CN216237377U - High-temperature processing device for monocrystalline silicon processing - Google Patents
High-temperature processing device for monocrystalline silicon processing Download PDFInfo
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- CN216237377U CN216237377U CN202122313536.7U CN202122313536U CN216237377U CN 216237377 U CN216237377 U CN 216237377U CN 202122313536 U CN202122313536 U CN 202122313536U CN 216237377 U CN216237377 U CN 216237377U
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Abstract
The utility model discloses a high-temperature processing device for processing monocrystalline silicon, which comprises a box body, wherein an opening is formed in the front side of the box body, a movable door matched with the opening is arranged on the front side of the box body, when the high-temperature processing device is used, raw materials are clamped and fixed conveniently through the mutual matching among a clamping plate, a second threaded rod, a second threaded sleeve and a hand-operated wheel, and a top cover is lifted conveniently through the mutual matching among a telescopic rod, a rotary disc, a rotary shaft, a movable plate, a connecting rod, a worm wheel, a worm and a second servo motor, so that the heating speed of the fed raw materials is increased, the processing efficiency is improved, water mist attached to the rear side of an observation window can be cleaned through the mutual matching among a first servo motor, a first threaded rod, a belt, a first threaded sleeve, a connecting plate and cotton cloth, an observer can better observe the heating condition of an inner cavity of the device, the use effect is good.
Description
Technical Field
The utility model relates to the technical field of monocrystalline silicon, in particular to a high-temperature processing device for processing monocrystalline silicon.
Background
Silicon is the most commonly used semiconductor material, when the molten simple substance silicon is solidified, silicon atoms are arranged into crystal nuclei in diamond crystal lattices, the crystal nuclei grow into crystal grains with the same crystal face orientation to form monocrystalline silicon, the monocrystalline silicon is used as a relatively active non-metal element crystal and is an important component of a crystal material, and a high-temperature processing device is required to carry out high-temperature carbon reduction on the monocrystalline silicon when the monocrystalline silicon is subjected to medium processing.
Current high temperature processingequipment for monocrystalline silicon processing, when using, can't make the device carry out high temperature heating to the raw materials fast, rate of heating is slow, and current high temperature processingequipment is used for observing the process through installing the observation window, but when there is the difference in temperature in device inner chamber and the external world, the observation that influences the observer is experienced through having water smoke adhesion to the observation window rear side, and the result of use is poor.
SUMMERY OF THE UTILITY MODEL
In order to overcome the defects of the prior art, the utility model provides a high-temperature processing device for processing monocrystalline silicon.
One of the purposes of the utility model is realized by adopting the following technical scheme:
the utility model provides a high temperature processingequipment is used in monocrystalline silicon processing, includes the box, the opening has been seted up to the front side of box, just the front side of box is equipped with the dodge gate that matches each other with the opening, the equal fixedly connected with electric heating board of the inner chamber left and right sides intermediate position department of box, the inner chamber bottom of box is equipped with places the box, just the bottom of placing the box is close to the first slider of the equal fixedly connected with of the left and right sides department, first spout has all been seted up, and two to the box inner chamber bottom is close to left and right sides department first slider swing joint is adjacent first spout inner chamber respectively, the inner chamber of placing the box is equipped with fixture, the top of placing the box is equipped with the top cap that matches each other with it, the top of top cap is equipped with elevating system.
Furthermore, the left side of dodge gate is equipped with a plurality of hinge, just the dodge gate passes through a plurality of hinge and box swing joint, the front side of dodge gate is close to right side fixedly connected with handle, the front side of dodge gate is close to intermediate position fixedly connected with observation window.
