CN207585793U - A kind of temperature measurement structure for crossing vacuum chamber - Google Patents
A kind of temperature measurement structure for crossing vacuum chamber Download PDFInfo
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- CN207585793U CN207585793U CN201721625254.8U CN201721625254U CN207585793U CN 207585793 U CN207585793 U CN 207585793U CN 201721625254 U CN201721625254 U CN 201721625254U CN 207585793 U CN207585793 U CN 207585793U
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- temperature
- vacuum chamber
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- temperature measurement
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Abstract
The utility model discloses a kind of temperature measurement structures for crossing vacuum chamber, including temperature-measuring part, rotary part, set on the indoor rotating disk of vacuum chamber and the driving device outside the vacuum chamber, the driving device is connect with the rotary part, and the rotary part is driven to rotate, the rotary part is extended in the vacuum chamber and is connect with the rotating disk, the temperature-measuring part runs through the rotary part, and is connect with the part to be measured in the rotating disk；The temperature measurement structure for crossing vacuum chamber of the utility model, by setting temperature-measuring part in rotary part, and rotary part is driven to be rotated synchronously with rotating disk using driving device, so as to ensure that temperature-measuring part follows part to be measured to move, it prevents the terminals of temperature-measuring part from loosening, effectively improves the global reliability of temperature measurement structure.
Description
Technical field
The utility model is related to vacuum temperature measurement technical field, particularly a kind of temperature measurement structure for crossing vacuum chamber.
Background technology
Existing semiconductor applications or field of solar energy, technique, which often requires that, carries out at heating the print of deposition film forming
Reason, heater are typically mounted inside vacuum chamber.Measurement sensor of the temperature-measuring part as print in vacuum chamber, it is also desirable to
Probe is stretched to inside vacuum chamber, print is measured.
If the sensors such as temperature-measuring part are stretched into inside vacuum chamber, must solve temperature-measuring part itself or lead into
Go out chamber wall problem, i.e., vacuum chamber problem, there are mainly two types of the modes of currently used temperature-measuring part disengaging vacuum chamber：
First, by temperature-measuring part cold end seal, i.e., temperature-measuring part cold end is directly mounted on vacuum chamber outer wall, by O-ring into
Row sealing；Another kind is sealed by crunch seal flange, and crunch seal flange both sides are equipped with binding post, crunch seal
It is sealed between flange and vacuum chamber wall by copper washer or O-ring, temperature-measuring part is located at together with itself lead in vacuum chamber
Portion, temperature-measuring part terminals first is connect with the indoor binding post of vacuum chamber, then by vacuum chamber outside binding post extraction.
In technical process, to reach better heating uniformity or membrane uniformity, need multiple prints being placed on
On circular disk, print follows circular disk to move in a circle, while is heated or plated film.If want to obtain the real-time of rotation print
Temperature, both the above temperature-measuring part passes in and out vacuum chamber mode all there are drawback, because the temperature-measuring part lead of two ways is equal
It is fixed on chamber wall, and temperature-measuring part probe is fixed on print surface, when temperature-measuring part probe follows tested print rotation, surveys
Warm component leads are but still in stationary state, thus the possibility of print multi-turn rotation is little, in addition either rotates certain angle
Degree or multi-turn, may all cause the temperature-measuring part terminals of chamber interior to loosen, and reduce safety coefficient, cause temp measuring system
Global reliability declines.
Utility model content
The purpose of this utility model is to provide a kind of temperature measurement structure for crossing vacuum chamber, to solve thermometric of the prior art
Component itself or lead disengaging vacuum chamber wall can not it is well suited in part to be measured rotate operating mode the technical issues of, it can make
Temperature-measuring part follows part to be measured to rotate, and terminals is avoided to loosen, realize the dynamic transmission to rotational workpieces temperature and measurement.
To achieve these goals, the utility model provides following technical solution：
A kind of temperature measurement structure for crossing vacuum chamber, including temperature-measuring part, rotary part, set on the indoor rotating disk of vacuum chamber
And the driving device outside the vacuum chamber, the driving device are connect with the rotary part, and drive the rotation
Rotation member rotates, and the rotary part is extended in the vacuum chamber and connect with the rotating disk, and the temperature-measuring part runs through
The rotary part, and connect with the part to be measured in the rotating disk.
