CN216067517U

CN216067517U - Flexible electrostatic chuck

Info

Publication number: CN216067517U
Application number: CN202121272904.1U
Authority: CN
Inventors: 雷勇; 杜世伦; 张耀文
Original assignee: Zhejiang University ZJU
Current assignee: Zhejiang University ZJU
Priority date: 2021-06-08
Filing date: 2021-06-08
Publication date: 2022-03-18
Anticipated expiration: 2031-06-08

Abstract

The utility model discloses a flexible electrostatic chuck. The electrostatic adsorption device comprises a soft sucker, a supporting structure and an electrostatic adsorption film, wherein the edge of the soft sucker is fixedly connected with the edge of the electrostatic adsorption film, a hollow area is formed in the middle of the soft sucker, the bottom of the supporting structure is fixedly connected in the hollow area between the soft sucker and the electrostatic adsorption film, the top of the supporting structure is connected with external equipment, and the electrostatic adsorption film is electrically connected with an external high-voltage generator through a relay. The utility model adopts the electrostatic adsorption principle, has small noise, can be suitable for more working scenes with noise control requirements compared with adsorption with larger noise, such as negative pressure or positive pressure adsorption and the like, can be suitable for walls of various materials in various scenes, can also be suitable for curved surface wall adsorption, can provide stable working conditions for external equipment, and has better adaptability and wider application range.

Description

Flexible electrostatic chuck

Technical Field

The utility model belongs to a sucker in the field of electromechanical coupling innovative design, and particularly relates to a flexible electrostatic sucker.

Background

The pipeline plays an important role as an important part in the fields of petrifaction, electric power, buildings and the like, but safety problems such as cracking, corrosion, embrittlement and the like are easy to occur in use, so that hidden dangers can be effectively avoided by regularly and timely overhauling pipeline equipment, and the pipeline adsorption technology is one of key technologies for carrying out pipeline detection and maintenance operation and is widely applied to overhauling industrial pipelines such as GIS high-voltage electric transmission pipelines. The traditional pipeline adsorption technology mainly adopts air pressure or ferromagnetic adsorption, and the technologies have the problems of poor reliability, high noise, higher requirements on adsorption wall materials and the like.

At present, a common adsorption robot is designed for a plane or an outer curved surface scene, the achievement for a non-magnetic inner curved surface adsorption technology is relatively few, a common pipeline maintenance scene at present is a non-magnetic inner curved surface pipeline, and an effective and stable adsorption technology is a necessary condition for maintenance work.

Aiming at the ferromagnetic adsorption technology, the pipeline is required to be made of magnetic materials, the adaptability is poor, aiming at the negative pressure adsorption technology, the pipeline is required to generate large negative pressure, the required size is large, the noise is large, aiming at the positive pressure adsorption technology, the reliability is poor, the adaptability to complex environment is poor, the clamping adsorption and the bionic adsorption have certain requirements on the wall surface, and the adaptability is poor.

Meanwhile, with the development of the robot technology, the load requirement for the adsorption technology is gradually relaxed, but the application range of the adsorption technology is gradually improved, the existing adsorption technology can generally bear larger load, but the adaptable environment is less, and the development and the application of the pipeline operation robot are not facilitated.

In conclusion, the existing pipeline adsorption technology has a complex structure, but has different requirements on the working environment, cannot adapt to the working scene of the inner curved surface of the nonmagnetic pipeline commonly used in the prior art, and cannot well meet the requirements of the pipeline wall climbing robot.

Disclosure of Invention

The utility model aims to design a sucker meeting the stable adsorption requirement of a pipeline wall-climbing robot, solves the defects in the adsorption technology of the pipeline wall-climbing robot, lays a good foundation for vigorously researching and developing special robots for pipeline operation, designs a flexible electrostatic sucker, adopts a low-voltage control signal to control the driving of a high-voltage power supply, has small volume, light weight and convenient manufacture, can provide adsorption force suitable for overhauling robots, can realize curved surface adsorption through a flexible structure, has no strict requirements on materials, roughness, curvature and the like of the adsorption wall surface of a pipeline, and can adapt to the inner curved surfaces of pipelines in various scenes.