Furthermore, the rear side of the movable door is fixedly connected with two fixed plates which are respectively positioned at the left side and the right side of the observation window, two first bearings are fixedly connected on the two fixed plates, the two first bearings are arranged up and down, a connecting plate is arranged at the position, close to the right side, of the rear side of the observation window, cotton cloth is fixedly connected at the front side of the connecting plate, first thread sleeves are fixedly connected at the top and the bottom of the connecting plate, a first threaded rod penetrates through the inner cavity of each first thread sleeve, a first protective shell is fixedly connected at the position, close to the top, of the right side of the box body, a first servo motor is fixedly connected at the right side of the inner cavity of each first protective shell, two second bearings are fixedly connected at the right side of the box body, the two second bearings are arranged up and down, and the left end of the first threaded rod positioned at the bottom is inserted into the inner cavities of the adjacent first bearings, and the right end of the first threaded rod penetrates through the inner cavities of the adjacent first bearing and the second bearing and extends to the outer side of the box body, the left end of the first threaded rod, which is positioned at the top, is inserted into the inner cavity of the adjacent first bearing, the right end of the first threaded rod penetrates through the inner cavities of the adjacent first bearing and the second bearing and is fixedly connected with the power output end of the first servo motor, a belt is arranged between the first threaded rods, a through hole matched with the belt is formed in the bottom of the first protective shell, and the first threaded rods are connected through the belt in a transmission mode.
Further, fixture includes two splint, and two splint are located the inner chamber bottom of placing the box respectively and are close to left and right sides department, two the equal fixedly connected with second slider in bottom of splint, the inner chamber bottom of placing the box is close to left and right sides department and has all seted up the second spout, and two the second slider swing joint is at adjacent second spout inner chamber respectively, two the equal fixedly connected with third bearing in one side that the splint kept away from mutually, just the third bearing inner chamber is pegged graft and is had the second threaded rod, place the equal fixedly connected with second thread bush in the box left and right sides, two the one end that adjacent splint were kept away from to the second threaded rod runs through adjacent second thread bush inner chamber respectively to the hand round of fixedly connected with.
Furthermore, the lifting mechanism comprises a rotary disc, the rotary disc is positioned at the position, close to the rear side, of the top cover, a rotary shaft is arranged in an inner cavity of the rotary disc, a fourth bearing is fixedly connected to the position, close to the top, of the rear side of an inner cavity of the box body, the rear end of the rotary shaft is inserted into an inner cavity of the fourth bearing, a movable plate is fixedly connected to the front end of the rotary shaft, a connecting rod is movably connected to the position, close to the left side, of the front side of the movable plate, one end, away from the movable plate, of the connecting rod is hinged to the top of the top cover, a worm wheel is sleeved on the rotary shaft and close to the rear end, a worm is meshed with the top of the worm wheel, a second protective shell is fixedly connected to the position, close to the top, of the right side of the box body, a second servo motor is fixedly connected to the right side of the inner cavity of the second protective shell, a fifth bearing is fixedly connected to the position, and the right end of the worm penetrates through an inner cavity of the fifth bearing, and is fixedly connected with the power output end of the second servo motor.
Furthermore, the top of top cap is close to the equal fixedly connected with telescopic link in four corners department, just the top and the box inner chamber top fixed connection of telescopic link.
Further, the front side of cotton is laminated with the rear side of dodge gate mutually, just the height of cotton is unanimous with the height of observation window.
Compared with the prior art, the utility model has the beneficial effects that:
1. the raw materials are clamped and fixed conveniently through the mutual matching among the clamping plate, the second threaded rod, the second threaded sleeve and the hand-operated wheel, and the top cover is lifted conveniently through the mutual matching among the telescopic rod, the rotary table, the rotary shaft, the movable plate, the connecting rod, the worm wheel, the worm and the second servo motor, so that the heating speed of the fed raw materials can be increased during high-temperature processing, and the processing efficiency is improved;
2. can clean the adnexed water smoke of observation window rear side through mutually supporting between first servo motor, first threaded rod, belt, first thread bush, connecting plate and the cotton, the better viewing device inner chamber of the observer of being convenient for heats the condition, excellent in use effect.
