CN215986794U - Testing device for silicon-based liquid crystal chip - Google Patents

Testing device for silicon-based liquid crystal chip Download PDF

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CN215986794U
CN215986794U CN202122053503.3U CN202122053503U CN215986794U CN 215986794 U CN215986794 U CN 215986794U CN 202122053503 U CN202122053503 U CN 202122053503U CN 215986794 U CN215986794 U CN 215986794U
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collimator
chip
incident light
light
lcos
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郭金平
杨睿
杨柳
王凡
马雨虹
禤颖仪
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Accelink Technologies Co Ltd
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Accelink Technologies Co Ltd
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Abstract

The utility model discloses a testing device of a silicon-based liquid crystal chip, which comprises: the device comprises a first collimator, an analyzer, a composite lens and a Liquid Crystal On Silicon (LCOS) chip which are sequentially arranged on an incident light path, wherein incident light reaches the LCOS chip through the first collimator, the analyzer and the composite lens, and the LCOS chip is used for deflecting the incident light and then emitting the deflected incident light; the emergent light comprises various angles; the device also comprises a second collimator arranged on the emergent light path and optical power equipment; the composite lens is used for converting the emergent light after the LCOS chip deflects into parallel emergent light; the second collimator is used for receiving and emitting the parallel emergent light passing through the compound lens; and the optical power equipment is connected with the output end of the second collimator and is used for collecting the power of emergent light emitted by the second collimator. The testing device of the liquid crystal on silicon chip has simple structure and can quickly measure the optical performance of the LCOS chip.

