CN215988696U - Vacuum suction nozzle structure - Google Patents

Vacuum suction nozzle structure Download PDF

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Publication number
CN215988696U
CN215988696U CN202122620611.4U CN202122620611U CN215988696U CN 215988696 U CN215988696 U CN 215988696U CN 202122620611 U CN202122620611 U CN 202122620611U CN 215988696 U CN215988696 U CN 215988696U
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CN
China
Prior art keywords
vacuum
suction nozzle
channel
circular channel
metal
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CN202122620611.4U
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Chinese (zh)
Inventor
黄忠
陈南南
葛京城
沈国芳
朱齐备
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Stats Chippac Semiconductor Jiangyin Co Ltd
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Stats Chippac Semiconductor Jiangyin Co Ltd
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Abstract

The utility model discloses a vacuum suction nozzle structure, and belongs to the technical field of vacuum suction nozzle structures. A suction nozzle mounting seat (1) is inverted T-shaped, a rubber suction nozzle mounting circular channel (19) inside the suction nozzle mounting seat is vertically communicated with a vacuum tube access circular channel (14) through a connecting circular channel (16), a vacuum collecting groove (18) is arranged at an outlet of the rubber suction nozzle mounting circular channel (19), a rubber suction nozzle (3) is connected with an internal thread of the connecting circular channel (16) through an external thread of a metal vacuum rod (35) above the rubber suction nozzle, and the vacuum tube (4) is in butt joint with the rubber suction nozzle (3) through the metal vacuum rod (35) above the rubber suction nozzle to form a vacuum channel. The utility model solves the problems of insufficient and uneven coverage rate of the adhesive between the radiating fin and the substrate and between the radiating fin and the back surface of the chip.