The foregoing description is only an overview of the technical solutions of the present invention, and in order to make the technical means of the present invention more clearly understood, the present invention may be implemented in accordance with the content of the description, and in order to make the above and other objects, features, and advantages of the present invention more clearly understood, the following preferred embodiments are described in detail with reference to the accompanying drawings.
Drawings
FIG. 1 is a schematic structural diagram of the present embodiment;
FIG. 2 is a left side sectional view of the present embodiment;
FIG. 3 is a front view of the present embodiment;
fig. 4 is a rear view of the component viewing window.
In the figure: 1. a box body; 2. placing the box; 3. a splint; 4. a second threaded rod; 5. a hand-operated wheel; 6. an electrical heating plate; 7. a top cover; 8. a telescopic rod; 9. a turntable; 10. a rotating shaft; 11. a movable plate; 12. a connecting rod; 13. a worm; 14. a second servo motor; 15. a belt; 16. a worm gear; 17. a movable door; 18. an observation window; 19. a connecting plate; 20. cotton cloth; 21. a first threaded sleeve; 22. a first threaded rod; 23. a first servo motor; 24. a second threaded sleeve.
Detailed Description
The present invention will be further described with reference to the accompanying drawings and the detailed description, and it should be noted that any combination of the embodiments or technical features described below can be used to form a new embodiment without conflict.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When a component is referred to as being "connected" to another component, it can be directly connected to the other component or intervening components may also be present. When a component is referred to as being "disposed on" another component, it can be directly on the other component or intervening components may also be present. The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the utility model herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the utility model. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
Referring to fig. 1 to 4, a high temperature processing device for processing monocrystalline silicon comprises a box body 1, wherein an opening is arranged at the front side of the box body 1, a movable door 17 matched with the opening is arranged at the front side of the box body 1, a plurality of hinges are arranged at the left side of the movable door 17, the movable door 17 is movably connected with the box body 1 through a plurality of hinges, a handle is fixedly connected at the position, close to the right side, of the front side of the movable door 17, an observation window 18 is fixedly connected at the position, close to the middle position, of the front side of the movable door 17, so as to penetrate through the heating condition of an inner cavity of the box body 1, an electric heating plate 6 is fixedly connected at the middle positions of the left side and the right side of the inner cavity of the box body 1, a placing box 2 is arranged at the bottom of the inner cavity of the box body 1, first slide grooves are respectively arranged at the positions, close to the left side and the right side, and two first slide blocks are respectively movably connected with the inner cavities of the adjacent first slide grooves, the inner cavity of the placing box 2 is provided with a clamping mechanism, the top of the placing box 2 is provided with a top cover 7 matched with the top of the placing box 2, and the top of the top cover 7 is provided with a lifting mechanism;
the rear side of the movable door 17 is fixedly connected with two fixed plates which are respectively positioned at the left side and the right side of the observation window 18, two first bearings are fixedly connected on the two fixed plates, the two first bearings are arranged up and down, a connecting plate 19 is arranged at the position, close to the right side, of the rear side of the observation window 18, a cotton cloth 20 is fixedly connected at the front side of the connecting plate 19, the front side of the cotton cloth 20 is attached to the rear side of the movable door 17, the height of the cotton cloth 20 is consistent with that of the observation window 18, a first threaded sleeve 21 is fixedly connected at the top and the bottom of the connecting plate 19, a first threaded rod 22 penetrates through the inner cavity of the first threaded sleeve 21, a first protective shell is fixedly connected at the position, close to the top, of the right side of the box body 1, a first servo motor 23 is fixedly connected at the right side of the inner cavity of the first protective shell, two second bearings are fixedly connected at the right side of the box body 1, and the two second bearings are arranged up and down, the left end of a first threaded rod 22 positioned at the bottom is inserted into an inner cavity of an adjacent first bearing, the right end of the first threaded rod 22 penetrates through the inner cavities of the adjacent first bearing and the adjacent second bearing and extends to the outer side of the box body 1, the left end of the first threaded rod 22 positioned at the top is inserted into the inner cavity of the adjacent first bearing, the right end of the first threaded rod 22 penetrates through the inner cavities of the adjacent first bearing and the adjacent second bearing and is fixedly connected with the power output end of a first servo motor 23, a belt 15 is arranged between the two first threaded rods 22, a through hole matched with the belt 15 is formed in the bottom of the first protective shell, and the two first threaded rods 22 are in transmission connection through the belt 15, so that the observation experience of an observer is improved, and the use effect is good;
