CN216131051U - Vacuum pipeline system with combined heating vacuum pipeline - Google Patents

Vacuum pipeline system with combined heating vacuum pipeline Download PDF

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Publication number
CN216131051U
CN216131051U CN202121946259.7U CN202121946259U CN216131051U CN 216131051 U CN216131051 U CN 216131051U CN 202121946259 U CN202121946259 U CN 202121946259U CN 216131051 U CN216131051 U CN 216131051U
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China
Prior art keywords
pipeline
heating
vacuum
coating
vacuum piping
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CN202121946259.7U
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Chinese (zh)
Inventor
项健
王虎成
王锐
张丹
李品鑫
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Hefei Yasheng Semiconductor Equipment Technology Co ltd
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Hefei Yasheng Semiconductor Equipment Technology Co ltd
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Abstract

The utility model relates to the technical field of vacuum pipeline systems, in particular to a vacuum pipeline system with a combined heating vacuum pipeline. The device comprises a process cavity, a first pipeline, a pump, a second pipeline and waste gas treatment equipment, wherein the outer walls of the first pipeline and the second pipeline are coated with heating kits. The improved vacuum system heating kit can heat gas flowing through the pipeline, and the pumping action of the pump is used, so that the probability of dust blocking due to condensation in the pipeline can be reduced, and the service life of the vacuum system is prolonged.

Description

Vacuum pipeline system with combined heating vacuum pipeline
Technical Field
The utility model relates to the technical field of vacuum pipeline systems, in particular to a vacuum pipeline system with a combined heating vacuum pipeline.
Background
Waste gas in the process reaction cavity of the original vacuum system is sucked by a downstream pump and then discharged to waste gas treatment equipment for treatment, and in the process, dust is condensed and accumulated between the pump and the waste gas treatment equipment to cause pipeline blockage and equipment downtime.
SUMMERY OF THE UTILITY MODEL
Technical problem to be solved
In order to solve the above problems in the prior art, the present invention provides a vacuum pipeline system with a combined heating vacuum pipeline, which is characterized in that a heating kit of the vacuum system is modified in the original vacuum system to heat the gas flowing through the pipeline, and the suction action of a pump is used to reduce the probability of dust condensation and blockage in the pipeline and prolong the service life of the vacuum system.
(II) technical scheme
In order to achieve the purpose, the utility model adopts the main technical scheme that: including process cavity, first pipeline, pump, second pipeline and exhaust-gas treatment equipment, first pipeline and second pipeline outer wall position cladding have the heating external member.
Preferably, the heating external member includes the heating band and sets up the magic subsides that are used for fixed heating band on the heating band, the heating band is including the zone of heating that is located the coating and the coating front right side of back one side, the magic subsides are including fixed setting on the coating and are located the first bonding portion of zone of heating left side position and the second bonding portion that is located coating back right side position.
Preferably, anti-slip strips are further arranged on one side of the front face of the heating belt at equal intervals.
Preferably, the anti-slip strip is made of rubber.
(III) advantageous effects
The utility model provides a vacuum pipeline system with a combined heating vacuum pipeline. The method has the following beneficial effects:
(1) the heating external member of first pipeline and second pipeline outer wall cladding can heat the gas of first pipeline and second pipeline of flowing through, avoids the dust to condense at the pipeline inner wall and causes the phenomenon of pipeline jam.
(2) The heating belt is fixed through the magic tape, so that the vacuum system is convenient to transform, and the pipeline does not need to be disassembled.
(3) When pasting fixed heating area through the magic, the antislip strip can with the contact of pipeline outer wall, can avoid heating area landing (rubber is heated the inflation, increase and the frictional force between first pipeline and the second pipeline) at the transformation in-process.
Drawings
FIG. 1 is a diagram of a vacuum line system according to the present invention;
FIG. 2 is a schematic view of a heating belt of the present invention;
FIG. 3 is a side view of a heating belt of the present invention.
In the figure: 1. a process chamber; 2. a first pipeline; 3. a pump; 4. a second pipeline; 5. heating the tape; 6. magic tape; 501. a coating layer; 502. a heating layer; 601. a first adhesive portion; 602. a second adhesive portion; 7. and (4) an anti-slip strip.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1-3, the vacuum pipeline system with a combined heating vacuum pipeline of the present embodiment includes a process chamber 1, a first pipeline 2, a pump 3, a second pipeline 4 and an exhaust gas treatment device, wherein the outer walls of the first pipeline 2 and the second pipeline 4 are wrapped with a heating kit. The heating external member of first pipeline 2 and the cladding of second pipeline 4 outer wall can heat the gas of first pipeline 2 and second pipeline 4 of flowing through, avoids the dust to condense at the pipeline inner wall and causes the phenomenon of pipeline jam.
Further, the heating kit includes heating band 5 and the magic subsides 6 that are used for fixed heating band 5 of setting on heating band 5, and heating band 5 is including the zone of heating 502 that is located the coating 501 right side in the front of coating 501 and back one side, and magic subsides 6 is including fixed first bonding portion 601 that sets up on coating 501 and be located the zone of heating 502 left side position and the second bonding portion 602 that is located the coating 501 right side position in the back. The heating belt 5 is wrapped on the outer walls of the first pipeline 2 and the second pipeline 4 and then fixed by the magic tape 6, the pipelines are not required to be disassembled in the process of modifying the vacuum system, and the operation is more convenient
Furthermore, anti-slip strips 7 are arranged on one side of the front surface of the heating belt 5 at equal intervals. When pasting 6 fixed heating area 5 through the magic, antislip strip 7 can avoid heating area 5 landing (rubber is heated the inflation, increases and first pipeline 2 and second pipeline 4 between frictional force 4) with first pipeline 2 and the contact of 4 outer walls of second pipeline, can be reforming transform the in-process.
Further, the anti-slip strip 7 is made of rubber.
The working principle is as follows: the heating external member of first pipeline 2 and the cladding of second pipeline 4 outer wall can heat the gas of first pipeline 2 and second pipeline 4 of flowing through, avoids the dust to condense at the pipeline inner wall and causes the phenomenon of pipeline jam. The cladding of heating zone 5 is at first pipeline 2 and 4 outer walls of second pipeline, then pastes 6 through the magic and fixes, in the process of carrying out vacuum system transformation, need not to dismantle the pipeline, it is more convenient to operate, when pasting 6 fixed heating zone 5 through the magic, antislip strip 7 can with first pipeline 2 and 4 outer wall contacts of second pipeline, can be at the transformation in-process, avoid heating zone 5 landing (rubber thermal expansion, increase and the frictional force between first pipeline 2 and the second pipeline 4).

