CN216204435U

CN216204435U - Novel constant-temperature circulating device for semiconductor equipment

Info

Publication number: CN216204435U
Application number: CN202122882188.5U
Authority: CN
Inventors: 潘鸿当; 赵一航; 乔琰方
Original assignee: Hebei Efaz Technology Co ltd
Current assignee: Hebei Efaz Technology Co ltd
Priority date: 2021-11-23
Filing date: 2021-11-23
Publication date: 2022-04-05
Anticipated expiration: 2031-11-23

Abstract

The utility model provides a novel constant-temperature circulating device for semiconductor equipment, which comprises an outer box body, a water tank, a compressor, a pump, a condenser and a heat exchanger, wherein circulating liquid is filled in the water tank, a water inlet is formed in the top of the water tank, a water outlet is formed in the bottom of the water tank, a water outlet and a water inlet are formed in the bottom of the pump, the water outlet of the water tank is connected with the water inlet of the pump, and a circulating liquid water inlet, a circulating liquid water outlet, a refrigerant inlet and a refrigerant outlet are formed in the heat exchanger; a circulating liquid outlet of the heat exchanger is connected with a water inlet of the water tank; the air inlet of the refrigerant is connected with an expansion valve, the expansion valve is connected with the air outlet of the condenser, and the air inlet of the condenser is connected with the discharge port of the compressor. The device cools equipment such as electronics, semiconductors, lasers, medical treatment and the like through the circulating liquid, the temperature of the circulating liquid is stable and meets the requirements, and the device is high in temperature control precision, compact in size and good in effect. The method is suitable for occasions with limited site space.

Description

Novel constant-temperature circulating device for semiconductor equipment

Technical Field

The utility model relates to the technical field of semiconductor temperature control equipment, in particular to a novel constant-temperature circulating device for semiconductor equipment.

Background

The semiconductor is taken as an important conductive material, and is widely applied to the fields of computers, large-scale precision instruments and the like at present, in the using process of the semiconductor, when the semiconductor equipment works for a long time, the semiconductor equipment is inevitably accompanied with equipment heating, in order to ensure the normal operation of the equipment, the semiconductor equipment is often required to be provided with a refrigerating or constant temperature device, heating pipes, fans, refrigerating pieces and the like are commonly used at present, the most commonly used refrigerating pieces are circulating liquid refrigeration, and in the refrigerating process of the circulating liquid, the temperature of the circulating liquid and the circulating liquid have high requirements.

But the constant temperature effect of the semiconductor constant temperature device used at present is not stable.

SUMMERY OF THE UTILITY MODEL

The object of the present invention is to solve at least one of the technical drawbacks mentioned.

Therefore, an object of the present invention is to provide a novel constant temperature circulating apparatus for a semiconductor device, which solves the problems mentioned in the background art and overcomes the disadvantages of the prior art.

In order to achieve the above object, an embodiment of one aspect of the present invention provides a novel constant temperature circulation device for a semiconductor device, including a housing, where the housing is a rectangular parallelepiped structure, a constant temperature circulation assembly is disposed inside the housing, the constant temperature circulation assembly includes a water tank, a pump, a compressor, a condenser and a heat exchanger, a plurality of mounting bases and brackets are fixed on a bottom panel inside the housing, the water tank is fixed on the brackets through bolts, the compressor and the pump are respectively fixed on the mounting bases through bolts, the heat exchanger is suspended on an inner wall of the housing, and the water tank, the pump and the heat exchanger are connected through pipes to form a circulation loop.

Preferably, according to any of the above schemes, the water tank is internally filled with circulating liquid, the top of the water tank is provided with a water inlet, the water tank is provided with a liquid level meter, the bottom of the water tank is provided with a water outlet, the bottom of the pump is provided with a water outlet and a water inlet, the compressor is provided with a suction inlet and a discharge outlet, the condenser is provided with a suction inlet and a gas outlet, the heat exchanger is provided with a circulating liquid water inlet and a circulating liquid water outlet, the heat exchanger is provided with a refrigerant gas inlet and a refrigerant gas outlet, the water outlet of the pump is connected with an equipment water outlet, the water inlet of the heat exchanger is an equipment water inlet, the circulating liquid water outlet of the heat exchanger is connected with the water inlet of the water tank, the heat exchanger is further provided with a refrigerant gas inlet and a refrigerant gas outlet, the refrigerant gas inlet is connected with an expansion valve, the expansion valve is connected with the gas outlet of the condenser, and the condenser gas inlet is connected with the discharge outlet of the compressor, the heat exchanger refrigerant gas outlet is connected with the compressor suction inlet, the expansion valve is controlled by the control panel to be opened, and the equipment water inlet and the water outlet are connected with external equipment for cooling.

