CN215995980U

CN215995980U - Vacuum-pumping device for vacuum furnace

Info

Publication number: CN215995980U
Application number: CN202121251494.2U
Authority: CN
Inventors: 董家海
Original assignee: Changshu Tongle Electronic Materials Co ltd
Current assignee: Changshu Tongle Electronic Materials Co ltd
Priority date: 2021-06-04
Filing date: 2021-06-04
Publication date: 2022-03-11
Anticipated expiration: 2031-06-04

Abstract

The utility model discloses a vacuumizing device for a vacuum furnace, which comprises a fixed frame, a vacuum furnace body, a furnace cover, a square box, a vacuum pump, a first filtering device and a second filtering device, wherein the fixed frame is fixedly provided with the vacuum furnace body and the square box, the vacuum furnace is fixedly connected with the furnace cover, the furnace cover is fixedly connected with an exhaust pipeline, the square box is internally and fixedly provided with the first filtering device and the vacuum pump, one end of the exhaust pipeline, far away from the furnace cover, is fixedly connected with the first filtering device, the first filtering device is fixedly connected with the input end of the vacuum pump, and the output end of the vacuum pump is fixedly connected with the second filtering device. Harmful gas is prevented from existing in the air pumped by the vacuum pump, and the safety of the working environment is ensured.

Description

Vacuum-pumping device for vacuum furnace

Technical Field

The utility model relates to the field of vacuumizing, in particular to a vacuumizing device for a vacuum furnace.

Background

Vacuum vapor deposition stove is at the during operation, need carry out evacuation processing in the furnace body, but the during repetitive operation, can have certain dust and harmful gas in the furnace body, directly carries out the evacuation through the vacuum pump, then discharges, has not only polluted operational environment, and the dust can reduce vacuum pump's life simultaneously.

SUMMERY OF THE UTILITY MODEL

The utility model mainly aims to provide a vacuumizing device for a vacuum furnace, which can prevent dust from entering a vacuum pump by performing first-step dust filtration on air pumped out of the vacuum furnace through a first filtering device, prolong the service life of the vacuum pump, prevent harmful gas from existing in the air pumped out of the vacuum pump by performing second-step filtration on the air exhausted by the vacuum pump through a second filtering device, and ensure the safety of a working environment.

In order to achieve the purpose, the utility model adopts the technical scheme that:

the utility model provides an evacuating device for vacuum furnace, including the mount, the vacuum furnace body, the bell, the square chest, the vacuum pump, first filter equipment and second filter equipment, fixed mounting has vacuum furnace body and square chest on this mount, fixedly connected with bell on this vacuum furnace, fixedly connected with exhaust duct on this bell, this square chest fixed mounting has first filter equipment and vacuum pump, the first filter equipment of one end fixedly connected with of bell is kept away from to this exhaust duct, the input fixed connection of this first filter equipment and vacuum pump, the output fixedly connected with second filter equipment of this vacuum pump.

Further, first filter equipment includes the shell body, first filter layer, the second filter layer, third filter layer and dustproof filter mantle, this first filter layer, the second filter layer, the equal fixed mounting of third filter layer and dustproof filter mantle is in the shell body, this shell body up end is fixed and has been seted up into the gas port, this shell body lower extreme is fixed and has been seted up the gas outlet, this first filter layer, second filter layer and third filter layer fixed mounting are gone into between gas port and the gas outlet, fixed cover is equipped with dustproof filter mantle on this gas outlet.

Further, the second filter equipment is including filtering the jar, go into the gas pipeline, separation otter board and fixed isolation frame, should filter the one end up end of jar and fixedly seted up the connecting hole, and this connecting hole in-connection has into the gas pipeline, should filter and fixedly seted up medium entry and discharge port on the jar, and fixed mounting has fixed isolation frame in the filtration jar of this discharge port department, should fix and be equipped with the separation otter board between isolation frame and the filtration jar lower extreme inner wall.

Furthermore, the gas inlet pipeline penetrates through the separation screen plate and is arranged at the lower end of the separation screen plate, and a plurality of exhaust holes are fixedly formed in the part of the gas inlet pipeline arranged at the lower end of the separation screen plate.

