CN216245516U

CN216245516U - Automatic feeding equipment of electric burning furnace

Info

Publication number: CN216245516U
Application number: CN202120750496.XU
Authority: CN
Inventors: 闫志旺
Original assignee: Tianjin Zhi Zhen Automatic Equipment Co ltd
Current assignee: Tianjin Zhi Zhen Automatic Equipment Co ltd
Priority date: 2021-04-13
Filing date: 2021-04-13
Publication date: 2022-04-08
Anticipated expiration: 2031-04-13

Abstract

The utility model discloses automatic feeding equipment of an electric burning furnace, which comprises a feeding and discharging device, wherein a vacuum suction nozzle mechanism is fixedly arranged above the feeding and discharging device, a carrying mechanism is arranged on the right side of the feeding and discharging device, a material scattering device is arranged in front of the carrying mechanism, a material accumulating mechanism is arranged on the opposite surface of the material scattering device, a progressive mechanism is arranged below the material scattering device and the material accumulating mechanism, a conveying mechanism is arranged in front of the material scattering device and the material accumulating mechanism, a grabbing mechanism is arranged above the conveying mechanism, and an integral carrying mechanism is arranged on the right side of the grabbing mechanism. The space utilization is maximized, and the operation is convenient.

Description

Automatic feeding equipment of electric burning furnace

Technical Field

The utility model relates to the field of semiconductor processing and manufacturing, in particular to automatic feeding equipment of an electric burning furnace.

Background

The semiconductor is a substance with conductivity between an insulator and a conductor, and the conductivity of the semiconductor is easy to control and can be used as an element material for information processing. Semiconductors are very important from the viewpoint of technological or economic development. The core elements of many electronic products, such as computers, mobile phones, and digital recorders, utilize the conductivity change of semiconductors to process information. Common semiconductor materials are silicon, germanium, gallium arsenide, etc., and silicon is the most influential of various semiconductor materials in commercial applications.

During semiconductor processing, the material is scattered and then is gone up unloading by the manual work in the traditional art, and inefficiency, cost of labor are high, the manual material of spilling can cause to pile up then the adhesion, and the long-pending rate is also low, and the human factor also can produce the defective products, for this reason, we propose electric stove automatic feeding equipment.

SUMMERY OF THE UTILITY MODEL

In order to overcome the defects of the prior art, the utility model provides the automatic feeding equipment of the electric burning furnace, which can completely realize full-automatic closed processing, has extremely low adhesion rate, realizes the flexible production of full-automatic compensation, can meet the unmanned production conditions, realizes the flexible processing process of products, has reasonable layout and design and compact mechanism, maximizes the space utilization and is convenient for personnel to operate.

In order to solve the technical problems, the utility model provides the following technical scheme: automatic feeding equipment of electric furnace, including last unloader, the top fixed mounting of last unloader has vacuum suction nozzle mechanism, transport mechanism is installed on last unloader's right side, the material device is installed in transport mechanism's the place ahead, long-pending material mechanism is installed to the opposite face of material device that spills, the mechanism of progressively advancing is installed to the below of spilling material device and long-pending material mechanism, conveying mechanism is installed in the place ahead of spilling material device and long-pending material mechanism, conveying mechanism's top is installed and is snatched the mechanism, snatch the right side of mechanism and install whole transport mechanism.

As a preferred technical scheme of the present invention, the vacuum nozzle mechanism includes a motor, a first synchronous belt, a first linear guide rail and a first synchronous belt wheel, a support structure is fixedly mounted at a lower end of the motor, an outer end of the support structure is fixedly connected to the first linear guide rail, an output end of the motor is connected to the first synchronous belt wheel through an output shaft, two ends of the first synchronous belt are rotatably connected to the first synchronous belt wheel, and the vacuum nozzle mechanism is provided with two vacuum nozzle mechanisms.

As a preferable technical scheme of the utility model, the carrying mechanism comprises a cartridge clip, a linear motor and a limit sensor, wherein the cartridge clip is connected with the linear motor in a sliding manner, and the limit sensor is arranged below the linear motor.

As a preferred technical scheme of the utility model, the material scattering device comprises a direct vibration feeder, a sealing cylinder and optical fiber sensors, wherein the outer end of the direct vibration feeder is connected with the sealing cylinder, and the optical fiber sensors are arranged on two sides of the direct vibration feeder.