Claims (4)

1. The utility model provides a vacuum pipe-line system that possesses combination heating vacuum pipe, includes process cavity (1), first pipeline (2), pump (3), second pipeline (4) and exhaust-gas treatment equipment, its characterized in that: the outer wall positions of the first pipeline (2) and the second pipeline (4) are coated with heating kits.
2. The vacuum piping system with combined heated vacuum piping as set forth in claim 1, wherein: the heating external member includes heating band (5) and magic subsides (6) that set up to be used for fixed heating band (5) on heating band (5), heating band (5) are including zone of heating (502) that are located coating (501) and coating (501) of back one side front right side, magic subsides (6) are including fixed setting on coating (501) and are located first bonding portion (601) of zone of heating (502) left side position and are located second bonding portion (602) of coating (501) back right side position.
3. The vacuum piping system with combined heated vacuum piping as set forth in claim 2, wherein: and anti-slip strips (7) are arranged on one side of the front surface of the heating belt (5) at equal intervals.
4. The vacuum piping system with combined heated vacuum piping as set forth in claim 3, wherein: the anti-slip strips (7) are made of rubber materials.
CN202121946259.7U 2021-08-18 2021-08-18 Vacuum pipeline system with combined heating vacuum pipeline Active CN216131051U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202121946259.7U CN216131051U (en) 2021-08-18 2021-08-18 Vacuum pipeline system with combined heating vacuum pipeline

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202121946259.7U CN216131051U (en) 2021-08-18 2021-08-18 Vacuum pipeline system with combined heating vacuum pipeline

Publications (1)

Publication Number Publication Date
CN216131051U true CN216131051U (en) 2022-03-25

Family

ID=80770544

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202121946259.7U Active CN216131051U (en) 2021-08-18 2021-08-18 Vacuum pipeline system with combined heating vacuum pipeline

Country Status (1)

Country Link
CN (1) CN216131051U (en)

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