The technical scheme adopted by the utility model is as follows:

the electrostatic adsorption device comprises a soft sucker, a supporting structure and an electrostatic adsorption film, wherein the edge of the soft sucker is fixedly connected with the edge of the electrostatic adsorption film, a hollow area is formed in the middle of the soft sucker, the bottom of the supporting structure is fixedly connected in the hollow area between the soft sucker and the electrostatic adsorption film, the top of the supporting structure is connected with external equipment, and the electrostatic adsorption film is electrically connected with an external high-voltage generator through a relay.

The electrostatic adsorption film comprises a flexible concentric circular electrode, electrode pads and a polyimide insulating layer, wherein the upper surface and the lower surface of the flexible concentric circular electrode are respectively fixed with one polyimide insulating layer, the polyimide insulating layer on the upper surface of the flexible concentric circular electrode is attached to the bottom surface of the soft sucker, the two electrode pads are symmetrically arranged on the circumference of the polyimide insulating layer on the lower surface of the flexible concentric circular electrode, and the flexible concentric circular electrode is electrically connected with the high-voltage generator through the electrode pads. The flexible concentric circular electrode is connected with the high-voltage generator, so that the flexible concentric circular electrode can generate a stable electric field when being connected with high voltage, and can polarize the nonmagnetic dielectric material, so that the wall surface of the pipeline made of the nonmagnetic dielectric material is magnetic, and the electrostatic adsorption film is adsorbed on the working wall surface made of the nonmagnetic dielectric material; the electrode pad is connected with the high voltage generator to obtain high voltage; the polyimide insulating layer belongs to a flexible insulating layer, can guarantee that flexible concentric circle electrode does not contact with external conductor, can maintain stable electric field, also can realize the good laminating with flexible concentric circle electrode when flexible concentric circle electrode deformation, and then ensure that electrostatic absorption membrane can adsorb on the pipeline wall.

The bottom of bearing structure be spherical curved surface, the spherical curved surface of bearing structure bottom contacts with the upper surface of electrostatic absorption membrane, the curvature of the spherical curved surface of bearing structure bottom is the same with the curvature of work wall, the work wall indicates that the electrostatic absorption membrane adsorbs the wall that adsorbs when the work, when the electrostatic absorption membrane adsorbs when the pipeline wall, bearing structure can support the electrostatic absorption membrane pipeline wall of laminating completely, thereby reduce the clearance, increase laminating area, realize more stable absorption, the software sucking disc can prevent that the bearing structure from droing behind the electrostatic absorption membrane pipeline wall of laminating completely.

The utility model discloses a support structure, including software sucking disc, support structure, slot, support structure, flexible hollow structure, form the cavity region between software sucking disc and the electrostatic absorption membrane, support structure's bottom is arranged in the cavity region between software sucking disc and the electrostatic absorption membrane, software sucking disc and electrostatic absorption membrane press from both sides tightly support structure, open at the center of software sucking disc has the round through-hole, support structure's top is equipped with the bracing piece, the bracing piece at support structure top is connected with outside external device through the vertical circular through-hole that upwards wears out the software sucking disc of slot.

The soft sucker and the electrostatic adsorption film are both made of flexible materials, the supporting structure is designed into a structure which is adaptive to the structural shape of the adsorption wall surface, and the supporting structure is made of rigid materials

The external equipment can be but is not limited to a foot type robot, such as a two-foot, four-foot or six-foot type robot, and the utility model can be arranged on the sole of the foot type robot to provide adsorption force, so that the external equipment is adsorbed on the wall surface of a nonmagnetic dielectric medium, such as a pipeline, a satellite surface and the like, through the utility model, and stable working conditions are provided for the external equipment.

The external equipment can also be in other various forms, and a robot needs to be adsorbed on the wall surface of the nonmagnetic dielectric medium.

The utility model discloses a sucker which mainly comprises an electrostatic adsorption film, a soft sucker, three sucker structural members for rigid support, a high-voltage discharge device and a relay. The soft sucker is of a hollow structure, and the bottom of the soft sucker is fixedly connected with the electrostatic adsorption film; the supporting structure is fixedly connected with a hollow area between the soft sucker and the adsorption membrane, the bottom of the supporting structure is a spherical curved surface, and the top of the supporting structure penetrates out of the round hole of the soft sucker through the slot so as to be connected with external equipment. The periphery of the bottom of a soft sucker made of a flexible material is connected with an electrostatic adsorption film, and a sucker electrode is controlled to be connected into a high-voltage loop through a relay, so that the sucker can be ensured to be adsorbed on a nonmagnetic dielectric material, and the flexible structure of the sucker can enable the sucker to be adsorbed on a curved surface, so that the adaptability is improved; the sucker has good application effect on nonmagnetic dielectric materials and strong adsorption capacity. The utility model can realize the adsorption of the non-magnetic dielectric medium curved surface.

