CN216192679U

CN216192679U - Cooling device of magnetron sputtering machine for cover plate

Info

Publication number: CN216192679U
Application number: CN202122793382.6U
Authority: CN
Inventors: 曹廷位; 侯宜明
Original assignee: Suzhou Putile New Material Technology Co ltd
Current assignee: Suzhou Putile New Material Technology Co ltd
Priority date: 2021-11-16
Filing date: 2021-11-16
Publication date: 2022-04-05
Anticipated expiration: 2031-11-16

Abstract

The utility model discloses a cooling device of a magnetron sputtering machine for a cover plate, which comprises a connecting frame, wherein a bearing device is arranged at the top of an inner cavity of the connecting frame, and a water control device is arranged at the bottom of the inner cavity of the connecting frame; the bearing device comprises a bearing frame, the outer wall of the bearing frame is sleeved with the inner cavity of the connecting frame in a sliding manner, and a filter screen is fixedly sleeved in the bearing frame; the water control device comprises a bearing plate, the bearing plate is fixedly sleeved in the middle of the inner cavity of the connecting frame, a water bag is fixedly connected to the bottom of the bearing plate, a squeezing plate is arranged at the bottom of the water bag, and the squeezing plate is slidably sleeved in the connecting frame. According to the utility model, the arrangement mode of the water control device is utilized, and the water control device comprises the bearing plate, the extrusion plate and the water bag, so that the extrusion plate moves up and down under the action of the hydraulic cylinder, water flow above the bearing plate can enter or discharge the water bag, the height of the water level at the top of the bearing plate is changed, and the water control device is not contacted with the water flow when a product is placed on the clamp, thereby improving the practical performance of the water control device.

Description

Cooling device of magnetron sputtering machine for cover plate

Technical Field

The utility model relates to the field of cooling devices, in particular to a cooling device of a magnetron sputtering machine for a cover plate.

Background

The magnetron sputtering machine bombards the surface of a material with charged particles with dozens of electron volts or higher kinetic energy, the charged particles are sputtered into gas phase and can be used for etching and coating, the number of atoms sputtered by one incident ion is called sputtering yield, the higher the yield is, the faster the sputtering speed is, the highest the sputtering speed is with Cu, Au, Ag and the like, the lowest the Ti, Mo, Ta, W and the like are generally 0.1-10 atoms/ion, the ions can be generated by direct current glow discharge, the discharge is generated by applying high voltage between two poles, and the positive ions bombard the target with negative electricity to sputter the target and coat the target onto a coated object.

The plate cover can produce certain temperature when using the magnetron sputtering machine to process, need use the water-cooling to cool down it, but when the plate cover immerged rivers and cool down, can make the anchor clamps that hold the plate cover and contact with rivers to inside adding man-hour that the anchor clamps add the plate cover entering magnetron sputtering machine once more, rivers will assist and get into inside the magnetron sputtering machine in the anchor clamps outside, thereby reduce its practicality.

SUMMERY OF THE UTILITY MODEL

The present invention is directed to a cooling device of a magnetron sputtering machine for a cover plate, so as to solve the problems mentioned in the background art.

In order to achieve the purpose, the utility model provides the following technical scheme: a cooling device of a magnetron sputtering machine for a cover plate comprises a connecting frame, wherein a bearing device is arranged at the top of an inner cavity of the connecting frame, and a water control device is arranged at the bottom of the inner cavity of the connecting frame;

the bearing device comprises a bearing frame, the outer wall of the bearing frame is in sliding sleeve joint with the inner cavity of the connecting frame, and a filter screen is fixedly sleeved in the bearing frame;

the water control device comprises a bearing plate, the bearing plate is fixedly sleeved in the middle of the inner cavity of the connecting frame, a water bag is fixedly connected to the bottom of the bearing plate, an extrusion plate is arranged at the bottom of the water bag, and the extrusion plate is slidably sleeved in the connecting frame.

Preferably, a plurality of baffles of bearing frame's top equidistance fixedly connected with, the equal fixedly connected with carrier block in both sides of connecting frame inner wall.

Preferably, the bearing frame is located at the tops of the four bearing blocks, two fixing bolts are arranged on two sides of the top of the bearing frame, and the bearing frame is fixedly connected with the bearing blocks through the fixing bolts.

