CN216141608U - Evaporation source - Google Patents
Evaporation source Download PDFInfo
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- CN216141608U CN216141608U CN202121466994.8U CN202121466994U CN216141608U CN 216141608 U CN216141608 U CN 216141608U CN 202121466994 U CN202121466994 U CN 202121466994U CN 216141608 U CN216141608 U CN 216141608U
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- liquid guide
- groove
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- groove body
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Abstract
The utility model discloses an evaporation source, which relates to the field of vacuum evaporation, and comprises a boat body, wherein a groove body is obliquely arranged in the boat body, the groove body comprises an upper groove body positioned at the upper part in the boat body and a lower groove body positioned at the lower part in the boat body, the upper groove body and the lower groove body are both formed by a plurality of uniformly arranged liquid guide grooves, a liquid guide wall is formed between the liquid guide grooves and the liquid guide grooves, the liquid guide grooves of the upper groove body are mutually communicated with the liquid guide grooves of the lower groove body, the upper groove body comprises a liquid guide area and an anti-splash area, one end of the liquid guide area is attached to the inner wall of the boat body, the other end of the liquid guide area is fixedly connected with the anti-splash area, the liquid guide wall of the anti-splash area is formed by a plurality of bulges, grooves are formed between the bulges, each groove is mutually communicated with the liquid guide grooves of the upper groove body, and liquid formed after aluminum wires are sequentially dispersed and flows to the liquid guide grooves of the upper groove body and the lower groove body. Through the improvement of the structure, the aluminum liquid can be prevented from splashing, the condition of film surface holes is improved, and the quality of finished products is improved.
Description
Technical Field
The utility model relates to the technical field of vacuum evaporation, in particular to an evaporation source.
Background art
An evaporation source is a member for evaporating a substance, and is mainly used in vacuum evaporation, in which metal is melted under vacuum conditions, and atoms of the metal are separated from a body and move upward under vacuum conditions, so that the atoms are laminated in a film or a substance to be plated.
However, in the process of actually producing the film, when the metal is molten and dropped onto the evaporation boat, the metal is deposited at a certain point of the evaporation boat, so that the molten metal is deposited at the certain point, when the metal in the later liquid state is dropped onto the certain point again, the metal liquid dropped onto the certain point before is splashed out, the surfaces of other facilities are polluted, and in addition, the splashed metal liquid drops have higher energy than that when single atoms of the metal liquid are volatilized, so that the film is likely to be burnt through when the metal liquid drops at higher temperature are splashed onto the film, and holes are formed.
On the other hand, when the metal is deposited at one place and is melted and volatilized, the metal volatilized or evaporated at the place is more than that at other positions, so that when metal atoms are evaporated and deposited upwards on the film to be plated, more metal is deposited at the corresponding position of the film, so that the thickness of the metal layer on the film is different, and the product quality is influenced.
SUMMERY OF THE UTILITY MODEL
In order to overcome the defects of the prior art, the utility model provides an evaporation source which can solve the problems.
The technical scheme adopted by the utility model for solving the technical problems is as follows:
an evaporation source comprises a boat body, wherein a groove body is obliquely arranged in the boat body, the groove body comprises an upper groove body positioned at the upper part in the boat body and a lower groove body positioned at the lower part in the boat body, the upper groove body and the lower groove body are respectively composed of a plurality of uniformly arranged liquid guide grooves, a liquid guide wall is formed between the liquid guide grooves, and the liquid guide grooves of the upper groove body and the lower groove body are mutually communicated;
last cell body include drain district and splashproof district, drain district one end and the laminating of the internal wall of boat, the drain district other end and splashproof district fixed connection, the drain wall in splashproof district comprises a plurality of archs, forms the recess between arch and the arch, every recess all switches on each other with the drain groove of last cell body, can follow the drain groove of the upper cell body of recess dispersion flow in proper order and the drain groove of lower cell body with the liquid that forms after the aluminium silk evaporation.