the clamping mechanism comprises two clamping plates 3, the two clamping plates 3 are respectively positioned at the bottom of the inner cavity of the placing box 2 and close to the left side and the right side, the bottoms of the two clamping plates 3 are both fixedly connected with second sliding blocks, the bottom of the inner cavity of the placing box 2 and close to the left side and the right side are both provided with second sliding grooves, the two second sliding blocks are respectively movably connected with the inner cavities of the adjacent second sliding grooves, one sides, away from the two clamping plates 3, of the two clamping plates are both fixedly connected with third bearings, second threaded rods 4 are inserted into the inner cavities of the third bearings, the left side and the right side of the placing box 2 are both fixedly connected with second threaded sleeves 24, one ends, away from the adjacent clamping plates 3, of the two second threaded rods 4 respectively penetrate through the inner cavities of the adjacent second threaded sleeves 24 and are fixedly connected with hand-operated wheels 5, and the stability of the device is improved;
the lifting mechanism comprises a rotary table 9, the rotary table 9 is positioned at the position, close to the rear side, of the top cover 7, a rotary shaft 10 is arranged in an inner cavity of the rotary table 9, a fourth bearing is fixedly connected to the position, close to the top, of the rear side of an inner cavity of the box body 1, the rear end of the rotary shaft 10 is inserted into an inner cavity of the fourth bearing, a movable plate 11 is fixedly connected to the front end of the rotary shaft 10, a connecting rod 12 is movably connected to the position, close to the left side, of the front side of the movable plate 11, one end, far away from the movable plate 11, of the connecting rod 12 is hinged to the top of the top cover 7, a worm wheel 16 is sleeved on the rotary shaft 10 and close to the rear end, a worm 13 is meshed with the top of the worm wheel 16, a second protective shell is fixedly connected to the position, close to the top, of the right side of the box body 1, a second servo motor 14 is fixedly connected to the right side of the inner cavity of the second protective shell, a fifth bearing is fixedly connected to the right side of the box body 1, the right side of the worm 13 penetrates through the fifth bearing and is fixedly connected with a power output end of the second servo motor 14, the top of top cap 7 is close to equal fixedly connected with telescopic link 8 in four corners department, and the top of telescopic link 8 and 1 inner chamber top fixed connection of box, is convenient for carry out carbon reduction to monocrystalline silicon fast.
The working principle is as follows: when the utility model is used, the movable door 17 is opened through a handle, the placing box 2 is pulled to move forwards, two first sliding blocks respectively slide in the inner cavities of adjacent first sliding chutes to limit the placing box 2, monocrystalline silicon to be subjected to carbon reduction is placed in the placing box 2, two hand-operated wheels 5 are rotated to drive adjacent second threaded rods 4 to rotate, the two second threaded rods 4 rotate to drive two clamping plates 3 to move relatively through adjacent second threaded sleeves 24, the two second sliding blocks respectively move in the inner cavities of adjacent second sliding chutes, so that the two clamping plates 3 move relatively and clamp and fix the monocrystalline silicon, the placing box 2 is pushed into the inner cavity of the box body 1 again, the movable door 17 is closed, two electric heating plates 6 and a second servo motor 14 are started through an external power supply, the second servo motor 14 works to drive the worm 13 to rotate, the worm 13 rotates to drive the worm wheel 16 to rotate, the worm wheel 16 rotates to drive the rotating shaft 10 to rotate, the rotating shaft 10 rotates to drive the movable plate 11 to deflect downwards at the left side, so that the top cover 7 is pushed to move downwards through the connecting rod 12, the top cover 7 is limited through the arrangement of the plurality of telescopic rods 8, the top cover 7 moves downwards and covers the placing box 2 in a closing manner, the heating rate of monocrystalline silicon is accelerated, when the temperature of the inner cavity of the box body 1 rises, due to the temperature difference with the outer side of the box body 1, water mist is attached to the rear side of the observation window 18, the first servo motor 23 is started through an external power supply, the first servo motor 23 works to drive the adjacent first threaded rods 22 to rotate, the first threaded rods 22 rotate to drive the first threaded rods 22 at the bottom through the belt 15, the two first threaded rods 22 simultaneously rotate to drive the two first threaded sleeves 21 to move leftwards, so as to drive the connecting plate 19 to move leftwards, the connecting plate 19 moves leftwards to drive the cotton cloth 20 to move leftwards, and the attached water mist at the rear side of the observation window 18 is wiped, so that an observer can better penetrate through the heating condition of the inner cavity of the box body 1, and the using effect is good.
