CN216118384U - Vertical moving platform and laser direct-writing type photoetching equipment comprising same - Google Patents

Abstract

The utility model discloses a vertical moving platform and laser direct-writing photoetching equipment comprising the same, wherein the vertical moving platform comprises: a stand assembly; the adjusting seat is arranged on the base assembly; the first verticality adjusting device comprises an upper adjusting assembly and a lower adjusting assembly, wherein the upper adjusting assembly and the lower adjusting assembly are arranged on the base assembly, the upper adjusting assembly can adjust the front and back positions of the upper part of the adjusting seat, and the lower adjusting assembly can adjust the front and back positions of the lower part of the adjusting seat; the second verticality adjusting device comprises a left adjusting component and a right adjusting component, the left adjusting component and the right adjusting component are arranged on the base component, the left adjusting component can adjust the upper and lower positions of the left side part of the adjusting seat, and the right adjusting component can adjust the upper and lower positions of the right side part; and the lifting device is arranged on the adjusting seat and is provided with a mobile platform capable of moving up and down. The vertical moving platform and the laser direct-writing type photoetching equipment comprising the same can adjust the verticality.

Description

Vertical moving platform and laser direct-writing type photoetching equipment comprising same

Technical Field

The utility model relates to processing equipment, in particular to a vertical moving platform and laser direct-writing type photoetching equipment comprising the same.

Background

The existing various processing devices with Z-axis motion need to be applied to a vertical moving platform. The vertical moving platform generally comprises a machine base assembly and a lifting device, wherein the machine base assembly is provided with a working plane for placing a workpiece to be machined, the lifting device is arranged on the machine base assembly, the lifting device is provided with a moving platform capable of vertically moving up and down, and a mechanism for specifically implementing machining is arranged on the moving platform, so that the Z-axis machining of the workpiece is realized. For the occasions with high precision requirements, such as laser direct writing type photoetching equipment, the precision of the existing vertical moving platform cannot meet higher requirements.

SUMMERY OF THE UTILITY MODEL

The present invention is directed to solving at least one of the problems of the prior art. Therefore, the utility model provides a vertical moving platform which can adjust the verticality.

The utility model also provides laser direct writing type photoetching equipment with the vertical moving platform.

According to a first aspect embodiment of the utility model, a vertical motion platform comprises: a stand assembly; the adjusting seat is arranged on the base assembly; the first verticality adjusting device comprises an upper adjusting assembly and a lower adjusting assembly, the upper adjusting assembly and the lower adjusting assembly are arranged on the base assembly, the upper adjusting assembly can adjust the front and back positions of the upper part of the adjusting seat, and the lower adjusting assembly can adjust the front and back positions of the lower part of the adjusting seat; the second verticality adjusting device comprises a left adjusting component and a right adjusting component, the left adjusting component and the right adjusting component are arranged on the base component, the left adjusting component can adjust the upper and lower positions of the left side part of the adjusting seat, and the right adjusting component can adjust the upper and lower positions of the right side part; and the lifting device is arranged on the adjusting seat and is provided with a mobile platform capable of moving up and down.

The vertical moving platform provided by the embodiment of the utility model at least has the following beneficial effects: the vertical moving platform adjusts the front and back positions of the upper part and the lower part of the adjusting seat through the upper adjusting component and the lower adjusting component of the first verticality adjusting device, so that the verticality of the adjusting seat in the front and back directions can be adjusted; the upper and lower positions of the left and right side parts of the adjusting seat can be adjusted through the left adjusting component and the right adjusting component of the second perpendicularity adjusting device, so that the perpendicularity of the adjusting seat in the left and right directions can be adjusted; and the lifting device for realizing vertical lifting is integrally arranged on the adjusting seat, and the perpendicularity of the adjusting seat in the front-back and left-right directions is indirectly adjusted, so that the perpendicularity of the mobile station during up-down lifting can be adjusted, and the processing precision can be improved.

According to some embodiments of the present invention, the upper adjusting assembly and the lower adjusting assembly are respectively disposed corresponding to an upper portion and a lower portion of the adjusting seat, the upper adjusting assembly and the lower adjusting assembly each include a pushing member and a pulling member, the base assembly is provided with a fixed vertical plate, the fixed vertical plate is provided with a first threaded hole, a hole axis of the first threaded hole is disposed along a front-back direction, the pushing member is connected to the first threaded hole in a threaded manner, one end of the pushing member is opposite to the adjusting seat, the pushing member has a sleeve hole, a hole axis of the sleeve hole is disposed along the front-back direction, the pulling member is inserted into the sleeve hole, the adjusting seat is provided with a second threaded hole opposite to the sleeve hole, one end of the pulling member is connected to the second threaded hole in a threaded manner, and the other end of the pulling member is provided with an abutting portion, the abutting part can abut against the other end of the pushing part.