Description

Vacuum suction nozzle structure
Technical Field
The utility model relates to a vacuum suction nozzle structure, and belongs to the technical field of vacuum suction nozzle structures.
Background
In the process of manufacturing semiconductor products, the chip package products may warp after the chip underfill process. Especially, the warpage problem of the current products below 40x40mm is common in the process of mounting a heat sink. When the non-hot pressing process is used for mounting the heat sink, the defects of insufficient coverage rate and non-uniformity of the adhesive on the heat sink are further caused.
Disclosure of Invention
The utility model aims to overcome the defects in the prior art and provide a vacuum suction nozzle structure which solves the problems of insufficient coverage rate and non-uniformity of adhesive on a radiating fin by using a non-hot-pressing process.
The technical scheme of the utility model is as follows:
the utility model provides a vacuum suction nozzle structure, which comprises a suction nozzle mounting seat, a rubber suction nozzle, a vacuum tube and a flat nut, wherein the suction nozzle mounting seat is inverted T-shaped, the upper end of the suction nozzle mounting seat is a metal mounting rod, the lower end of the suction nozzle mounting seat is a boss, the metal mounting rod is cylindrical, the vacuum tube access circular channel and a connection circular channel are sequentially arranged in the metal mounting rod from top to bottom, a bolt channel, a bolt hole and a screw through hole are arranged on the wall of the vacuum tube access circular channel, the bolt channel is L-shaped, the L-shaped vertical part of the bolt channel is opened at the inlet of the vacuum tube access circular channel, the L-shaped horizontal part of the bolt channel is clockwise and transversely communicated with the bolt hole, and the screw through hole is arranged below the bolt hole;
the lug boss is in a rectangular column shape, a rubber suction nozzle installation round channel is arranged in the lug boss, the rubber suction nozzle installation round channel is vertically communicated with a vacuum tube access round channel through a connection round channel, a vacuum collecting groove is arranged at the outlet of the rubber suction nozzle installation round channel, the vacuum collecting groove is in a rectangular groove, an internal thread is arranged on the inner wall of the connection round channel, and the inner diameter of the connection round channel is smaller than the inner diameter of a vacuum tube access round channel 14 and smaller than the inner diameter of the rubber suction nozzle installation round channel;
the rubber suction nozzle is cylindrical, a metal vacuum rod, a suction nozzle cylinder and a suction nozzle elastic area are sequentially arranged from top to bottom, a vacuum channel I is arranged in the rubber suction nozzle, the metal vacuum rod is provided with an external thread, and the rubber suction nozzle is connected with the internal thread of the connecting circular channel through the external thread of the metal vacuum rod;
the vacuum tube comprises a metal vacuum connecting rod and a vacuum hose, a vacuum channel II is arranged in the vacuum tube, the head of the metal vacuum connecting rod directly abuts against the bottom of the vacuum tube and is connected into the bottom of the circular channel, a bolt bulge matched with a bolt hole of the suction nozzle mounting seat and a nut fixing groove aligned with the screw through hole are arranged on the outer wall of the vacuum tube, and the nut fixing groove is arranged on the lower side of the bolt bulge;
the bolt bulge of the vacuum tube is connected into the vacuum tube through the bolt channel, is connected into the round channel, is butted with the metal vacuum rod of the rubber suction nozzle to form a vacuum channel, is clockwise rotated by 90 degrees and is clamped with the bolt hole, and is simultaneously screwed to the nut fixing groove through the flat nut to be fixedly connected, so that the communication between the vacuum channel I and the vacuum channel II is completed.
Optionally, the metal mounting bar and the boss are of unitary construction.
Optionally, the pin holes are a pair and symmetrically distributed on two sides of the round channel for connecting the vacuum tube.
Optionally, the screw through holes are arranged in two numbers and distributed at 90 degrees.
Optionally, the cross section of the boss at the vacuum collection groove is annular rectangular.
Optionally, the metal vacuum rod, the suction nozzle column and the suction nozzle elastic area of the rubber suction nozzle are of an integrated structure.
Optionally, the metal vacuum connecting rod and the vacuum hose are of an integral structure.
Advantageous effects
The utility model designs a vacuum suction nozzle structure, wherein a vacuum collecting groove of a boss of the vacuum suction nozzle structure adopts an annular rectangle and is matched with a rubber suction nozzle, a radiating fin area is directly sucked during the operation of an LA station, and balanced pressure is applied, so that glue between a radiating fin and a substrate and between the radiating fin and the back of a chip is uniformly covered, and the problems of insufficient and non-uniform coverage rate of the glue on the radiating fin are solved.
Drawings
FIG. 1 is a schematic view of a nozzle mount of a vacuum nozzle configuration of the present invention;
FIG. 2 is a schematic diagram of the top view of FIG. 1;
FIG. 3 is a schematic bottom view of FIG. 1;
FIG. 4 is a schematic view of a rubber suction nozzle of a vacuum suction nozzle configuration of the present invention;
FIG. 5 is a schematic view of a vacuum tube of a vacuum nozzle configuration of the present invention;
FIG. 6 is an assembled view of a vacuum nozzle configuration of the present invention;
FIG. 7 is a schematic view of a vacuum nozzle configuration of the present invention in use;
in the figure: suction nozzle mounting base 1
Metal mounting bar 11
Bolt channel 12
Bolt hole 13
Vacuum tube access circular channel 14
Screw through hole 15
Connecting circular channel 16
Boss 17
Vacuum collection tank 18
Rubber suction nozzle mounting round channel 19
Rubber suction nozzle 3
Suction nozzle column 31
Elastic region 33 of suction nozzle
Metal vacuum rod 35
Vacuum tube 4
Metal vacuum connecting rod 41
Latch projection 42
Nut fixing groove 43
Vacuum hose 44
A flat head nut 5.
Detailed Description
The following detailed description of embodiments of the utility model refers to the accompanying drawings. Spatially relative terms (such as "below …", "below", "lower", "above …", "upper", and the like) may be used for ease of illustration to describe one element or component's relationship to another element or component as illustrated in the figures. Spatially relative terms may also encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. The device may be otherwise oriented 90 degrees or at other orientations and the spatially relative descriptors used herein interpreted accordingly.
