CN212774645U - Vacuum pump with filter for vacuum furnace - Google Patents

Vacuum pump with filter for vacuum furnace Download PDF

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Publication number
CN212774645U
CN212774645U CN202020582275.1U CN202020582275U CN212774645U CN 212774645 U CN212774645 U CN 212774645U CN 202020582275 U CN202020582275 U CN 202020582275U CN 212774645 U CN212774645 U CN 212774645U
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CN
China
Prior art keywords
filter
vacuum pump
shell
filter element
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN202020582275.1U
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Chinese (zh)
Inventor
关占龙
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TAICANG HAURUI VACUUM FURNACE INDUSTRY CO LTD
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TAICANG HAURUI VACUUM FURNACE INDUSTRY CO LTD
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Application filed by TAICANG HAURUI VACUUM FURNACE INDUSTRY CO LTD filed Critical TAICANG HAURUI VACUUM FURNACE INDUSTRY CO LTD
Priority to CN202020582275.1U priority Critical patent/CN212774645U/en
Application granted granted Critical
Publication of CN212774645U publication Critical patent/CN212774645U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02ATECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A50/00TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
    • Y02A50/20Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
    • Y02A50/2351Atmospheric particulate matter [PM], e.g. carbon smoke microparticles, smog, aerosol particles, dust

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  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Compressor (AREA)

Abstract

The utility model discloses a vacuum pump with a filter for a vacuum furnace, which comprises a vacuum pump main body and a filter structure, wherein the filter structure is fixedly arranged on one side of the vacuum pump main body and is fixedly connected with the vacuum pump main body through screws, the filter structure consists of a filter shell, a filter element and a filter shell cover plate, a gas outlet is arranged on one side surface of the filter shell, the filter shell cover plate is arranged on the other side surface of the filter shell, one side of the filter shell cover plate is provided with an air inlet interface, the other side of the filter shell cover plate is provided with a filter element interface, the filter element interface is provided with the filter element, the filter element is arranged on the filter element interface, the vacuum pump main body is provided with the filter structure, and the air pumped out from, reduce the particulate matter content in the air, be favorable to improving the life of vacuum pump main part.

Description

Vacuum pump with filter for vacuum furnace
Technical Field
The utility model relates to a vacuum pump technical field specifically is a vacuum pump with filter for vacuum furnace.
Background
The vacuum pump refers to a device or equipment for obtaining vacuum by pumping a pumped container by using a mechanical, physical, chemical or physicochemical method. In general, a vacuum pump is a device for improving, generating and maintaining a vacuum in a certain closed space by various methods.
The vacuum furnace is characterized in that a vacuum system (formed by elaborately assembling elements such as a vacuum pump, a vacuum measuring device, a vacuum valve and the like) is utilized to discharge partial substances in a furnace chamber in a specific space of the furnace chamber, so that the pressure in the furnace chamber is less than a standard atmospheric pressure, and the space in the furnace chamber realizes a vacuum state, namely the vacuum furnace.
Because the content of particulate matters in the air in the vacuum furnace is high, the service life of a vacuum pump for the vacuum furnace is generally short, and the use cost of the vacuum furnace is high.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a vacuum pump with filter for vacuum furnace to solve the problem among the prior art.
In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a vacuum pump with filter for vacuum furnace, includes vacuum pump main part and filter structure, one side fixed mounting of vacuum pump main part has filter structure, and filter structure passes through screw and vacuum pump main part fixed connection, filter structure comprises filter housing, filter core and filter housing apron, the gas outlet has been seted up to one side of filter housing, filter housing's opposite side-mounting has filter housing apron, one side of filter housing apron is provided with the air inlet interface, and filter housing apron's opposite side is provided with filter core interface, install filter core on the filter core interface.
Preferably, the filter element comprises a filter element outer shell, a filter element inner shell and a filter element, wherein the filter element is sleeved on the outer surface of the filter element inner shell, the filter element outer shell is sleeved outside the filter element, and the filter element outer shell is fixedly connected with the filter element inner shell through a screw.
Preferably, an inner ventilation opening is formed in the filter element inner shell, and an outer ventilation opening of the filter element outer shell is matched with the inner ventilation opening.
Preferably, the inner air vent of the filter element inner shell is covered with a metal net, and the outer air vent of the filter element outer shell is covered with a metal net.
Preferably, the filter element is in threaded connection with the filter element interface, the filter housing is fixedly connected with the filter housing cover plate through screws, and a threaded hole is formed in the side face of the other side of the filter housing.
Compared with the prior art, the beneficial effects of the utility model are that:
1. the utility model discloses an install filter structure in the vacuum pump main part, filter the air that the vacuum pump main part was taken out through filter structure, reduce the particulate matter content in the air, be favorable to improving the life of vacuum pump main part, filter structure comprises filter shell, filter core and filter housing cover board, can dismantle between each component, the clearance is dismantled to filter core to the convenience, filter core comprises filter core shell, filter core inner shell and filter core, therefore filter core can further disassemble.
Drawings
The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description serve to explain the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic view of the internal structure of the filter structure of the present invention;
fig. 2 is a schematic view of the overall structure of the present invention.
In the figure: 1. a vacuum pump main body; 2. a filter arrangement; 3. an air outlet; 4. a threaded hole; 5. a filter housing; 6. a filter element housing; 7. an outer gas permeable port; 8. a filter cartridge; 9. a filter housing cover plate; 10. a filter cartridge interface; 11. an air inlet interface; 12. a filter element inner shell; 13. a filter element; 14. an inner ventilation opening.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Please refer to fig. 1 and 2, in an embodiment of the present invention, a vacuum pump with a filter for a vacuum furnace, includes a vacuum pump main body 1 and a filter structure 2, one side of the vacuum pump main body 1 is fixedly installed with the filter structure 2, the filter structure 2 is fixedly connected with the vacuum pump main body 1 through a screw, the filter structure 2 is composed of a filter housing 5, a filter element 8 and a filter housing cover plate 9, a gas outlet 3 is opened on one side of the filter housing 5, the filter housing cover plate 9 is installed on the other side of the filter housing 5, one side of the filter housing cover plate 9 is provided with an air inlet interface 11, the other side of the filter housing cover plate 9 is provided with a filter element interface 10, and the filter element 8 is installed.
Referring to fig. 1, the filter element 8 is composed of an outer shell 6, an inner shell 12 and an element 13, the element 13 is sleeved on the outer surface of the inner shell 12, the outer shell 6 is sleeved outside the element 13, and the outer shell 6 is fixedly connected with the inner shell 12 through screws.
Referring to fig. 1, an inner ventilation opening 14 is formed on the inner casing 12 of the filter element, and an outer ventilation opening 7 of the outer casing 6 of the filter element, and the outer ventilation opening 7 is matched with the inner ventilation opening 14.
Referring to fig. 1, a metal mesh is covered at an inner air vent 14 of an inner filter element shell 12, and a metal mesh is covered at an outer air vent 7 of an outer filter element shell 6.
Referring to fig. 1, a filter element 8 is in threaded connection with a filter element interface 10, a filter housing 5 is fixedly connected with a filter housing cover plate 9 through screws, and a threaded hole 4 is formed in the other side surface of the filter housing 5.
The utility model discloses a theory of operation and use flow: the utility model discloses an install filter structure 2 on vacuum pump main part 1, the air of taking out vacuum pump main part through filter structure 2 filters, reduce the particulate matter content in the air, be favorable to improving vacuum pump main part 1's life, filter structure 2 is by filter housing 5, filter insert 8 and filter housing apron 9 are constituteed, can dismantle between each component, the clearance is dismantled to filter insert 8 to the convenience, filter insert 8 is by filter housing 6, filter insert inner shell 12 and filter core 13 are constituteed, therefore filter insert 8 can further be disassembled.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described in the foregoing embodiments, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (5)

