CN216189191U - Vacuum panel structure for picking up substrate - Google Patents

Vacuum panel structure for picking up substrate Download PDF

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Publication number
CN216189191U
CN216189191U CN202122514173.3U CN202122514173U CN216189191U CN 216189191 U CN216189191 U CN 216189191U CN 202122514173 U CN202122514173 U CN 202122514173U CN 216189191 U CN216189191 U CN 216189191U
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China
Prior art keywords
vacuum
suction nozzle
panel
groove
hole
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CN202122514173.3U
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Chinese (zh)
Inventor
朱小俊
张小青
顾国强
薛文华
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Stats Chippac Semiconductor Jiangyin Co Ltd
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Stats Chippac Semiconductor Jiangyin Co Ltd
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Priority to CN202122514173.3U priority Critical patent/CN216189191U/en
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Abstract

The utility model discloses a vacuum panel structure for picking up a substrate, and belongs to the technical field of vacuum panels for picking up substrates. It from down and on include panel body (1), black rubber pad (2) and silica gel suction nozzle (3) in proper order, fluting (11) set up in on the panel the front of panel body (1), the central authorities in suction nozzle groove (12) set up suction nozzle bottom hole (18), vacuum hole I (13) evenly distributed is around suction nozzle groove (12), suction nozzle bottom hole (18) with vacuum hole I (13) pass through vacuum intercommunication groove (17) intercommunication, its silica gel suction nozzle (3) through its unable adjustment base (32), vacuum extension mouth (34) respectively with suction nozzle through-hole (22) joint of black rubber pad (2), with suction nozzle bottom hole (18) joint of panel body (1). The utility model solves the problem that the original metal vacuum panel adsorbs the substrate due to static electricity.

