CN216207297U - Detection equipment for solar cell passivation film layer - Google Patents
Detection equipment for solar cell passivation film layer Download PDFInfo
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- CN216207297U CN216207297U CN202122358574.4U CN202122358574U CN216207297U CN 216207297 U CN216207297 U CN 216207297U CN 202122358574 U CN202122358574 U CN 202122358574U CN 216207297 U CN216207297 U CN 216207297U
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Abstract
The utility model discloses a detection device for a solar cell passivation film layer, which comprises a film coating module, wherein a sealing machine table for sealing and coating a solar cell panel is arranged on the film coating module, a film coating cavity is arranged inside the sealing machine table, a sealing limiting plate for sealing the sealing machine table is arranged on the sealing machine table, a clamping groove for clamping the sealing limiting plate on the sealing machine table is arranged at the position of the sealing machine table close to the sealing limiting plate, a clamping block for sliding in the clamping groove is arranged on the sealing limiting plate, a detection part for performing sealing detection on the sealing machine table is arranged on the sealing limiting plate, the detection part comprises a sliding azimuth block, a sealing part for performing sealing on the sealing machine table is arranged at the position of the sealing machine table close to the sealing limiting plate, the purpose of performing sealing detection on equipment for passivating the solar cell panel is achieved, and the sealing performance of the equipment for passivating and preparing the solar cell panel is ensured, the gas reaction tightness is ensured, and the success rate of passivation of the cell panel is improved.
Description
Technical Field
The utility model relates to the field of solar cells, in particular to a detection device for a passivation film layer of a solar cell.
Background
Passivation is defined as the passivation of a metal material by strong anodic polarization under oxidizing conditions to a state where corrosion is hindered by the formation of a very thin protective layer on the surface of the metal material. The thin film on the metal surface is a passivation film. Some metals or alloys exhibit a simple barrier layer at the activation potential or in the case of weak anodic polarization to reduce the corrosion rate, which is not considered passivation by the definition of passivation. The passivation film has a very thin structure, and the thickness is measured between 1 nm and 10 nm.
Metal passivation is an interfacial phenomenon because it does not change the properties of the metal itself, but only changes the stability of the metal surface in the medium. The transition of metals from the active state to the passive state is a relatively complex process and thus passivation is increasingly recognized. There is no complete theory to explain all passivation phenomena. Two theories, i.e., the phase film theory and the adsorption theory, which are considered to be more satisfactory for explaining most experimental facts, are briefly described below.
For the crystalline silicon solar cell, along with the improvement of the crystalline silicon manufacturing technology, the service life of a bulk carrier of a substrate silicon wafer is continuously prolonged, and the bulk carrier is no longer a key factor for restricting the improvement of the cell efficiency. The passivation of the cell surface has an increasingly significant effect on the conversion efficiency. In the production process of the solar cell, the cost of the substrate silicon wafer accounts for the highest proportion of the whole production cost, so that the production cost is reduced, the photovoltaic electricity price 'flat-price internet connection' is realized as soon as possible, the market competitiveness is improved, the silicon wafer is thinned to be the necessary trend, and the problem of serious cell surface recombination is generated. This presents a challenge to the solar cell surface passivation technology, and in order to maintain high conversion efficiency of the cell during the thinning process of the silicon wafer, the research on the crystalline silicon solar cell surface passivation technology is indispensable.
The preparation method of the solar cell passivation is mainly a Plasma Enhanced Chemical Vapor Deposition (PECVD) method, wherein the PECVD method is characterized in that glow discharge is generated on a cathode of a process cavity by using low-temperature plasma under low pressure, a sample is heated to a preset temperature by using the glow discharge (or a heating element is additionally added), then a proper amount of process gas is introduced, and the gases form a solid film on the surface of the sample through a series of chemical reactions and plasma reactions. The reaction gases were mainly silane (SiH4) and ammonia (NH 3).
At present solar energy passivation in-process, adopt process gas to passivate the panel, the gas tightness requirement to the gas reaction process of passivation is very high, gaseous revealing in the preparation process can lead to solar cell panel passivation failure, reduces the efficiency of solar cell panel passivation coating film, this application aims at carrying out the leakproofness to the equipment of solar cell panel passivation and detects, guarantees the leakproofness of panel passivation preparation equipment, has guaranteed the seal of gas reaction, has improved the success rate of panel passivation.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide detection equipment for a solar cell passivation film layer, which aims to solve the problems in the prior art.