According to some embodiments of the utility model, the pushing member is connected with a fastening nut, and the fastening nut is connected to the periphery of the pushing member in a threaded manner and can abut against the fixed vertical plate.

According to some embodiments of the utility model, the upper adjustment assembly and/or the lower adjustment assembly are arranged in at least two sets in a left-right direction.

According to some embodiments of the utility model, the left adjustment assembly and the right adjustment assembly each comprise a pusher and a positioning mechanism; a pushing matching part is arranged on the lower side of the adjusting seat, the pushing matching part is provided with a left matching part and a right matching part, and the left matching part and the right matching part are respectively matched with the pushing blocks in the left adjusting assembly and the right adjusting assembly correspondingly; the pushing block can be movably arranged on the base assembly along the left-right direction, the left matching part and/or the corresponding pushing block is provided with an inclined plane part, and the left matching part is jacked up or made to descend by the inclined plane part when the pushing block corresponding to the left matching part moves; the right matching part and/or the corresponding pushing block is/are provided with an inclined surface part, and the right matching part is pushed up or made to descend by the inclined surface part when the pushing block corresponding to the right matching part moves; the positioning mechanism is arranged on the machine base assembly and can position the corresponding pushing block.

According to some embodiments of the present invention, the base assembly is provided with a fixed vertical plate, the left upper portion and the right upper portion of the fixed vertical plate are provided with pressing members, the pressing members are connected to the fixed vertical plate in a threaded manner and can adjust positions in an up-down direction, an end portion of the pressing member disposed on the left upper portion of the fixed vertical plate can abut against the left upper end surface of the adjusting seat, and an end portion of the pressing member disposed on the right upper portion of the fixed vertical plate can abut against the right upper end surface of the adjusting seat.

According to some embodiments of the present invention, the positioning mechanism includes a fixing seat and a limiting member, the fixing seat is fixedly disposed on the base assembly, the limiting member is screwed to the fixing seat along the left-right direction, and one end of the limiting member can be in abutting fit with one side of the pushing block away from the inclined plane portion; the ejector pad is provided with a strip hole extending along the left-right direction, the positioning mechanism further comprises a locking piece, the locking piece penetrates through the strip hole and is connected to the machine base assembly, the ejector pad can pass through the strip hole and is opposite to the locking piece to move left and right, and the locking piece can lock the ejector pad in the machine base assembly.

According to some embodiments of the present invention, the adjusting base further comprises an auxiliary fixing member, wherein the auxiliary fixing member can lock the adjusting base and the base assembly together.

According to some embodiments of the utility model, the lifting device comprises the mobile station, a connecting seat and an upper and lower driver, the connecting seat is arranged on the adjusting seat, the mobile station is movably arranged on the connecting seat and can move up and down relative to the connecting seat, and the upper and lower driver is connected with the connecting seat and can drive the mobile station to move up and down; the connecting seat is configured as an air floatation guide rail, and the moving platform is configured as a moving block assembly matched with the air floatation guide rail; the upper driver and the lower driver are configured into linear motors, the linear motors are fixed on the connecting seats, and the rotors of the linear motors are connected with the mobile platform; the lifting device also comprises an air cylinder auxiliary mechanism, and the air cylinder auxiliary mechanism comprises an air cylinder, a butting seat and a push plate assembly; the air cylinder is vertically arranged on the connecting seat, the abutting seat is arranged at the end part of an air cylinder rod of the air cylinder, the push plate component comprises a push plate, a left connecting plate and a right connecting plate, the push plate is positioned on the upper side of the abutting seat and can abut against the abutting seat, the upper part of the left connecting plate is connected with the left side of the push plate, the lower part of the left connecting plate is connected with the left side of the moving table, the upper part of the right connecting plate is connected with the right side of the push plate, and the lower part of the right connecting plate is connected with the right side of the moving table; the pushing plate is provided with a pushing plate, and the pushing plate is matched with the pushing seat in a pushing mode through the pushing seat.

According to a second aspect of the utility model, an embodiment of the laser direct write lithography apparatus comprises any of the above-described vertically moving stages.

The laser direct-writing type photoetching equipment provided by the embodiment of the utility model has the following beneficial effects: due to the adoption of the vertical moving platform, the verticality of the vertically moving platform can be adjusted, so that the processing precision can be improved.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the utility model.