Preferably, the driving device includes motor and transmission mechanism, and the motor drives the transmission mechanism to drive institute
Rotary part rotation is stated, the transmission mechanism includes driving pulley, driven pulley and belt, and the belt is set in the active
On belt wheel and the driven pulley, the driven pulley is connect with the rotary part.
Preferably, the center of the rotary part is equipped with channel, and the temperature-measuring part is accommodated in the channel, the survey
The outer diameter of warm component is less than the internal diameter of the channel, is tightly connected between the temperature-measuring part and the channel.
Preferably, the rotary part is the magnetic fluid of hollow cylindrical body, the magnetic fluid and the vacuum cavity
Wall surface is tightly connected.
Preferably, the rotating disk is connect with the magnetic fluid, and the magnetic fluid can drive the rotating disk and institute
It states temperature-measuring part and synchronous circular motion is made with the speed set.
Preferably, the temperature measurement structure further includes temperature control device, side of the temperature-measuring part far from the vacuum chamber
It is connect with the temperature control device, and feeds back real time temperature signal.
Preferably, the one end of the rotary part on the outside of the vacuum chamber is connect with pedestal, and the pedestal is by insulating
Material is made, and conductive component is provided on the pedestal, the first lead-out wire and the conductive component electricity of the temperature-measuring part
Connection.
Preferably, the temperature measurement structure further includes carbon brush holder, the carbon brush end on the carbon brush holder and the conductive component
Outside abuts, the second lead-out wire that the one end of the carbon brush far from the conductive component is equipped with, and second lead-out wire passes through institute
Carbon brush holder is stated to connect with the temperature control device.
Preferably, the carbon brush holder is equipped with groove, and the groove is sequentially arranged spring and the carbon brush, institute from inside to outside
It states spring and is in compressive state, make the carbon brush with being in close contact on the outside of the conductive component.
Preferably, the first binding post is drawn on the inside of the conductive component, first lead-out wire is fixed on described first and connects
On terminal；One end far from the carbon brush is equipped with the second binding post on the carbon brush holder, and second lead-out wire is fixed on described
On second binding post；And it is cased with insulation sleeve respectively on first binding post and second binding post.
The beneficial effects of the utility model are：
The utility model provides a kind of temperature measurement structure for crossing vacuum chamber, including temperature-measuring part, rotary part, set on true
The indoor rotating disk of cavity and the driving device outside the vacuum chamber, the driving device connect with the rotary part
It connects, and the rotary part is driven to rotate, the rotary part is extended in the vacuum chamber and connect with the rotating disk, institute
Temperature-measuring part is stated through the rotary part, and is connect with the part to be measured in the rotating disk；The utility model crosses vacuum chamber
The temperature measurement structure of room drives rotary part and rotating disk by setting temperature-measuring part in rotary part, and using driving device
It rotates synchronously, ensures that temperature-measuring part follows part to be measured to move, can prevent the terminals of temperature-measuring part from loosening, with prior art phase
Than the utility model can be suitable for the thermometric of more various part to be measured, measure the temperature of part to be measured in real time, greatly improve survey
The global reliability of warm structure.
Description of the drawings
Fig. 1 is the front view of the temperature measurement structure for crossing vacuum chamber of the utility model embodiment；
Fig. 2 is the vertical view of the temperature measurement structure for crossing vacuum chamber of the utility model embodiment.
Reference sign：
1- temperature-measuring parts, 2- rotating disks, 3- driving devices, 4- transmission mechanisms, 5- rotary parts, 6- parts to be measured, 7- is actively
Belt wheel, 8- driven pulleys, 9- belts, 10- shells, 11- pedestals, the first binding posts of 12-, 13- conductive components, 14- carbon brush holders,
15- carbon brush, the second binding posts of 16-, 17- connecting plates, 18- stents, 19- sealing elements.
Specific embodiment
The embodiment of the utility model is described below in detail, the example of the embodiment is shown in the drawings, wherein from beginning
Same or similar element is represented to same or similar label eventually or there is the element of same or like function.Below by ginseng
The embodiment for examining attached drawing description is exemplary, and is only used for explaining the utility model, and cannot be construed to the utility model
Limitation.
