CN216120192U - Grid fixing device, grid structure and radio frequency ion source - Google Patents
Grid fixing device, grid structure and radio frequency ion source Download PDFInfo
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- CN216120192U CN216120192U CN202122729063.9U CN202122729063U CN216120192U CN 216120192 U CN216120192 U CN 216120192U CN 202122729063 U CN202122729063 U CN 202122729063U CN 216120192 U CN216120192 U CN 216120192U
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Abstract
The application relates to a grid fixing device, a grid structure and a radio frequency ion source; the grid fixing device is applied to a grid structure of a radio frequency ion source, each grid of the grid structure is fixed through a fastener and an insulating part, the fastener and the grid are insulated and isolated through the insulating part, a protective cap is arranged outside the insulating part, and the cap edge of the protective cap is fixedly connected with the grid so that the insulating part and the outside form space isolation; according to the technical scheme, the protective cap is arranged outside the insulating part for insulating and isolating the grid mesh and the fastener, the insulating part is isolated from the outside by using the protective cap, the insulating part is protected in a difficult area of coating deposition, the short circuit condition between the grid meshes is avoided, and the stable work of the radio frequency ion source is ensured.
Description
Technical Field
The application relates to the technical field of ion sources, in particular to a grid fixing device, a grid structure and a radio frequency ion source.
Background
The radio frequency ion source is a common ion source, and mainly generates plasma through radio frequency ionization, and then is accelerated through a grid electric field, so that positive ions are accelerated to generate ion beams; the radio frequency ion source ionizes gas through radio frequency, and has the characteristics of long continuous working time, no material consumption and small heat productivity.
The conventional radio frequency ion source is generally used in a non-metal working environment, but in a coating process, because a large amount of metal particles are generated in the coating environment, the outer surface of insulating ceramic between grid meshes is easily polluted, if a metal film layer is coated, a short circuit fault can be caused, and even the radio frequency ion source cannot work normally.
SUMMERY OF THE UTILITY MODEL
The present application aims to solve one of the above technical defects, and provides a grid fixing device, a grid structure and a radio frequency ion source, so as to ensure stable operation of the radio frequency ion source.
A grid fixing device is applied to a grid structure of a radio frequency ion source, each grid of the grid structure is fixed through a fastener and an insulating part, the fastener and the grid are isolated in an insulating mode through the insulating part, a protective cap is arranged outside the insulating part, and the cap edge of the protective cap is fixedly connected with the grid, so that the insulating part is isolated from the outside in a space.
In one embodiment, the grid structure comprises a deceleration grid, an acceleration grid and a screen grid;
the fastener comprises a first bolt and a first nut; the deceleration grid, the acceleration grid and the screen grid are fixed through the first bolt, the first nut and the insulating part.
In one embodiment, the protective cap comprises an upper protective cap and a lower protective cap;
the edge of the upper protective cap is fixedly connected with the deceleration grid, and the edge of the lower protective cap is fixedly connected with the screen grid.
In one embodiment, the insulator comprises a first insulator, a second insulator, and a third insulator;
the first insulating part is arranged between the head of the first bolt and the upper protective cap, the second insulating part is arranged between the upper protective cap and the accelerating grid, the third insulating part is arranged between the accelerating grid and the lower protective cap, and the first nut is fixed below the lower protective cap.
In one embodiment, the upper protective cap is mounted outside the first insulator such that the first insulator is isolated from an external space; and the lower protective cap is installed outside the third insulating member such that the third insulating member is isolated from an external space.
In one embodiment, the protective cap is a circular metal cap.
In one embodiment, the brim of the protective cap is provided with screw holes, and the screw holes corresponding to the grid mesh are fixed through second bolts and second nuts.
In one embodiment, the insulator is a cylindrical insulating ceramic.
A grid structure comprises a grid and a plurality of grid fixing devices; wherein, the grid is fixed by the grid fixing device.