Description

Testing device for silicon-based liquid crystal chip
Technical Field
The utility model relates to the technical field of optics, in particular to a testing device for a silicon-based liquid crystal chip.
Background
The Wavelength Selective Switch (WSS) has functions of any port Wavelength and any uplink and downlink, and is an important Optical device in a Reconfigurable Optical Add-Drop Multiplexer (ROADM). To support higher modulation rates, higher network channel counts, and higher network flexibility, people have turned their attention to wavelength selective switches with tunable bandwidths, such as those based on Liquid Crystal On Silicon (LCOS) chips.
In the wavelength selective switch based on the LCOS chip, a certain periodic pattern is loaded on the LCOS chip, so that a certain deflection of a space light beam can be realized, and an optical signal is output from a certain port of the wavelength selective switch. The periodic pattern loaded on the LCOS chip makes the phases on the LCOS chip periodically distributed, thereby generating the diffraction characteristic of the grating, so that the energy of the light is approximately concentrated and emitted from a certain angle, however, there is also the problem that the light with some energy is emitted from other angles, which affects the isolation between the output port and the coupling port of the wavelength selection switch, so that the energy distribution of the optical signal after the LCOS chip is deflected needs to be tested.
SUMMERY OF THE UTILITY MODEL
In order to solve the existing technical problems, embodiments of the present invention provide a testing apparatus for a liquid crystal on silicon chip.
In order to achieve the above purpose, the technical solution of the embodiment of the present invention is realized as follows:
the embodiment of the utility model provides a testing device of a silicon-based liquid crystal chip, which comprises: the device comprises a first collimator, an analyzer, a composite lens and a silicon-based Liquid Crystal On Silicon (LCOS) chip which are sequentially arranged on an incident light path, wherein incident light reaches the LCOS chip through the first collimator, the analyzer and the composite lens, and the LCOS chip is used for deflecting the incident light and then emitting the deflected incident light; the emergent light comprises various angles;
the device also comprises a second collimator arranged on the emergent light path and optical power equipment;
the composite lens is used for converting the emergent light after the LCOS chip deflects into parallel emergent light;
the second collimator is used for receiving and emitting the parallel emergent light passing through the compound lens;
and the optical power equipment is connected with the output end of the second collimator and is used for collecting the power of emergent light emitted by the second collimator.
In the above scheme, the apparatus further comprises a tunable laser; the tunable laser is connected with the first collimator and is used for generating the incident light.
In the above solution, the apparatus further comprises a movable adjusting frame; the second collimator is disposed on the movable alignment bracket.
In the above solution, the movable adjusting frame is a height-adjustable movable adjusting frame to receive the emergent light of multiple angles after the LCOS chip is deflected by adjusting the height of the second collimator.
In the above scheme, the device further includes a first upper computer, where the first upper computer is configured to load a periodic driving pattern on the LCOS chip through an LCOS chip driving circuit, so that the LCOS chip deflects the incident light and then concentrates the deflected incident light on an exit at a specified angle.
In the above scheme, the device further comprises a second upper computer, the second upper computer is electrically connected with the movable adjusting frame and used for sending instructions to the movable adjusting frame, and the instructions are used for lifting or lowering the movable adjusting frame so as to adjust the height of the second collimator.
In the above scheme, the optical power device is an optical power meter.
In the above scheme, the analyzer is further located on the outgoing light path, and the second collimator is further configured to receive and emit the parallel outgoing light passing through the compound lens and the analyzer.
According to the testing device of the liquid crystal on silicon chip, the deflection light beams of the LCOS chip are changed into the parallel light beams through the composite lens, and the energy distribution of the deflection light beams in each angle direction can be quickly tested only by loading the periodic driving patterns on the LCOS chip.
Drawings
FIG. 1 is a first schematic diagram of a configuration of a testing apparatus for LCOS chips according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a testing optical path of a liquid crystal on silicon chip according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a second component of the testing apparatus for a liquid crystal on silicon chip according to an embodiment of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
The embodiment of the present invention provides a device for testing a liquid crystal on silicon chip, fig. 1 is a schematic structural diagram of a composition of the device for testing a liquid crystal on silicon chip according to the embodiment of the present invention, as shown in fig. 1, the device 100 includes: the device comprises a first collimator 101, a polarization analyzer 102, a composite lens 103 and an LCOS chip 104 which are sequentially arranged on an incident light path, wherein incident light reaches the LCOS chip 104 through the first collimator 101, the polarization analyzer 102 and the composite lens 103, and the LCOS chip 104 is used for deflecting the incident light and then emitting the deflected incident light; the emerging light includes a variety of angles.
The apparatus 100 further comprises an optical power device 106 and a second collimator 105 arranged on the exit light path; the compound lens 103 is configured to convert the emergent light after the LCOS chip 104 is deflected into parallel emergent light; the second collimator 105 is used for receiving and emitting the parallel emergent light passing through the compound lens 103; the optical power device 106 is connected to the output end of the second collimator 105, and is configured to collect power of emergent light emitted by the second collimator 105.
In this embodiment, the apparatus 100 is used to analyze the energy distribution of the outgoing light of the LCOS chip 104 after deflecting a specific test light (i.e., incident light) at a plurality of angles. The incident light may be generated by a laser, and optionally, the apparatus 100 may further include a tunable laser, where the tunable laser is connected to the input end of the first collimator, and is used to generate laser with different wavelengths, so as to ensure diversity and accuracy of the test result of the LCOS chip.
Fig. 2 is a schematic diagram of a test optical path of a liquid crystal on silicon chip according to an embodiment of the present invention, where incident light enters the device 100 through the first collimator 101, and first passes through the analyzer 102 to make a polarization state of the incident light meet a requirement of the LCOS chip 104 on the polarization state of the incident light, and then passes through the compound lens 103 to make the incident light enter the LCOS chip 104 according to a set angle and a set light spot size.