Drawings

The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:

FIG. 1 is a perspective view of an embodiment of the present invention;

FIG. 2 is an exploded view of the structure shown in FIG. 1;

FIG. 3 is a partial block diagram of an embodiment of the present invention;

FIG. 4 is a schematic half-section view of an embodiment of the present invention;

FIG. 5 is an enlarged view of FIG. 4 at A;

FIG. 6 is a schematic perspective view of the lifting device removed according to the embodiment of the present invention;

FIG. 7 is an enlarged view of FIG. 6 at B;

fig. 8 is a schematic perspective view of a lifting device according to an embodiment of the present invention.

Reference numerals:

the base assembly 100, the fixed vertical plate 110 and the first threaded hole 111;

an adjusting seat 200, a second threaded hole 210, a pushing matching part 220, a left matching part 221 and a right matching part 222;

the device comprises a first verticality adjusting device 300, an upper adjusting component 310, a lower adjusting component 320, a pushing component 330, a sleeving hole 331, a pulling component 340, a butting component 341 and a fastening nut 350;

the second perpendicularity adjusting device 400, the left adjusting assembly 410, the right adjusting assembly 420, the pushing block 430, the strip hole 431, the positioning mechanism 440, the fixing seat 441, the limiting piece 442, the locking piece 443 and the jacking piece 450;

the lifting device 500, the mobile station 510, the connecting seat 520, the up-down driver 530, the air cylinder 540, the abutting seat 550, the push plate assembly 560, the push plate 561, the left connecting plate 562 and the right connecting plate 563;

the auxiliary fixing member 600.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.

In the description of the present invention, it should be understood that the orientation or positional relationship referred to in the description of the orientation, such as the upper, lower, front, rear, left, right, etc., is based on the orientation or positional relationship shown in the drawings, and is only for convenience of description and simplification of description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.

In the description of the present invention, the meaning of a plurality of means is one or more, the meaning of a plurality of means is two or more, and larger, smaller, larger, etc. are understood as excluding the number, and larger, smaller, inner, etc. are understood as including the number. If the first and second are described for the purpose of distinguishing technical features, they are not to be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.

In the description of the present invention, unless otherwise explicitly limited, terms such as arrangement, installation, connection and the like should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above terms in the present invention in combination with the specific contents of the technical solutions.

Referring to fig. 1 to 2, a vertical moving platform includes: the device comprises a stand assembly 100, an adjusting seat 200, a first verticality adjusting device 300, a second verticality adjusting device 400 and a lifting device 500. The adjusting base 200 is disposed on the base assembly 100. The first verticality adjusting apparatus 300 includes an upper adjusting assembly 310 and a lower adjusting assembly 320, the upper adjusting assembly 310 and the lower adjusting assembly 320 are disposed on the base assembly 100, the upper adjusting assembly 310 can adjust the front and rear positions of the upper portion of the adjusting base 200, and the lower adjusting assembly 320 can adjust the front and rear positions of the lower portion of the adjusting base 200. The second verticality adjusting device 400 comprises a left adjusting component 410 and a right adjusting component 420, wherein the left adjusting component 410 and the right adjusting component 420 are arranged on the base component 100, the left adjusting component 410 can adjust the upper and lower positions of the left side part of the adjusting base 200, and the right adjusting component 420 can adjust the upper and lower positions of the right side part. The elevating device 500 is installed on the adjusting base 200, and the elevating device 500 has a movable stage 510 that can move up and down.

The vertical moving platform adjusts the front and rear positions of the upper and lower parts of the adjusting base 200 through the upper adjusting component 310 and the lower adjusting component 320 of the first verticality adjusting device 300, so that the verticality of the adjusting base 200 in the front and rear directions can be adjusted; the left adjusting component 410 and the right adjusting component 420 of the second verticality adjusting device 400 can adjust the upper and lower positions of the left and right sides of the adjusting seat 200, so that the verticality of the adjusting seat 200 in the left and right directions can be adjusted; the lifting device 500 for realizing vertical lifting is integrally arranged on the adjusting base 200, and the perpendicularity of the moving platform 510 in the vertical lifting process can be adjusted by indirectly adjusting the perpendicularity of the adjusting base 200 in the front-back and left-right directions, so that the processing precision can be improved.

