4.?
In Fig. 4, current vortex sensor 4 uses bridge balance principle, and current vortex sensor 4 is direct voltage output value, and two probes are
It uses in pairs, when diamond shape measured piece 5 is in zero-bit, two distance phases of the probe away from diamond shape measured piece 5 of current vortex sensor 4
Deng (A=B, distance A, distance B pop one's head in during installation for two, the initial distance apart from measured piece surface), the electricity exported at this time
Pressing signal is zero；When diamond shape measured piece 5 moves back and forth, two distances of the probe away from diamond shape measured piece 5 of current vortex sensor 4
It differs, the voltage signal of output is not zero.
It is non-linear with the increase of measurement range since the nonlinearity erron of current vortex sensor 4 is related with measurement range
Error increases severely, therefore the range very little (within ± 0.5mm) that current vortex sensor 4 is measured in linearity range is unsatisfactory for accurate measurement system
Large displacement measurement in system.To solve this problem, measured piece is designed to diamond structure (angle θ), passes through triangle relation
The positional relationship of precision measurement system is obtained indirectly.
X=Lx×tanθ (1)
Wherein: x is probe and the displacement of diamond shape measured piece 5 in the Y direction；The distance that measuring device is used, LxFor diamond shape quilt
Survey displacement of the part 5 in the direction x, the actual displacement of focusing mobile frame 2.
The actual displacement of focusing mobile frame 2 can be very big it can be seen from (1) formula, but has used diamond shape measured piece 5
As indirect measuring medium, the displacement of diamond shape measured piece 5 in the Y direction is much smaller, and measurement is promoted to meet current vortex sensor 4
Measurement range is smaller, measures more accurate principle.
When diamond shape measured piece 5 moves in X direction, diamond shape measured piece 5 also occurs along the distance between Y-direction and two probes
Variation, the voltage that current vortex sensor 4 exports can also change.
Referring to Fig. 1,2,3,4 and 5, focussing distance measurement method in optical focusing mechanism, comprising the following steps:
1) mobile microscope group is fixed on focusing mobile frame 2, focusing mobile frame 2 passes through guide rail 18 and focusing pedestal 1
It is connected, wherein focusing mobile frame 2 can be along guide rail 18 and focusing 1 linear relative movement of pedestal；Driving assembly 3 and focusing mobile mirror
Frame 2 is connected by screw pair 19, realizes mobile microscope group straight reciprocating motion；
2) diamond shape measured piece 5 is fixed on focusing mobile frame 2；
3) probe fixing seat 6 is fixed on focusing pedestal 1；
4) when the first probe 41 of sensor module is A at a distance from the M point on diamond shape measured piece 5, by the first probe
41 are fixed in probe fixing seat 6；First probe 41 is compressed with the first probe pressing plate 16, mobile diamond shape measured piece 5 makes its water chestnut
M point on shape measured piece 5 is located on the axis of the first probe 41；
It is overlapped the axis of the second probe 42 and the first pop one's head in 41 axis, at this point, the N point on diamond shape measured piece 5 is the
On the axis of two probes 42, the second probe 42 is moved along its axis, when the output voltage of fore-lying device 43 is zero, then by the
Two probes 42 are fixed in probe fixing seat 6, are compressed the second probe 42 with the second probe pressing plate 17；
Wherein, the straight line MN that M, N point are constituted at the center of the tested surface of 5 two sides of diamond shape measured piece, M, N two o'clock line respectively
It is parallel with two short side faces up and down of diamond shape measured piece 5, and be equidistant；
5) sensor module is demarcated:
5.1) prism of corner cube 8 is adhesive in the upper end of diamond shape measured piece 5, double-frequency laser is set in 8 corresponding position of prism of corner cube
Interferometer 9, the host computer interface of two-frequency laser interferometer 9 is shown this moment between prism of corner cube 8 and two-frequency laser interferometer 9 at this time
Distance；
5.2) make focusing mobile frame 2 along 18 direction moving distance X of guide rail0, 43 output voltage V of fore-lying device at this time0；
5.3) step (5.2) are repeated, measures one group of data { (X0, V0)、(X1, V1)……(Xn, Vn)}；
5.4) data are fitted using least square method, obtain a calibration curve；
5.5) sensor module is put into temperature control box, by adjusting temperature, repeats step 5.2), 5.3), 5.4), this
Sample just obtains the calibration curve under different temperatures, such as { (- 50 DEG C~-30 DEG C) calibration curve 1, (- 30 DEG C~-10 DEG C) calibration
Curve 2 ... ... (30 DEG C~50 DEG C) calibration curve 5 }, wherein temperature range can change according to the actual situation；
6) according to the output voltage values for measuring fore-lying device 43, environment temperature is judged by temperature sensor 7, is recalled current
Calibration curve in environment temperature section obtain diamond shape measured piece 5 along optical axis direction moving displacement to get to moving microscope group
Moving displacement.