As depicted in figs. 1 and 2, the embodiment of the utility model provides a kind of temperature measurement structure for crossing vacuum chamber, including surveying
Warm component 1, rotary part 5, set on the indoor rotating disk 2 of vacuum chamber and the driving device 3 outside the vacuum chamber, institute
It states driving device 3 to connect with the rotary part 5, and the rotary part 5 is driven to rotate, the rotary part 5 extends to institute
State and connect with the rotating disk 2 in vacuum chamber, the temperature-measuring part 1 through the rotary part 5, and with the rotating disk 2
On part to be measured 6 connect.Temperature-measuring part 1 is preferably provided at the center of rotary part 5.Wherein, rotary part 5 is perpendicular to institute
State rotating disk 2 and affixed with the rotating disk 2.Temperature-measuring part 1 is fixedly connected with rotary part 5.The temperature-measuring part 1 is preferably
Armoured thermocouple.
The application method of the utility model：It is first that the end of temperature-measuring part 1 and rotating disk 2 is affixed, with rear drive equipment 3
Driving rotary part 5 starts to rotate, and then the temperature-measuring part 1 affixed with rotary part 5 and rotating disk 2 is driven to rotate, due to treating
It surveys part 6 to be fixed in rotating disk 2, part 6 to be measured is rotated synchronously with temperature-measuring part 1, and the two is opposing stationary, then outside vacuum chamber
Temperature-measuring part 1 can steadily output numerical value, accurately represent the temperature of measured object in real time；It can by aforesaid operations step
Know, the temperature measurement structure for crossing vacuum chamber of the utility model, thermometric can be carried out to the part to be measured 6 rotated in vacuum chamber, it is real
The temperature on Shi Fanying testees surface exports and stablizes correlation values, and since part 6 to be measured and temperature-measuring part 1 are opposing stationary,
The loosening of 1 terminals of temperature-measuring part is also prevented from, improves the reliability of whole temperature measurement structure.
Further, the driving device includes motor and transmission mechanism 4, and the motor drives 4 band of transmission mechanism
It moves the rotary part 5 to rotate, the transmission mechanism 4 preferably includes driving pulley 7, driven pulley 8 and belt 9, the belt 9
It is set on the driving pulley 7 and the driven pulley 8, the driven pulley 8 is connect with the rotary part 5.Belt 9
Direction is preferably parallel with the outside wall surface of vacuum chamber, to achieve the purpose that make full use of space.Transmission mechanism 4 is passed using belt
Dynamic, being mainly in view of it has the advantages that transmitting range is longer.Wherein belt 9 be preferably toothed belt, with stable drive with
And the advantages of buffering absorbing, it can ensure the temperature measurement accuracy of temperature-measuring part 1.Certainly, as the case may be, transmission mechanism 4
It can be with other kinds of drive such as selected as gear drive, chain drive.
On the basis of above structure, the center of the rotary part 5 is equipped with channel, and the temperature-measuring part 1 is accommodated in institute
It states in channel, the outer diameter of the temperature-measuring part 1 is less than the internal diameter of the channel, close between the temperature-measuring part 1 and the channel
Envelope connection.It is preferably tightly connected between the temperature-measuring part 1 and the channel by clamping sleeve and sealing ring, the sealing ring is excellent
O-ring seals are selected as, the clamping sleeve is preferably column structure, the end face of the clamping sleeve and the end face of the O-ring seals
It abuts.
Specifically, the rotary part 5 is the magnetic fluid of hollow cylindrical body, the magnetic fluid and the vacuum cavity
Wall surface is tightly connected.Using magnetic fluid, the sealing effect of vacuum cavity can be improved, ensures the vacuum degree of vacuum cavity, is improved
The quality of technique.Mounting hole is equipped on the outer wall of vacuum cavity, magnetic fluid is close by sealing element 19 and the outer wall of vacuum cavity
Envelope is fixedly connected, and the sealing element 19 preferably using vacuum flange, to further enhance sealing effect, ensures the installation of magnetic fluid
Firm degree.
