CN216141607U

CN216141607U - Evaporation source structure for preventing metal liquid from splashing

Info

Publication number: CN216141607U
Application number: CN202121461193.2U
Authority: CN
Inventors: 王俊; 杨俊�; 王喜本; 臧世伟
Original assignee: Chongqing Jinmei New Material Technology Co Ltd
Current assignee: Chongqing Jinmei New Material Technology Co Ltd
Priority date: 2021-06-29
Filing date: 2021-06-29
Publication date: 2022-03-29
Anticipated expiration: 2031-06-29

Abstract

The utility model discloses an evaporation source structure for preventing metal liquid from splashing, which relates to the field of evaporation, and comprises a boat body, wherein a groove body is obliquely arranged in the boat body, the groove body comprises an upper groove body positioned above the inner part of the boat body and a lower groove body positioned below the inner part of the boat body, the bottom of the upper groove body and the bottom of the lower groove body are both of a smooth structure, the upper groove body is provided with a cover for preventing metal liquid from splashing, and a through hole is arranged right above the cover so that a metal wire can touch the inner part of the upper groove body through the through hole. Through the improvement of the structure, the aluminum liquid can be prevented from splashing to the surfaces of other equipment, the pollution to the surfaces of the other equipment is caused, the condition of membrane surface holes is improved, and the quality of finished products is improved.

Description

Evaporation source structure for preventing metal liquid from splashing

Technical Field

The utility model relates to the field of vacuum evaporation, in particular to an evaporation source structure for preventing metal liquid from splashing.

Background

An evaporation source is a member for evaporating a substance, and is mainly used in vacuum evaporation, in which metal is melted under vacuum conditions, and atoms of the metal are separated from a body and move upward under vacuum conditions, so that the atoms are laminated in a film or a substance to be plated.

However, in the process of actually producing a thin film, when the metal is dropped onto the evaporation boat, the metal is deposited at a certain point of the evaporation boat, so that the molten metal is deposited there, and when the metal is dropped onto the point again in a later liquid state, the metal liquid previously dropped thereon is splashed out, and the surface of other facilities is polluted. In addition, because the energy of the splashed metal liquid drops is higher than that of the metal liquid single atom when the metal liquid single atoms are volatilized, the metal liquid drops with higher temperature are likely to burn through the film when being splashed on the film, and holes are formed.

On the other hand, when the metal is deposited at one place and is melted and volatilized, the metal volatilized or evaporated at the place is more than that at other positions, so that when metal atoms are evaporated and deposited upwards on the film to be plated, more metal is deposited at the corresponding position of the film, so that the thickness of the metal layer on the film is different, and the product quality is influenced.

SUMMERY OF THE UTILITY MODEL

In order to overcome the defects of the prior art, the utility model provides an evaporation source structure for preventing metal liquid from splashing, so as to solve the problems.

The technical scheme adopted by the utility model for solving the technical problems is as follows:

the utility model provides an evaporation source structure for preventing metallic liquid splashes, includes the boat body, the internal cell body that the slope was placed that is equipped with of boat, the cell body including the last cell body that is located the internal top of boat and the lower cell body that is located the internal below of boat, the bottom of going up the cell body and the bottom of lower cell body are smooth structure, last cell body be equipped with the lid that prevents metallic liquid and splash.

As an improvement of the technical scheme, the bottom of the upper tank body and the bottom of the lower tank body are both formed by a plurality of liquid guide grooves which are uniformly arranged, a liquid guide wall is formed between the liquid guide grooves, and the liquid guide grooves of the upper tank body and the lower tank body are mutually communicated.

As above-mentioned technical scheme's improvement, last cell body include drain district and splashproof district, drain district one end and the laminating of the internal wall of boat, the drain district other end and splashproof district fixed connection, the drain wall in splashproof district comprises a plurality of archs, forms the recess between arch and the arch, and every recess all switches on each other with the drain groove of last cell body, can follow the liquid that forms after the aluminium silk evaporation in proper order the liquid from the recess dispersion flow to the drain groove of cell body and the drain groove of cell body down.

As the improvement of the technical scheme, the top end of the cover is provided with a through hole, so that the metal wire can touch the inside of the upper groove body through the through hole.

As an improvement of the technical scheme, the width of the groove is 1-3 mm.

As an improvement of the technical scheme, the area of the upper tank body occupied by the splash-proof area is 6-7 times of the area of the upper tank body occupied by the liquid guide area.

As an improvement of the technical scheme, the area of the upper trough body in the boat body is smaller than that of the lower trough body in the boat body.

As an improvement of the technical proposal, the boat body is made of any one of boron nitride, titanium diboride, aluminum nitride, aluminum oxide, zirconium oxide, silicon carbide and silicon nitride.