The utility model has the beneficial effects that:

the utility model can be suitable for the wall surfaces of various materials in various scenes, does not require the wall surface material to be a magnetic material, can be adsorbed on the wall surface of a nonmagnetic material, and has wider application range compared with a magnetic adsorption sucker.

The utility model can adapt to the adsorption of curved surface wall surface, and compared with the rigid adsorption sucker which can only be adsorbed on the plane or the wall surface with a specific shape, the utility model has improved adaptability.

The electrostatic adsorption sucker adopts the electrostatic adsorption principle, has stronger stability, can be more stably adsorbed on a certain wall surface compared with adsorption with poor stability such as negative pressure or positive pressure adsorption, has no vibration during adsorption, and can provide stable working conditions for external equipment.

In summary, the utility model adopts the electrostatic adsorption principle, has low noise, and compared with adsorption with larger noise, such as negative pressure or positive pressure adsorption, the sucker can be suitable for more working scenes with noise control requirements, can adapt to the wall surfaces of various materials in various scenes, can also adapt to curved surface wall adsorption, and can provide stable working conditions for external equipment.

Drawings

FIG. 1 is an exploded view of an electrostatic chuck;

FIG. 2 is a half sectional view of an electrostatic chuck;

FIG. 3 shows an internal structure of an electrostatic adsorption film;

FIG. 4 is a schematic diagram of the operating circuit of the electrostatic adsorption membrane system;

FIG. 5 is a schematic circuit diagram of a flexible electrostatic chuck application system.

In the figure, 1 a soft sucker, 2 a supporting structure, 3 an electrostatic adsorption film, 4 a polyimide insulating layer, 5 an electrode pad, 6 a flexible concentric electrode, 7 a relay and 8 a high voltage generator.

Detailed Description

The utility model is further illustrated with reference to the following figures and examples.

As shown in fig. 1 and 2, the flexible electrostatic chuck of the present invention includes a soft chuck 1, a supporting structure 2 and an electrostatic adsorption film 3, wherein the edge of the soft chuck 1 is fixedly connected with the edge of the electrostatic adsorption film 3, a hollow region is formed in the middle of the soft chuck 1, the bottom of the supporting structure 2 is fixedly connected in the hollow region between the soft chuck 1 and the electrostatic adsorption film 3, the top of the supporting structure 2 is connected with an external device 9, and the electrostatic adsorption film 3 is electrically connected with an external high voltage generator 8 through a relay 7.

As shown in fig. 3, the electrostatic adsorption film 3 includes a flexible concentric electrode 6, electrode pads 5 and a polyimide insulating layer 4, the upper and lower surfaces of the flexible concentric electrode 6 are respectively fixed with a polyimide insulating layer 4, the polyimide insulating layer 4 on the upper surface of the flexible concentric electrode 6 is attached to the bottom surface of the soft sucker 1, two electrode pads 5 are symmetrically arranged on the circumference of the polyimide insulating layer 4 on the lower surface of the flexible concentric electrode 6, and the flexible concentric electrode 6 is electrically connected to the high voltage generator 8 through the electrode pads 5. The flexible concentric electrode 6 is connected with the high-voltage generator 8, so that the flexible concentric electrode 6 can generate a stable electric field when being connected with high voltage, the nonmagnetic dielectric material can be polarized, the wall surface of the pipeline made of the nonmagnetic dielectric material is magnetic, and the electrostatic adsorption film 3 can be adsorbed on the working wall surface made of the nonmagnetic dielectric material; the electrode pad 5 is connected with a high voltage generator 8 for obtaining high voltage; the polyimide insulating layer 4 is a flexible insulating layer, can guarantee that the flexible concentric circular electrode 6 does not contact with external conductor, can maintain stable electric field, also can realize the good laminating with flexible concentric circular electrode 6 when flexible concentric circular electrode 6 deforms, and then ensure that the electrostatic absorption membrane 3 can adsorb on the pipeline wall.