Description

Vacuum panel structure for picking up substrate
Technical Field
The utility model relates to a vacuum panel structure for picking up a substrate, belonging to the technical field of vacuum panels for picking up substrates.
Background
Because the vacuum panel of the product that the tongs of unloading contacted is the metal material, and its surface is more smooth and contact surface is bigger, has the phenomenon that static glues the product, and the tongs of unloading can bring the product such as base plate in the twinkling of an eye when putting the vacuum and rising, and because there is the time delay in the vacuum, does not report to the police to the product takes place the position offset when dropping on the conveying platform of unloading.
Disclosure of Invention
The utility model aims to overcome the defects in the prior art and provide a vacuum panel structure for picking up a substrate, which solves the problem that the original metal panel adsorbs the substrate.
The technical scheme of the utility model is as follows:
the utility model provides a vacuum panel structure for picking up a substrate, which sequentially comprises a panel body, a black rubber pad and a silica gel suction nozzle from bottom to top, wherein the panel body is rectangular and comprises a panel upper groove, a vacuum communicating groove and an edge, the panel upper groove is arranged on the front surface of the panel body, the vacuum communicating groove is arranged on the back surface of the panel body, the edge surrounds the panel upper groove and the periphery of the vacuum communicating groove,
the panel is internally provided with a suction nozzle groove, vacuum holes I and suction nozzle bottom holes in a groove, the suction nozzle groove is distributed in a matrix shape, the center of the suction nozzle groove is provided with the suction nozzle bottom holes, the vacuum holes I are uniformly distributed around the suction nozzle groove, the suction nozzle bottom holes are communicated with the vacuum holes I through the vacuum communication groove, the reverse fixing screw holes are arranged on the back of the edge and are uniformly distributed,
the black rubber pad is as large as the groove in the panel, is arranged in the groove in the panel through a binder, and is provided with a vacuum gathering groove, suction nozzle through holes and vacuum holes II, the suction nozzle through holes are uniformly distributed in the vacuum gathering groove in a matrix form, and the vacuum holes II are aligned and connected with the vacuum holes I of the panel body 1;
silica gel suction nozzle is the loudspeaker form, and it includes suction nozzle opening, unable adjustment base and vacuum extension mouth from the top in proper order, sets up vacuum channel and vacuum cushion chamber in it, the vacuum cushion chamber set up in the unable adjustment base, unable adjustment base's transversal circular of personally submitting, vacuum extension mouthful transversal circular of personally submitting, vacuum channel intercommunication suction nozzle opening, vacuum cushion chamber and vacuum extension mouth, the silica gel suction nozzle through its unable adjustment base, vacuum extension mouth respectively with the suction nozzle through-hole joint of black rubber pad, with the suction nozzle bottom hole joint of panel body.
Optionally, the size of the vacuum communication groove is larger than that of the groove on the panel.
Optionally, the number of rows of nozzle slots is 2.
Optionally, the number of rows of vacuum holes i is 4.
Optionally, the thickness of the panel body = a depth of the groove on the panel + a depth of the nozzle groove + a depth of the nozzle bottom hole + a depth of the vacuum communication groove.
Optionally, the cross section of the vacuum buffer cavity is circular or criss-cross.
Advantageous effects
According to the vacuum panel structure for picking up the substrate, the black rubber pads are laid on the panel body, the suction nozzle through holes are arranged in a matrix mode, the silica gel suction nozzles are arranged in the suction nozzle through holes one by one, static electricity is avoided by vacuum picking up of the substrate, the problem that the original metal panel adsorbs the substrate in a static mode is solved, the frequency of blanking suction vacuum alarm is greatly reduced, and the quality risk of damage of the substrate is reduced.
Drawings
FIG. 1 is a schematic view of an embodiment of a vacuum panel structure for picking up a substrate according to the present invention;
FIG. 2 is a schematic view of the assembly of FIG. 1;
fig. 3 is a top view of the panel body 1 in fig. 2;
FIG. 4 is an elevational, cross-sectional view of FIG. 3;
FIG. 5 is an enlarged schematic view of detail I of FIG. 4;
FIG. 6 is a side sectional view of FIG. 3;
FIG. 7 is a top view of the black rubber pad of FIG. 2;
FIG. 8 is an elevational, cross-sectional view of FIG. 6;
FIG. 9 is an enlarged schematic view of detail II of FIG. 8;
FIG. 10 is a side sectional view of FIG. 7;
FIG. 11 is a schematic cross-sectional view of the silicone mouthpiece of FIG. 2;
FIG. 12 is a schematic view of the usage state of FIG. 1;
in the figure:
panel body 1
Panel top groove 11
Edge 16
Vacuum communicating groove 17
Suction nozzle bottom hole 18
Black rubber pad 2
Vacuum collection tank 21
Suction nozzle through hole 22
Vacuum hole II 23
Silica gel suction nozzle 3
Suction nozzle opening 31
Fixed base 32
Vacuum buffer chamber 33
Vacuum extension 34
A vacuum channel 35.
Detailed Description
The following detailed description of embodiments of the utility model refers to the accompanying drawings. Spatially relative terms (such as "below …", "below", "lower", "above …", "upper", and the like) may be used for ease of illustration to describe one element or component's relationship to another element or component as illustrated in the figures. Spatially relative terms may also encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. The device may be otherwise oriented 90 degrees or at other orientations and the spatially relative descriptors used herein interpreted accordingly.
Examples
The utility model relates to a vacuum panel structure for picking up a substrate, which comprises a panel body 1, a black rubber pad 2 and a silica gel suction nozzle 3 from bottom to top in sequence as shown in figure 1, wherein the size of a vacuum communicating groove 17 is larger than that of a slot 11 on the panel as shown in figure 2.
The panel body 1 is rectangular and comprises a panel upper slot 11, a vacuum communication groove 17 and a border 16, as shown in fig. 3-6, the panel upper slot 11 is arranged on the front surface of the panel body 1, the vacuum communication groove 17 is arranged on the back surface of the panel body 1, and the border 16 surrounds the panel upper slot 11 and the periphery of the vacuum communication groove 17.
The panel is provided with a slot 11 internally provided with a nozzle slot 12, a vacuum hole I13 and a nozzle bottom hole 18, the nozzle slot 12 is distributed in a matrix shape, the nozzle bottom hole 18 is arranged at the center of the nozzle slot, and the row number of the nozzle slot 12 is 2 in the figure 3. The vacuum holes I13 are uniformly distributed around the nozzle groove 12, and the row number of the vacuum holes I13 is 4 in the figure 3.
Suction nozzle bottom hole 18 with vacuum hole I13 passes through vacuum intercommunication groove 17 intercommunication, border 16 sets up reverse fixed screw hole 19 at the back, reverse fixed screw hole 19 evenly distributed is through reverse fixed screw with this vacuum panel and panel base fixed connection.
The thickness of the panel body 1 = the depth of the panel upper slot 11 + the depth of the nozzle slot 12 + the depth of the nozzle bottom hole 18 + the depth of the vacuum communication slot 17.
The black rubber pad 2 is as large as the upper groove 11 of the panel and is arranged in the upper groove 11 of the panel through an adhesive. Typically, the adhesive is a high viscosity glue. The black rubber pad 2 is provided with a vacuum gathering groove 21, suction nozzle through holes 22 and vacuum holes II 23, as shown in fig. 7 to 10, the suction nozzle through holes 22 are uniformly distributed in the vacuum gathering groove 21 in a matrix manner, and the vacuum holes II 23 are aligned and connected with the vacuum holes I13 of the panel body 1.
Silica gel suction nozzle 3 is the loudspeaker form, and it includes suction nozzle opening 31, unable adjustment base 32 and vacuum extension mouth 34 from the top down in proper order, sets up vacuum channel 35 and vacuum cushion chamber 33 in it, as shown in fig. 11, vacuum cushion chamber 33 set up in unable adjustment base 32, vacuum cushion chamber 33's transversal circular or the crisscross shape of personally submitting.
Unable adjustment base 32's transversal personally submits circularly, vacuum extension mouth 34's transversal personally submits circularly, vacuum channel 35 intercommunication suction nozzle opening 31, vacuum cushion chamber 33 and vacuum extension mouth 34, silica gel suction nozzle 3 through its unable adjustment base 32, vacuum extension mouth 34 respectively with the suction nozzle through-hole 22 joint of black rubber pad 2, with the suction nozzle bottom hole 18 joint of panel body 1. Generally, in order to enhance the connection between the silicone suction nozzle 3 and the black rubber pad 2 and the panel body 1, a high viscosity glue may be applied appropriately.
When in use, the vacuum panel of the pickup substrate is fixed with the panel base through the reverse fixing screw holes 19 and then is arranged on the unloading gripper. After the grinding of the grinder is completed, the gripper is moved to the position above the substrate, the gripper moves downwards to the position where the silica gel suction nozzle can suck the substrate 4, the machine platform opens the suction cup vacuum device, 2 × 6 silica gel suction nozzles 3 suck the substrate 4, and as shown in fig. 12, the substrate 4 is conveyed to the unloading conveying platform.
The above-mentioned embodiments are intended to explain the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention, and are not intended to limit the scope of the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (6)