As an improvement of the technical proposal, the vertical distance between the lowest part of the inclined groove body and the highest part of the groove body is 1-5mm, the length range of the groove body is 100-200mm, and the width range is 30-60 mm.

The utility model has the beneficial effects that: through the improvement of the structure, the aluminum liquid can be prevented from splashing to the surfaces of other equipment, the pollution to the surfaces of the other equipment is caused, the condition of membrane surface holes is improved, and the quality of finished products is improved.

Drawings

The utility model is further illustrated with reference to the following figures and examples.

FIG. 1 is a schematic structural diagram of a first embodiment of the present invention;

FIG. 2 is a schematic structural diagram of a second embodiment of the present invention;

FIG. 3 is a structural exploded view of a second embodiment of the present invention;

fig. 4 is a partially enlarged view of a in fig. 3.

Detailed Description

The conception, the specific structure, and the technical effects produced by the present invention will be clearly and completely described below in conjunction with the embodiments and the accompanying drawings to fully understand the objects, the features, and the effects of the present invention. It is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and those skilled in the art can obtain other embodiments without inventive effort based on the embodiments of the present invention, and all embodiments are within the protection scope of the present invention. In addition, all the connection/connection relations referred to in the patent do not mean that the components are directly connected, but mean that a better connection structure can be formed by adding or reducing connection auxiliary components according to specific implementation conditions. All technical characteristics in the utility model can be interactively combined on the premise of not conflicting with each other.

The utility model discloses an evaporation source structure for preventing metal liquid from splashing, which comprises a boat body 1, wherein a groove body 2 is obliquely arranged in the boat body 1, and the groove body 2 comprises an upper groove body 3 positioned at the upper part in the boat body 1 and a lower groove body 4 positioned at the lower part in the boat body 1.

In the above embodiment, the boat body 1 is quadrilateral, the material is any one of boron nitride, titanium diboride, aluminum nitride, aluminum oxide, zirconium oxide, silicon carbide and silicon nitride, the inclined trough body 2 is arranged in the boat body 1, the length of the trough body 2 is 100 plus one 200cm, and the width is 30-60mm, the main advantage of the design is that when the boat body 1 of the utility model is used, when metal to be evaporated on the boat body 1 is evaporated, aluminum is mainly evaporated, the boat body 1 is uniformly heated, the aluminum wire 100 is evaporated to be aluminum liquid, in order to avoid the waste or pollution of the aluminum liquid to the surface of other equipment, the specific process that the aluminum liquid flows from the upper trough body 3 to the lower trough body 4 is as follows:

example one

Referring to fig. 1, the bottom of the upper tank body 3 and the bottom of the lower tank body 4 are both smooth structures. And the upper tank body 3 is provided with a cover 200 for preventing the metal liquid from splashing, and the top end of the cover 200 is provided with a through hole 300 so that the aluminum wire 100 touches the inside of the upper tank body 3 through the through hole 300.

The bottom of the upper tank body 3 and the bottom of the lower tank body 4 are both of smooth structures (not shown), the upper tank body 3 is provided with a cover 200 for preventing metal liquid from splashing, the aluminum wire 100 is inserted into the upper tank body 3 and touches the bottom end of the upper tank body 3, when the boat body 1 is heated, the aluminum wire 100 is heated to be changed into aluminum liquid, the tank body 2 is in an inclined state, the aluminum liquid can remain to the smooth bottom of the lower tank body 4 along the smooth bottom of the upper tank body 3, and the aluminum liquid splashing phenomenon can occur in the melting process of the aluminum wire 100, the cover 200 for preventing the aluminum liquid from splashing is arranged above the upper tank body 3, so that the aluminum liquid can be prevented from splashing and polluting the surfaces of other devices.

Example two

Referring to fig. 2 to 4, the upper tank body 3 is provided with a cover 200 for preventing the metal liquid from splashing, and a through hole 300 is formed at the top end of the cover 200 so that the aluminum wire 100 touches the inside of the upper tank body 3 through the through hole 300. Go up the bottom of cell body 3 and the bottom of lower cell body 4 and constitute by a plurality of align to grid's liquid guide groove 5, form liquid guide wall 6 between liquid guide groove 5 and the liquid guide groove 5, and go up the liquid guide groove 5 of cell body 3 and switch on each other with the liquid guide groove 5 of lower cell body 4, last cell body 3 include liquid guide area 7 and splashproof district 8, laminate with 1 inner wall of the boat body in liquid guide area 7 one end, the liquid guide area 7 other end and 8 fixed connection in splashproof district, liquid guide wall 6 of splashproof district 8 comprises a plurality of archs 9, forms recess 10 between arch 9 and the arch 9, and every recess 10 all switches on each other with liquid guide groove 5 of last cell body 3, can follow the liquid that forms after the melting of aluminium silk 100 and disperse flow in proper order to go up cell body 3's liquid guide groove 5 and lower cell body 4's liquid guide groove 5.

