CN216030144U - Quartz semiconductor grinding disc and grinding equipment applying same - Google Patents
Quartz semiconductor grinding disc and grinding equipment applying same Download PDFInfo
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- CN216030144U CN216030144U CN202122102968.3U CN202122102968U CN216030144U CN 216030144 U CN216030144 U CN 216030144U CN 202122102968 U CN202122102968 U CN 202122102968U CN 216030144 U CN216030144 U CN 216030144U
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Abstract
The application relates to a quartz semiconductor grinding disc which comprises a disc body, wherein a plurality of material grooves are formed in one end face of the disc body. This application has before the grinding, pack the abrasive in the silo, start driving motor thereupon and drive the abrasive disc rotation, the abrasive that fills in the silo overflows from the silo under the effect of centrifugal force, the abrasive disc grinds quartz member through the abrasive that overflows from the silo, under the restriction of silo, effective abrasive is difficult for being thrown away from the abrasive disc under the effect of the centrifugal force of abrasive disc in a large number, when having reduced the waste of effective abrasive, the abrasive that prefills in the silo can supply the grinding dose on the abrasive disc roof under the effect of abrasive disc centrifugal force, the number of times that the staff shut down and supply the abrasive has been reduced, and then the effect of grinding efficiency has been improved.
Description
Technical Field
The application relates to the field of processing equipment for epitaxial quartz pieces of semiconductors, in particular to a quartz semiconductor grinding disc and grinding equipment applying the grinding disc.
Background
Quartz is a common material for manufacturing semiconductors, and plate-shaped semiconductors manufactured by quartz need to be ground to ensure flatness.
Referring to fig. 1, the grinding apparatus in the related art includes a mounting bracket 2, a recycling bin 21 is provided on the mounting bracket 2, the recycling bin 21 is provided with an upper opening, a horizontal grinding disc is rotatably mounted in the recycling bin 21, and a driving motor 22 in transmission connection with the grinding disc is further fixedly mounted on the mounting bracket 2.
When the staff need polish to the quartz member, at first put the abrasive material on the abrasive disc roof, then the staff compresses tightly the roof at the abrasive disc with the face of treating of quartz member through the hand, start driving motor 22, driving motor 22 drives the abrasive disc and rotates and grind the quartz member, the piece of being worn down on the quartz member and the abrasive material that became invalid can fall into collection box 21 under the effect of the centrifugal force of abrasive disc and concentrate the collection, make the abrasive material that became invalid and quartz piece be difficult for producing the pollution to external environment.
With respect to the related art among the above, the inventors consider that the following drawbacks exist: effective grinding agent on the high-speed pivoted abrasive disc also can throw away from the abrasive disc under the effect of the centrifugal force of abrasive disc, has caused great grinding agent extravagant, and the staff need shut down many times when grinding quartz spare and add the grinding effect of grinding agent in order to guarantee quartz spare, has reduced the grinding efficiency of quartz spare.
SUMMERY OF THE UTILITY MODEL
In order to solve the problem that effective grinding agent can be thrown away from the abrasive disc and fly to cause the waste of grinding agent and reduced grinding efficiency when the abrasive disc rotates, the application provides a quartz semiconductor abrasive disc and applied this abrasive disc's grinding device.
In a first aspect, the present application provides a quartz semiconductor grinding disc, which adopts the following technical scheme:
a quartz semiconductor grinding disc comprises a disc body, wherein a plurality of material grooves are formed in one end face of the disc body.
Through adopting above-mentioned technical scheme, before the grinding, pack the abrasive in the silo, start driving motor thereupon and drive the abrasive disc rotation, the abrasive that fills in the silo overflows from the silo under the effect of centrifugal force, the abrasive disc grinds quartz member through the abrasive that overflows from the silo, under the restriction of silo, effective abrasive is difficult for being thrown away from the abrasive disc under the effect of the centrifugal force of abrasive disc in a large number, when having reduced the waste of effective abrasive, the abrasive that the silo prefilled can supplement the grinding agent on the abrasive disc roof under the effect of abrasive disc centrifugal force, the number of times that the staff shut down and supply the abrasive has been reduced, and then grinding efficiency has been improved.
Optionally, the material grooves are annular and coaxial with the tray body, and all the material grooves are concentrically distributed on the tray body.