As shown in Figure 1, the rotating disk 2 is connect with the magnetic fluid, and the magnetic fluid can drive the rotating disk 2
With the temperature-measuring part 1 with the synchronous circular motion of speed work of setting.More specifically, the shell 10 of the magnetic fluid is sequentially set
There are the first shaft part, the second shaft part, third shaft part and the 4th shaft part of outer diameter from large to small, the sealing element 19 is set on described first
Between shaft part and second shaft part, first shaft part is set on the outside of the vacuum cavity, the second shaft part and the vacuum
The mounting hole cooperation of chamber, the end face of the third shaft part are abutted with the end face of the rotating disk 2, and the 4th shaft part is set on institute
It states the center of rotating disk 2 and is connect with the rotating disk 2.Wherein, rotating disk 2 is equipped with centre bore, and the 4th shaft part is accommodated in this
It is fixedly connected in heart hole with rotating disk 2, rotating disk 2 to be driven to rotate.
In order to intuitively quickly read the size of temperature value, the temperature measurement structure further includes temperature control device, the survey
Side of the warm component 1 far from the vacuum chamber is connect, and feed back real time temperature signal with the temperature control device.Temperature control device can
Think PLC or temperature controller.
The one end of the rotary part 5 on the outside of the vacuum chamber is connect with pedestal 11, and the pedestal 11 is by insulation material
Matter is made, and conductive component 13 is provided on the pedestal 11, the first lead-out wire and the conductive component of the temperature-measuring part 1
13 electrical connections.Pedestal 11 is preferably disposed to the end of rotary part 5, and it is preferably cylindricality.Pedestal 11 is fixed with rotary part 5 to be connected
It connects.Pedestal 11 is preferably made of polytetrafluoro material.Conductive component 13 is preferably arranged to conducting ring, preferable using electric conductivity
Red copper is made, and is arranged on the base 11.The electric signal of temperature-measuring part 1 can be drawn out to by temperature control device by conductive component 13
On, to facilitate observation.
As shown in Figure 1, the temperature measurement structure further includes carbon brush holder 14,15 end of carbon brush on the carbon brush holder 14 with it is described
The outside of conductive component 13 abuts, the second lead-out wire that the one end of the carbon brush 15 far from the conductive component 13 is equipped with, and described the
Two lead-out wires are connect across the carbon brush holder 14 with the temperature control device.The vertical section of the carbon brush holder 14 is preferably rectangular, and
Carbon brush holder 14 is also made of the insulating materials of such as polytetrafluoro, to ensure insulation effect.
Preferably, the carbon brush holder 14 is equipped with groove, and the groove is sequentially arranged spring and the carbon brush from inside to outside
15, the spring is in compressive state, and the carbon brush 15 is made to be in close contact always with 13 outside of conductive component.Groove is indulged
Section is preferably rectangular, and the axis of groove is preferably vertical with the axis of conductive component 13.Conductive component 13, groove, spring and carbon
The quantity of brush 15 is according to the first lead-out wire and the quantity set of the second lead-out wire, in the present embodiment, conductive component 13, groove, bullet
Spring and carbon brush 15 are to be pushed into spring and carbon brush 15 in the groove inside 2 carbon brush holders 14 successively, and groove can be that carbon brush 15 carries
For guiding role, spring can push carbon brush 15, it is made to be in close contact with conductive component 13.It is conductive when rotary part 5 rotates
Component 13 also follows rotation, and under the action of the spring, the carbon brush 15 of carbon brush holder 14 can be compressed with the conductive component 13 of rotation,
The two realizes sliding contact, and well conducting.The setting of above structure can draw part 6 to be measured more convenient and flexiblely
Temperature signal.
In addition, the first binding post 12 is drawn in 13 inside of conductive component, first lead-out wire is fixed on described first
On binding post 12；One end far from the carbon brush 15 is equipped with the second binding post 16, second lead-out wire on the carbon brush holder 14
It is fixed on second binding post 16；And it is cased with insulating respectively on first binding post 12 and second binding post 16
Set, preferably ceramic insulation set.In the present embodiment, the first binding post 12 is 2, and 2 the first binding posts 12 are symmetricly set on
The both sides of temperature-measuring part 1 are fixedly connected with pedestal 11.First binding post 12 is preferably wrapped over inside pedestal 11, and end is stretched out
Pedestal 11.Second binding post 16 is also set as 2, and 2 the second binding posts 16 are arranged on the tail portion of carbon brush holder 14, and temperature-measuring part is believed
It number draws, that realizes movement temperature-measuring part signal stablizes output, and the second binding post 16 preferably connect with temperature controller or PLC, with
Temperature-measuring part signal is converted into temperature value, intuitively reads temperature height.