LCOS chips can achieve spatial beam deflection by loading a periodic drive pattern. Illustratively, the device 100 further includes a first upper computer, where the first upper computer loads a periodic driving pattern on the LCOS chip 104 through an LCOS chip driving circuit, so that phases on the LCOS chip 104 are periodically distributed, thereby generating a diffraction characteristic of a grating, and deflecting and concentrating incident light to exit from a specified angle, such as an exit light path 111 in fig. 2, but there may exist a part of incident light exiting at other angles, and this embodiment illustrates two exit light paths 112 and 113 exiting at other angles in fig. 2.
Emergent light after LCOS chip 104 deflection passes through compound lens 103 and becomes parallel light to emergent 105 directions of second collimator, optical power equipment 106 (not shown in figure 2) is connected to the output of second collimator 105, optical power equipment 106 is used for gathering the power of the parallel light that the emergent light of multiple angle corresponds, and is optional, optical power equipment 106 is the optical power meter.
As an embodiment, the apparatus 100 includes a plurality of second collimators 105, and the plurality of second collimators 105 are respectively disposed on different paths of the parallel outgoing light to simultaneously collect optical powers of outgoing light with multiple angles after being deflected by the LCOS chip 104.
As another embodiment, the apparatus 100 may further include a movable adjustment bracket; the second collimator 105 is arranged on the movable adjusting frame, and the position of the second collimator 105 on the emergent light path is adjusted through the movable adjusting frame so as to collect the light power of emergent light at multiple angles. The movable adjusting frame can be a manual movable adjusting frame or an electric-control movable adjusting frame.
Exemplarily, the movable adjusting bracket is a height-adjustable movable adjusting bracket to receive the emergent light of multiple angles deflected by the LCOS chip 104 by adjusting the height of the second collimator 105, as shown in fig. 2, the emergent light of different angles is changed into parallel light through the compound lens 103 and then corresponds to different heights at the second collimator 105, the emergent light of each angle is output to the optical power device 106 through the second collimator 105 by adjusting the movable adjusting bracket up and down, and the optical power value of the second collimator 105 at each position is read, so that the emergent light energy distribution of the LCOS chip 104 in each angle direction after the incident light is deflected can be obtained.
In an embodiment, the apparatus 100 further includes a second upper computer electrically connected to the movable adjusting frame, and configured to send a command to the movable adjusting frame, where the command is used to raise or lower the movable adjusting frame to adjust the height of the second collimator 105. It should be noted that, in an actual application scenario, the second upper computer may be the same device as the first upper computer.
The testing device for the silicon-based liquid crystal chip of the embodiment changes the deflected light beams of the LCOS chip into the parallel light beams through the compound lens, and can quickly test the energy distribution of the deflected light beams in each angle direction only by loading a periodical driving pattern on the LCOS chip.
In the above solution, the analyzer 102 is further located on the outgoing light path, and the second collimator 105 is further configured to receive and emit the parallel outgoing light passing through the compound lens 103 and the analyzer 102.
The utility model also provides a testing device of the liquid crystal on silicon chip. Fig. 3 is a schematic diagram of a second component structure of a testing apparatus for a liquid crystal on silicon chip according to an embodiment of the present invention, and as shown in fig. 3, the apparatus 200 includes a tunable laser 201, a first collimator 202, an analyzer 203, a compound lens 204, an LCOS chip 205, an LCOS chip driving circuit 206, a first upper computer 207, a movable adjusting frame 208, a second collimator 209, and an optical power device 210; wherein: the first collimator 202, the analyzer 203 and the compound lens 204 form an incident light path of the device 200, and the compound lens 204, the analyzer 203 and the second collimator 209 form an exit light path of the device 200.
In this embodiment, the detailed descriptions of the first collimator 202, the analyzer 203, the compound lens 204, the LCOS chip 205, the second collimator 209, and the optical power device 210 may specifically refer to the detailed descriptions of the first collimator 101, the analyzer 102, the compound lens 103, the LCOS chip 104, the second collimator 105, and the optical power device 106 in the foregoing embodiments, and for brevity, no further description is provided here.
The second collimator 209 is mounted on the movable adjusting frame 208, an output end of the second collimator 209 is connected to the optical power device 210, and the optical power device 210 is configured to collect optical power of emergent light emitted by the second collimator 209; first host computer 207 connects LCOS chip drive circuit 206 to through LCOS chip drive circuit 206 is right LCOS chip 205 loads specific periodic drive pattern, first host computer 207 still connects movable adjustment frame 208 for to movable adjustment frame 208 sends the instruction, the instruction is used for movable adjustment frame 208 risees or reduces, in order to adjust the height of second collimator 209.
The working process of the testing device for the liquid crystal on silicon chip in the embodiment is as follows: the tunable laser 201 is connected to a first collimator 202, incident light emitted by the first collimator 202 passes through an analyzer 203 and a compound lens 204 and then enters an LCOS chip 205 at a set angle and a set light spot size, and a periodic driving pattern is loaded on the LCOS chip by using a first upper computer 207 and an LCOS chip driving circuit 206, so that the incident light is deflected and then emitted at various angles; the emergent light is changed into parallel light through the composite lens 204 and is emitted towards the direction of the second collimator 209, the deflected emergent light with different angles corresponds to different heights at the second collimator 209, the first upper computer 207 is used for controlling the movable adjusting frame 208 to adjust the position of the second collimator 209 up and down, so that the emergent light with different angles is input to the optical power equipment 210 through the second collimator 209, the optical power values of the second collimator 209 on different heights are read, and the optical energy distribution of the LCOS chip 205 on each angle direction after the incident light is deflected is obtained; further, the first upper computer 207 and the LCOS chip driving circuit 206 may be used to load other periodic driving patterns on the LCOS chip 205, and the above process is repeated to obtain the energy distribution of the LCOS chip 205 after deflecting the incident light under different driving signals.
The testing device for the silicon-based liquid crystal chip has a simple structure, can quickly measure the optical performance of the LCOS chip, and is favorable for quickly and conveniently analyzing the problem of port isolation of the LCOS chip in the wavelength selective switch.
The above description is only for the specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily conceive of the changes or substitutions within the technical scope of the present invention, and all the changes or substitutions should be covered within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the appended claims.

