CN216050340U - Workpiece rotary coating temperature detection device - Google Patents
Workpiece rotary coating temperature detection device Download PDFInfo
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- CN216050340U CN216050340U CN202121824814.9U CN202121824814U CN216050340U CN 216050340 U CN216050340 U CN 216050340U CN 202121824814 U CN202121824814 U CN 202121824814U CN 216050340 U CN216050340 U CN 216050340U
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Abstract
The embodiment of the utility model discloses a temperature detection device for rotary coating of a workpiece, which comprises: a vacuum coating chamber; the test platform is rotatably arranged in the vacuum coating chamber; the test sleeve is used for simulating a workpiece to be tested and arranged on the test platform and in ohmic contact with the test platform; the thermal resistor is arranged inside the test sleeve, a metal shell is arranged outside the thermal resistor, and the thermal resistor is in ohmic contact with the test sleeve through the metal shell; the anti-tangling assembly is connected with the lead-out cable of the thermal resistor; the signal transmission assembly is electrically connected with the lead-out cable; and the display is electrically connected with the signal transmission assembly. The scheme solves the problems that the existing temperature measurement technology is low in precision and cannot realize real-time detection of the temperature of the rotating workpiece, guarantees are provided for depositing a temperature sensitive coating and preparing the coating on a temperature sensitive base material, and the detected temperature is real, stable and real-time.
Description
Technical Field
The utility model relates to the technical field of vacuum coating, in particular to a workpiece rotary coating temperature detection device.
Background
The vacuum coating technology is an effective way to prolong the service life of products such as cutters, molds, engine parts and the like. With the continuous development of vacuum coating technology, new coating types are continuously produced and widely applied to different technical fields. For temperature sensitive film systems or substrates, such as diamond-like coatings or plastics, temperature detection and control during the deposition process is particularly important. At present, the temperature measuring method in the vacuum coating process mainly comprises the following steps: the thermocouple is used for measuring the environment temperature of the vacuum coating chamber to approximately replace the workpiece temperature, the workpiece temperature in the coating process is detected by an infrared detection method, and the thermocouple is arranged at the back of a static workpiece for measuring the temperature.
However, the thermocouple is used for measuring the environment temperature of the vacuum coating chamber to approximately replace the workpiece temperature, the actual temperature of the workpiece cannot be accurately measured, and the problem of large error of the measurement result exists; the workpiece temperature in the coating process is detected by using an infrared detection method, and the accuracy of a workpiece temperature detection result is reduced due to the influences of unstable environmental factors, the weakening of infrared rays by intermediate pollutants, the false reflection of infrared rays by objects around the workpiece and the like; the thermocouple is arranged at the back of a static workpiece for measuring temperature, the actual temperature of the workpiece in a rotating state cannot be detected, and in actual production, the workpiece is coated under a rotating condition, so the method has great application limitation.
SUMMERY OF THE UTILITY MODEL
In view of this, the utility model provides a workpiece rotary coating temperature detection device, which is used for solving the problems that the temperature detection of a rotary coating workpiece cannot be realized, the temperature measurement precision is low, and the stability is poor in the prior art.
In order to achieve one or a part of or all of the above or other objects, the present invention provides a device for detecting a temperature of a workpiece during spin coating, comprising:
a vacuum coating chamber;
the test platform is rotatably arranged in the vacuum coating chamber;
the test sleeve is used for simulating a workpiece to be tested and arranged on the test platform and in ohmic contact with the test platform;
the thermal resistor is arranged inside the test sleeve, a metal shell is arranged outside the thermal resistor, and the thermal resistor is in ohmic contact with the test sleeve through the metal shell;
the anti-tangling assembly is connected with the lead-out cable of the thermal resistor;
the signal transmission assembly is electrically connected with the lead-out cable; and
the display is electrically connected with the signal transmission assembly.
In one embodiment, the outer part of the thermal resistor is also provided with ceramic, and the thermal resistor is fixedly connected with the metal shell through the ceramic.
In one embodiment, the test platform comprises a platform body and a tray, wherein the platform body is rotatably arranged, and the tray is rotatably arranged on the platform body; wherein the tray may remain stationary when the platform body rotates, or the platform body may rotate simultaneously with the tray when the tray rotates.