When the first binding post 12 is 2,2 the first binding posts 12 are connect with twin wire thermal resistance, twin wire thermal resistance
The thermometric of part 6 to be measured can be directly realized by, such structure is relatively simple, and cost is relatively low.
More specifically, the driving device 3 is equipped with connecting plate 17, and the connecting plate 17 is connect with the rotary part 5,
The end vertical of the connecting plate 17 is equipped with stent 18, and the stent 18 is connect with second connecting pole 16.And described
Ceramic blanket is also preferably equipped between two connecting poles 16 and the stent 18.Stent 18 plays fixed function to the second connecting pole 16,
Since the second binding post 16 is electrically connected with the second lead-out wire of carbon brush 15, in order to ensure the second binding post 16 insulate, preferably
First packet sets ceramic blanket in two connecting poles, 16 outside, is then connect again with stent 18.
The structure, feature and effect of the utility model are described in detail based on the embodiments shown in the drawings, with
Upper described is only the preferred embodiment of the utility model, but the utility model is to limit practical range shown in drawing, it is every according to
Change that conception according to the utility model is made or the equivalent embodiment for being revised as equivalent variations, still without departing from specification and figure
When showing covered spirit, it should be within the protection scope of the present utility model.
Claims (10)
1. a kind of temperature measurement structure for crossing vacuum chamber, which is characterized in that including temperature-measuring part (1), rotary part (5), set on true
The indoor rotating disk of cavity (2) and the driving device (3) outside the vacuum chamber, the driving device (3) with it is described
Rotary part (5) connects, and the rotary part (5) is driven to rotate, and the rotary part (5) is extended in the vacuum chamber
Connect with the rotating disk (2), the temperature-measuring part (1) through the rotary part (5), and in the rotating disk (2)
Part (6) connection to be measured.
2. the temperature measurement structure according to claim 1 for crossing vacuum chamber, which is characterized in that the driving device includes motor
With transmission mechanism (4), the motor drives the transmission mechanism (4) to drive rotary part (5) rotation, the transmission mechanism
(4) including driving pulley (7), driven pulley (8) and belt (9), the belt (9) is set in the driving pulley (7) and institute
It states on driven pulley (8), the driven pulley (8) connect with the rotary part (5).
3. the temperature measurement structure according to claim 1 for crossing vacuum chamber, which is characterized in that in the rotary part (5)
The heart is equipped with channel, and the temperature-measuring part (1) is accommodated in the channel, and the outer diameter of the temperature-measuring part (1) is less than the channel
Internal diameter, be tightly connected between the temperature-measuring part (1) and the channel.
4. the temperature measurement structure according to any one of claims 1 to 3 for crossing vacuum chamber, which is characterized in that the rotating part
Part (5) is the magnetic fluid of hollow cylindrical body, and the wall surface of the magnetic fluid and the vacuum cavity is tightly connected.
5. it is according to claim 4 cross vacuum chamber temperature measurement structure, which is characterized in that the rotating disk (2) with it is described
Magnetic fluid connects, and the magnetic fluid can drive the rotating disk (2) and the temperature-measuring part (1) to make together with the speed of setting
Walk circular motion.
6. the temperature measurement structure according to claim 1 for crossing vacuum chamber, which is characterized in that the temperature measurement structure further includes temperature
Device is controlled, side of the temperature-measuring part (1) far from the vacuum chamber is connect, and feed back real time temperature with the temperature control device
Signal.
7. the temperature measurement structure according to claim 6 for crossing vacuum chamber, which is characterized in that the rotary part (5) is in institute
It states one end on the outside of vacuum chamber to connect with pedestal (11), the pedestal (11) is made of isolation material, and the pedestal (11)
On be provided with conductive component (13), the first lead-out wire of the temperature-measuring part (1) is electrically connected with the conductive component (13).