As a preferred technical scheme of the utility model, the accumulated material mechanism comprises a turning motor, a lifting motor, a second linear guide rail, a second synchronous belt, a ball screw, a clamping cylinder, tendons and a vacuum chuck, wherein an output end of the turning motor is rotationally connected with the second synchronous belt, the lifting motor is slidably connected with a moving seat on the second linear guide rail, the ball screw is fixedly mounted on an inner end surface of the moving seat, a rotating wheel is rotationally connected at the center of the moving seat and is in transmission connection with the second synchronous belt, an outer end of the rotating wheel is fixedly connected with a clamping mechanism, the clamping cylinder is fixedly mounted on two sides of the clamping mechanism, the tendons are fixedly mounted on an upper end surface of the clamping mechanism, and the vacuum chuck is mounted in front of the tendons.

As a preferable technical scheme of the present invention, the progressive mechanism includes a progressive motor, two second synchronous pulleys and a third synchronous belt, the progressive mechanism is connected to the second synchronous pulleys through a belt, the two second synchronous pulleys are symmetrically arranged, and the two second synchronous pulleys are connected to each other through the third synchronous belt.

As a preferred technical scheme, the grabbing mechanism comprises an electric cylinder, a vacuum generator, a vacuum suction nozzle and a shaping cylinder, wherein the output end of the electric cylinder is fixedly connected with a transverse plate, the vacuum suction nozzle is installed at the corner of the transverse plate, the shaping cylinder is installed above the transverse plate, a support is fixedly installed on the outer side wall of the electric cylinder, and the upper portion of the support is fixedly connected with the upper end of the vacuum generator.

As a preferred technical solution of the present invention, the integral carrying mechanism includes a conveying motor, a third synchronous pulley, a conveying belt, a reflective sensor and a transmission roller, an output end of the conveying motor is connected to a driving wheel through a belt transmission, the driving wheel is connected to the third synchronous pulley through a connecting rod, the driving wheel and the third synchronous pulley are concentrically arranged, two transverse third synchronous pulleys are connected to each other through the conveying belt, the reflective sensor is provided in plurality and fixedly mounted on the integral carrying mechanism, and the transmission roller is disposed in front of the integral carrying mechanism.

Compared with the prior art, the utility model can achieve the following beneficial effects:

the utility model can completely realize full-automatic closed processing, has matrix type material accumulation and extremely low adhesion rate, realizes full-automatic compensation flexible production, can meet unmanned production conditions, realizes the flexible processing process of products, has reasonable layout and design and compact mechanism, maximizes the space utilization and is convenient for personnel to operate.

Drawings

FIG. 1 is a perspective view of the present invention;

FIG. 2 is a perspective view of a vacuum nozzle mechanism of the present invention;

FIG. 3 is a perspective view of the carrying mechanism of the present invention;

FIG. 4 is a perspective view of the material spreading device of the present invention;

FIG. 5 is a perspective view of the stacking mechanism of the present invention;

FIG. 6 is a perspective view of the advancing mechanism of the present invention;

FIG. 7 is a perspective view of the grasping mechanism of the present invention;

fig. 8 is a perspective view of the entire carrying mechanism of the present invention.

Wherein: 1. a loading and unloading device; 2. a vacuum nozzle mechanism; 3. a carrying mechanism; 4. a material spreading device; 5. a material accumulation mechanism; 6. a progressive mechanism; 7. a conveying mechanism; 8. a grabbing mechanism; 9. an integral carrying mechanism; 10. a cartridge clip; 11. a linear motor; 12. a limit sensor; 13. an electric cylinder; 14. a vacuum generator; 15. a vacuum nozzle; 16. shaping the cylinder; 17. a motor; 18. a first synchronization belt; 19. a first linear guide rail; 20. a first timing pulley; 21. a direct vibration feeder; 22. sealing the cylinder; 23. an optical fiber sensor; 24. turning over a motor; 25. a hoisting motor; 26. a second linear guide; 27. a second synchronous belt; 28. a ball screw; 29. a clamping cylinder; 30. a tendon; 31. a vacuum chuck; 32. a progressive motor; 33. a second timing pulley; 34. a third synchronous belt; 35. a conveying motor; 36. a third synchronous pulley; 37. a conveyor belt; 38. a reflective sensor; 39. and (4) transferring the roller.

Detailed Description

The present invention will be further described with reference to specific embodiments for the purpose of facilitating an understanding of technical means, characteristics of creation, objectives and functions realized by the present invention, but the following embodiments are only preferred embodiments of the present invention, and are not intended to be exhaustive. Based on the embodiments in the implementation, other embodiments obtained by those skilled in the art without any creative efforts belong to the protection scope of the present invention. The experimental methods in the following examples are conventional methods unless otherwise specified, and materials, reagents and the like used in the following examples are commercially available unless otherwise specified.