Referring to fig. 3 to 5, in an embodiment, the upper adjusting assembly 310 and the lower adjusting assembly 320 are respectively disposed corresponding to an upper portion and a lower portion of the adjusting seat 200, each of the upper adjusting assembly 310 and the lower adjusting assembly 320 includes a pushing member 330 and a pulling member 340, the base assembly 100 is provided with a fixed vertical plate 110, the fixed vertical plate 110 is provided with a first threaded hole 111, a hole axis of the first threaded hole 111 is disposed along a front-back direction, the pushing member 330 is threadedly connected to the first threaded hole 111, one end of the pushing member 330 is opposite to the adjusting seat 200, the pushing member 330 has a socket hole 331, a hole axis of the socket hole 331 is disposed along the front-back direction, the pulling member 340 is inserted into the socket hole 331, the adjusting seat 200 is provided with a second threaded hole 210 opposite to the socket hole 331, one end of the pulling member 340 is threadedly connected to the second threaded hole 210, the other end of the pulling member 340 is provided with an abutting portion 341, and the abutting portion 341 can abut against the other end of the pushing member 330. It should be understood that, in the description of the present invention, the upper and lower adjustment assemblies 310 and 320 are respectively disposed corresponding to the upper and lower portions of the adjustment base 200, which means that the upper and lower adjustment assemblies 310 and 320 are respectively engaged with the upper and lower portions of the adjustment base 200 and adjust the front and rear positions thereof, and particularly, in the embodiment of the upper and lower adjustment assemblies 310 and 320, that is, one end of the push-up member 330 of the upper adjustment assembly 310 is opposite to the upper portion of the adjustment base 200, and the push-up member 330 of the lower adjustment assembly 320 is opposite to the lower portion of the adjustment base 200.

Referring to fig. 5, when the front and rear positions of the lower portion of the adjusting seat 200 are to be adjusted, the pushing member 330 of the lower adjusting assembly 320 is rotated to move forward to adjust the position by the threaded connection with the first threaded hole 111, and one end of the pushing member 330 pushes the adjusting seat 200 to move forward to adjust the position; if the position of the lower part of the adjusting seat 200 is to be adjusted backwards, the pushing part 330 is rotated reversely to adjust the position backwards (the pulling part 340 can be rotated to move the pushing part 330 backwards at the same time), so that the lower part of the adjusting seat 200 is moved backwards by a corresponding distance and the other end of the pushing part 330 is moved backwards, the pulling part 340 is rotated to be connected with the second threaded hole 210 by the threads of the second threaded hole 210, the abutting part 341 of the pulling part 340 abuts against the other end of the pushing part 330, the pulling part 340 is rotated continuously, the pulling part 340 pulls the adjusting seat 200 backwards by the threads of the connecting part, and the backward adjustment of the lower part of the adjusting seat 200 is realized. The adjustment of the upper position of the adjustment base 200 is performed by rotating the pushing member 330 and the pulling member 340 of the upper adjustment assembly 310 in the same manner as described above. The upper adjusting component 310 and the lower adjusting component 320 adopting the structure have simple structure, adopt thread adjustment and have higher adjusting precision. In other embodiments, the upper adjusting assembly 310 and the lower adjusting assembly 320 may also adopt other adjusting structures without being limited to the above-mentioned embodiments, for example, two pairs of bolts are provided corresponding to the upper portion and the lower portion of the adjusting base 200 respectively, the two pairs of bolts are located at the front and rear sides of the adjusting base 200 respectively, the ends of the two pairs of bolts are opposite to the front side and the rear side of the adjusting base 200, and the front and rear positions of the corresponding portion (upper portion or lower portion) of the adjusting base 200 are adjusted by adjusting the front and rear positions of the two pairs of bolts. It is understood that there are many mechanisms for adjusting the forward and backward positions of the members in the art, and those skilled in the art can select the adjustment according to the actual situation.

In the embodiment, the pull-back member 340 is embodied as a bolt, and the principle of pulling back the adjustment base 200 is equivalent to the process of fastening the bolt. After the upper and lower portions of the adjustment seat 200 are adjusted in position, the positions of the upper and lower portions of the adjustment seat 200 may also be fixed by tightening the pull-back member 340. In one embodiment, the pushing member 330 is embodied as a hollow bolt having external threads.

In an embodiment, the pushing member 330 is connected with a fastening nut 350, and the fastening nut 350 is screwed on the outer circumference of the pushing member 330 and can be abutted against the fixed vertical plate 110. When the position of the pushing member 330 is adjusted, the fastening nut 350 can be tightened to further fasten the pushing member 330 to the fixed vertical plate 110, so as to keep the position of the pushing member 330 stable and have a locking effect. Specifically, the fastening nut 350 may be screwed to one end of the pushing member 330 exposed out of the fixed vertical plate 110, and when the pushing member 330 needs to be fastened, the fastening nut 350 is screwed toward the fixed vertical plate 110.