In one embodiment, the wall thickness of the test sleeve is adjustably settable.
In one embodiment, the outside of the outgoing cable is sleeved with a protective sleeve, and the protective sleeve is made of an insulating material.
In one embodiment, the outer portion of the protection sleeve is sleeved with a ceramic protection sleeve, and the ceramic protection sleeve is arranged on the test sleeve through a first ceramic bearing.
In one embodiment, the anti-tangling assembly comprises a positioning insulating sleeve, an anti-tangling pad and an insulating sleeve, the insulating sleeve is arranged on the vacuum coating chamber, the anti-tangling pad is screwed on the inner wall of the insulating sleeve, one end of the positioning insulating sleeve is fixed on the insulating sleeve through a second ceramic bearing, and the leading-out cable sequentially penetrates through the positioning insulating sleeve and the anti-tangling pad and then is connected with the signal transmission assembly.
In one embodiment, the positioning insulating sleeve comprises a first pipe body and a second pipe body which are connected in an angle mode, and the second pipe body is fixed on the insulating sleeve through the second ceramic bearing; wherein, the included angle between the first pipe body and the second pipe body is 45 degrees to 180 degrees.
In one embodiment, the signal transmission assembly comprises an electrode, a metal flange and a transmission cable, the metal flange is arranged on the insulating sleeve, the electrode is mounted on the metal flange, one end of the electrode is connected with one end penetrating out of the entanglement preventing pad, the other end of the electrode is connected with one end of the transmission cable, and the other end of the transmission cable is connected with the display.
In one embodiment, the signal transmission assembly further comprises a threaded connector, the electrode is mounted on the metal flange through the threaded connector, and insulation materials are adopted between the electrode and the metal flange and between the threaded connector and the electrode for insulation treatment.
In one embodiment, the test platform is provided with a plurality of test sites, and each test site can be respectively provided with one test sleeve.
The embodiment of the utility model has the following beneficial effects:
the workpiece rotary coating temperature detection device is applied to the temperature detection occasion when the workpiece is subjected to rotary coating. Particularly, during the use, at first will be used for simulating the test sleeve of the work piece that awaits measuring and install test platform on to guarantee that test sleeve and test platform ohmic contact are good, open power and filming equipment immediately, test platform drives the test sleeve rotatory, can carry out test sleeve's rotatory coating processing. In this in-process, because test sleeve's internally mounted has the thermal resistance, and the thermal resistance is through external metal casing and test sleeve ohmic contact, therefore the thermal resistance can realize carrying out the temperature detection to the test sleeve, also realizes the direct measurement of the temperature that the work piece that awaits measuring is in rotatory coating, and the temperature signal that the measurement obtained passes through signal transmission subassembly real-time transmission to display to conveniently show temperature value and give measurement personnel. Meanwhile, the leading-out cable is connected with the anti-entanglement component, so that the problem of entanglement of the leading-out cable can be effectively prevented in the rotation process of the test sleeve, and the detection safety and reliability are guaranteed. Compared with the prior art, the scheme solves the problems that the existing temperature measurement technology is low in precision and cannot realize temperature detection of the rotating workpiece, guarantees are provided for depositing the temperature sensitive coating and preparing the coating on the temperature sensitive base material, and the detected temperature is real, stable and real-time.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
Wherein:
FIG. 1 is a sectional structural view of a device for detecting a temperature of a rotary coating film on a workpiece according to an embodiment of the present invention;
FIG. 2 is a schematic view of the assembly structure of the thermal resistor and the test sleeve of the present invention;
FIG. 3 is an assembled view of the lead-out cable, the protective sleeve and the ceramic protective sleeve of the present invention;
fig. 4 is an assembly structural view of an anti-tangling mat, a protective sleeve, and a lead-out cable according to the present invention.
Description of reference numerals:
10. a vacuum coating chamber; 20. a test platform; 21. a platform body; 22. a tray; 30. testing the sleeve; 40. a thermal resistor; 50. an anti-tangling assembly; 51. positioning an insulating sleeve; 511. a first pipe body; 512. a second tube body; 52. an anti-tangling mat; 53. an insulating sleeve; 60. a signal transmission component; 61. an electrode; 62. a metal flange; 63. a transmission cable; 70. a display; 80. protecting the sleeve; 90. a ceramic protective sheath; 100. a first ceramic bearing; 110. a second ceramic bearing; 120. a cathode; 130. an ion source; 140. a power source; 150. and leading out a cable.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein.