Furthermore, the separation screen plate comprises an outer frame and a corrosion-resistant separation screen fixedly arranged on the inner wall of the outer frame.

Compared with the prior art, the utility model has the beneficial effects that:

according to the utility model, the first filtering device is used for filtering the dust in the first step on the air pumped out of the vacuum furnace, so that the dust can be prevented from entering the vacuum pump, the service life of the vacuum pump is prolonged, and then the second filtering device is used for filtering the air exhausted by the vacuum pump in the second step, so that harmful gas in the air pumped out by the vacuum pump is prevented, and the safety of the working environment is ensured.

Drawings

FIG. 1 is a front view of the present invention;

FIG. 2 is a view showing the internal structure of the square box according to the present invention;

fig. 3 is a cross-sectional view of a second filter device of the present invention.

Reference numerals

1. A fixed mount; 2. a vacuum furnace body; 3. a furnace cover; 4. a square box; 5. a vacuum pump; 6. a first filtering device; 7. a second filtering device; 8. an exhaust duct; 9. an outer housing; 10. a first filter layer; 11. a second filter layer; 12. a third filter layer; 13. a dustproof filter cover; 14. an air inlet; 15. an air outlet; 16. a filter tank; 17. a gas inlet pipe; 18. separating the screen plate; 19. fixing an isolation frame; 20. connecting holes; 21. a media inlet; 22. a discharge port; 23. and (4) exhausting holes.

Detailed Description

The following detailed description of the preferred embodiments of the present invention, taken in conjunction with the accompanying drawings, will make the advantages and features of the utility model easier to understand by those skilled in the art, and thus will clearly and clearly define the scope of the utility model.

Referring to fig. 1-3, a vacuum-pumping device for a vacuum furnace comprises a fixing frame 1, a vacuum furnace body 2, a furnace cover 3, a square box 4, a vacuum pump 5, a first filtering device 6 and a second filtering device 7, wherein the fixing frame 1 is fixedly provided with a vacuum furnace body and the square box 4, the vacuum furnace is fixedly connected with the furnace cover 3, the furnace cover 3 is fixedly connected with an exhaust pipeline 8, the square box 4 is internally and fixedly provided with the first filtering device 6 and the vacuum pump 5, one end of the exhaust pipeline 8 far away from the furnace cover 3 is fixedly connected with the first filtering device 6, the first filtering device 6 is fixedly connected with an input end of the vacuum pump 5, and an output end of the vacuum pump 5 is fixedly connected with the second filtering device 7.

Carry out first step dust through the air of first filter equipment 6 taking out in to the vacuum furnace and filter, can prevent that the dust from entering into vacuum pump 5, improved vacuum pump 5's life, rethread second filter equipment 7 carries out the filtration of second step to vacuum pump 5 exhaust air, prevents to have harmful gas in the air that vacuum pump 5 took out, has guaranteed operational environment's security

First filter equipment 6 includes shell body 9, first filter layer 10, second filter layer 11, third filter layer 12 and dustproof filter mantle 13, this first filter layer 10, second filter layer 11, third filter layer 12 and the equal fixed mounting of dustproof filter mantle 13 are in shell body 9, this shell body 9 up end is fixed to have seted up into gas port 14, this shell body 9 lower extreme is fixed to have seted up gas outlet 15, this first filter layer 10, second filter layer 11 and third filter layer 12 fixed mounting are between gas port 14 and gas outlet 15, the fixed cover is equipped with dustproof filter mantle 13 on this gas outlet 15.

The dust in the air is fully filtered through multi-layer filtering.

The second filtering device 7 comprises a filtering tank 16, an air inlet pipeline 17, a separating screen 18 and a fixed isolating frame 19, wherein a connecting hole 20 is fixedly formed in the upper end face of one end of the filtering tank 16, the air inlet pipeline 17 is connected into the connecting hole 20, a medium inlet 21 and a discharge port 22 are fixedly formed in the filtering tank 16, the fixed isolating frame 19 is fixedly mounted in the filtering tank 16 at the discharge port 22, and the separating screen 18 is fixedly arranged between the fixed isolating frame 19 and the inner wall of the lower end of the filtering tank 16.