The utility model provides a radio frequency ion source, is including the discharge cavity body of connecting the air supply line, locates the radio frequency coil outside the discharge cavity body, locates the anterior grid structure as above-mentioned of discharge cavity body.
According to the grid mesh fixing device, the grid mesh structure and the radio frequency ion source, the protective cap is arranged outside the insulating part for insulating and isolating the grid mesh and the fastening piece, the insulating part is isolated from the outside by forming a space by using the protective cap, the insulating part is protected in a difficult area for coating deposition, the short circuit condition between the grid meshes is avoided, and the stable work of the radio frequency ion source is ensured.
Additional aspects and advantages of the present application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the present application.
Drawings
The foregoing and/or additional aspects and advantages of the present application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
FIG. 1 is an external view of an exemplary RF ion source;
FIG. 2 is a schematic diagram of an exemplary grid structure;
FIG. 3 is a cross-sectional view of an exemplary RF ion source;
FIG. 4 is a schematic diagram of a grid structure of an embodiment;
FIG. 5 is a cross-sectional view of a grid structure of an embodiment;
fig. 6 is a schematic structural diagram of a grid fixing device according to an embodiment.
Detailed Description
Reference will now be made in detail to embodiments of the present application, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present application and are not to be construed as limiting the present application.
Referring to fig. 1, fig. 1 is an external view of an exemplary rf ion source, which employs a circular housing structure 100, a discharge chamber 10 is built in, and a grid structure 20 is disposed at the front of the discharge chamber 10.
Referring to fig. 2, fig. 2 is a schematic diagram of an exemplary grid structure 20, the grid structure 20 including a deceleration grid 21, an acceleration grid 22, and a screen 23, wherein the circle is a region where the grid is susceptible to contamination, and some grids of the rf ion source include the acceleration grid 22 and the screen 23.
Referring to fig. 3, fig. 3 is a cross-sectional view of an exemplary rf ion source in which the outer surface of the insulator 30 between the acceleration grid 22 and the deceleration grid 21 and between the acceleration grid 22 and the screen grid 23 is contaminated, which may lead to short circuit failure if plated with a metal film.
Referring to fig. 4 and 5, fig. 4 is a schematic view of an embodiment of the grid structure 20, and fig. 5 is a cross-sectional view of an embodiment of the grid structure 20; each grid of the grid structure 20 is fixed by a grid fixing device, and the outer surface of the insulating part 30 of the grid structure 20 can be protected from being polluted, a metal film layer is prevented from being plated, and short-circuit faults are avoided.
An embodiment of the grid fixing device is described in detail below, taking the grid structure of fig. 2 as an example; referring to fig. 6, fig. 6 is a schematic structural diagram of a grid fixing device of an embodiment, which is applied to a grid structure 20 of an rf ion source, and the grid includes a deceleration grid 21, an acceleration grid 22 and a screen grid 23; each grid of the grid structure 20 is fixed by a fastener 50 and an insulating member 30, the fastener 50 and the grid are insulated and isolated by the insulating member 30, a protective cap 40 is arranged outside the insulating member 30, and a cap edge 40a of the protective cap 40 is fixedly connected with the grid, so that the insulating member 30 is isolated from the outside in space; preferably, the protective cap 40 is a metal cap with a circular cap rim 40a, the metal material can be adapted to a high-temperature and high-corrosion environment, the insulating member 30 is made of a cylindrical insulating ceramic, and the ceramic material has the characteristics of high temperature resistance and corrosion resistance.