Be equipped with the lid 200 that prevents aluminium liquid and splash in the top of last cell body 3, can avoid the unnecessary waste of material, consider that aluminium silk 100 is heated gradually to aluminium liquid in splashproof district 8, can splash to supreme cell body 3 top after some aluminium liquid is heated, and the top of going up cell body 3 is equipped with liquid guide district 7, because liquid guide district 7 is equipped with liquid guide groove 5, because cell body 2 is the slope setting again, the cell body 2 lower and the highest point vertical distance of cell body 2 of slope type is 1-5mm promptly. The vertical distance between the highest position of the tank body 2 and the lowest position of the tank body 2 is within the range of 1-5mm, and the inclination angle is proper, so that the molten aluminum liquid flows to the bottom at a certain speed, more aluminum liquid cannot be gathered at the bottom position, that is, the flow rate of the aluminum liquid and the evaporation of the aluminum liquid reach certain balance, and therefore the passing film can be uniformly coated in all places. The distance between the edge of the trough body 2 and the edge of the boat body 1 is 1-3mm, and the aluminum liquid flows down along the liquid guide groove 5 of the liquid guide area 7 quickly, flows through the liquid guide groove 5 of the splash-proof area 8 and finally stays in the liquid guide groove 5 of the lower trough body 4.

The width of the groove 10 is equal to that of the liquid guide groove 5, the width of the groove 10 is 1-3mm, the height of the bulge 9 is 1-4mm, and the area of the upper groove body 3 occupied by the splash-proof area 8 is 6-7 times that of the upper groove body 3 occupied by the liquid guide area 7. The area of the upper trough body 3 in the boat body 1 is smaller than that of the lower trough body 4 in the boat body 1. Adopt this kind of design, when aluminium silk 200 melting is dripped on cell body 2, in addition the inside cell body 2 of boat body 1 adopts the slope type, and inside is provided with liquid guide groove 5 and arch 9, the aluminium liquid that drips on cell body 2 can flow to liquid guide groove 5 along the recess 10 between arch 9 and the arch 9, thereby can not gather in a place, also further prevent to drip the aluminium silk sputter of dropping on cell body 2 above, cause the waste of aluminium and pollute other equipment surfaces, also can prevent that aluminium from accumulating in a place, thereby cause this place aluminium source more, corresponding aluminium of laminating on waiting to plate the film increases, it is more to cause the aluminium of film local lamination, finally cause the physical property difference above the product, thereby influence the qualification rate.

While the preferred embodiments of the present invention have been illustrated and described, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the utility model as defined by the appended claims.

Claims

1. The utility model provides an evaporation source structure for preventing metallic liquid splashes, a serial communication port, includes the boat body, the internal cell body that the slope was placed that is equipped with of boat, the cell body including the last cell body that is located the internal top of boat and the lower cell body that is located the internal below of boat, the bottom of going up the cell body and the bottom of lower cell body are smooth structure, last cell body be equipped with the lid that prevents metallic liquid and splash.

2. The evaporation source structure as claimed in claim 1, wherein the bottom of the upper tank and the bottom of the lower tank are formed by a plurality of liquid guiding grooves arranged uniformly, a liquid guiding wall is formed between the liquid guiding grooves, and the liquid guiding grooves of the upper tank and the lower tank are communicated with each other.

3. The evaporation source structure for preventing metal liquid from splashing according to claim 2, wherein the upper tank body comprises a liquid guide area and an anti-splashing area, one end of the liquid guide area is attached to the inner wall of the boat body, the other end of the liquid guide area is fixedly connected with the anti-splashing area, a liquid guide wall of the anti-splashing area is formed by a plurality of protrusions, a groove is formed between each protrusion and each protrusion, each groove is communicated with the liquid guide groove of the upper tank body, and liquid formed after aluminum wire evaporation can be dispersed and flowed from the grooves in sequence to the liquid guide groove of the upper tank body and the liquid guide groove of the lower tank body.

4. The evaporation source structure as claimed in claim 1, wherein the top end of the cover is provided with a through hole so that the wire can touch the inside of the upper tank body through the through hole.

5. The evaporation source structure according to claim 3, wherein the width of the groove is 1-3 mm.

6. The evaporation source structure for preventing metal liquid from splashing according to claim 1, wherein the splash-proof area occupies 6-7 times of the area of the upper tank body occupied by the liquid guide area.

7. The evaporation source structure according to claim 1, wherein the upper tank occupies a smaller area than the lower tank occupies.

8. The evaporation source structure for preventing metal liquid from splashing as recited in claim 1, wherein the vertical distance between the lowest position of the tilted tank body and the highest position of the tank body is 1-5mm, the length of the tank body ranges from 100 mm to 200mm, and the width ranges from 30 mm to 60 mm.