Example one
Fig. 1 to 6 are schematic views of a vacuum nozzle structure and an assembly diagram thereof according to an embodiment of the present invention.
The utility model relates to a vacuum suction nozzle structure, which comprises a suction nozzle mounting seat 1, a rubber suction nozzle 3, a vacuum tube 4 and a flat nut 5, wherein the suction nozzle mounting seat 1 is in an inverted T shape, the upper end of the suction nozzle mounting seat is provided with a metal mounting rod 11, the lower end of the suction nozzle mounting seat is provided with a boss 17, and generally, the metal mounting rod 11 and the boss 17 are in an integral structure.
The metal mounting rod 11 is cylindrical, a vacuum tube access circular channel 14 and a connecting circular channel 16 are sequentially arranged in the metal mounting rod from top to bottom, a bolt channel 12, a bolt hole 13 and a screw through hole 15 are arranged on the wall of the vacuum tube access circular channel 14, the bolt channel 12 is L-shaped, the L-shaped vertical part of the bolt channel is opened at the inlet of the vacuum tube access circular channel 14, the L-shaped transverse part of the bolt channel is transversely communicated with the bolt hole 13 clockwise, the bolt holes 13 are used as a pair of indications in the figure, and the bolt channels are symmetrically distributed on two sides of the vacuum tube access circular channel 14.
The screw through hole 15 is disposed below the latch hole 13.
The boss 17 is in a rectangular column shape, a rubber suction nozzle mounting circular channel 19 is arranged in the boss, and two screw through holes 15 are arranged in the figure and are distributed at 90 degrees.
The rubber suction nozzle mounting circular channel 19 is vertically communicated with the vacuum tube access circular channel 14 through a connecting circular channel 16, a vacuum collecting groove 18 is arranged at the outlet of the rubber suction nozzle mounting circular channel 19, and the vacuum collecting groove 18 is a rectangular groove and is used for accommodating the raised cap top part 71 of the radiating fin 7. The cross section of the boss 17 at the vacuum collection groove 18 is annular and rectangular. The annular width of the annular rectangle thereof matches the annular width of the brim portion 73 of the heat sink 7. Generally, the annular rectangular ring width of the boss 17 is not smaller than the ring width of the brim portion 73 of the heat sink 7.
The depth H of the vacuum collection groove 18 is determined according to the thickness of the fins and the groove depth of the fins. Typically, the vacuum collection trough 18 has a depth H of 1-1.85 millimeters.
The inner wall of the connecting circular channel 16 is provided with internal threads, and the inner diameter of the connecting circular channel 16 is (the inner diameter of the vacuum tube connected into the circular channel 14 is (the inner diameter of the rubber suction nozzle mounting circular channel 19);
the rubber suction nozzle 3 is cylindrical, and is sequentially provided with a metal vacuum rod 35, a suction nozzle cylinder 31 and a suction nozzle elastic area 33 from top to bottom, wherein a vacuum channel I is arranged in the metal vacuum rod 35, the suction nozzle cylinder 31 and the suction nozzle elastic area 33 of the rubber suction nozzle 3, and generally, the metal vacuum rod 35, the suction nozzle cylinder 31 and the suction nozzle elastic area 33 of the rubber suction nozzle are of an integrated structure. The metal vacuum rod 35 is provided with an external thread, and the rubber suction nozzle 3 is connected with the internal thread of the connecting circular channel 16 through the external thread of the metal vacuum rod 35 above the rubber suction nozzle.
The vacuum tube 4 comprises a metal vacuum connecting rod 41 and a vacuum hose 44, and generally, the metal vacuum connecting rod 41 and the vacuum hose 44 are of an integral structure, and a vacuum channel II is arranged in the integral structure. The vacuum hose 44 is connected to a vacuum generator. The head of the metal vacuum connecting rod 41 is directly abutted against the bottom of the vacuum tube access circular channel 14, the outer wall of the metal vacuum connecting rod is provided with a bolt protrusion 42 matched with the bolt hole 13 of the suction nozzle mounting base 1 and a nut fixing groove 43 aligned with the screw through hole 15, and the nut fixing groove 43 is arranged on the lower side of the bolt protrusion 42. The plug pin bulge 42 of the vacuum tube 4 is connected into the vacuum tube access circular channel 14 through the plug pin channel 12 and is in butt joint with the metal vacuum rod 35 of the rubber suction nozzle 3 to form a vacuum channel, then the vacuum channel is clockwise rotated by 90 degrees and is clamped with the plug pin hole 13, and meanwhile the flat-head nut 5 is screwed to the nut fixing groove 43 for fixed connection, so that the communication between the vacuum channel I and the vacuum channel II is completed.
When the vacuum heat collection tank is used, as shown in fig. 7, the heat dissipation fin 7 is aligned with the vacuum suction nozzle structure 1, the cap top portion 71 of the heat dissipation fin 7 is placed in the range of the vacuum collection tank 18, after the alignment is completed, the vacuum suction nozzle structure is pressed down on the cap top portion 71 of the heat dissipation fin 7, the whole elastic area 33 of the suction nozzle of the rubber suction nozzle 3 is made to contact with the heat dissipation fin 7, the vacuum equipment is started, the rubber suction nozzle 3 adsorbs the heat dissipation fin 7, and a space height H is reserved between the cap top portion 71 of the heat dissipation fin 7 and the vacuum collection tank 18, and is smaller than the depth H of the vacuum collection tank 18.
After the heat sink 7 is sucked, the heat sink 7 is placed on the substrate 9 of the chip packaging product, the circular rectangular structure at the vacuum collection groove 18 of the boss 17 applies balanced pressure to the brim part 73 of the heat sink 7, and the pressing time with fixed pressure is given, so that the glue 91 between the heat sink 7 and the substrate 9 and the glue 81 between the back of the chip 8 are uniformly covered.
The above-mentioned embodiments are intended to explain the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention, and are not intended to limit the scope of the present invention. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (7)