Through adopting above-mentioned technical scheme, the silo that is cyclic annular setting makes abrasive material in the silo when the abrasive disc rotates distribute comparatively evenly, and then makes the abrasive material that spills over from the silo comparatively even for the grinding effect of each position of the abrasive surface of the work piece of carrying out the grinding on the abrasive disc is comparatively even, and then has improved the final grinding effect to quartz spare.
Optionally, the cross section of the trough is gradually reduced towards the bottom of the trough.
Through adopting above-mentioned technical scheme, the abrasive of silo bottom is difficult for remaining in the silo bottom, and the staff of being convenient for is to the clearance of silo.
In a second aspect, the present application provides a grinding apparatus, which adopts the following technical solution:
the utility model provides a grinding equipment, includes the mounting bracket, be provided with the collection box on the mounting bracket, driving motor is still installed to the mounting bracket, and above-mentioned quartz semiconductor abrasive disc level is rotated and is installed in the collection box and with the driving motor transmission is connected, one side of the diapire of collection box is run through and has been seted up the clearance mouth, the collection box diapire be provided with the shrouding that the clearance mouth seals the cover, the shrouding pass through the mounting with the collection box is connected, the mounting bracket deviates from the vertical sliding in one side of clearance mouth installs two piece at least bracing pieces, the mounting bracket is provided with and is used for the drive the driving piece that the bracing piece slided.
Through adopting above-mentioned technical scheme, piece and the discarded grinding agent that produces among the grinding process are got rid of under the effect of abrasive disc's centrifugal force and are flown in the collection box, when debris in the collection box pile up when more, the staff drives one side of bracing piece through the driving piece and slides and prop up the mounting bracket, make the collection box be the slope, then open the shrouding, the staff is washed out debris from the collection box through the clearance mouth through high-pressure rivers, and because the collection box diapire is the slope, make the water that has debris of the mixture in the collection box be difficult for detaining in the collection box, and then make the clearance of collection box comparatively convenient, and the clearance effect is better.
Optionally, the junction between the inner walls of the side walls of the recycling bin is provided with a first fillet, and the junction between the inner walls of the side walls of the recycling bin and the inner walls of the bottom wall of the recycling bin is also provided with a first fillet.
Through adopting above-mentioned technical scheme, the junction between the collection box inner wall is first fillet form and makes debris be difficult for detaining the corner department in the collection box for the clearance of collection box is more convenient.
Optionally, the driving piece include a plurality of with the support motor of bracing piece one-to-one, the support motor is installed on the mounting bracket, rotate on the mounting bracket install many with the lead screw of support motor one-to-one, the one end of lead screw with the transmission of support motor one-to-one is connected, the other end one-to-one of lead screw passes the bracing piece and with bracing piece screw-thread fit, the axis of lead screw with the glide direction of bracing piece is parallel.
Through adopting above-mentioned technical scheme, when needing to clear up the collection box, the staff starts the support motor, and the support motor drives the lead screw and rotates, and then drives the bracing piece and slides and prop up one side of mounting bracket and collection box, and realizes the auto-lock through the screw-thread fit between lead screw and the bracing piece for the support motor can adopt ordinary motor, and the cost is lower.
Optionally, the mounting includes the clearance pipeline of collection box diapire installation, the clearance pipeline will the clearance mouth surrounds, clearance pipeline lateral wall circumference interval is equipped with a plurality of recesses, shrouding a terminal surface install with clearance pipeline complex go-between, circumference interval is provided with a plurality of with the elastic plate of recess one-to-one on the go-between, the elastic plate be provided with recess matched with is protruding, go-between cooperation cover is established the clearance pipeline is kept away from one of collection box is served, protruding one-to-one cooperation is inlayed and is established in the recess.
Through adopting above-mentioned technical scheme, the shrouding just will clear up the mouth and seal on the collection box through the cooperation fixed mounting between the recess of clearance pipeline and the arch of elastic plate, and getting of shrouding is put comparatively conveniently, and makes the shrouding seal the clearance mouth through the cooperation between go-between and the clearance pipeline, and debris in the collection box are difficult for revealing from the clearance mouth, simultaneously because the inner wall of clearance pipeline is smooth state for it is comparatively convenient to clear up on the clearance pipeline inner wall.