1. The vacuum panel structure for picking up the substrate is characterized by sequentially comprising a panel body (1), a black rubber pad (2) and a silica gel suction nozzle (3) from bottom to top, wherein the panel body (1) is rectangular and comprises an upper panel groove (11), a vacuum communication groove (17) and a border (16), the upper panel groove (11) is formed in the front of the panel body (1), the vacuum communication groove (17) is formed in the back of the panel body (1), the border (16) surrounds the upper panel groove (11) and the vacuum communication groove (17),
set up suction nozzle groove (12), vacuum hole I (13), suction nozzle bottom hole (18) in fluting (11) on the panel, suction nozzle groove (12) is the matrix distribution, and its center sets up suction nozzle bottom hole (18), vacuum hole I (13) evenly distributed is around suction nozzle groove (12), suction nozzle bottom hole (18) with vacuum hole I (13) pass through vacuum intercommunication groove (17) intercommunication, border (16) set up reverse fixed screw hole (19) at the back, reverse fixed screw hole (19) evenly distributed,
the black rubber pad (2) is as large as the groove (11) in the panel, is arranged in the groove (11) in the panel through a bonding agent, is provided with a vacuum gathering groove (21), suction nozzle through holes (22) and vacuum holes II (23), the suction nozzle through holes (22) are uniformly distributed in the vacuum gathering groove (21) in a matrix manner, and the vacuum holes II (23) are aligned and connected with the vacuum holes I (13) of the panel body (1);
silica gel suction nozzle (3) are the loudspeaker form, and it from the top includes suction nozzle opening (31), unable adjustment base (32) and vacuum extension mouth (34) in proper order, sets up vacuum channel (35) and vacuum cushion chamber (33) in it, vacuum cushion chamber (33) set up in unable adjustment base (32), the transversal circular of personally submitting of vacuum extension mouth (34), vacuum channel (35) intercommunication suction nozzle opening (31), vacuum cushion chamber (33) and vacuum extension mouth (34), silica gel suction nozzle (3) through its unable adjustment base (32), vacuum extension mouth (34) respectively with suction nozzle through-hole (22) joint of black rubber pad (2), with suction nozzle bottom hole (18) joint of panel body (1).
2. Vacuum panel structure according to claim 1, characterized in that the size of the vacuum communication groove (17) is larger than the size of the slot (11) in the panel.
3. Vacuum panel structure according to claim 1, characterized in that the number of rows of nozzle slots (12) is 2.
4. Vacuum panel structure according to claim 1, characterized in that the number of rows of vacuum holes i (13) is 4.
5. Vacuum panel structure according to claim 1, characterized in that the thickness of the panel body (1) = the depth of the slot (11) on the panel + the depth of the nozzle slot (12) + the depth of the nozzle bottom hole (18) + the depth of the vacuum communication slot (17).
6. Vacuum panel structure according to claim 1, characterized in that the vacuum buffer chamber (33) has a circular or cross-shaped cross-section.
CN202122514173.3U 2021-10-19 2021-10-19 Vacuum panel structure for picking up substrate Active CN216189191U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202122514173.3U CN216189191U (en) 2021-10-19 2021-10-19 Vacuum panel structure for picking up substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202122514173.3U CN216189191U (en) 2021-10-19 2021-10-19 Vacuum panel structure for picking up substrate

Publications (1)

Publication Number Publication Date
CN216189191U true CN216189191U (en) 2022-04-05

Family

ID=80884360

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202122514173.3U Active CN216189191U (en) 2021-10-19 2021-10-19 Vacuum panel structure for picking up substrate

Country Status (1)

Country Link
CN (1) CN216189191U (en)

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