1. A vacuum pump with a filter for a vacuum furnace, comprising a vacuum pump main body (1) and a filter structure (2), characterized in that: one side fixed mounting of vacuum pump main part (1) has filter structure (2), and filter structure (2) pass through screw and vacuum pump main part (1) fixed connection, filter structure (2) comprise filter housing (5), filter core (8) and filter housing apron (9), gas outlet (3) have been seted up to one side of filter housing (5), filter housing apron (9) are installed to the opposite side of filter housing (5), one side of filter housing apron (9) is provided with air inlet interface (11), and the opposite side of filter housing apron (9) is provided with filter core interface (10), install filter core (8) on filter core interface (10).
2. A vacuum pump with a filter for a vacuum furnace according to claim 1, wherein: filter core (8) comprise filter core outer shell (6), filter core inner shell (12) and filter core (13), and filter core (13) suit is on the outside surface of filter core inner shell (12), and filter core outer shell (6) suit is in the outside of filter core (13), and filter core outer shell (6) pass through screw and filter core inner shell (12) fixed connection.
3. A vacuum pump with a filter for a vacuum furnace according to claim 2, wherein: an inner ventilation opening (14) is formed in the filter element inner shell (12), an outer ventilation opening (7) of the filter element outer shell (6) is formed in the filter element inner shell, and the outer ventilation opening (7) is matched with the inner ventilation opening (14).
4. A vacuum pump with a filter for a vacuum furnace according to claim 2 or 3, characterized in that: the filter element is characterized in that a metal net is covered at an inner ventilation port (14) of the filter element inner shell (12), and a metal net is covered at an outer ventilation port (7) of the filter element outer shell (6).
5. A vacuum pump with a filter for a vacuum furnace according to claim 1, wherein: the filter is characterized in that the filter element (8) is in threaded connection with the filter element interface (10), the filter shell (5) is fixedly connected with the filter shell cover plate (9) through screws, and the side face of the other side of the filter shell (5) is provided with a threaded hole (4).
CN202020582275.1U 2020-04-19 2020-04-19 Vacuum pump with filter for vacuum furnace Expired - Fee Related CN212774645U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202020582275.1U CN212774645U (en) 2020-04-19 2020-04-19 Vacuum pump with filter for vacuum furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202020582275.1U CN212774645U (en) 2020-04-19 2020-04-19 Vacuum pump with filter for vacuum furnace

Publications (1)

Publication Number Publication Date
CN212774645U true CN212774645U (en) 2021-03-23

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Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

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CN (1) CN212774645U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113058342A (en) * 2021-04-13 2021-07-02 西安航空制动科技有限公司 CVD furnace filter equipment convenient to online real-time clearance
CN113389706A (en) * 2021-07-09 2021-09-14 长鑫存储技术有限公司 Vacuum system, low-pressure vacuum process equipment and stop piece

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113058342A (en) * 2021-04-13 2021-07-02 西安航空制动科技有限公司 CVD furnace filter equipment convenient to online real-time clearance
CN113058342B (en) * 2021-04-13 2022-10-28 西安航空制动科技有限公司 CVD furnace filter equipment convenient to online real-time clearance
CN113389706A (en) * 2021-07-09 2021-09-14 长鑫存储技术有限公司 Vacuum system, low-pressure vacuum process equipment and stop piece

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Granted publication date: 20210323