In order to achieve the purpose, the utility model provides the following technical scheme:
the utility model provides a check out test set for solar cell passivation film layer, the equipment body includes the coating film module, be equipped with the sealed board that is used for carrying out sealed coating film to solar cell panel on the coating film module, the inside coating film chamber that is equipped with of sealed board, be equipped with on the sealed board and be used for carrying out sealed limiting plate to sealed board, the position that sealed board is close to sealed limiting plate is equipped with and is used for establishing the card of sealed limiting plate card at sealed board and establishes the groove, be equipped with on the sealed limiting plate and be used for sliding the card of establishing inslot portion at the card and establish the piece, be equipped with on the sealed limiting plate and be used for carrying out the detection part that seals up the board, the detection part includes slip orientation piece, the position that sealed board is close to sealed limiting plate is equipped with and is used for sealed board to carry out sealed seal up the seal part.
By adopting the steps as follows: the sealed board can carry out gaseous reaction to the passivation of solar cell panel, and sealed limiting plate seals sealed board, and the card is established the groove and can is established the card establishment piece card on the sealed limiting plate and establish inslot portion at the card for sealed limiting plate and sealed board zonulae occludens, and the leakproofness of detection component to sealed board detects, and the leakproofness between sealed limiting plate and the sealed board can be strengthened to the seal part.
Further setting: the detection part is including being used for carrying out the air current test rod that detects to the leakproofness of sealed board, the air current test rod is including being used for carrying out the leftward test rod and the rightward test rod that detect to the gas that sealed board outwards gived off, leftward test rod and rightward test rod are the telescopic link, be equipped with the telescopic strut who is used for supporting leftward test rod and rightward test rod on the slip position piece, the inside motor that is used for driving telescopic strut and carries out the pivoted that is equipped with of slip position piece, be equipped with left spout and the right spout that is used for making the slip position piece to carry out left right slip on the sealed limiting plate, left spout and the inside sliding cylinder that drives the slip position piece and slide that is equipped with of right spout.
By adopting the steps as follows: the gas that the air current detection pole distributes to sealed board inside detects, and slip orientation piece can drive the leftward detection pole and the rightward detection pole carries out leftward and slides and rightward slides, and the motor can drive leftward detection pole and rightward detection pole and rotate, and telescopic strut can drive leftward detection pole and rightward detection pole and reciprocate.
Further setting: one side that the left direction test bar and the right direction test bar are close to ground is equipped with the sliding tray, and the inside detection mobile jib that detects that carries out the detection to sealed board four sides gas that is equipped with of sliding tray, and the inside cylinder that slides that is used for driving the test mobile jib and slides that is equipped with of sliding tray detects the sensor on the mobile jib, and the model of gaseous detection sensor adopts KP830 to pump to inhale portable gas detection appearance.
By adopting the steps as follows: the test mobile jib can drive gaseous detection sensor and detect sealed board inside leakproofness, and the cylinder that slides can drive and detect the mobile jib and slide inside the sliding tray.
Further setting: the sealing part is including the sealed cardboard that is used for sealing the gap of limiting plate and sealed board and seals, and sealed cardboard is the L type, and sealed cardboard is articulated with sealed board, is equipped with the sealed glue film of strengthening sealed cardboard leakproofness on the sealed cardboard, is equipped with the magnetism suction disc that is used for fixed sealed cardboard on the sealed cardboard.
By adopting the steps as follows: the sealed cardboard can carry out the external seal to the gap between sealed board and the sealed limiting plate, and the leakproofness of sealed cardboard can be strengthened to the sealant layer, and the board is inhaled to magnetism can be fixed sealed cardboard on sealed limiting plate.
Further setting: be equipped with on the sealed board and be used for the gas filled pipeline of aerifing inside the sealed board and the exhaust duct of bleeding inside the sealed board, the inside sealed detector that is used for detecting the sealed board leakproofness that is equipped with of exhaust duct.
By adopting the steps as follows: the inflation pipeline can be used for injecting detection gas used for detecting the sealing performance of the sealing machine and process gas used for passivation of the solar cell into the sealing machine, the air exhaust pipeline can exhaust gas in the sealing machine, and the sealing detector can detect the air tightness in the sealing machine.
Further setting: the sealing limiting plate is provided with a plugging plate used for sealing a gap in the clamping groove, and the plugging plate is provided with a sealing adhesive layer for enhancing the sealing performance of the plugging plate.
By adopting the steps as follows: the plugging plate can be used for externally sealing a gap between the sealing machine table and the sealing limiting plate.
Further setting: the left detection rod and the right detection rod are provided with distance sensors used for detecting distances from the sliding direction block to the four sides of the sealing limiting plate, and the distance sensors are electrically connected with the sliding air cylinders.