In the embodiment, the upper adjusting members 310 are provided in two sets in the left-right direction, so that the front-rear positions of the left and right side portions of the adjusting base 200 can be adjusted by the upper adjusting members 310, and the function of adjusting the position of the adjusting base 200 is added. In other embodiments, the lower adjustment assembly 320 may be provided with two sets or the upper adjustment assembly 310 and the lower adjustment assembly 320 may be provided with two sets at the same time, which can also achieve the above-mentioned functions. Meanwhile, the number of the upper adjusting assembly 310 and the lower adjusting assembly 320 is not limited to two, and may be two or more, and those skilled in the art may set the number according to actual situations.

Referring to fig. 6, in an embodiment, the left and right adjustment assemblies 410 and 420 each include a push block 430 and a positioning mechanism 440; the pushing matching part 220 is arranged at the lower side of the adjusting seat 200, the pushing matching part 220 is provided with a left matching part 221 and a right matching part 222, and the left matching part 221 and the right matching part 222 are correspondingly matched with the pushing blocks 430 in the left adjusting assembly 410 and the right adjusting assembly 420 respectively; the pushing block 430 is movably disposed on the base assembly 100 in the left-right direction, the left mating portion 221 and the corresponding pushing block 430 are both provided with an inclined surface portion, and the pushing block 430 corresponding to the left mating portion 221 is moved to lift the left mating portion 221 through the inclined surface portion or to lower the left mating portion 221; the right matching part 222 and the corresponding pushing block 430 are both provided with an inclined surface part, and the pushing block 430 corresponding to the right matching part 222 pushes up the right matching part 222 or enables the right matching part 222 to descend through the inclined surface part when moving; the positioning mechanism 440 is disposed on the base assembly 100 and can position the corresponding pushing block 430.

When the left side of the adjusting seat 200 needs to move upward to the adjusting position, the pushing block 430 corresponding to the left matching part 221 is moved, and the pushing block 430 pushes up the left matching part 221 through the inclined plane part, so that the left side of the adjusting seat 200 is pushed up; when the left side of the adjusting seat 200 needs to be moved downwards to adjust the position, the inclined plane structure is adopted to realize jacking, so that when the jacking block 430 is moved reversely, the left matching part 221 and the left side of the adjusting seat 200 can be lowered under the action of self weight. The positioning mechanism 440 may be used to position the ejector block 430 so as to maintain the adjusted position of the adjustment base 200. Similarly, when the up-down position of the right side portion of the adjusting base 200 is adjusted, the adjustment can be performed by the pushing block 430 corresponding to the right matching portion 222. The left adjusting component 410 and the right adjusting component 420 with the structure are simple in structure and convenient to implement. Of course, it is conceivable that the left and right adjusting assemblies 410 and 420 may have other structures without being limited to the above-mentioned embodiments, for example, two bolts corresponding to the left and right lower sides of the adjusting base 200 are provided, the bolts are vertically screwed to the base assembly 100, the lower portion of the adjusting base 200 is abutted by the end portions of the bolts, and the left and right side portions of the adjusting base 200 are abutted and lowered by the bolts when the bolts are rotated. There are many mechanisms in the art for implementing the adjustment of the up-down position of the member, and those skilled in the art can select the adjustment according to the actual situation.

In an embodiment, the left mating portion 221 and the corresponding ejector 430, the right mating portion 222 and the corresponding ejector 430 are each provided with a beveled portion and are correspondingly snug-fit. Of course, it is conceivable that an inclined surface portion may be provided on one of the left fitting portion 221 and the corresponding pushing block 430, and one of the right fitting portion 222 and the corresponding pushing block 430, and when the pushing block 430 moves left and right, the other member slides on the inclined surface portion, and the left fitting portion 221 or the right fitting portion 222 may be lifted.

In an embodiment, the base assembly 100 is provided with the fixed vertical plate 110, the top pressing members 450 are disposed on the upper left portion and the upper right portion of the fixed vertical plate 110, the top pressing members 450 are screwed to the fixed vertical plate 110 and can adjust positions in the vertical direction, an end portion of the top pressing member 450 disposed on the upper left portion of the fixed vertical plate 110 can abut against an upper left end surface of the adjusting seat 200, and an end portion of the top pressing member 450 disposed on the upper right portion of the fixed vertical plate 110 can abut against an upper right end surface of the adjusting seat 200. When the up-and-down position of the left and right side parts of the adjusting base 200 is adjusted, the left and right side parts of the adjusting base 200 can be pressed by the pressing member 450, so that the position of the adjusting base 200 is pressed tightly, and the position of the adjusting base 200 can be adjusted better. In an embodiment, the pressing member 450 may be a bolt.