1. A vacuum suction nozzle structure is characterized by comprising a suction nozzle mounting seat (1), a rubber suction nozzle (3), a vacuum tube (4) and a flat-head nut (5), wherein the suction nozzle mounting seat (1) is in an inverted T shape, the upper end is a metal mounting rod (11), the lower end is a boss (17), the metal mounting rod (11) is cylindrical, a vacuum tube access circular channel (14) and a connecting circular channel (16) are sequentially arranged in the vacuum tube from top to bottom, and a plug pin channel (12), a plug pin hole (13) and a screw through hole (15) are arranged on the wall of the vacuum tube access circular channel (14), the plug pin channel (12) is L-shaped, the L-shaped vertical part is opened at the inlet of the vacuum tube access circular channel (14), the L-shaped transverse part is communicated with the bolt hole (13) clockwise and transversely, the screw through hole (15) is arranged below the bolt hole (13);
the rubber suction nozzle mounting circular channel (19) is vertically communicated with the vacuum tube access circular channel (14) through a connecting circular channel (16), a vacuum collecting tank (18) is arranged at an outlet of the rubber suction nozzle mounting circular channel (19), the vacuum collecting tank (18) is a rectangular groove, an internal thread is arranged on the inner wall of the connecting circular channel (16), and the inner diameter of the connecting circular channel (16) is smaller than the inner diameter of the vacuum tube access circular channel (14) and smaller than the inner diameter of the rubber suction nozzle mounting circular channel (19);
the rubber suction nozzle (3) is cylindrical, a metal vacuum rod (35), a suction nozzle cylinder (31) and a suction nozzle elastic area (33) are sequentially arranged from top to bottom, a vacuum channel I is arranged in the rubber suction nozzle, the metal vacuum rod (35) is provided with an external thread, and the rubber suction nozzle (3) is connected with the internal thread of the connecting circular channel (16) through the external thread of the metal vacuum rod (35);
the vacuum tube (4) comprises a metal vacuum connecting rod (41) and a vacuum hose (44), a vacuum channel II is arranged in the vacuum tube, the head of the metal vacuum connecting rod (41) directly abuts against the bottom of the vacuum tube access circular channel (14), the outer wall of the vacuum tube is provided with a bolt bulge (42) matched with a bolt hole (13) of the suction nozzle mounting seat (1) and a nut fixing groove (43) aligned with the screw through hole (15), and the nut fixing groove (43) is arranged on the lower side of the bolt bulge (42);
the plug pin bulge (42) of the vacuum tube (4) is connected into the interior of the vacuum tube access circular channel (14) through the plug pin channel (12) and is in butt joint with the metal vacuum rod (35) of the rubber suction nozzle (3), then the plug pin bulge and the plug pin hole are clamped with the plug pin hole (13) through clockwise rotation by 90 degrees, meanwhile, the plug pin bulge and the plug pin hole are supported to the nut fixing groove (43) through the flat-head nut (5) in a rotating mode, and communication of the vacuum channel I and the vacuum channel II is completed.
2. A vacuum nozzle arrangement according to claim 1, characterized in that the metal mounting bar (11) and the boss (17) are of one-piece construction.
3. A vacuum nozzle arrangement according to claim 1, characterized in that said pin holes (13) are a pair, symmetrically distributed on both sides of the vacuum tube access circular channel (14).
4. A vacuum nozzle structure according to claim 1, characterized in that the screw through holes (15) are arranged in two, 90 degree distribution.
5. A vacuum nozzle arrangement according to claim 1, characterized in that the cross-section at the vacuum collection trough (18) of the boss (17) is circular rectangular.
6. A vacuum nozzle arrangement according to claim 1, characterized in that the metal vacuum bar (35), the nozzle cylinder (31) and the nozzle spring zone (33) of the rubber nozzle (3) are of one-piece construction.
7. A vacuum nozzle arrangement according to claim 1, characterized in that the metal vacuum connection rod (41) and the vacuum hose (44) are of one-piece construction.
CN202122620611.4U 2021-10-29 2021-10-29 Vacuum suction nozzle structure Active CN215988696U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202122620611.4U CN215988696U (en) 2021-10-29 2021-10-29 Vacuum suction nozzle structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202122620611.4U CN215988696U (en) 2021-10-29 2021-10-29 Vacuum suction nozzle structure

Publications (1)

Publication Number Publication Date
CN215988696U true CN215988696U (en) 2022-03-08

Family

ID=80572513

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202122620611.4U Active CN215988696U (en) 2021-10-29 2021-10-29 Vacuum suction nozzle structure

Country Status (1)

Country Link
CN (1) CN215988696U (en)

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