Optionally, a roller is rotatably mounted on one end of the support rod, which is away from the mounting rack, the axis of the roller is horizontal and perpendicular to the sliding direction of the support rod, and a second fillet is arranged on one side edge of the bottom wall of the mounting rack, which is away from the roller; the two side edges of the cleaning opening in the length direction coincide with the side walls of the recovery box, and the one side edge of the cleaning opening in the width direction coincides with the side walls of the recovery box.
Through adopting above-mentioned technical scheme, the bracing piece cooperates through between gyro wheel and the ground and makes the bracing piece be difficult for producing the damage to ground when supporting the mounting bracket, and the mounting bracket diapire side that is the second fillet shape has same effect, simultaneously because the side of clearance mouth flushes with the lateral wall of collection box for debris in the collection box can not remain on the collection box diapire of clearance mouth department, has further reduced the clearance degree of difficulty of collection box.
In summary, the present application includes at least one of the following beneficial technical effects:
1. under the limitation of the trough, the effective grinding agent is not easy to be thrown away from the grinding disc in a large amount under the action of the centrifugal force of the grinding disc, so that the waste of the effective grinding agent is reduced, the grinding agent pre-filled in the trough can supplement the grinding agent on the top wall of the grinding disc under the action of the centrifugal force of the grinding disc, the times of stopping and supplementing the grinding agent by workers are reduced, and the grinding efficiency is improved;
2. the annularly arranged material groove enables the abrasive in the material groove to be distributed more uniformly when the grinding disc rotates, so that the abrasive overflowing from the material groove is more uniform, the grinding effect of each part of the grinding surface of the workpiece to be ground on the grinding disc is more uniform, and the final grinding effect of the quartz piece is improved;
3. the grinding agent of silo bottom is difficult for remaining in the silo bottom, and the staff of being convenient for is to the clearance of silo.
Drawings
Fig. 1 is a perspective view of a related art of the present application.
Fig. 2 is a perspective view of the tray body of the present application.
Fig. 3 is a cross-sectional schematic view of the U-shaped slot of the disc of the present application.
Fig. 4 is a schematic cross-sectional view of the V-groove of the disc of the present application.
Fig. 5 is a perspective view of the present application with the tray mounted to the mounting bracket.
Fig. 6 is an exploded view of the mount of the present application, with the foot and mount broken away.
Reference numerals: 1. a tray body; 11. a trough; 2. a mounting frame; 21. a recycling bin; 211. cleaning the opening; 22. a drive motor; 23. closing the plate; 24. a support bar; 25. footing; 3. a first rounded corner; 4. a drive member; 41. a support motor; 42. a screw rod; 5. a fixing member; 51. cleaning the pipeline; 511. a groove; 52. a connecting ring; 53. an elastic plate; 531. a protrusion; 6. a roller; 7. a second rounded corner.
Detailed Description
The present application is described in further detail below with reference to figures 2-6.
In a first aspect, an embodiment of the present application discloses a quartz semiconductor grinding disc, with reference to fig. 2 and fig. 3, including a disc body 1 in a flat cylindrical shape, a plurality of annular material troughs 11 are coaxially disposed on one end surface of the disc body 1, a trough width of each material trough 11 is not less than 1.5 mm and not more than 4 mm, and an interval between two adjacent material troughs 11 is not less than 30 mm and not more than 100 mm.
Referring to fig. 3 and 4, the cross section of the trough 11 is gradually reduced toward the bottom of the trough 11, and the bottom of the trough 11 in this embodiment is in a semi-arc shape or a V shape.
The abrasive is placed in the annular trough 11, and the abrasive can overflow from the trough 11 relatively uniformly when the grinding disc rotates, and meanwhile, the abrasive is not easy to remain in the trough 11.
In a second aspect, the embodiment of the present application discloses a grinding device, refer to fig. 5 and 6, including the mounting bracket 2 that is cuboid form, the bottom of mounting bracket 2 is provided with four footing 25, and mounting bracket 2 roof fixed mounting has the collection box 21 that has the upper shed, and outside one side of collection box 21 extended to mounting bracket 2, and the junction between the collection box 21 inner wall all was provided with first fillet 3.