As illustrated, the fastener 50 may include a first bolt 51 and a first nut 52, i.e., a bolt-and-nut connection; in practical application, other fixed connection modes may also be adopted, and are not described in detail herein. The deceleration grid 21, the acceleration grid 22 and the screen 23 in the grid mesh are fixed through a first bolt 51, a first nut 52 and an insulating part 30; the protective cap 40 includes an upper protective cap 41 and a lower protective cap 42; wherein the edge of the upper protective cap 41 is fixedly connected with the speed reducing grid 21, and the edge of the lower protective cap 42 is fixedly connected with the screen 23; preferably, the insulating member 30 includes a first insulating member 31, a second insulating member 32, and a third insulating member 33; the first insulating member 31 is disposed between the head 51a of the first bolt 51 and the upper protective cap 41, the second insulating member 32 is disposed between the upper protective cap 41 and the acceleration grid 22, the third insulating member 33 is disposed between the acceleration grid 22 and the lower protective cap 42, and the first nut 52 fixes the lower protective cap 42. The upper shield cap 41 is installed outside the first insulating member 31 such that the first insulating member 31 is isolated from an external space; the lower protective cap 42 is installed outside the third insulating member 33 such that the third insulating member 33 is isolated from the external space.
In the above technical solution, the first insulating member 31 can ensure the insulation between the head 51a of the first bolt 51 and the upper protection cap 41, and the second insulating member 32 can ensure the insulation between the upper protection cap 41 and the acceleration grid 22, and since the upper protection cap 41 is fixedly connected to the deceleration grid 21, the upper protection cap 41 can be fixed by the first insulating member 31 and the second insulating member 32, so as to fix the deceleration grid 21; the acceleration grid 22 is fixed by the second insulating member 32 and the third insulating member 33; since the lower protective cap 42 is fixedly connected with the screen 23, the lower protective cap 42 is fixed through the first nut 52 and the third insulating member 33, so as to fix the screen 23; the upper protective cap 41 covers the second insulating part 32, so that the second insulating part 32 is prevented from being polluted, and a metal film layer is prevented from being plated, so that short-circuit faults between the deceleration grid 21 and the acceleration grid 22 are avoided; the lower protective cap 42 covers the third insulating member 33, so that the third insulating member 33 is protected from being contaminated, and a metal film layer is prevented from being plated, thereby preventing a short-circuit fault between the acceleration grid 22 and the screen grid 23.
Preferably, as shown in fig. 4-6, screw holes may be provided on the brim 40a of the upper protective cap 41 and the lower protective cap 42, and the screw holes corresponding to the reduction grid 21 and the screen grid 23 pass through the second bolts 60a and the second nuts 60b, wherein the number of the second bolts 60a and the second nuts 60b is determined according to the requirement; of course, the brim 40a may also be fixedly connected to the deceleration grid 21 and the screen 23 by welding, which is not described herein again.
An example of a grid structure is set forth below.
As shown in fig. 2-5, the grid structure 20 of the present application may include a plurality of grids and grid securing means; wherein each grid fixing device is used for fixing, as shown in the figure example, the grid 20 comprises a deceleration grid 21, an acceleration grid 22 and a screen grid 23, and each grid is fixed by the grid fixing device arranged along the edge; it should be noted that, the number of the grid fixing devices may be determined according to the requirement in practical application.
The grid structure 20 of the above embodiment is fixed by the grid fixing device of the above embodiment, so that the insulating member 30 is protected in a hard region where film deposition is difficult, a short circuit condition between grids is avoided, and stable operation of the radio frequency ion source is ensured.
Embodiments of the rf ion source are described below.
As shown in fig. 1-3, the rf ion source of the present application includes a discharge chamber 10 connected to an air supply pipeline 11, an rf coil 12 disposed outside the discharge chamber 10, and a grid structure 20 disposed in front of the discharge chamber 10; the grid structure 20 is fixed by the grid fixing device which is innovatively designed, so that the short circuit condition between grids can be avoided, and the stable work of the radio frequency ion source is ensured.
It should be noted that the technical solution of the present application is applicable to rf ion sources with various shapes, such as a circular rf ion source, a bar rf ion source or other rf ion sources with other shapes, and the basic principle thereof is consistent with the above embodiments, and therefore, the details are not repeated herein.
It will be understood by those within the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
The foregoing is only a partial embodiment of the present application, and it should be noted that, for those skilled in the art, several modifications and decorations can be made without departing from the principle of the present application, and these modifications and decorations should also be regarded as the protection scope of the present application.