As an improvement of the technical scheme, the area of the upper tank body occupied by the splash-proof area is 6-7 times of the area of the upper tank body occupied by the liquid guide area.
As an improvement of the technical scheme, the area of the upper trough body in the boat body is smaller than that of the lower trough body in the boat body.
As an improvement of the technical proposal, the boat body is made of any one of boron nitride, titanium diboride, aluminum nitride, aluminum oxide, zirconium oxide, silicon carbide and silicon nitride.
As an improvement of the technical scheme, the width of the groove is 1-3 mm.
As an improvement of the technical scheme, the length of the groove body is 100-200mm, and the width is 30-60 mm.
The utility model has the beneficial effects that: through the improvement of the structure, the aluminum liquid can be prevented from splashing to the surfaces of other equipment to pollute the surfaces of the other equipment, the hole condition of the membrane surface is improved, and the quality of finished products is improved.
Drawings
The utility model is further illustrated with reference to the following figures and examples.
FIG. 1 is a schematic assembly view of the present invention;
fig. 2 is a partially enlarged view of a in fig. 1.
Detailed Description
The conception, the specific structure, and the technical effects produced by the present invention will be clearly and completely described below in conjunction with the embodiments and the accompanying drawings to fully understand the objects, the features, and the effects of the present invention. It is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and those skilled in the art can obtain other embodiments without inventive effort based on the embodiments of the present invention, and all embodiments are within the protection scope of the present invention. In addition, all the connection/connection relations referred to in the patent do not mean that the components are directly connected, but mean that a better connection structure can be formed by adding or reducing connection auxiliary components according to specific implementation conditions. All technical characteristics in the utility model can be interactively combined on the premise of not conflicting with each other.
Referring to fig. 1 and 2, the utility model discloses an evaporation source, which comprises a boat body 1, wherein a groove body 2 is obliquely arranged in the boat body 1, the length of the groove body 2 is 100-200mm, and the width of the groove body 2 is 30-60 mm. Cell body 2 is including last cell body 3 that is located 1 internal top of boat and the lower cell body 4 that is located 1 internal below of boat, goes up cell body 3 and lower cell body 4 and constitutes by a plurality of align to grid's liquid guide groove 5, forms liquid guide wall 6 between liquid guide groove 5 and the liquid guide groove 5, and goes up the liquid guide groove 5 of cell body 3 and switches on each other with lower cell body 4's liquid guide groove 5, last cell body 3 including liquid guide district 7 and splashproof district 8, laminate with 1 inner wall of the boat body 7 one end in liquid guide district 7 other end and 8 fixed connection in splashproof district, the liquid guide wall 6 in splashproof district 8 comprises a plurality of archs 9, forms recess 10 between arch 9 and the arch 9, the width of recess 10 is 1-3 mm. Each groove 10 is communicated with the liquid guide groove 5 of the upper tank body 3, and liquid formed after the aluminum wires are melted can be dispersed and flowed to the liquid guide groove 5 of the upper tank body 3 and the liquid guide groove 5 of the lower tank body 4 from the grooves 10 in sequence.
In the above embodiment, the boat body 1 is quadrilateral, made of any one of boron nitride, titanium diboride, aluminum nitride, alumina, zirconia, silicon carbide and silicon nitride, the inclined groove body 2 is arranged in the boat body 1, the length of the groove body 2 is 100-200cm, and the width is 30-60mm, so that the main advantage of the design is that when the boat body 1 of the utility model is used, when evaporating the substances to be evaporated on the boat body 1, aluminum is mainly evaporated, the boat body 1 is uniformly heated, aluminum wires are gradually heated into aluminum liquid in the splash-proof area 8, some aluminum liquid splashes to the top of the upper tank body 3 after being heated, the top of the upper tank body 3 is provided with a liquid guide area 7, because the liquid guide area 7 is provided with the liquid guide groove 5, and the tank body 2 is obliquely arranged, the aluminum liquid flows downwards along the liquid guide groove 5 of the liquid guide area 7, flows through the liquid guide groove 5 of the splash-proof area 8, and finally stays in the liquid guide groove 5 of the lower tank body 4.