By adopting the steps as follows: the distance sensor can detect the distance from the sliding orientation block to the four sides of the sealing limit plate, the detected distance position is sent to the sliding cylinder, the sliding cylinder adjusts the position of the test main rod, and the detection gas of the sealing machine is detected.
Compared with the prior art, the utility model has the beneficial effects that: the utility model aims to detect the sealing performance of equipment for passivating the solar cell panel, ensure the sealing performance of equipment for preparing the passivation of the cell panel, ensure the sealing performance of gas reaction and improve the success rate of passivation of the cell panel.
Drawings
In order that the present invention may be more readily and clearly understood, a more particular description of the utility model briefly described above will be rendered by reference to specific embodiments that are illustrated in the appended drawings.
FIG. 1 is a schematic structural diagram of an apparatus for detecting a passivation film layer of a solar cell according to the present invention;
FIG. 2 is a partial schematic view of an inspection apparatus for a passivation film layer of a solar cell according to the present invention;
FIG. 3 is a partial schematic view of an inspection apparatus for a passivation film layer of a solar cell according to the present invention;
fig. 4 is an overall sectional view of an inspection apparatus for a passivation film layer of a solar cell according to the present invention.
In the figure, 1, a sealing machine platform; 2. sealing the limiting plate; 3. clamping the block; 4. a sliding orientation block; 5. a left direction detection rod; 6. a right direction detection lever; 7. a telescopic strut; 8. a motor; 9. a left-hand chute; 10. a right-direction chute; 11. a slide cylinder; 12. detecting the main rod; 13. a slipping cylinder; 14. a gas detection sensor; 15. a distance sensor; 16. a sealing clamping plate; 17. a magnetic attraction plate; 18. an inflation conduit; 19. an air extraction pipeline; 20. a plugging plate.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1 to 4, in an embodiment of the present invention, an apparatus for detecting a passivation film layer of a solar cell includes a film coating module, a sealing machine 1 for performing a sealing film coating on a solar cell panel is disposed on the film coating module, a film coating cavity is disposed inside the sealing machine 1, a sealing limiting plate 2 for sealing the sealing machine 1 is disposed on the sealing machine 1, a clamping groove for clamping the sealing limiting plate 2 to the sealing machine 1 is disposed at a position of the sealing machine 1 close to the sealing limiting plate 2, a clamping block 3 for sliding inside the clamping groove is disposed on the sealing limiting plate 2, a detecting component for performing a sealing detection on the sealing machine 1 is disposed on the sealing limiting plate 2, the detecting component includes a sliding direction block 4, and a sealing component for sealing the sealing machine 1 is disposed at a position of the sealing machine 1 close to the sealing limiting plate 2.
Sealed board 1 can carry out gaseous reaction to the passivation of solar cell panel, and sealed limiting plate 2 seals sealed board 1, and the card is established the groove and can is established the 3 cards of card establishing on sealed limiting plate 2 and establish inslot portion at the card for sealed limiting plate 2 and sealed board 1 zonulae occludens, and the detection part detects sealed board 1's leakproofness, and the leakproofness between sealed limiting plate 2 and the sealed board 1 can be strengthened to the sealing part.
The detection part is including being used for carrying out the air current measuring rod that detects to the leakproofness of sealed board 1, the air current measuring rod is including being used for carrying out the leftward detection pole 5 and the rightward detection pole 6 that detect to the gas that sealed board 1 outwards gived off, leftward detection pole 5 and rightward detection pole 6 are the telescopic link, be equipped with the telescopic strut 7 that is used for supporting leftward detection pole 5 and rightward detection pole 6 on the slip orientation piece 4, 4 inside being equipped with of slip orientation piece are used for driving telescopic strut 7 and carry out pivoted motor 8, be equipped with on the sealed limiting plate 2 and be used for making slip orientation piece 4 carry out the leftward spout 9 and the rightward spout 10 that control slided, leftward spout 9 and rightward spout 10 inside be equipped with the slip cylinder 11 that drives slip orientation piece 4 and slide.
The gas that the air current detection pole was gived off to 1 inside sealed board detects, and slip orientation piece 4 can drive left direction detection pole 5 and right direction detection pole 6 and carry out the left direction and slide with the right direction and slide, and motor 8 can drive left direction detection pole 5 and right direction detection pole 6 and rotate, and telescopic strut 7 can drive left direction detection pole 5 and right direction detection pole 6 and reciprocate.