In an embodiment, the positioning mechanism 440 includes a fixing base 441 and a limiting member 442, the fixing base 441 is fixedly disposed on the base assembly 100, the limiting member 442 is threadedly connected to the fixing base 441 along the left-right direction, and one end of the limiting member 442 can be abutted against and matched with one side of the pushing block 430 far away from the inclined surface portion. When the pushing block 430 is adjusted, the pushing block 430 can be adjusted by the limiting member 442, and the left and right positions of the pushing block 430 can be adjusted by rotating the limiting member 442, so that the left and right positions of the pushing block 430 can be indirectly adjusted and positioned.

Referring to fig. 7, in the embodiment, the pushing block 430 is provided with a bar hole 431 extending in the left-right direction, the positioning mechanism 440 further includes a locking member 443, the locking member 443 is inserted into the bar hole 431 and connected to the base assembly 100, the pushing block 430 can move left and right relative to the locking member 443 through the bar hole 431, and the locking member 443 can lock the pushing block 430 to the base assembly 100. The pushing block 430 can be moved left and right by the arrangement of the bar hole 431 and the locking member 443, but it is needless to say that the pushing block 430 can be moved left and right by other structures without being limited to the above-mentioned embodiment, for example, a slide groove extending left and right is provided to be engaged with the pushing block 430. The locking member 443 can be a bolt and is screwed into the housing assembly 100, and when the locking member 443 is screwed, the locking member 443 can function to lock the pushing block 430, i.e., to position the pushing block 430. Of course, the locking member 443 can also be a bolt and a nut, wherein the bolt passes through one end of the housing assembly 100 to connect with the nut, and the pushing block 430 is locked by the nut. In other embodiments, the positioning mechanism 440 may also adopt other suitable mechanisms, and is not limited to the above-mentioned embodiments, and there are many mechanisms for realizing the positioning of the movable member in the field, and those skilled in the art can select the mechanism according to the actual situation.

The embodiment of the vertical moving platform further includes an auxiliary fixing member 600, and the auxiliary fixing member 600 can fix the adjusting base 200 and the base assembly 100 together. After the first verticality adjusting device 300 and the second verticality adjusting device 400 perform verticality adjustment on the adjusting seat 200, the adjusting seat 200 and the stand assembly 100 can be locked together through the auxiliary fixing member 600, so as to fix the adjusted position of the adjusting seat 200. In an embodiment, the auxiliary fixing member 600 is a plurality of bolts, which pass through the fixing vertical plate 110 and are screwed to the adjusting base 200, and after the auxiliary fixing member 600 is screwed, the fixing vertical plate 110 and the adjusting base 200 can be locked and fixed together. In other embodiments, the auxiliary fastener 600 may also lock the adjusting base 200 to other parts of the base assembly 100. In addition, other suitable fasteners may be used to perform the function of the auxiliary fixture 600, such as a bolt and nut combination, or some clamping fixture.

In an embodiment, the base assembly 100 includes a base and a gantry, the working plane is disposed on the base, the gantry is disposed on the base, and the fixed vertical plate 110, the adjusting base 200, the first verticality adjusting device 300, the second verticality adjusting device 400, the lifting device 500, and other components are disposed on a beam of the gantry. Of course, in other embodiments, the base assembly 100 may have other structures without being limited to the above-mentioned embodiments, for example, if the entire vertical moving platform is a component of a certain Z-axis machining apparatus, the base assembly 100 may not include a base and a gantry, but only a structure for connecting the base.

Referring to fig. 8, in an embodiment, the lifting device 500 includes a moving stage 510, a connecting base 520, and an up-down driver 530, wherein the connecting base 520 is disposed on the adjusting base 200, the moving stage 510 is movably disposed on the connecting base 520 and can move up and down relative to the connecting base 520, and the up-down driver 530 is connected to the connecting base 520 and can drive the moving stage 510 to move up and down. Specifically, the connecting seat 520 is configured as an air rail, and the moving stage 510 is configured as a moving block assembly matched with the air rail; the up-down driver 530 is configured as a linear motor, which is fixed to the connection base 520, and a mover of the linear motor is connected to the moving stage 510. And the air floatation guide rail is adopted, so that the guiding precision is high and the movement is smooth. The upper and lower drivers 530 adopt linear motors, and the precision is high. Of course, in other cases, the mobile station 510 may also be movably connected to the connecting seat 520 in other suitable manners to achieve the up-and-down movement, for example, a structure that a guide rod is engaged with a sliding sleeve is adopted, and specifically, the guide rod may be disposed on the connecting seat 520, and the sliding sleeve may be disposed on the mobile station 510. The up-down driver 530 may also be selected from other suitable driver structures, such as a lead screw motor, according to the actual situation.