As shown in fig. 2, the bottom of the supporting structure 2 is a spherical curved surface, the spherical curved surface at the bottom of the supporting structure 2 is in contact with the upper surface of the electrostatic adsorption film 3, the curvature of the spherical curved surface at the bottom of the supporting structure 2 is the same as that of the working wall surface, the working wall surface refers to the wall surface adsorbed by the electrostatic adsorption film 3 during adsorption work, when the electrostatic adsorption film 3 is adsorbed on the wall surface of the pipeline, the supporting structure 2 can support the electrostatic adsorption film 3 to completely adhere to the pipeline wall surface, thereby reducing the gap, increasing the adhesion area, realizing more stable adsorption, and the soft sucker 1 can prevent the supporting structure 2 from falling off after the electrostatic adsorption film 3 completely adheres to the pipeline wall surface.

The soft sucker 1 is of a flexible hollow structure, a hollow area is formed between the soft sucker 1 and the electrostatic adsorption film 3, the bottom of the supporting structure 2 is located in the hollow area between the soft sucker 1 and the electrostatic adsorption film 3, the supporting structure 2 is clamped by the soft sucker 1 and the electrostatic adsorption film 3, a round through hole is formed in the center of the soft sucker 1, a supporting rod is arranged at the top of the supporting structure 2, and the supporting rod at the top of the supporting structure 2 vertically penetrates out of the round through hole of the soft sucker 1 upwards through a slot and then is connected with external equipment 9.

The soft sucker 1 and the electrostatic adsorption film 3 are both made of flexible materials, and the supporting structure 2 is made of rigid materials.

Fig. 4 is a schematic diagram of an operating circuit of the electrostatic adsorption film system, the core component is the electrostatic adsorption film 3, the electrostatic adsorption film 3 can be regarded as an electrode plate in the circuit, the electrostatic adsorption film 3 is connected in series with a relay S1, the two relays 7 are connected with the control circuit and a high-voltage generator 8 which can generate thousands of volts of high voltage in parallel with the other relay S2, so that the high-voltage working circuit is controlled by using the low-voltage control signal to play the role of isolation, when the relay S1 is closed by the control signal, the flexible concentric electrode 6 is connected with the high voltage generator 8 through the relay S1, the flexible concentric electrode 6 can generate a stable electric field when being connected with high voltage, and can polarize the nonmagnetic dielectric material to enable the working wall surface of the nonmagnetic dielectric material to have magnetism, so that the electrostatic adsorption film 3 can be adsorbed on the working wall surface of the nonmagnetic dielectric material; when the relay S2 is closed by receiving a control signal and the relay S1 is disconnected, the positive electrode and the negative electrode of the flexible concentric electrode 6 of the electrostatic adsorption film are connected, electric charges are neutralized and rapidly discharged, the electric field generated by the flexible concentric electrode 6 disappears, and then the electrostatic adsorption film 3 is not adsorbed on the working wall surface, so that separation is generated. In a specific implementation, the working wall may be a pipe wall.

In the adsorption process, the polyimide insulating layer 4 belongs to a flexible insulating layer, which can ensure that the flexible concentric circular electrode 6 is not contacted with an external conductor, namely, the electrostatic adsorption film 3 is not contacted with an external conductor, a stable electric field can be formed, and the flexible concentric electrode 6 can be well jointed with the flexible concentric electrode 6 when the flexible concentric electrode 6 is deformed, thereby ensuring that the electrostatic adsorption film 3 can be adsorbed on the wall surface of the pipeline, and when the electrostatic adsorption film 3 is adsorbed on the working wall surface, the spherical curved surface at the bottom of the supporting structure 2 can support the electrostatic adsorption film 3 to be completely attached to the working wall surface, thereby reduce the clearance between electrostatic absorption membrane 3 and the work wall, increase the laminating area between electrostatic absorption membrane 3 and the work wall, realize more stable absorption, supporting structure 2 drops behind the soft sucking disc 1 can prevent that electrostatic absorption membrane 3 from laminating the pipeline wall completely.