Referring to Fig. 6, work since whole device is not constantly under temperature constant state, when the temperature varies, diamond shape
Measured piece 5 can be because material expands with heat and contract with cold to change and becomes diamond shape measured piece 13 or diamond shape measured piece 14, but due to diamond shape
The angle theta of measured piece 5 will not change, therefore only need to be by calling the calibration curve in current environmental temperature section just in measurement method
The achievable accurate measurement to focusing amount, therefore not having an impact to precision measurement system, therefore improve the adaptation to environment
Property.
Any part has mismachining tolerance, rigging error, since diamond shape measured piece 5 is the part of a very little, by grinding
Scale error and the Form and position error meeting very little for grinding its processing are negligible, but rigging error is relatively large, but all can be analyzed to
Rotation error and assembly translation error are assembled, as shown in Figure 7, Figure 8.As shown in fig. 7, diamond shape measured piece 5 has rotation about the z axis
Error alpha becomes diamond shape measured piece 11, then diamond shape measured piece 11 and X-direction only will affect its measurement to measuring system at angle theta+α
Range L, but rotation error is considered when designing diamond shape measured piece 5, this can be solved the problems, such as by reserving range surplus.For diamond shape
For the assembly translation error of measured piece as shown in figure 8, diamond shape measured piece 5 becomes diamond shape measured piece 12 along Y-direction translation, this error can
Pass through above-mentioned demarcating steps 4) it is eliminated.
Focussing distance measurement method in a kind of optical focusing mechanism of the utility model, in ground experiment room to regulating mechanism
Moving distance and corresponding voltage at different temperatures is demarcated, and is connected with electric vortex sensor measuring diamond shape measured piece in probe
The small distance in line direction, to obtain the biggish focussing distance of accurate focus adjusting mechanism.
Claims (5)
1. focussing distance measuring device in a kind of optical focusing mechanism, the optical focusing mechanism includes focusing pedestal (1), focusing
Mobile frame (2) and driving assembly (3)；Focusing mobile frame (2) is connected by guide rail (18) with focusing pedestal (1), wherein adjusting
Coke mobile frame (2) can do straight reciprocating motion in optical axis direction along guide rail (18)；Driving assembly (3) setting is in focusing pedestal
(1) on；Driving assembly (3) drives focusing mobile frame (2) to do straight reciprocating motion in optical axis direction along guide rail (18)；Its feature
It is:
It further include sensor module；
Sensor module includes current vortex sensor (4) and diamond shape measured piece (5)；
Current vortex sensor (4) is fixed in focusing pedestal (1), and diamond shape measured piece (5) is fixed on focusing mobile frame (2),
Current vortex sensor (4) is to obtain focusing mobile frame (2) edge indirectly by moving distance of the measurement away from diamond shape measured piece (5)
The shift length of optical axis direction.
2. focussing distance measuring device in a kind of optical focusing mechanism according to claim 1, it is characterised in that: the electricity
Eddy current sensor (4) includes a pair of of probe and a fore-lying device (43), and a pair of probe is divided into the first probe (41) and the second probe
(42), a pair of of probe is symmetrically mounted on probe fixing seat (6), and probe fixing seat (6) is fixed in focusing pedestal (1), diamond shape
Measured piece (5) is located between a pair of of probe, and between the tested surface of diamond shape measured piece (5) and the normal plane of a pair of of center probe line
Angle be θ, θ is acute angle.
3. focussing distance measuring device in a kind of optical focusing mechanism according to claim 1 or 2, it is characterised in that: institute
It states focusing pedestal (1) and is equipped with temperature sensor (7).
4. focussing distance measuring device in a kind of optical focusing mechanism according to claim 3, it is characterised in that: the drive
Dynamic component (3) are motor.
5. focussing distance measuring device in a kind of optical focusing mechanism according to claim 4, it is characterised in that: the drive
Dynamic component (3) are connect with focusing mobile frame (2) by screw pair (19).
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| Application Number | Priority Date | Filing Date | Title |
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| CN201820952037.8U CN208269822U (en) | 2018-06-20 | 2018-06-20 | Focusing distance measuring device in optical focusing mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201820952037.8U CN208269822U (en) | 2018-06-20 | 2018-06-20 | Focusing distance measuring device in optical focusing mechanism |
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| CN208269822U true CN208269822U (en) | 2018-12-21 |
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| CN201820952037.8U Withdrawn - After Issue CN208269822U (en) | 2018-06-20 | 2018-06-20 | Focusing distance measuring device in optical focusing mechanism |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108680093A (en) * | 2018-06-20 | 2018-10-19 | 中国科学院西安光学精密机械研究所 | Focusing distance measuring device and method in optical focusing mechanism |
-
2018
- 2018-06-20 CN CN201820952037.8U patent/CN208269822U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108680093A (en) * | 2018-06-20 | 2018-10-19 | 中国科学院西安光学精密机械研究所 | Focusing distance measuring device and method in optical focusing mechanism |
| CN108680093B (en) * | 2018-06-20 | 2023-09-01 | 中国科学院西安光学精密机械研究所 | Focusing distance measuring device and measuring method in optical focusing mechanism |
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