By any of the above schemes preferably, a pressure gauge and a first temperature sensor are installed at the water outlet of the equipment, and the equipment shell is provided with a circuit breaker, a cable waterproof connector and a communication interface.

Preferably, in any one of the above schemes, a floating ball liquid level switch is further arranged inside the water tank, the floating ball liquid level switch is connected with a floating ball inside the water tank through a cable, a liquid level meter is installed on the side surface of the water tank, the first temperature sensor is respectively connected with the control board, and the liquid level switch and the pressure sensor are respectively connected with the control board

By any of the above schemes preferably, the device also comprises a filter, the filter adopts a 5-inch plastic filter flask filter, the 5-inch filter is provided with a PP cotton filter element, and the filter is connected with the water tank through a PVC hose.

The bottom of the pump is provided with a screw hole, the pump is fixedly installed in the shell through a bolt matched with the screw hole, and a pump rubber pad is arranged at the contact position of the pump and the shell.

Preferably, in any of the above schemes, the heat exchanger is a plate heat exchanger.

Preferably, according to any one of the above schemes, the circulating liquid loop is provided with a second temperature sensor, the second temperature sensor is arranged at a circulating liquid return water port, and the second temperature sensor is connected with the control panel.

In any of the above aspects, the expansion valve is preferably controlled in opening degree by a control plate.

Preferably, in any of the above embodiments, the pipeline is made of PVC pipe, and the pipeline is fastened by using a clamp.

Preferably, according to any of the above solutions, the implementation of the control logic requirements is an autonomously developed circuit control.

The following advantages can be obtained by adopting the technical means:

the utility model provides a constant temperature circulating device for semiconductor equipment, wherein a water tank, a compressor, a condenser, a pump, an expansion valve and a heat exchanger are arranged in a shell of the device, circulating liquid for cooling the semiconductor equipment is filled in the water tank, the heat exchanger is used for cooling the circulating liquid, in a circulating liquid loop, the circulating liquid in the water tank is pumped out by the pump to cool the external semiconductor equipment, the circulating liquid passing through the equipment is changed into high-temperature liquid, the high-temperature liquid enters the water tank after being cooled by the heat exchanger, and the low-temperature circulating liquid is pumped out by the pump to circulate in the way. In the refrigerant loop, the refrigerant flows from the compressor to the condenser, then enters the heat exchanger through the expansion valve a, and the low-temperature refrigerant cools the circulating liquid in the heat exchanger and then returns to the compressor. The device also has a heating function, and the circulating liquid is heated in the heat exchanger through the expansion valve b so as to achieve the aim of maintaining stability and constancy. Pump and compressor are opened by control panel control and are stopped, and the expansion valve is by control panel control aperture, and the filter is installed to this device, installs 5 cun plastics filter flask between heat exchanger and water tank, filters the circulating liquid through the PP cotton, reduces the impurity in the circulating liquid.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the utility model.

Drawings

The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:

FIG. 1 is a schematic structural view of a constant temperature circulating apparatus for a semiconductor device according to an embodiment of the present invention;

FIG. 2 is a schematic view of another embodiment of a constant temperature cycle apparatus for a semiconductor device;

FIG. 3 is a schematic view of another embodiment of a constant temperature cycle apparatus for a semiconductor device;

fig. 4 is a schematic view of another example of the constant temperature cycle device for a semiconductor device according to the present invention.

In the figure, 1, a shell, 2, a water tank, 3, a pump, 4, a compressor, 5, a condenser, 6, a heat exchanger, 7, expansion valves a, 8, expansion valves b, 9, a circulating liquid inlet, 10, a circulating liquid outlet, 11, a pressure sensor, 12, a temperature sensor, 13, a control panel, 14, a power switch, 15, a PIN socket, 16, a communication interface, 17, a top cover, 18, a liquid injection port, 19, a float ball liquid level switch, 20, a liquid level meter, 21, a second temperature sensor, 22, a water tank outlet, 23, a pump water inlet, 24, a pump water outlet, 25, a pagoda joint, 26, a flow dividing block, 27, a pump rubber pad, 28, a refrigerant pressure sensor, 29, a liquid discharge valve, 30, a liquid leakage sensor, 31, a drying filter, 32 and a 5-inch filter flask.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are illustrative and intended to be illustrative of the utility model and are not to be construed as limiting the utility model.