Example (b):

as shown in fig. 1-8, the automatic feeding equipment of the electric burning furnace comprises a feeding and discharging device 1, a vacuum suction nozzle mechanism 2 is fixedly installed above the feeding and discharging device 1, a carrying mechanism 3 is installed on the right side of the feeding and discharging device 1, a material spreading device 4 is installed in front of the carrying mechanism 3, a material accumulating mechanism 5 is installed on the opposite surface of the material spreading device 4, a progressive mechanism 6 is installed below the material spreading device 4 and the material accumulating mechanism 5, a conveying mechanism 7 is installed in front of the material spreading device 4 and the material accumulating mechanism 5, a grabbing mechanism 8 is installed above the conveying mechanism 7, and an integral carrying mechanism 9 is installed on the right side of the grabbing mechanism 8;

the material spreading device 4 is responsible for feeding wafers, the progressive mechanism 6 is responsible for taking and placing the wafers, the conveying mechanism 7 is responsible for conveying work between a feeding box and a transplanting turntable, the conveying mechanism 3 is responsible for judging the shapes and the positions of the wafers, meanwhile, the material accumulating mechanism 5 and the conveying mechanism 7 move to ensure that the wafers are placed in the center of the transplanting turntable, the material accumulating mechanism 5 is responsible for conveying the wafers to the lower part of a welding head and can horizontally move and rotate, the turntable can be lifted, the grabbing mechanism 8 is responsible for conveying the processed products to the integral conveying mechanism 9, the integral conveying mechanism 9 is responsible for integrally conveying the processed products, in the actual work, after the cartridge clips 10 provided with the meshes are placed in the equipment, the linear motor 11 is matched with the vacuum suction nozzle mechanism 2 to suck the meshes, then the meshes are placed to the progressive mechanism 6 for carrying forward, so that after the meshes are progressively conveyed from a first station to a middle station, the material scattering device 4 works synchronously while advancing, the material scattering device 4 scatters semiconductor materials into material bowls, the carrying mechanism 3 translates to the material accumulating mechanism 5, tendons 30, a vacuum chuck 31 and a clamping cylinder 29 in the material accumulating mechanism 5 cooperate to complete matrix type material accumulation, the matrix type material accumulation is placed on a net piece of an intermediate station after completion, the advancing mechanism 6 translates to three stations, a cover net piece is conveyed to the integral carrying mechanism 9 through the grabbing mechanism 8 to be conveyed integrally, the position of the net piece is detected and judged, coordinate data are converted, high-precision carrying mechanism 3 is matched to perform data compensation processing, the flexible full-automatic processing process of products is achieved, sensors are designed among the parts to detect and judge in place, the action form of each moving part is fed back automatically, and interlocking and interaction are achieved through a control software program.

In other embodiments, the vacuum nozzle mechanism 2 includes a motor 17, a first synchronous belt 18, a first linear guide rail 19 and a first synchronous pulley 20, a support structure is fixedly mounted at the lower end of the motor 17, the outer end of the support structure is fixedly connected with the first linear guide rail 19, the output end of the motor 17 is connected with the first synchronous belt 18 through an output shaft, two ends of the first synchronous belt 18 are rotatably connected with the first synchronous pulley 20, and the vacuum nozzle mechanism 2 is provided with two;

the motor 17 is started, the first synchronous belt pulley 20 can be driven to rotate under the action of the motor 17, the first synchronous belt pulley 20 is in transmission connection through the first synchronous belt 18, the movement of the device is limited by arranging the first linear guide rail 19, the mesh which is conveyed can be conveyed to the progressive mechanism 6 by arranging the vacuum suction nozzle mechanism 2, and the operation is simple.

In other embodiments, the carrying mechanism 3 comprises a cartridge clip 10, a linear motor 11 and a limit sensor 12, the cartridge clip 10 is connected with the linear motor 11 in a sliding manner, and the limit sensor 12 is arranged below the linear motor 11;

can accept the net piece through setting up cartridge clip 10, can adjust the vertical height of cartridge clip 10 through setting up linear electric motor 11, can prescribe a limit to the motion route through setting up spacing sensor 12, avoid droing easy operation.

In other embodiments, the material spreading device 4 comprises a straight vibrating feeder 21, a sealing cylinder 22 and an optical fiber sensor 23, the outer end of the straight vibrating feeder 21 is connected with the sealing cylinder 22, and the optical fiber sensors 23 are mounted on two sides of the straight vibrating feeder 21;

the feeding of wafer can be realized through setting up straight shake feeder 21, seal the cylinder 22 through setting up and can realize sealing, can monitor the quantity of wafer through setting up optical fiber sensor 23, and can realize the feed function of wafer through setting up material device 4 that spills.