Claims (10)
1. A grid fixing device is applied to a grid structure (20) of a radio frequency ion source, each grid of the grid structure (20) is fixed through a fastener (50) and an insulating piece (30), the fastener (50) and the grid are insulated and isolated through the insulating piece (30), the grid fixing device is characterized in that a protective cap (40) is arranged outside the insulating piece (30), and a cap edge (40a) of the protective cap (40) is fixedly connected with the grid, so that the insulating piece (30) is isolated from the outside in a space.
2. A grid fixing device according to claim 1, characterized in that the grid structure (20) comprises a deceleration grid (21), an acceleration grid (22) and a screen grid (23);
the fastener (50) comprises a first bolt (51) and a first nut (52); the deceleration grid (21), the acceleration grid (22) and the screen grid (23) are fixed through a first bolt (51), a first nut (52) and the insulating piece (30).
3. A grid fixing device according to claim 2, characterized in that the protective cap (40) comprises an upper protective cap (41) and a lower protective cap (42);
the edge of the upper protective cap (41) is fixedly connected with the speed reducing grating (21), and the edge of the lower protective cap (42) is fixedly connected with the screen grating (23).
4. A grid fixing device according to claim 3, wherein the insulation (30) comprises a first insulation (31), a second insulation (32) and a third insulation (33);
the first insulating piece (31) is arranged between the head (51a) of the first bolt (51) and the upper protective cap (41), the second insulating piece (32) is arranged between the upper protective cap (41) and the acceleration grid (22), the third insulating piece (33) is arranged between the acceleration grid (22) and the lower protective cap (42), and the first nut (52) is fixed below the lower protective cap (42).
5. A grid fixing device according to claim 4, characterized in that the upper protective cap (41) is mounted outside the first insulating member (31) so that the first insulating member (31) is isolated from the outside space; and the lower protective cap (42) is installed outside the third insulating member (33) such that the third insulating member (33) is isolated from an external space.
6. A grid fixing device according to any of claims 1-5, characterized in that the protective cap (40) is a circular metal cap.
7. The grid fixing device according to claim 6, wherein the brim (40a) of the protective cap (40) is provided with screw holes, and the screw holes corresponding to the grid are passed through the second bolt (60a) and the second nut (60 b).
8. A grid fixing device according to claim 1, characterized in that the insulating member (30) is a cylindrical insulating ceramic.
9. A grid construction comprising a grid and a plurality of grid fastening devices as claimed in any one of claims 1 to 8; wherein, the grid is fixed by the grid fixing device.
10. A radio frequency ion source, comprising a discharge chamber (10) connected to a gas supply line (11), a radio frequency coil (12) arranged outside the discharge chamber (10), and a grid structure (20) according to claim 9 arranged in front of the discharge chamber (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122729063.9U CN216120192U (en) | 2021-11-09 | 2021-11-09 | Grid fixing device, grid structure and radio frequency ion source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122729063.9U CN216120192U (en) | 2021-11-09 | 2021-11-09 | Grid fixing device, grid structure and radio frequency ion source |
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| Publication Number | Publication Date |
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| CN216120192U true CN216120192U (en) | 2022-03-22 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202122729063.9U Active CN216120192U (en) | 2021-11-09 | 2021-11-09 | Grid fixing device, grid structure and radio frequency ion source |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116798844A (en) * | 2023-08-29 | 2023-09-22 | 江苏鹏举半导体设备技术有限公司 | Ion generating device and particle removing method |
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2021
- 2021-11-09 CN CN202122729063.9U patent/CN216120192U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116798844A (en) * | 2023-08-29 | 2023-09-22 | 江苏鹏举半导体设备技术有限公司 | Ion generating device and particle removing method |
| CN116798844B (en) * | 2023-08-29 | 2023-11-10 | 江苏鹏举半导体设备技术有限公司 | Ion generating device and particle removing method |
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