One side that the leftward detection pole 5 and the rightward detection pole 6 are close to ground is equipped with the sliding tray, and the inside detection mobile jib 12 that detects that carries out the detection to 1 four sides gas of sealed board that is equipped with of sliding tray, and the inside cylinder 13 that slides that is used for driving the test mobile jib and slides that is equipped with of sliding tray detects the mobile jib 12 and is equipped with gaseous detection sensor 14, and gaseous detection sensor 14's model adopts KP830 pump to inhale portable gas detector. The test mobile jib can drive gaseous detection sensor 14 and detect the leakproofness of sealed board 1 inside, and the cylinder 13 that slides can drive and detect mobile jib 12 and slide inside the sliding tray.
The left detection rod 5 and the right detection rod 6 are provided with a distance sensor 15 for detecting the distance from the sliding direction block 4 to the four sides of the sealing limit plate 2, and the distance sensor 15 is electrically connected with the sliding cylinder 13.
The seal part carries out the sealed cardboard 16 that seals including the gap that is used for sealed limiting plate 2 and sealed board 1, and sealed cardboard 16 is the L type, and sealed cardboard 16 is articulated with sealed board 1, is equipped with the sealed glue film of strengthening the leakproofness of sealed cardboard 16 on the sealed cardboard 16, is equipped with the magnetism board 17 of inhaling that is used for fixed sealed cardboard 16 on the sealed cardboard 16.
The sealing cardboard 16 can carry out the external seal to the gap between sealed board 1 and the sealed limiting plate 2, and the leakproofness of sealing cardboard 16 can be strengthened to the sealant layer, and the board 17 is inhaled to magnetism can be fixed sealing cardboard 16 on sealed limiting plate 2.
The sealing machine table 1 is provided with an inflation pipeline 18 for inflating the inside of the sealing machine table 1 and an air exhaust pipeline 19 for exhausting air from the inside of the sealing machine table 1, and the inside of the air exhaust pipeline 19 is provided with a sealing detector for detecting the sealing performance of the sealing machine table 1.
The inflation pipeline 18 can flush the inside of the sealing machine table 1 with detection gas for detecting the sealing performance of the sealing machine table 1 and process gas for passivating the solar cell, the air exhaust pipeline 19 can exhaust the gas inside the sealing machine table 1, and the sealing detector can detect the air tightness inside the sealing machine table 1.
The sealing limit plate 2 is provided with a plugging plate 20 for sealing a gap inside the clamping groove, and the plugging plate 20 is provided with a sealing adhesive layer for enhancing the sealing performance of the plugging plate 20. The plugging plate 20 can externally seal a gap between the sealing machine 1 and the sealing limit plate 2.
The sliding cylinder 11 and the sliding cylinder 13 are SDA32 thin cylinders, the motor 8 is an AC small three-phase asynchronous motor, the distance sensor 15 is an A1-2 laser ranging sensor, and the sliding cylinder 11 and the motor 8 are electrically connected with an external switch.
The working principle of the utility model is as follows: before the passivation reaction of the solar cell, an operator opens the sealing machine 1, the sealing limiting plate 2 seals the sealing machine 1, the sealing clamping plate 16 seals the gap between the sealing limiting plate 2 and the sealing machine 1, after the sealing clamping plate 16 is fixed, the air exhaust pipeline 19 exhausts the sealing machine 1, the sealing detector determines the air tightness inside the sealing machine 1, when the air tightness of the sealing machine 1 meets the requirement, the air inflation pipeline 18 blows detection gas into the sealing machine 1, the motor 8 drives the left detection rod 5 and the right detection rod 6 to rotate to the two sides of the sealing limiting plate 2, the sliding cylinder 11 is opened, the sliding cylinder 11 drives the sliding direction block 4 to slide inside the left sliding chute 9 and the right sliding chute 10, and drives the test main rod to detect whether the test gas overflows from the gap between the sealing machine 1 and the sealing limiting plate 2, the distance sensor 15 detects the position distance from the sliding orientation block 4 to the four sides of the sealing limiting plate 2 in real time, the sliding cylinder 13 is opened to drive the testing main rod to be close to the sealing limiting plate 2 for gas detection, and the sealing performance inside the sealing machine table 1 is judged.