In other embodiments, the stacking mechanism 5 includes a turning motor 24, a lifting motor 25, a second linear guide rail 26, a second synchronous belt 27, a ball screw 28, a clamping cylinder 29, tendons 30 and a vacuum chuck 31, an output end of the turning motor 24 is rotatably connected with the second synchronous belt 27, the lifting motor 25 is slidably connected with a moving seat on the second linear guide rail 26, the ball screw 28 is fixedly mounted on an inner end surface of the moving seat, a rotating wheel is rotatably connected at the center of the moving seat and is in transmission connection with the second synchronous belt 27, an outer end of the rotating wheel is fixedly connected with a clamping mechanism, the clamping cylinders 29 are fixedly mounted on two sides of the clamping mechanism, the tendons 30 are fixedly mounted on an upper end surface of the clamping mechanism, and the vacuum chuck 31 is mounted in front of the tendons 30;

can drive second hold-in range 27 through setting up upset motor 24 and rotate, the runner is connected with the transmission of second hold-in range 27, the outer end fixedly connected with of runner presss from both sides material mechanism, and second hold-in range 27 can drive and press from both sides material mechanism and rotate, realize the function and the purpose of upset, can inject the removal route of removing the seat through setting up ball 28, and have limiting displacement concurrently, can realize the function of pressing from both sides the material through setting up die clamping cylinder 29, and can satisfy the centre gripping requirement of not unidimensional material, can accomplish inhaling tightly fixed of material through setting up vacuum chuck 31, long-pending material mechanism 5 is responsible for moving the wafer and send the soldered connection below, and self can horizontal migration and rotary motion, the liftable.

In other embodiments, the progressive mechanism 6 includes a progressive motor 32, a second synchronous pulley 33 and a third synchronous belt 34, the progressive mechanism 6 is connected with the second synchronous pulley 33 through a belt, two second synchronous pulleys 33 are symmetrically arranged, and the two second synchronous pulleys 33 are connected through the third synchronous belt 34;

can drive second synchronous pulley 33 through progressive motor 32 and rotate, and be connected through third hold-in range 34 between the second synchronous pulley 33 to can realize the removal of top tray, can realize the product through setting up progressive mechanism 6 and remove between the station.

In other embodiments, the grabbing mechanism 8 comprises an electric cylinder 13, a vacuum generator 14, a vacuum suction nozzle 15 and a shaping cylinder 16, wherein a transverse plate is fixedly connected to the output end of the electric cylinder 13, the vacuum suction nozzle 15 is installed at the corner of the transverse plate, the shaping cylinder 16 is installed above the transverse plate, a support is fixedly installed on the outer side wall of the electric cylinder 13, and the upper part of the support is fixedly connected with the upper end of the vacuum generator 14;

can carry out the removal of vertical direction to the product through setting up electric jar 13, can accomplish the centre gripping and the fastening of material through setting up vacuum suction nozzle 15, through setting up the stability of promotion centre gripping that shaping cylinder 16 can be further, the practicality is strong.

In other embodiments, the integral carrying mechanism 9 includes a conveying motor 35, third synchronous pulleys 36, a conveying belt 37, a reflective sensor 38 and a transmission roller 39, an output end of the conveying motor 35 is connected with a driving wheel through a belt transmission, the driving wheel is connected with the third synchronous pulleys 36 through a connecting rod, the driving wheel and the third synchronous pulleys 36 are arranged in a concentric circle, two transverse third synchronous pulleys 36 are connected through the conveying belt 37, the reflective sensors 38 are provided in plurality and fixedly mounted on the integral carrying mechanism 9, and the transmission roller 39 is arranged in front of the integral carrying mechanism 9;

drive the drive wheel through conveying motor 35 and rotate, can drive third synchronous pulley 36 under the effect of drive wheel and connecting rod and rotate, and be connected through conveyer belt 37 between two horizontal third synchronous pulleys 36, can realize the removal of material, can detect being close to of having or not having the product through setting up reflective sensor 38, the practicality is strong, can the stationarity of material transport through setting up transmission gyro wheel 39.

In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

The foregoing shows and describes the general principles, essential features, and advantages of the utility model. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, and the preferred embodiments of the present invention are described in the above embodiments and the description, and are not intended to limit the present invention. The scope of the utility model is defined by the appended claims and equivalents thereof.