In the description of the present invention, it is to be understood that the terms "central," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," and the like are used in the orientations and positional relationships indicated in the drawings for convenience in describing the utility model and to simplify the description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the utility model.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature.
In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly and can, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
As shown in fig. 1, a workpiece rotary coating temperature detection device shown in an embodiment of the present application can be used in combination with a vacuum coating apparatus, that is, the vacuum coating apparatus can complete a coating process on a workpiece in a rotating state, and the workpiece rotary coating temperature detection device can detect a temperature of the workpiece during a rotary coating process, and has dual functions of a coating process and temperature measurement.
With continuing reference to fig. 1-4, an exemplary apparatus for detecting a temperature of a workpiece during a spin coating process includes: vacuum coating chamber 10, test platform 20, test sleeve 30, thermal resistor 40, anti-tangling assembly 50, signal transmission assembly 60, and display 70. The vacuum coating chamber 10 is used for coating and processing, and is also used as a main body for loading and fixing components such as the test platform 20 and the test sleeve 30, so that the detection device (a workpiece rotation coating temperature detection device, which is abbreviated as the following) has a compact and stable structure.
The test platform 20 is used for loading the test sleeve 30, and the test platform 20 is rotatably arranged in the vacuum coating chamber 10 and used for outputting rotary power to drive the test sleeve 30 to rotate, so that rotary coating processing is completed.
The test sleeve 30 is used for simulating a workpiece to be tested, and the test sleeve 30 is arranged on the test platform 20 and in ohmic contact with the test platform 20. The thermal resistor 40 is arranged inside the test sleeve 30, and a metal shell is arranged outside the thermal resistor 40, and the thermal resistor 40 is in ohmic contact with the test sleeve 30 through the metal shell; the anti-tangling assembly 50 is connected to the outgoing cable 150 of the thermal resistor 40; the signal transmission assembly 60 is electrically connected to the outgoing cable 150; the display 70 is electrically connected to the signal transmission assembly 60.
In summary, the implementation of the technical solution of the present embodiment has the following beneficial effects: the workpiece rotary coating temperature detection device is applied to the temperature detection occasion when the workpiece is subjected to rotary coating. Particularly, during the use, at first will be used for simulating the test sleeve 30 of the work piece that awaits measuring to install on test platform 20 to guarantee that test sleeve 30 and test platform 20 ohmic contact are good, switch on power 140 and filming equipment immediately, test platform 20 drives test sleeve 30 rotatory, can carry out the rotatory coating processing of test sleeve 30. In this process, because the internally mounted of test sleeve 30 has thermal resistance 40, and thermal resistance 40 is through external metal casing and test sleeve 30 ohmic contact, therefore thermal resistance 40 can realize carrying out temperature detection to test sleeve 30, also realizes the direct measurement of the temperature that the work piece that awaits measuring is in rotatory coating, and the temperature signal that obtains of measurement passes through signal transmission subassembly 60 and transmits to display 70 in real time to conveniently show temperature value and give the measurement personnel. Meanwhile, since the outgoing cable 150 is connected to the anti-entanglement component 50, the outgoing cable 150 can be effectively prevented from being entangled and entangled during the rotation of the test sleeve 30, thereby ensuring the safety and reliability of detection.
Compared with the prior art, the scheme solves the problems that the prior temperature measurement technology is poor in stability and low in precision and cannot realize temperature detection of the rotating workpiece, guarantees are provided for depositing the temperature sensitive coating and preparing the coating on the temperature sensitive base material, and the detected temperature is real, stable and real-time.
Referring to fig. 1, in the above embodiment, the vacuum coating apparatus includes a cathode 120, an ion source 130 and a power source 140, the cathode 120 and the ion source 130 are disposed on two opposite sidewalls of the vacuum coating chamber 10 and are opposite to the testing sleeve 30, and the power source 140 is electrically connected to the testing platform 20. The power supply 140 is used to supply power to the test sleeve 30 and to perform a coating process on the test sleeve 30 under the operation of the cathode 120 and the ion source 130.