In an embodiment, the lifting device 500 further comprises an air cylinder auxiliary mechanism, which comprises an air cylinder 540, an abutting base 550 and a push plate assembly 560; the cylinder 540 is vertical to be set up in connecting seat 520, it sets up in the tip of the cylinder pole of cylinder 540 to support footstock 550, push pedal subassembly 560 includes push pedal 561, left connecting plate 562 and right connecting plate 563, push pedal 561 is located the upside that supports footstock 550 and can supports with supporting footstock 550, the upper portion of left connecting plate 562 is connected with push pedal 561's left side, the lower part of left connecting plate 562 is connected with the left side of mobile station 510, the upper portion of right connecting plate 563 is connected with push pedal 561's right side, the lower part of right connecting plate 563 is connected with the right side of mobile station 510. When the up-down driver 530 drives the moving stage 510 to move upward, the push plate assembly 560 can be pushed upward by the cylinder 540, and the push plate assembly 560 provides upward pulling force to the moving stage 510, so that the load of the up-down driver 530 can be reduced, the requirement on the driving force of the up-down driver 530 can be reduced, the up-down driver 530 with smaller driving force can be selected, the cost is reduced, and the volume is reduced. The air cylinder 540 also functions as a buffer when the moving stage 510 moves downward. In an embodiment, a single air cylinder 540 is used, and the coupling action of the push plate assembly 560 can uniformly apply the assisting force to the moving stage 510, so that the moving accuracy of the moving stage 510 is not affected. In an embodiment, the abutting base 550 is provided with a ball, and the abutting base 550 is in abutting fit with the pushing plate 561 through the ball, so as to perform the abutting fit better.

The patent also provides a laser direct-writing type photoetching device which comprises the vertical moving platform. Due to the adoption of the vertical moving platform, the verticality of the vertically moving mobile platform 510 can be adjusted, so that the processing precision can be improved.

The technical features of the above embodiments can be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the above embodiments are not described, but should be considered as the scope of the present specification as long as there is no contradiction between the combinations of the technical features.

The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge of those skilled in the art without departing from the gist of the present invention.

Claims (10)

1. A vertical motion platform, comprising:

a stand assembly (100);

the adjusting seat (200) is arranged on the stand component (100);

the first verticality adjusting device (300) comprises an upper adjusting assembly (310) and a lower adjusting assembly (320), the upper adjusting assembly (310) and the lower adjusting assembly (320) are arranged on the base assembly (100), the upper adjusting assembly (310) can adjust the front and back positions of the upper part of the adjusting base (200), and the lower adjusting assembly (320) can adjust the front and back positions of the lower part of the adjusting base (200);

the second verticality adjusting device (400) comprises a left adjusting component (410) and a right adjusting component (420), the left adjusting component (410) and the right adjusting component (420) are arranged on the base component (100), the left adjusting component (410) can adjust the upper and lower positions of the left side part of the adjusting seat (200), and the right adjusting component (420) can adjust the upper and lower positions of the right side part;

and a lifting device (500) which is arranged on the adjusting base (200), wherein the lifting device (500) is provided with a movable platform (510) capable of moving up and down.

2. The vertically movable platform of claim 1, wherein: the upper adjusting component (310) and the lower adjusting component (320) are respectively arranged corresponding to the upper part and the lower part of the adjusting seat (200), the upper adjusting component (310) and the lower adjusting component (320) respectively comprise a pushing piece (330) and a pulling piece (340), the base component (100) is provided with a fixed vertical plate (110), the fixed vertical plate (110) is provided with a first threaded hole (111), the axis of the first threaded hole (111) is arranged along the front-back direction, the pushing piece (330) is in threaded connection with the first threaded hole (111), one end of the pushing piece (330) is opposite to the adjusting seat (200), the pushing piece (330) is provided with a sleeve hole (331), the axis of the sleeve hole (331) is arranged along the front-back direction, the pulling piece (340) penetrates through the sleeve hole (331), the adjusting seat (200) is provided with a second threaded hole (210) opposite to the sleeve hole (331), one end of the pull-back piece (340) is in threaded connection with the second threaded hole (210), the other end of the pull-back piece (340) is provided with a contact part (341), and the contact part (341) can be abutted against the other end of the pushing piece (330).

3. The vertically movable platform of claim 2, wherein: the pushing piece (330) is connected with a fastening nut (350), and the fastening nut (350) is in threaded connection with the periphery of the pushing piece (330) and can be abutted against the fixed vertical plate (110).

4. The vertically movable platform of claim 1 or 2, wherein: the upper adjusting assembly (310) and/or the lower adjusting assembly (320) are arranged in at least two groups along the left-right direction.