Claims

1. Automatic feeding equipment of electric furnace, including unloader (1), its characterized in that: the utility model discloses a conveying mechanism, including last unloader (1), handling mechanism (3) are installed on the right side of last unloader (1), spill material device (4) are installed in the place ahead of handling mechanism (3), the long-pending material mechanism (5) are installed to the opposite face of spilling material device (4), spill the below of material device (4) and long-pending material mechanism (5) and install and carry forward mechanism (6) one by one, conveyor mechanism (7) are installed in the place ahead of spilling material device (4) and long-pending material mechanism (5), the top of conveyor mechanism (7) is installed and is snatched mechanism (8), snatch the right side of mechanism (8) and install whole handling mechanism (9).

2. The automatic charging equipment of the electric burning furnace of claim 1, which is characterized in that: the vacuum suction nozzle mechanism (2) comprises a motor (17), a first synchronous belt (18), a first linear guide rail (19) and a first synchronous belt wheel (20), a supporting structure is fixedly mounted at the lower end of the motor (17), the outer end of the supporting structure is fixedly connected with the first linear guide rail (19), the output end of the motor (17) is connected with the first synchronous belt (18) through an output shaft, the two ends of the first synchronous belt (18) are rotatably connected with the first synchronous belt wheel (20), and the vacuum suction nozzle mechanism (2) is provided with two parts.

3. The automatic charging equipment of the electric burning furnace of claim 1, which is characterized in that: the carrying mechanism (3) comprises a cartridge clip (10), a linear motor (11) and a limiting sensor (12), the cartridge clip (10) is connected with the linear motor (11) in a sliding mode, and the limiting sensor (12) is arranged below the linear motor (11).

4. The automatic charging equipment of the electric burning furnace of claim 1, which is characterized in that: spill material device (4) including directly shake feeder (21), seal cylinder (22) and optical fiber sensor (23), directly shake the outer end of feeder (21) and seal cylinder (22) and be connected, directly shake the both sides of feeder (21) and install optical fiber sensor (23).

5. The automatic charging equipment of the electric burning furnace of claim 1, which is characterized in that: the timber stacking mechanism (5) comprises a turnover motor (24), a lifting motor (25), a second linear guide rail (26), a second synchronous belt (27), a ball screw (28), a clamping cylinder (29), tendons (30) and a vacuum chuck (31), the output end of the turnover motor (24) is rotationally connected with a second synchronous belt (27), the lifting motor (25) and the second linear guide rail (26) are connected with a moving seat in a sliding way, a ball screw (28) is fixedly arranged on the inner end surface of the moving seat, a rotating wheel is rotatably connected at the center of the moving seat, and the runner is connected with the transmission of second hold-in range (27), and the outer end fixedly connected with of runner presss from both sides material mechanism, and the both sides fixed mounting that presss from both sides material mechanism has die clamping cylinder (29), presss from both sides the up end fixed mounting of material mechanism and has tendon (30), vacuum chuck (31) are installed in the place ahead of tendon (30).

6. The automatic charging equipment of the electric burning furnace of claim 1, which is characterized in that: the progressive mechanism (6) comprises a progressive motor (32), a second synchronous pulley (33) and a third synchronous belt (34), the progressive mechanism (6) is connected with the second synchronous pulley (33) through a belt, the second synchronous pulley (33) is symmetrically provided with two synchronous pulleys, and the two synchronous pulleys are connected between the second synchronous pulley (33) through the third synchronous belt (34).

7. The automatic charging equipment of the electric burning furnace of claim 1, which is characterized in that: snatch mechanism (8) and include electric jar (13), vacuum generator (14), vacuum suction nozzle (15) and integer cylinder (16), the output fixedly connected with diaphragm of electric jar (13), vacuum suction nozzle (15) are installed to the edge of diaphragm, and the top of diaphragm installs integer cylinder (16), the lateral wall fixed mounting of electric jar (13) has the support, the top of support with the upper end fixed connection of vacuum generator (14).

8. The automatic charging equipment of the electric burning furnace of claim 1, which is characterized in that: whole handling mechanism (9) are including conveying motor (35), third synchronous pulley (36), conveyer belt (37), reflective sensor (38) and transmission gyro wheel (39), the output of conveying motor (35) is connected with the drive wheel through belt drive, the drive wheel with be connected through the connecting rod between third synchronous pulley (36), and drive wheel and third synchronous pulley (36) are concentric circles setting, and transversely two be connected through conveyer belt (37) between third synchronous pulley (36), reflective sensor (38) are provided with a plurality ofly, and fixed mounting is on whole handling mechanism (9), transmission gyro wheel (39) set up the place ahead at whole handling mechanism (9).