8. the temperature measurement structure according to claim 7 for crossing vacuum chamber, which is characterized in that the temperature measurement structure further includes carbon
Brush holder (14) is abutted on the outside of carbon brush (15) end and the conductive component (13) on the carbon brush holder (14), the carbon brush
(15) the second lead-out wire that one end far from the conductive component (13) is equipped with, second lead-out wire pass through the carbon brush holder
(14) it is connect with the temperature control device.
9. the temperature measurement structure according to claim 8 for crossing vacuum chamber, which is characterized in that the carbon brush holder (14) is equipped with
Groove, the groove are sequentially arranged spring and the carbon brush (15) from inside to outside, and the spring is in compressive state, makes the carbon
(15) are brushed with being in close contact on the outside of the conductive component (13).
10. the temperature measurement structure according to claim 8 for crossing vacuum chamber, which is characterized in that in the conductive component (13)
The first binding post (12) is drawn in side, and first lead-out wire is fixed on first binding post (12)；The carbon brush holder (14)
Upper one end far from the carbon brush (15) is equipped with the second binding post (16), and second lead-out wire is fixed on second binding post
(16) on；And it is cased with insulation sleeve respectively on first binding post (12) and second binding post (16).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721625254.8U CN207585793U (en) | 2017-11-28 | 2017-11-28 | A kind of temperature measurement structure for crossing vacuum chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721625254.8U CN207585793U (en) | 2017-11-28 | 2017-11-28 | A kind of temperature measurement structure for crossing vacuum chamber |
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| Publication Number | Publication Date |
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| CN207585793U true CN207585793U (en) | 2018-07-06 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109405988A (en) * | 2018-12-22 | 2019-03-01 | 湖南玉丰真空科学技术有限公司 | Online movement monitoring temperature measuring device in a kind of vacuum chamber |
| CN109520640A (en) * | 2018-12-27 | 2019-03-26 | 北京航天长征飞行器研究所 | Moving target surface contact thermography device, system and method under vacuum low-temperature environment |
| CN114764030A (en) * | 2022-04-13 | 2022-07-19 | 东莞市华升真空镀膜科技有限公司 | Temperature detection mechanism and coating equipment with same |
-
2017
- 2017-11-28 CN CN201721625254.8U patent/CN207585793U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109405988A (en) * | 2018-12-22 | 2019-03-01 | 湖南玉丰真空科学技术有限公司 | Online movement monitoring temperature measuring device in a kind of vacuum chamber |
| CN109520640A (en) * | 2018-12-27 | 2019-03-26 | 北京航天长征飞行器研究所 | Moving target surface contact thermography device, system and method under vacuum low-temperature environment |
| CN109520640B (en) * | 2018-12-27 | 2019-08-23 | 北京航天长征飞行器研究所 | Moving target surface contact thermography device, system and method under vacuum low-temperature environment |
| CN114764030A (en) * | 2022-04-13 | 2022-07-19 | 东莞市华升真空镀膜科技有限公司 | Temperature detection mechanism and coating equipment with same |
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Address after: 102299 room a129-1, No. 10, Zhongxing Road, science and Technology Park, Changping District, Beijing Patentee after: DONGTAI HI-TECH EQUIPMENT TECHNOLOGY (BEIJING) Co.,Ltd. Address before: 102299 room a129-1, No. 10, Zhongxing Road, science and Technology Park, Changping District, Beijing Patentee before: Beijing Chuangyu Technology Co.,Ltd. Address after: 102299 room a129-1, No. 10, Zhongxing Road, science and Technology Park, Changping District, Beijing Patentee after: DONGTAI HI-TECH EQUIPMENT TECHNOLOGY Co.,Ltd. Address before: 102299 room a129-1, No. 10, Zhongxing Road, science and Technology Park, Changping District, Beijing Patentee before: DONGTAI HI-TECH EQUIPMENT TECHNOLOGY (BEIJING) Co.,Ltd. |
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Effective date of registration: 20210209 Address after: Unit 611, unit 3, 6 / F, building 1, yard 30, Yuzhi East Road, Changping District, Beijing 102208 Patentee after: Zishi Energy Co.,Ltd. Address before: 102299 room a129-1, No. 10, Zhongxing Road, science and Technology Park, Changping District, Beijing Patentee before: DONGTAI HI-TECH EQUIPMENT TECHNOLOGY Co.,Ltd. |