5. The vertically movable platform of claim 1, wherein: the left adjustment assembly (410) and the right adjustment assembly (420) each include a push block (430) and a positioning mechanism (440); a pushing matching part (220) is arranged on the lower side of the adjusting seat (200), the pushing matching part (220) is provided with a left matching part (221) and a right matching part (222), and the left matching part (221) and the right matching part (222) are correspondingly matched with a pushing block (430) in the left adjusting assembly (410) and the right adjusting assembly (420) respectively; the pushing block (430) can be movably arranged on the machine base assembly (100) along the left-right direction, the left matching part (221) and/or the corresponding pushing block (430) are/is provided with an inclined plane part, and the left matching part (221) is jacked up or the left matching part (221) is lowered through the inclined plane part when the pushing block (430) corresponding to the left matching part (221) moves; the right matching part (222) and/or the corresponding pushing block (430) is/are provided with an inclined surface part, and when the pushing block (430) corresponding to the right matching part (222) moves, the right matching part (222) is lifted up through the inclined surface part or the right matching part (222) is lowered; the positioning mechanism (440) is arranged on the base assembly (100) and can position the corresponding pushing block (430).

6. The vertically movable platform of claim 5, wherein: the machine base assembly (100) is provided with a fixed vertical plate (110), the left upper part and the right upper part of the fixed vertical plate (110) are provided with jacking parts (450), the jacking parts (450) are in threaded connection with the fixed vertical plate (110) and can adjust positions in the vertical direction, the end part of the jacking part (450) arranged on the left upper part of the fixed vertical plate (110) can be abutted against the left upper end face of the adjusting seat (200), and the end part of the jacking part (450) arranged on the right upper part of the fixed vertical plate (110) can be abutted against the right upper end face of the adjusting seat (200).

7. The vertically movable platform of claim 5, wherein:

the positioning mechanism (440) comprises a fixed seat (441) and a limiting piece (442), the fixed seat (441) is fixedly arranged on the base assembly (100), the limiting piece (442) is in threaded connection with the fixed seat (441) along the left-right direction, and one end of the limiting piece (442) can be in abutting fit with one side, away from the inclined plane part, of the pushing block (430);

the pushing block (430) is provided with a strip hole (431) extending in the left-right direction, the positioning mechanism (440) further comprises a locking part (443), the locking part (443) penetrates through the strip hole (431) and is connected to the base assembly (100), the pushing block (430) can move left and right relative to the locking part (443) through the strip hole (431), and the locking part (443) can lock the pushing block (430) on the base assembly (100).

8. The vertically movable platform of any one of claims 1 to 7, wherein: the adjusting seat is characterized by further comprising an auxiliary fixing piece (600), wherein the auxiliary fixing piece (600) can lock the adjusting seat (200) and the base assembly (100) together.

9. The vertically movable platform of claim 1, wherein:

the lifting device (500) comprises the moving platform (510), a connecting seat (520) and an upper and lower driver (530), the connecting seat (520) is arranged on the adjusting seat (200), the moving platform (510) is movably arranged on the connecting seat (520) and can move up and down relative to the connecting seat (520), and the upper and lower driver (530) is connected with the connecting seat (520) and can drive the moving platform (510) to move up and down;

the connecting seat (520) is configured as an air rail, and the moving table (510) is configured as a moving block assembly matched with the air rail; the upper and lower drivers (530) are configured as linear motors, the linear motors are fixed on the connecting seats (520), and the rotors of the linear motors are connected with the mobile table (510);

the lifting device (500) further comprises an air cylinder auxiliary mechanism, and the air cylinder auxiliary mechanism comprises an air cylinder (540), a butting seat (550) and a push plate assembly (560); the air cylinder (540) is vertically arranged on the connecting seat (520), the abutting seat (550) is arranged at the end part of an air cylinder rod of the air cylinder (540), the push plate assembly (560) comprises a push plate (561), a left connecting plate (562) and a right connecting plate (563), the push plate (561) is positioned on the upper side of the abutting seat (550) and can abut against the abutting seat (550), the upper part of the left connecting plate (562) is connected with the left side of the push plate (561), the lower part of the left connecting plate (562) is connected with the left side of the moving table (510), the upper part of the right connecting plate (563) is connected with the right side of the push plate (561), and the lower part of the right connecting plate (563) is connected with the right side of the moving table (510); the abutting seat (550) is provided with a ball, and the abutting seat (550) is in abutting fit with the push plate (561) through the ball.

10. A laser direct write lithographic apparatus, comprising a vertically moving stage according to any of claims 1 to 9.

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