It will be evident to those skilled in the art that the utility model is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Claims (7)
1. A check out test set for solar cell passivation film layer which characterized in that: the equipment body includes the coating film module, be equipped with on the coating film module and be used for carrying out sealed board (1) of sealed coating film to solar cell panel, sealed board (1) inside is equipped with the coating film chamber, be equipped with on sealed board (1) and be used for carrying out sealed limiting plate (2) sealed board (1), the position that sealed board (1) is close to sealed limiting plate (2) is equipped with and is used for establishing sealed limiting plate (2) card in the card of sealed board (1) and establishes the groove, be equipped with on sealed limiting plate (2) and be used for sliding card that establishes inslot portion establishes piece (3) at the card, be equipped with on sealed limiting plate (2) and be used for carrying out the sealed detection's to sealed board (1) detection part, the detection part includes slip orientation piece (4), the position that sealed board (1) is close to sealed limiting plate (2) is equipped with and is used for sealed board (1) to carry out the sealed sealing part that seals.
2. The detection device for the passivation film layer of the solar cell according to claim 1, wherein the detection component comprises an airflow detection rod for detecting the sealing performance of the sealing machine table (1), the airflow detection rod comprises a left detection rod (5) and a right detection rod (6) for detecting the gas emitted from the sealing machine table (1), the left detection rod (5) and the right detection rod (6) are telescopic rods, the sliding direction block (4) is provided with a telescopic strut (7) for supporting the left detection rod (5) and the right detection rod (6), the sliding direction block (4) is internally provided with a motor (8) for driving the telescopic strut (7) to rotate, the sealing limit plate (2) is provided with a left chute (9) and a right chute (10) for enabling the sliding direction block (4) to slide left and right, sliding cylinders (11) for driving the sliding orientation block (4) to slide are arranged in the left sliding chute (9) and the right sliding chute (10).
3. The detection equipment for the solar cell passivation film layer according to claim 2, characterized in that a sliding groove is formed in one side, close to the ground, of the left detection rod (5) and the right detection rod (6), a detection main rod (12) for detecting the gas on four sides of the sealed machine table (1) is arranged inside the sliding groove, a sliding cylinder (13) for driving the detection main rod to slide is arranged inside the sliding groove, a gas detection sensor (14) is arranged on the detection main rod (12), and the type of the gas detection sensor (14) adopts a KP830 pump suction portable gas detector.
4. The detection equipment for the solar cell passivation film layer according to claim 1, wherein the sealing component comprises a sealing clamping plate (16) for sealing a gap between the limiting plate (2) and the sealing machine table (1), the sealing clamping plate (16) is L-shaped, the sealing clamping plate (16) is hinged to the sealing machine table (1), a sealing glue layer for enhancing the sealing performance of the sealing clamping plate (16) is arranged on the sealing clamping plate (16), and a magnetic suction plate (17) for fixing the sealing clamping plate (16) is arranged on the sealing clamping plate (16).
5. The detection equipment for the solar cell passivation film layer according to claim 1, wherein an inflation pipeline (18) for inflating the inside of the sealing machine table (1) and an air extraction pipeline (19) for extracting air from the inside of the sealing machine table (1) are arranged on the sealing machine table (1), and a sealing detector for detecting the sealing performance of the sealing machine table (1) is arranged inside the air extraction pipeline (19).
6. The detection equipment for the solar cell passivation film layer according to claim 1, wherein a plugging plate (20) for sealing a gap inside the clamping groove is arranged on the sealing limiting plate (2), and a sealing glue layer for enhancing the sealing performance of the plugging plate (20) is arranged on the plugging plate (20).
7. The detection equipment for the solar cell passivation film layer is characterized in that the left detection rod (5) and the right detection rod (6) are provided with distance sensors (15) used for detecting the distances from the sliding orientation block (4) to the four sides of the sealing limit plate (2), and the distance sensors (15) are electrically connected with the sliding cylinder (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122358574.4U CN216207297U (en) | 2021-09-28 | 2021-09-28 | Detection equipment for solar cell passivation film layer |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122358574.4U CN216207297U (en) | 2021-09-28 | 2021-09-28 | Detection equipment for solar cell passivation film layer |
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| CN216207297U true CN216207297U (en) | 2022-04-05 |
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| CN202122358574.4U Active CN216207297U (en) | 2021-09-28 | 2021-09-28 | Detection equipment for solar cell passivation film layer |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117168712A (en) * | 2023-11-03 | 2023-12-05 | 宁德时代新能源科技股份有限公司 | Detection assembly, detection equipment and detection method thereof |
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2021
- 2021-09-28 CN CN202122358574.4U patent/CN216207297U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117168712A (en) * | 2023-11-03 | 2023-12-05 | 宁德时代新能源科技股份有限公司 | Detection assembly, detection equipment and detection method thereof |
| CN117168712B (en) * | 2023-11-03 | 2024-04-02 | 宁德时代新能源科技股份有限公司 | Detection assembly, detection equipment and detection method thereof |
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