The above embodiments are only preferred embodiments of the present invention, and the protection scope of the present invention is not limited thereby, and any insubstantial changes and substitutions made by those skilled in the art based on the present invention are within the protection scope of the present invention.
Claims (7)
1. The utility model provides a high temperature processingequipment is used in monocrystalline silicon processing, includes box (1), its characterized in that: the front side of box (1) is opened and is equipped with the opening, just the front side of box (1) is equipped with dodge gate (17) that matches each other with the opening, the equal fixedly connected with electric heating board (6) of the inner chamber left and right sides intermediate position department of box (1), the inner chamber bottom of box (1) is equipped with places box (2), just the bottom of placing box (2) is close to the first slider of the equal fixedly connected with of left and right sides department, box (1) inner chamber bottom is close to left and right sides department and has all seted up first spout, and two first slider swing joint is adjacent first spout inner chamber respectively, the inner chamber of placing box (2) is equipped with fixture, the top of placing box (2) is equipped with top cap (7) that matches each other with it, the top of top cap (7) is equipped with elevating system.
2. The high-temperature processing apparatus for processing single-crystal silicon according to claim 1, wherein: the left side of dodge gate (17) is equipped with a plurality of hinge, just dodge gate (17) are through a plurality of hinge and box (1) swing joint, the front side of dodge gate (17) is close to right side department fixedly connected with handle, the front side of dodge gate (17) is close to intermediate position department fixedly connected with observation window (18).
3. The high-temperature processing apparatus for processing single-crystal silicon according to claim 1, wherein: the rear side of the movable door (17) is fixedly connected with two fixed plates, the two fixed plates are respectively positioned at the left side and the right side of the observation window (18), two first bearings are fixedly connected to the two fixed plates, the two first bearings are arranged up and down, a connecting plate (19) is arranged at the position, close to the right side, of the rear side of the observation window (18), cotton cloth (20) is fixedly connected to the front side of the connecting plate (19), the top and the bottom of the connecting plate (19) are fixedly connected with a first threaded sleeve (21), a first threaded rod (22) penetrates through the inner cavity of the first threaded sleeve (21), a first protective shell is fixedly connected to the position, close to the top, of the right side of the box body (1), a first servo motor (23) is fixedly connected to the right side of the inner cavity of the first protective shell, and two second bearings are fixedly connected to the right side of the box body (1), the two second bearings are arranged up and down, the left end of the first threaded rod (22) located at the bottom is connected with the inner cavity of the adjacent first bearing in an inserting mode, the right end of the first threaded rod (22) penetrates through the inner cavities of the adjacent first bearing and the second bearing and extends to the outer side of the box body (1), the left end of the first threaded rod (22) located at the top is connected with the inner cavity of the adjacent first bearing in an inserting mode, the right end of the first threaded rod (22) penetrates through the inner cavities of the adjacent first bearing and the second bearing and is fixedly connected with the power output end of the first servo motor (23), a belt (15) is arranged between the first threaded rods (22), through holes matched with the belt (15) are formed in the bottom of the first protective shell, and the two first threaded rods (22) are connected through the belt (15) in a transmission mode.