Referring to fig. 5 and 6, a rectangular cleaning opening 211 is formed through the bottom wall of the side of the recycling bin 21 extending out of the mounting frame 2, two side edges of the cleaning opening 211 in the length direction are overlapped with two opposite side walls of the recycling bin 21, and one side edge of the cleaning opening 211 in the width direction is overlapped with one side wall of the recycling bin 21. The collection box 21 is provided with the shrouding 23 that is used for sealing clearance mouth 211, and the shrouding 23 is provided with mounting 5, and mounting 5 includes the clearance passageway of the transversal rectangle of personally submitting of fixed mounting on the collection box 21 diapire of clearance mouth 211 department, and the one end that clearance passageway and collection box 21 are connected covers clearance mouth 211, and the inside wall of clearance passageway flushes with the lateral wall of clearance mouth 211.
Referring to fig. 5 and 6, the fixing member 5 further includes a rectangular connecting ring 52 fixedly mounted on one end surface of the closing plate 23, and the connecting ring 52 is fittingly inserted into the cleaning pipe 51. The four sides of the end face of the connecting ring 52 away from the sealing plate 23 are fixedly provided with an elastic plate 53, the elastic plate 53 on one short side and the elastic plate 53 on the adjacent long side are integrally connected with each other, and the elastic plate 53 on the other short side and the elastic plate 53 on the adjacent long side are also integrally connected with each other. The side wall of the cleaning channel is provided with a plurality of grooves 511 at intervals in the circumferential direction, all the grooves 511 are connected with each other and form an annular whole, the elastic plate 53 is integrally provided with a plurality of protrusions 531 corresponding to the grooves 511 one by one, and all the protrusions 531 are also connected with each other integrally to form strip-shaped protrusions 531 matched with the annular grooves 511.
Referring to fig. 5 and 6, the connection ring 52 is fittingly sleeved on the lower end of the cleaning pipeline 51, the lower end of the cleaning pipeline 51 is fitted and tightly abutted against the sealing plate 23, the protrusion 531 on the elastic plate 53 is fittingly inserted in the groove 511, the sealing plate 23 is fixed on the cleaning pipeline 51 by the fit between the protrusion 531 and the groove 511, and the cleaning pipeline 51 is sealed by the sealing plate 23 and the connection pipe.
Referring to fig. 5 and 6, a driving motor 22 is fixedly installed in the mounting frame 2, the grinding disc is horizontally and rotatably installed in the recycling bin 21 by using an end surface provided with the trough 11 as a top wall, and the grinding disc is in transmission connection with the driving motor 22.
Referring to fig. 5 and 6, the bottom wall of two feet 25 departing from cleaning pipeline 51 runs through and has been seted up the spout, the length direction of spout is vertical, and the spout fit in slides and installs bracing piece 24, mounting bracket 2 is provided with two driving pieces 4 corresponding with two bracing pieces 24, driving piece 4 includes support motor 41 of fixed mounting on mounting bracket 2 and rotates the lead screw 42 of installing on mounting bracket 2, lead screw 42 passes bracing piece 24 and with bracing piece 24 screw-thread fit, the axis of lead screw 42 is parallel with the glide direction of bracing piece 24. One end of the screw rod 42 is coaxially and fixedly connected with the output shaft of the support motor 41.
Referring to fig. 5 and 6, the lower end of the supporting rod 24 is rotatably provided with the roller 6, the axis of the roller 6 is horizontal and perpendicular to the sliding direction of the supporting rod 24, and a second fillet 7 is arranged on one side of the bottom walls of the two bottom feet 25 at the lower side of the cleaning opening 211 departing from the supporting device.
Referring to fig. 5 and 6, the mounting frame 2 is fixedly mounted with two switches, one of which is connected with the driving motor 22 and the other of which is connected with the two supporting motors 41. The supporting motor 41 is started by the switch, the supporting motor 41 drives the screw rod 42 to rotate, and then the supporting rod 24 is driven to slide to support one side wall of the mounting rack 2, so that the recycling bin 21 is inclined.
The implementation principle of the grinding equipment in the embodiment of the application is as follows: when clearing up collection box 21, start earlier that support motor 41 drives lead screw 42 rotates, and then drive bracing piece 24 and slide and prop up one side of mounting bracket 2 and collection box 21, then take off shrouding 23 from clearance pipeline 51, wash collection box 21 inside through high-pressure rivers, the water liquid that mixes there is debris is discharged along clearance pipeline 51 from clearance mouth 211.
The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.