Preferably, the bottom of the bearing plate is fixedly inserted and sleeved with a connecting pipe, and the bottom of the outer wall of the connecting pipe is fixedly sleeved with the water bag.

Preferably, the bottom of the connecting frame is provided with a bottom plate, four corners of the bottom plate are provided with inner bolts, and the bottom plate is fixedly connected with the connecting frame through the inner bolts.

Preferably, the middle part of the upper surface of the bottom plate is fixedly connected with a hydraulic cylinder, and the output end of the hydraulic cylinder is in transmission connection with the extrusion plate.

Preferably, the top of the bottom plate is fixedly connected with four connecting sleeves in a rectangular array, the inner cavities of the connecting sleeves are sleeved with connecting rods in a sliding mode, and the tops of the connecting rods are fixedly connected with the extrusion plate.

The utility model has the technical effects and advantages that:

(1) according to the utility model, the arrangement mode of the water control device is utilized, the water control device comprises the bearing plate, the extrusion plate and the water bag, so that the extrusion plate moves up and down under the action of the hydraulic cylinder, water flow above the bearing plate can enter or discharge the water bag, the height of the water level at the top of the bearing plate is changed, and the water control device is not contacted with the water flow when a product is placed on the clamp, so that the practical performance of the water control device is improved;

(2) the utility model utilizes the arrangement mode of the bearing device, the bearing device comprises the bearing frame, the filter screen and the plurality of clapboards, so that the plate cover products can be stored at the tops of the bearing frame and the filter screen and are positioned between the adjacent clapboards, and the plate cover products are not interfered with each other when being cooled.

Drawings

Fig. 1 is a schematic view of the overall structure of the present invention.

FIG. 2 is a schematic side view of the present invention.

FIG. 3 is a schematic top view of the present invention.

In the figure: 1. a connecting frame; 2. a carrying device; 21. a load-bearing frame; 22. a filter screen; 23. a partition plate; 24. a bearing block; 25. fixing the bolt; 3. a water control device; 31. a carrier plate; 32. a pressing plate; 33. a water bladder; 34. a base plate; 35. a hydraulic cylinder; 36. a connecting sleeve; 37. a connecting rod; 38. and (5) an inner bolt.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

The utility model provides a cooling device of a magnetron sputtering machine for a cover plate, which comprises a connecting frame 1, wherein the top of the inner cavity of the connecting frame 1 is provided with a bearing device 2, and the bottom of the inner cavity of the connecting frame 1 is provided with a water control device 3.

Bearing device 2 includes bearing frame 21, bearing frame 21's outer wall and connection frame 1's inner chamber slip cup joint, bearing frame 21's inside is fixed to have cup jointed filter screen 22, bearing frame 21, filter screen 22 and baffle 23 can carry out the position to the board lid product and prescribe a limit to, a plurality of baffles 23 of bearing frame 21's top equidistance fixedly connected with, the equal fixedly connected with carrier block 24 in both sides of connection frame 1 inner wall, bearing frame 21 is located the top of four carrier blocks 24, the both sides limit at bearing frame 21 top all is provided with two fixing bolt 25, bearing frame 21 passes through fixing bolt 25 and carrier block 24 fixed connection.

Accuse water installation 3 includes loading board 31, certain rivers are equipped with in the inside of coupling frame 1 and the top that is located loading board 31, loading board 31 is fixed to connect in the middle part of 1 inner chamber of coupling frame, loading board 31's bottom fixedly connected with water pocket 33, connecting pipe and loading board 31's top intercommunication is passed through to water pocket 33's inside, thereby stripper plate 32 up-and-down motion, just can make water pocket 33 receive the extrusion or resume the normal position, thereby make the inside rivers of water pocket 33 get into the top of loading board 31, perhaps loading board 31's rivers get into water pocket 33, thereby change the height of the inside rivers of coupling frame 1, water pocket 33's bottom is provided with stripper plate 32, stripper plate 32 slides and cup joints in the inside of coupling frame 1, the fixed connecting pipe that has alternated in bottom of loading board 31, the bottom and the water pocket 33 of coupling pipe outer wall are fixed to cup joint.