The vertical distance between the lowest part of the inclined tank body 2 and the highest part of the tank body 2 is 1-5 mm. The distance length between the edge of the trough body 2 and the edge of the boat body 1 is 1-3mm, the width of the groove 10 is equal to that of the liquid guide groove 5, the width of the groove 10 is 1-3mm, the height of the bulge 9 is 1-4mm, and the area of the upper trough body 3 occupied by the liquid guide area 7 is 6-7 times that of the upper trough body 3 occupied by the splash-proof area 8. The area of the upper trough body 3 in the boat body 1 is smaller than that of the lower trough body 4 in the boat body 1. Adopt this kind of design, when the aluminium silk melting drips on cell body 2, because the inside cell body 2 of boat body 1 adopts the slope type, and inside is provided with liquid guide groove 5 and arch 9, the aluminium liquid that drips on cell body 2 can flow to liquid guide groove 5 along the recess 10 between arch 9 and the arch 9, thereby can not gather in a place, also further prevent to drip the aluminium silk sputter of on cell body 2 above, cause the waste of aluminium and pollute other equipment surfaces, also can prevent that aluminium from accumulating in a place, thereby cause this place aluminium source more, corresponding aluminium of laminating on treating the coating film increases, it is more to cause the aluminium of film local lamination, finally cause the physical property difference above the product, thereby influence the qualification rate.
The utility model has the beneficial effects that: through the improvement of the structure, the aluminum liquid can be prevented from splashing to the surfaces of other equipment to pollute the surfaces of the other equipment, the hole condition of the membrane surface is improved, and the quality of finished products is improved.
While the preferred embodiments of the present invention have been illustrated and described, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the utility model as defined by the appended claims.
Claims (5)
1. An evaporation source is characterized by comprising a boat body, wherein obliquely arranged groove bodies are arranged in the boat body, each groove body comprises an upper groove body positioned at the upper part in the boat body and a lower groove body positioned at the lower part in the boat body, the upper groove body and the lower groove body are respectively composed of a plurality of uniformly arranged liquid guide grooves, a liquid guide wall is formed between each liquid guide groove and the corresponding liquid guide groove, and the liquid guide grooves of the upper groove body and the lower groove body are communicated with each other;
last cell body include drain district and splashproof district, drain district one end and the laminating of the internal wall of boat, the drain district other end and splashproof district fixed connection, the drain wall in splashproof district comprises a plurality of archs, forms the recess between arch and the arch, every recess all switches on each other with the drain groove of last cell body, can follow the drain groove of the upper cell body of recess dispersion flow in proper order and the drain groove of lower cell body with the liquid that forms after the aluminium silk evaporation.
2. The evaporation source of claim 1, wherein the splash-proof area occupies 6-7 times of the area of the upper tank occupied by the liquid guide area.
3. The evaporation source of claim 1, wherein the boat area of the upper trough is smaller than the boat area of the lower trough.
4. An evaporation source according to claim 1, wherein the width of the groove is 1-3 mm.
5. The evaporation source as claimed in claim 1, wherein the length of the tank body is 100-200mm, and the width is 30-60 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121466994.8U CN216141608U (en) | 2021-06-29 | 2021-06-29 | Evaporation source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121466994.8U CN216141608U (en) | 2021-06-29 | 2021-06-29 | Evaporation source |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216141608U true CN216141608U (en) | 2022-03-29 |
Family
ID=80801257
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121466994.8U Active CN216141608U (en) | 2021-06-29 | 2021-06-29 | Evaporation source |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216141608U (en) |
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2021
- 2021-06-29 CN CN202121466994.8U patent/CN216141608U/en active Active
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