Wherein, the outside of test sleeve 30, test platform 20 and thermal resistance 40 all is wrapped with metal casing, and each metal casing has equal electric potential to be convenient for on electric energy conduction to test sleeve 30.
The power supply 140 in the scheme adopts a direct current power supply 140, and the voltage range is 0-2000V.
In some embodiments, a ceramic is further disposed outside the thermal resistor 40, and the thermal resistor 40 is connected and fixed to the metal housing through the ceramic. The thermal resistor 40 can be fixed inside the metal shell through ceramic, so that temperature measurement is reliable, and the ceramic can further realize mutual insulation between the thermal resistor 40 and the metal shell. I.e., the ceramic, implements an insulating treatment of the thermal resistor 40, thereby facilitating measurement of workpiece temperatures at different voltages.
Alternatively, the material of the metal shell may be aluminum and its alloy or copper and its alloy, which are good in heat conductivity and easy to obtain. The material of the thermal resistor 40 may be a metal material, such as any one of copper, nickel, palladium, platinum, etc., whose resistance value changes with the temperature change, according to the temperature measurement range.
With continued reference to fig. 1, in some embodiments, the testing platform 20 includes a platform body 21 and a tray 22, the platform body 21 is rotatably disposed, and the tray 22 is rotatably disposed on the platform body 21; wherein the tray 22 may be kept stationary when the platform body 21 rotates, or the platform body 21 may rotate simultaneously with the tray 22 when the tray 22 rotates. For example, the platform body 21 and the tray 22 are each driven to rotate by a motor that is individually assembled. That is, the pallet 22 can rotate and revolve with respect to the table body 21 when the table body 21 rotates compared to the table body 21, and the table body 21 and the pallet 22 can constitute a planetary turret structure.
When only the platform body 21 rotates and the tray 22 does not rotate, the test sleeve 30 performs single-speed rotation, and the actual temperature of the workpiece under the condition of single-speed rotation can be measured. When the platform body 21 and the tray 22 rotate together, the test sleeve 30 performs 2 times of rotation speed, so that the actual temperature of the workpiece with double rotation speed can be measured, and the influence of the rotation speed on the temperature of the rotary coating workpiece can be known.
It should be noted that, when the actual temperature of the workpiece is measured at a single rotational speed, the size of the long side of the outlet of the ceramic protection sleeve 90 in the positioning insulation sleeve 51 may be 0mm, and the longest length of the long side cannot exceed the radius of the inner cavity of the vacuum coating chamber 10; when the actual temperature of the workpiece is measured at double rotation speed, the size of the long edge of the outlet of the ceramic protective sleeve 90 in the positioning insulating sleeve 51 is the shortest size of the free hanging down which is just tangent to the farthest end of the tray 22 far away from the cathode 120, and the size of the long edge is the largest size of the free hanging down which is just tangent to the nearest end of the tray 22 far away from the cathode 120.
In some embodiments, the test platform 20 is provided with a plurality of test sites, each of which can be respectively mounted with one of the test cartridges 30. Specifically, at least two trays 22 are installed along the circumferential direction on the platform body 21, and a plurality of test positions are arranged on each tray 22 along the circumferential direction, so that the temperature detection during the rotary film coating of a plurality of test sleeves 30 can be realized simultaneously.
Further, the wall thickness of the test sleeve 30 is adjustably set. That is, the test sleeve 30 having different wall thicknesses can be replaced according to different test conditions during the test, so that the temperature distribution at different depths on the workpiece can be measured.
With continued reference to fig. 2 to 4, in some embodiments, the external portion of the outgoing cable 150 is sleeved with a protective sleeve 80, and the protective sleeve 80 is made of an insulating material. The protective sleeve 80 can isolate and protect the exposed lead-out cable 150, and the transmission quality of the temperature signal is ensured. In this embodiment, the material of the outgoing cable 150 may be a conductive metal with a small resistance value, such as any one of silver, copper, gold, and the like, or a composite material of at least two or more. The protective sleeve 80 is made of an insulating material, such as any one of teflon, mica, asbestos, and the like.