Bottom of connecting frame 1 is provided with bottom plate 34, four edges of bottom plate 34 bottom all are provided with interior bolt 38, bottom plate 34 is through interior bolt 38 and connecting frame 1 fixed connection, thereby not hard up interior bolt 38 just can take off bottom plate 34, and then maintain its inside part, the middle part fixedly connected with pneumatic cylinder 35 of the upper surface of bottom plate 34, the output and the stripper plate 32 transmission of pneumatic cylinder 35 are connected, bottom plate 34's top is four connecting sleeve 36 of rectangle array fixedly connected with, connecting sleeve 36's inner chamber slides and has cup jointed connecting rod 37, the stability of stripper plate 32 motion can be guaranteed to connecting rod 37 and connecting sleeve 36, the top and the stripper plate 32 fixed connection of connecting rod 37.

The hydraulic cylinder 35 is electrically connected to an external power source through an external hydraulic cylinder switch.

The working principle of the utility model is as follows: when the plate cover product is cooled by water, firstly, the product to be cooled is placed at the top of the bearing frame 21, the plate cover product is positioned between two adjacent partition plates 23, then a hydraulic cylinder switch is turned on, a hydraulic cylinder 35 is electrified to drive the extrusion plate 32 to ascend, the extrusion plate 32 extrudes the water bag 33, water flow in the water bag 33 is discharged to the top of the bearing plate 31 through a connecting pipe, so that the liquid level of the water flow at the top of the bearing plate 31 ascends, and the plate cover product is submerged to cool the product;

after the plate cover product is cooled, the hydraulic cylinder 35 drives the extrusion plate 32 to descend, and the water flow part at the top of the bearing plate 31 flows back into the water bag 33 under the action of the gravity of the water flow, so that the height of the water flow at the top of the bearing plate 31 is reduced, the top of the plate cover product is exposed outside, and the plate cover product can be taken out.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments or portions thereof without departing from the spirit and scope of the utility model.

Claims

1. A cooling device of a magnetron sputtering machine for a cover plate comprises a connecting frame (1), and is characterized in that a bearing device (2) is arranged at the top of an inner cavity of the connecting frame (1), and a water control device (3) is arranged at the bottom of the inner cavity of the connecting frame (1);

the bearing device (2) comprises a bearing frame (21), the outer wall of the bearing frame (21) is in sliding sleeve joint with the inner cavity of the connecting frame (1), and a filter screen (22) is fixedly sleeved in the bearing frame (21);

accuse water installation (3) are including loading board (31), loading board (31) fixed cover connects in the middle part of connecting frame (1) inner chamber, the bottom fixedly connected with water pocket (33) of loading board (31), the bottom of water pocket (33) is provided with stripper plate (32), stripper plate (32) slip cup joint in the inside of connecting frame (1).

2. A cooling device of a magnetron sputtering machine for cover plate according to claim 1, characterized in that a plurality of partition plates (23) are fixedly connected with the top of the bearing frame (21) at equal intervals, and bearing blocks (24) are fixedly connected with both sides of the inner wall of the connecting frame (1).

3. The cooling device of a magnetron sputtering machine for cover plate as claimed in claim 2, wherein the carrying frame (21) is located on top of four carrying blocks (24), two fixing bolts (25) are arranged on two sides of the top of the carrying frame (21), and the carrying frame (21) is fixedly connected with the carrying blocks (24) through the fixing bolts (25).

4. The cooling device of a magnetron sputtering machine for cover plate as claimed in claim 1, wherein the bottom of the bearing plate (31) is fixedly inserted and sleeved with a connecting pipe, and the bottom of the outer wall of the connecting pipe is fixedly sleeved with the water pocket (33).

5. The cooling device of a magnetron sputtering machine for cover plate according to claim 1, wherein a bottom plate (34) is disposed at the bottom of the connecting frame (1), inner bolts (38) are disposed at four corners of the bottom plate (34), and the bottom plate (34) is fixedly connected with the connecting frame (1) through the inner bolts (38).

6. The cooling device of a magnetron sputtering machine for cover plate as claimed in claim 5, wherein the middle of the upper surface of the bottom plate (34) is fixedly connected with a hydraulic cylinder (35), and the output end of the hydraulic cylinder (35) is in transmission connection with the extrusion plate (32).

7. The cooling device of a magnetron sputtering machine for cover plates according to claim 5, characterized in that the top of the bottom plate (34) is fixedly connected with four connecting sleeves (36) in a rectangular array, the inner cavities of the connecting sleeves (36) are slidably sleeved with connecting rods (37), and the tops of the connecting rods (37) are fixedly connected with the extrusion plate (32).