In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

As shown in fig. 1-4, the utility model provides a constant temperature circulating device for semiconductor equipment, the device mainly comprises a shell 1, a water tank 2, a pump 3, a compressor 4, a condenser 5 and a heat exchanger 6, a plurality of mounting bases and supports are fixed on a bottom panel in the shell, the water tank 2 is fixed on the supports through bolts, the compressor 4 and the pump 3 are respectively fixed on the mounting bases through bolts, the heat exchanger 6 is hung on the inner wall of the shell, the water tank 2, the pump 3 and the heat exchanger 6 are connected into a circulating loop through pipelines, the compressor 4, the heat exchanger 6, the condenser 5, an expansion valve a 7 and an expansion valve b 8 are connected into a circulating loop through copper pipes, the pump 3 and the compressor 4 are controlled by a control panel 13 to start and stop, the expansion valve is controlled by the control panel 13 to open, a circulating liquid water inlet 9 and a circulating liquid water outlet 10 are arranged on the back wall of the equipment and pass through an external filter, the water pump is connected with external equipment through a pipeline, a water outlet 24 of the water pump is provided with a pressure sensor 11 and a first temperature sensor 12, the temperature sensor and the pressure sensor 11 are respectively connected with a control panel 13 and used for displaying the pressure and the temperature of the outlet of the water pump, the rear wall of the equipment is provided with a circuit breaker 14, a cable waterproof connector 15 and a communication interface 16, signals collected inside the device can be transmitted to an upper computer, in order to facilitate the inspection and the maintenance of devices inside the shell, a top cover 17 is arranged on the shell, the devices inside the shell can be directly operated by pressing the top cover 17 when the inspection or the maintenance is needed, circulating liquid is filled inside the water tank 2, the circulating liquid is mainly used for cooling external semiconductor equipment, as shown in figure 4, the top of the water tank 2 is provided with a liquid injection port 18 and a floating ball liquid level switch 19, the floating ball liquid level switch 19 is connected with a floating ball inside the water tank through a cable and used for measuring the liquid level inside the water tank 2, the float ball liquid level switch 19 can be connected to a control device 13 through a cable, a liquid level meter 20 is fixedly installed on one side of the water tank 2, two ends of the liquid level meter 20 are fixed on the water tank 2 through bolts, the liquid level meter 20 is used for measuring the water level in the water tank 2 and exchanging heat, a second temperature sensor 21 is installed on the upper surface of the pump 6 and used for measuring the temperature of the return liquid of the circulating liquid, a water tank water outlet 22 is arranged at the bottom of the water tank 2, the water tank water outlet 22 is connected with the pump through a PVC hose, a water inlet 23 and a water outlet 24 are arranged at the bottom of the pump 3, the water outlet 24 is connected with a section of PVC hose through a pagoda joint 25, the hose is connected with a shunting block 26, a pressure sensor 11 and a first temperature sensor 12 are installed on the shunting block, a screw hole is arranged at the bottom of the pump 3, the pump 3 is fixedly installed on an installation base in the shell through bolts matched with the screw hole, in order to increase friction, the device is characterized in that the looseness of the pump in the moving process is avoided, a pump rubber cushion 27 is arranged at the contact position of the pump and an installation base, the heat exchanger 6 adopts a plate type heat exchanger, 4 openings are arranged on the heat exchanger 6 and respectively comprise a circulating liquid water inlet 9, a circulating liquid water outlet 10, a refrigerant air inlet and a refrigerant air outlet, the circulating liquid water outlet 10 is connected with a water tank 2, the circulating liquid water inlet 9 on the heat exchanger 6 is used as an equipment circulating liquid water inlet, the refrigerant air inlet is connected with an expansion valve, the expansion valve is connected with a condenser air outlet, the condenser air inlet is connected with a compressor discharge port, the refrigerant air outlet of the heat exchanger is connected with a compressor suction inlet, a second temperature sensor 21 is arranged on the heat exchanger, the liquid outlet of the heat exchanger 6 is connected with a drying filter 31, a refrigerant pressure sensor 28 is arranged on the refrigerant circulating cycle, a liquid outlet of the water tank 2 is provided with a liquid discharge valve 29 and a liquid leakage sensor 30, and the device is provided with an external filter at the equipment circulating liquid outlet, the filter is a 5 inch filter flask 32.

The working principle of the device of the utility model is as follows:

the device comprises a circulating loop and a refrigerant loop, wherein in the circulating loop, circulating liquid in a water tank is pumped out by a pump to cool external semiconductor equipment, the circulating liquid passing through the equipment is changed into high-temperature liquid, the high-temperature liquid enters the water tank after being cooled by a heat exchanger, and the low-temperature circulating liquid is pumped out by the pump and circulates in the way. In the refrigerant loop, the refrigerant flows from the compressor to the condenser, then enters the heat exchanger through the expansion valve a, and the low-temperature refrigerant cools the circulating liquid in the heat exchanger and then returns to the compressor.