Fig. 5 is a schematic diagram of an applied circuit of a flexible electrostatic chuck, similar to the working process of the working circuit of the electrostatic adsorption film system shown in fig. 4, fig. 5 mainly includes an a electrostatic adsorption film and a B electrostatic adsorption film, four relays are respectively named as S1, S2, S3 and S4, and a high voltage generator 8, the a electrostatic adsorption film is connected in series with the relay S1 and in parallel with the relay S2, the B electrostatic adsorption film is connected in series with the relay S3 and in parallel with the relay S4, the relay S1 and the relay S3 are connected with the high voltage generator 8,

because the flexible electrostatic chuck can normally adsorb only by the voltage of several kilovolts, the utility model uses the relay to realize that the low-voltage control signal controls the high-voltage working circuit, when the A electrostatic adsorption film is required to work, the relay S1 is connected with the high-voltage generator 8, the relay S1 enables the flexible concentric circular electrode 6 of the A electrostatic adsorption film to generate a stable electric field when the high voltage is switched on, the nonmagnetic dielectric material can be polarized, so that the working wall surface of the nonmagnetic dielectric material has magnetism, and the adsorption of the electrostatic adsorption film 3 and the working wall surface of the nonmagnetic dielectric material is further realized; when the electrostatic adsorption film A does not work, the relay S1 is switched off, the relay S2 is switched on, the positive electrode and the negative electrode of the flexible concentric electrode 6 of the electrostatic adsorption film A are connected, charges are neutralized and quickly discharged, so that an electric field generated by the flexible concentric electrode 6 disappears, the electrostatic adsorption film 3 is not adsorbed to the working wall surface, and then the separation is generated. When two electrostatic adsorption films of the electrostatic adsorption film A and the electrostatic adsorption film B are adopted, the robot can be installed in some robot systems, and the robot can climb on the nonmagnetic dielectric curved surface under the action of the electrostatic adsorption film 3 by alternately electrifying the electrostatic adsorption film A and the electrostatic adsorption film B.

The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and any minor modifications, equivalent replacements and improvements made to the above embodiment according to the technical spirit of the present invention should be included in the protection scope of the technical solution of the present invention.

Claims

1. A flexible electrostatic chuck, comprising: including software sucking disc (1), bearing structure (2) and electrostatic absorption membrane (3), the edge and the electrostatic absorption membrane (3) fixed connection of software sucking disc (1), the centre forms the hollow region, the bottom rigid coupling of bearing structure (2) is in the hollow region between software sucking disc (1) and electrostatic absorption membrane (3), the top and the external peripheral equipment (9) of outside of bearing structure (2) are connected, electrostatic absorption membrane (3) are connected through relay (7) and outside high voltage generator (8) electricity.

2. The flexible electrostatic chuck of claim 1, wherein: the electrostatic adsorption film (3) include flexible concentric circle electrode (6), electrode pad (5) and polyimide insulating layer (4), the upper and lower surface of flexible concentric circle electrode (6) all is fixed with one deck polyimide insulating layer (4), polyimide insulating layer (4) of flexible concentric circle electrode (6) upper surface is attached in the bottom surface of software sucking disc (1), symmetrical arrangement has two electrode pad (5) on the circumference of polyimide insulating layer (4) of flexible concentric circle electrode (6) lower surface, flexible concentric circle electrode (6) are connected with high voltage generator (8) electricity through electrode pad (5).

3. The flexible electrostatic chuck of claim 1, wherein: the bottom of the supporting structure (2) is a spherical curved surface, the spherical curved surface at the bottom of the supporting structure (2) is in contact with the upper surface of the electrostatic adsorption film (3), the curvature of the spherical curved surface at the bottom of the supporting structure (2) is the same as that of a working wall surface, and the working wall surface refers to a wall surface adsorbed when the electrostatic adsorption film (3) performs adsorption work.

4. The flexible electrostatic chuck of claim 1, wherein: software sucking disc (1) be flexible hollow structure, form the cavity region between software sucking disc (1) and electrostatic absorption membrane (3), the bottom of bearing structure (2) is located the cavity region between software sucking disc (1) and electrostatic absorption membrane (3), open at the center of software sucking disc (1) has the round through hole, the top of bearing structure (2) is equipped with the bracing piece, the bracing piece at bearing structure (2) top is vertical upwards to wear out behind the round through hole of software sucking disc (1) to be connected with external device (9).

5. The flexible electrostatic chuck of claim 1, wherein: the external equipment (9) is a biped robot, a quadruped robot or a hexapod robot.