4. The high-temperature processing apparatus for processing single-crystal silicon according to claim 1, wherein: the clamping mechanism comprises two clamping plates (3), the two clamping plates (3) are respectively positioned at the positions, close to the left side and the right side, of the bottom of the inner cavity of the placing box (2), the bottoms of the two clamping plates (3) are fixedly connected with second sliding blocks, the bottom of the inner cavity of the placing box (2) is provided with a second chute near the left side and the right side, the two second sliding blocks are respectively movably connected with the inner cavities of the adjacent second sliding chutes, the sides of the two clamping plates (3) far away from each other are fixedly connected with third bearings, and a second threaded rod (4) is inserted into the inner cavity of the third bearing, a second threaded sleeve (24) is fixedly connected to the left side and the right side of the placing box (2), two ends, far away from the adjacent clamping plates (3), of the second threaded rods (4) respectively penetrate through the inner cavities of the adjacent second threaded sleeves (24) and are fixedly connected with hand-operated wheels (5).
5. The high-temperature processing apparatus for processing single-crystal silicon according to claim 1, wherein: the lifting mechanism comprises a rotary table (9), the rotary table (9) is positioned at the position, close to the rear side, of the top cover (7), a rotary shaft (10) is arranged in an inner cavity of the rotary table (9), a fourth bearing is fixedly connected to the position, close to the top, of the rear side of an inner cavity of the box body (1), the rear end of the rotary shaft (10) is inserted into an inner cavity of the fourth bearing, a movable plate (11) is fixedly connected to the front end of the rotary shaft (10), a connecting rod (12) is movably connected to the position, close to the left side, of the front side of the movable plate (11), one end, far away from the movable plate (11), of the connecting rod (12) is hinged to the top of the top cover (7), a worm wheel (16) is sleeved on the rotary shaft (10) close to the rear end, a worm (13) is meshed with the top of the worm wheel (16), a second protective shell is fixedly connected to the position, close to the top, and a second servo motor (14) is fixedly connected to the right side of an inner cavity of the second protective shell, the right side of the box body (1) is fixedly connected with a fifth bearing close to the top, and the right end of the worm (13) penetrates through the inner cavity of the fifth bearing and is fixedly connected with the power output end of the second servo motor (14).
6. The high-temperature processing apparatus for processing single-crystal silicon according to claim 1, wherein: the top of top cap (7) is close to equal fixedly connected with telescopic link (8) in four corners department, just the top and the box (1) inner chamber top fixed connection of telescopic link (8).
7. A high-temperature processing apparatus for processing single-crystal silicon according to claim 3, wherein: the front side of cotton cloth (20) is laminated with the rear side of dodge gate (17), just the height of cotton cloth (20) is unanimous with the height of observation window (18).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122313536.7U CN216237377U (en) | 2021-09-24 | 2021-09-24 | High-temperature processing device for monocrystalline silicon processing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122313536.7U CN216237377U (en) | 2021-09-24 | 2021-09-24 | High-temperature processing device for monocrystalline silicon processing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216237377U true CN216237377U (en) | 2022-04-08 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122313536.7U Active CN216237377U (en) | 2021-09-24 | 2021-09-24 | High-temperature processing device for monocrystalline silicon processing |
Country Status (1)
| Country | Link |
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| CN (1) | CN216237377U (en) |
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2021
- 2021-09-24 CN CN202122313536.7U patent/CN216237377U/en active Active
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Effective date of registration: 20230515 Address after: 214000 Huaqing Chuangzhi Park, Huishan Economic Development Zone, Wuxi City, Jiangsu Province 14-801 Patentee after: Wuxi Heguang Green Energy Technology Co.,Ltd. Address before: 510000 shop 117, first floor, No. 207-211, Baogang Avenue, Haizhu District, Guangzhou City, Guangdong Province Patentee before: Yan Yali |
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