The device realizes the function of cooling the semiconductor equipment through the uninterrupted circulating liquid, and the opening degree of an expansion valve in the device can be controlled by the control board so as to ensure the constant temperature of the circulating liquid and further realize the stable cooling effect. This device is provided with the filter between heat exchanger and water tank, filters the circulating fluid through the PP cotton, reduces the impurity in the circulating fluid, satisfies the requirement of this device.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

It will be understood by those skilled in the art that the utility model includes any combination of the elements of the foregoing description and the detailed description as well as those illustrated in the drawings, which are meant to be space-limited and not intended to constitute a part of the specification in any way whatsoever, the combination being such that the description is not intended to be exhaustive. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made in the above embodiments by those of ordinary skill in the art without departing from the principle and spirit of the present invention. The scope of the utility model is defined by the appended claims and equivalents thereof.

Claims

1. The utility model provides a novel constant temperature circulating device for semiconductor equipment, a serial communication port, which comprises a housin, the casing is the cuboid structure, the inside constant temperature circulation subassembly that sets up of casing, constant temperature circulation subassembly includes water tank, pump, compressor, condenser and heat exchanger be fixed with a plurality of installation bases and support on the inside bottom surface board of casing, the water tank passes through the bolt fastening on the support, and compressor and pump are respectively through the bolt fastening on the installation base, and the heat exchanger hangs on shells inner wall, and water tank, pump and heat exchanger pass through the pipe connection and become a circulation circuit.

2. The new thermostatic circulation device for semiconductor equipment as claimed in claim 1, wherein the water tank is filled with a circulation liquid, the top of the water tank is provided with a water inlet, the water tank is provided with a level gauge, the bottom of the water tank is provided with a water outlet, the bottom of the pump is provided with a water outlet and a water inlet, the compressor is provided with a suction inlet and a discharge outlet, the condenser is provided with a suction inlet and a gas outlet, the heat exchanger is provided with a circulation liquid water inlet and a circulation liquid water outlet, the heat exchanger is provided with a refrigerant gas inlet and a refrigerant gas outlet, the water outlet of the pump is connected with the equipment water outlet, the water inlet of the heat exchanger is the equipment water inlet, the circulation liquid water outlet of the heat exchanger is connected with the water inlet of the water tank, the heat exchanger is further provided with a refrigerant gas inlet and a refrigerant gas outlet, the refrigerant gas inlet is connected with an expansion valve, the expansion valve is connected with a condenser air outlet, a condenser air inlet is connected with a compressor discharge outlet, a heat exchanger refrigerant air outlet is connected with a compressor suction inlet, the expansion valve is controlled by a control panel in opening degree, and the equipment water inlet and the equipment water outlet are connected with external equipment for cooling.

3. The novel constant temperature circulating device for semiconductor equipment as claimed in claim 2, wherein a pressure gauge and a first temperature sensor are installed at the outlet of the equipment, and the equipment housing is provided with a circuit breaker, a cable waterproof connector and a communication interface.

4. The novel constant temperature circulating device for semiconductor equipment as claimed in claim 3, wherein a float level switch is further provided inside the water tank, the float level switch is connected with a float inside the water tank through a cable, a level gauge is installed on a side surface of the water tank, the first temperature sensors are respectively connected with the control board, and the level switch and the pressure sensor are respectively connected with the control board.

5. The novel constant temperature circulating device for semiconductor equipment as claimed in claim 2, further comprising a filter, wherein the filter is a 5-inch plastic filter flask filter, the 5-inch filter flask filter is provided with a PP cotton filter element, and the filter is connected with the water tank through a PVC hose.

6. The novel constant temperature circulating device for semiconductor equipment as claimed in claim 2, wherein a screw hole is formed at the bottom of the pump, the pump is fixedly installed in the case through a bolt matched with the screw hole, and a pump rubber pad is disposed at a contact portion of the pump and the case.

7. A novel thermostatic circulation device for semiconductor equipment according to claim 2, characterized in that the heat exchanger is a plate heat exchanger.

8. The novel constant temperature circulating device for semiconductor equipment as claimed in claim 2, wherein the circulating liquid loop is provided with a second temperature sensor, the second temperature sensor is arranged at a circulating liquid return port, and the second temperature sensor is connected with the control board.