The filter tank 16 is filled with filter medium whose height is not higher than the height of the fixed isolation frame 19, and discharges the air pumped by the vacuum pump 5 to the bottom of the medium through the air inlet pipeline 17, and then the air discharged to the bottom of the medium can be finely separated through the separation screen 18, so that the air can be fully contacted with the medium, and the air is ensured to be fully filtered.

The gas inlet pipeline 17 penetrates through the separation screen 18 and is arranged at the lower end of the separation screen 18, and a plurality of exhaust holes 23 are fixedly formed in the part, arranged at the lower end of the separation screen 18, of the gas inlet pipeline 17.

The plurality of exhaust holes 23 not only ensure uniform discharge of air into the medium, sufficient contact with the filter medium, and silencing of exhaust through the exhaust holes 23 and the medium for filtration.

The separation mesh plate 18 includes an outer frame and a corrosion-resistant separation mesh fixedly installed on an inner wall of the outer frame.

The above description is only a preferred embodiment of the present invention, and the scope of the present invention is not limited to the above embodiment, but equivalent modifications or changes made by those skilled in the art according to the present disclosure should be included in the scope of the present invention as set forth in the appended claims.

Claims

1. The utility model provides an evacuating device for vacuum furnace, includes mount (1), vacuum furnace body (2), bell (3), square chest (4), vacuum pump (5), first filter equipment (6) and second filter equipment (7), its characterized in that: fixed mounting has vacuum furnace body and square chest (4) on mount (1), fixedly connected with bell (3) on this vacuum furnace, fixedly connected with exhaust duct (8) on this bell (3), fixed mounting has first filter equipment (6) and vacuum pump (5) in this square chest (4), the first filter equipment of one end fixedly connected with (6) of bell (3) is kept away from in this exhaust duct (8), the input fixed connection of this first filter equipment (6) and vacuum pump (5), the output fixedly connected with second filter equipment (7) of this vacuum pump (5).

2. The vacuum-pumping device for vacuum furnace as claimed in claim 1, wherein: first filter equipment (6) are including shell body (9), first filter layer (10), second filter layer (11), third filter layer (12) and dustproof filter mantle (13), this first filter layer (10), second filter layer (11), third filter layer (12) and the equal fixed mounting of dustproof filter mantle (13) are in shell body (9), this shell body (9) up end is fixed to have seted up into gas port (14), gas outlet (15) have been seted up to this shell body (9) lower extreme is fixed, this first filter layer (10), second filter layer (11) and third filter layer (12) fixed mounting are between income gas port (14) and gas outlet (15), fixed cover is equipped with dustproof filter mantle (13) on this gas outlet (15).

3. The vacuum-pumping device for vacuum furnace as claimed in claim 1, wherein: second filter equipment (7) are including filtering jar (16), go into trachea way (17), separation otter board (18) and fixed isolation frame (19), connecting hole (20) have been seted up to one end up end of this filtering jar (16) is fixed, this connecting hole (20) in-connection has into trachea way (17), medium entry (21) and discharge port (22) have been seted up to this filtering jar (16) is gone up to fix, fixed mounting has fixed isolation frame (19) in filtering jar (16) of this discharge port (22) department, this fixed isolation frame (19) and filtering jar (16) lower extreme inner wall between fixed separation otter board (18) that is equipped with.

4. The vacuum-pumping device for vacuum furnace as claimed in claim 3, wherein: the gas inlet pipeline (17) penetrates through the separation screen plate (18) and is arranged at the lower end of the separation screen plate (18), and a plurality of exhaust holes (23) are fixedly formed in the part, arranged at the lower end of the separation screen plate (18), of the gas inlet pipeline (17).

5. The evacuation apparatus for a vacuum furnace according to claim 3 or 4, wherein: the separation screen plate (18) comprises an outer frame and a corrosion-resistant separation screen fixedly arranged on the inner wall of the outer frame.