Claims (6)
1. The utility model provides a quartz semiconductor grinding disk, includes disk body (1), its characterized in that: a plurality of silos (11) have been seted up to a terminal surface of disk body (1), silo (11) be cyclic annular and with disk body (1) is coaxial, all silo (11) are concentric distribution on disk body (1), the cross section of silo (11) is along the orientation the tank bottom direction of silo (11) reduces gradually.
2. The utility model provides a grinding device, includes mounting bracket (2), be provided with collection box (21) on mounting bracket (2), driving motor (22), its characterized in that are still installed to mounting bracket (2): the quartz semiconductor grinding disc of claim 1 is installed in the recycling bin (21) in a horizontally rotating manner and is in transmission connection with the driving motor (22), a cleaning opening (211) is formed in one side of the bottom wall of the recycling bin (21) in a penetrating manner, a sealing plate (23) for sealing and covering the cleaning opening (211) is arranged on the bottom wall of the recycling bin (21), the sealing plate (23) is connected with the recycling bin (21) through a fixing piece (5), at least two supporting rods (24) are vertically slidably installed on one side, away from the cleaning opening (211), of the mounting frame (2), and the mounting frame (2) is provided with a driving piece (4) for driving the supporting rods (24) to slide.
3. A grinding apparatus according to claim 2, wherein: the junction between the inner wall of the lateral wall of collection box (21) all is provided with first fillet (3), the inner wall of collection box (21) lateral wall with the junction between the inner wall of collection box (21) diapire also all is provided with first fillet (3).
4. A grinding apparatus according to claim 3, wherein: driving piece (4) including a plurality of with bracing piece (24) one-to-one support motor (41), support motor (41) and install on mounting bracket (2), rotate on mounting bracket (2) install many with support motor (41) one-to-one lead screw (42), the one end of lead screw (42) with support motor (41) one-to-one transmission and connect, the other end one-to-one of lead screw (42) passes bracing piece (24) and with bracing piece (24) screw-thread fit, the axis of lead screw (42) with the direction of sliding of bracing piece (24) is parallel.
5. A grinding apparatus according to claim 2, wherein: mounting (5) include clearance pipeline (51) of collection box (21) diapire installation, clearance pipeline (51) will clearance mouth (211) surround, a plurality of recesses (511) have been seted up at clearance pipeline (51) lateral wall circumference interval, shrouding (23) a terminal surface install with clearance pipeline (51) complex go-between (52), go-between (52) go up the circumference interval be provided with a plurality of with elastic plate (53) of recess (511) one-to-one, elastic plate (53) be provided with recess (511) matched with protruding (531), go-between (52) cooperation cover is established clearance pipeline (51) is kept away from one of collection box (21) is served, protruding (531) one-to-one cooperation is inlayed and is established in recess (511).
6. A grinding apparatus according to claim 2, wherein: a roller (6) is rotatably mounted at one end of the support rod (24) departing from the mounting rack (2), the axis of the roller (6) is horizontal and vertical to the sliding direction of the support rod (24), and a second round angle (7) is arranged at one side edge of the bottom wall of the mounting rack (2) departing from the roller (6); the two side edges of the cleaning opening (211) in the length direction coincide with the side walls of the recovery box (21), and one side edge of the cleaning opening (211) in the width direction coincides with the side walls of the recovery box (21).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122102968.3U CN216030144U (en) | 2021-09-02 | 2021-09-02 | Quartz semiconductor grinding disc and grinding equipment applying same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122102968.3U CN216030144U (en) | 2021-09-02 | 2021-09-02 | Quartz semiconductor grinding disc and grinding equipment applying same |
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| Publication Number | Publication Date |
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| CN216030144U true CN216030144U (en) | 2022-03-15 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202122102968.3U Active CN216030144U (en) | 2021-09-02 | 2021-09-02 | Quartz semiconductor grinding disc and grinding equipment applying same |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114734371A (en) * | 2022-04-06 | 2022-07-12 | 深圳市比华德科技有限公司 | Semiconductor manufacturing equipment for avoiding high-temperature explosion based on electronic industry |
-
2021
- 2021-09-02 CN CN202122102968.3U patent/CN216030144U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114734371A (en) * | 2022-04-06 | 2022-07-12 | 深圳市比华德科技有限公司 | Semiconductor manufacturing equipment for avoiding high-temperature explosion based on electronic industry |
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