Further, the outer portion of the protection sleeve 80 is sleeved with a ceramic protection sleeve 90, and the ceramic protection sleeve 90 is disposed on the test sleeve 30 through a first ceramic bearing 100. The ceramic protective sheath 90 serves to further protect the outgoing cable 150 and the protective sheath 80 from damage in a coating environment. Ceramic protective sheath 90 accessible first ceramic bearing 100 is firm to be installed on test sleeve 30, treats that the position is fixed the back, is favorable to guaranteeing that thermal resistance 40 and simulation workpiece's test sleeve 30 are in ohmic contact state always, and then guarantees measurement accuracy and stability.
Specifically, the ceramic protective sheath 90 is provided with two through holes for respectively penetrating through the two outgoing cables 150.
With reference to fig. 1, in addition to any of the above embodiments, the anti-tangling assembly 50 includes a positioning insulating sleeve 51, an anti-tangling pad 52 and an insulating sleeve 53, the insulating sleeve 53 is disposed on the vacuum coating chamber 10, the anti-tangling pad 52 is screwed on the inner wall of the insulating sleeve 53, one end of the positioning insulating sleeve 51 is fixed on the insulating sleeve 53 through a second ceramic bearing 110, and the outgoing cable 150 sequentially passes through the positioning insulating sleeve 51 and the anti-tangling pad 52 and then is connected to the signal transmission assembly 60.
The ceramic protective sleeve 90 can be used to adjust the horizontal position of the thermal resistor 40 relative to the test sleeve 30 of the dummy workpiece by positioning the insulating sleeve 51 to hang from other positions in the vacuum coating chamber 10. The anti-tangling pad 52 serves to prevent the problem of knotting of the outgoing cable 150 as it rotates with the test sleeve 30. The second ceramic bearing 110 and the insulating sleeve 53 are fixed in an interference fit manner, so that the positioning insulating sleeve 51 can be firmly installed.
Alternatively, the material of the positioning insulating sleeve 51 may be any one of ceramics, teflon, and the like.
With continued reference to fig. 1, for example, in some embodiments, the positioning insulating sleeve 51 includes a first tube 511 and a second tube 512 connected at an angle, and the second tube 512 is fixed on the insulating sleeve 53 through the second ceramic bearing 110; wherein, the included angle between the first pipe 511 and the second pipe 512 is 45-180 °. The positioning insulating sleeve 51 is designed into the first pipe body 511 and the second pipe body 512 which are connected at an angle, so that the pipe penetrating installation of the protection pipe is facilitated, and the rotation motion of the test sleeve 30 can be better adapted.
With reference to fig. 1, in some embodiments, the signal transmission assembly 60 includes an electrode 61, a metal flange 62 and a transmission cable 63, the metal flange 62 is disposed on the insulating sleeve 53, the electrode 61 is mounted on the metal flange 62, one end of the electrode 61 is connected to one end penetrating through the anti-tangling pad 52, the other end of the electrode 61 is connected to one end of the transmission cable 63, and the other end of the transmission cable 63 is connected to the display 70. Therefore, the electrode 61 can be reliably fixed on the insulating sleeve 53 through the metal flange 62, so that the electrode 61 is ensured to be simultaneously connected with the outgoing cable 150 and the transmission cable 63, a temperature signal detected by the thermal resistor 40 is timely and accurately transmitted to the display 70, and a temperature value is displayed for a detector.
Specifically, the two electrodes 61 and the two transmission cables 63 are arranged, and the outgoing cables 150, the two electrodes 61 and the two transmission cables 63 are connected in a one-to-one correspondence manner, so that a double transmission channel can be formed, and the temperature signal can be transmitted to the display 70 more reliably.
Further, the signal transmission assembly 60 further includes a threaded connector, the electrode 61 is mounted on the metal flange 62 through the threaded connector, and insulation materials are used for insulation processing between the electrode 61 and the metal flange 62 and between the threaded connector and the electrode 61. For example, the screw is used as the screw for the screw connection, and the screw can be used for more conveniently and firmly fixing the electrode 61 on the metal flange 62. The electrode 61 and the metal flange 62 and the screw connector and the electrode 61 are insulated from each other, so that loss of transmission signals can be prevented. Optionally, the insulating material used is any one or a combination of at least two of nylon, polytetrafluoroethylene, mica, and the like.
In the embodiment, the outer diameter of the entanglement preventing pad 52 is 40mm to 300mm, the distance between the two holes is 20mm to 280mm, and the hole diameter is 4mm to 50 mm.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the utility model. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (11)
1. A workpiece rotary coating temperature detection device is characterized by comprising:
a vacuum coating chamber;
the test platform is rotatably arranged in the vacuum coating chamber;
the test sleeve is used for simulating a workpiece to be tested and arranged on the test platform and in ohmic contact with the test platform;
the thermal resistor is arranged inside the test sleeve, a metal shell is arranged outside the thermal resistor, and the thermal resistor is in ohmic contact with the test sleeve through the metal shell;
the anti-tangling assembly is connected with the lead-out cable of the thermal resistor;
the signal transmission assembly is electrically connected with the lead-out cable; and
the display is electrically connected with the signal transmission assembly.
2. The device for detecting the temperature of the rotary coating of the workpiece as recited in claim 1, wherein a ceramic is further provided outside the thermal resistor, and the thermal resistor is connected and fixed with the metal housing through the ceramic.
3. The device for detecting the rotary coating temperature of the workpiece as recited in claim 1, wherein the testing platform comprises a platform body and a tray, the platform body is rotatably disposed, and the tray is rotatably disposed on the platform body; wherein the tray may remain stationary when the platform body rotates, or the platform body may rotate simultaneously with the tray when the tray rotates.
4. The apparatus for detecting the temperature of a workpiece during spin coating according to claim 1, wherein the wall thickness of the test sleeve is adjustable.
5. The device for detecting the temperature of the rotary coating of the workpiece as claimed in claim 1, wherein a protective sleeve is sleeved outside the lead-out cable, and the protective sleeve is made of an insulating material.
6. The device for detecting the temperature of the rotary coating of the workpiece as claimed in claim 5, wherein a ceramic protective sleeve is sleeved outside the protective sleeve, and the ceramic protective sleeve is arranged on the test sleeve through a first ceramic bearing.
7. The workpiece rotary coating temperature detection device of claim 6, wherein the anti-tangling assembly comprises a positioning insulating sleeve, an anti-tangling pad and an insulating sleeve, the insulating sleeve is arranged on the vacuum coating chamber, the anti-tangling pad is screwed on the inner wall of the insulating sleeve, one end of the positioning insulating sleeve is fixed on the insulating sleeve through a second ceramic bearing, and the leading-out cable sequentially penetrates through the positioning insulating sleeve and the anti-tangling pad and then is connected with the signal transmission assembly.
8. The apparatus for detecting the temperature of a workpiece during spin coating according to claim 7, wherein the positioning insulating sleeve comprises a first tube and a second tube connected at an angle, and the second tube is fixed on the insulating sleeve by the second ceramic bearing; wherein, the included angle between the first pipe body and the second pipe body is 45 degrees to 180 degrees.
9. The workpiece rotary coating temperature detection device of claim 7, wherein the signal transmission assembly comprises an electrode, a metal flange and a transmission cable, the metal flange is arranged on the insulating sleeve, the electrode is mounted on the metal flange, one end of the electrode is connected with one end penetrating out of the entanglement preventing pad, the other end of the electrode is connected with one end of the transmission cable, and the other end of the transmission cable is connected with the display.
10. The apparatus for detecting the temperature of a workpiece during spin coating according to claim 9, wherein the signal transmission assembly further comprises a threaded connector, the electrode is mounted on the metal flange through the threaded connector, and the electrode and the metal flange and the threaded connector and the electrode are insulated by an insulating material.
11. The apparatus for detecting the temperature of a workpiece during spin coating according to claim 1, wherein the testing platform is provided with a plurality of testing positions, and each testing position is respectively provided with one testing sleeve.
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| CN202121824814.9U CN216050340U (en) | 2021-08-05 | 2021-08-05 | Workpiece rotary coating temperature detection device |
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| CN202121824814.9U CN216050340U (en) | 2021-08-05 | 2021-08-05 | Workpiece rotary coating temperature detection device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114764030A (en) * | 2022-04-13 | 2022-07-19 | 东莞市华升真空镀膜科技有限公司 | Temperature detection mechanism and coating equipment with same |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114764030A (en) * | 2022-04-13 | 2022-07-19 | 东莞市华升真空镀膜科技有限公司 | Temperature detection mechanism and coating equipment with same |
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