Claims (8)

1. A testing device for a liquid crystal on silicon chip is characterized by comprising: the device comprises a first collimator, an analyzer, a composite lens and a silicon-based Liquid Crystal On Silicon (LCOS) chip which are sequentially arranged on an incident light path, wherein incident light reaches the LCOS chip through the first collimator, the analyzer and the composite lens, and the LCOS chip is used for deflecting the incident light and then emitting the deflected incident light; the emergent light comprises various angles;
the device also comprises a second collimator arranged on the emergent light path and optical power equipment;
the composite lens is used for converting the emergent light after the LCOS chip deflects into parallel emergent light;
the second collimator is used for receiving and emitting the parallel emergent light passing through the compound lens;
and the optical power equipment is connected with the output end of the second collimator and is used for collecting the power of emergent light emitted by the second collimator.
2. The apparatus of claim 1, further comprising a tunable laser; the tunable laser is connected with the first collimator and is used for generating the incident light.
3. The device of claim 1 or 2, further comprising a movable adjustment frame; the second collimator is disposed on the movable alignment bracket.
4. The apparatus of claim 3, wherein the movable adjustment frame is height adjustable to receive multiple angles of the emitted light after being deflected by the LCOS chip by adjusting a height of the second collimator.
5. The device of claim 1, further comprising a first upper computer, wherein the first upper computer is configured to load a periodic driving pattern on the LCOS chip through an LCOS chip driving circuit, so that the LCOS chip deflects the incident light and then concentrates the incident light on the exit at a specific angle.
6. The device of claim 4, further comprising a second upper computer electrically connected to the movable adjusting frame for sending instructions to the movable adjusting frame, the instructions being used for raising or lowering the movable adjusting frame to adjust the height of the second collimator.
7. The apparatus of claim 1, wherein the optical power device is an optical power meter.
8. The apparatus of any of claims 1, 2 and 4 to 7, wherein the analyzer is further located in the outgoing light path, and the second collimator is further configured to receive and emit the parallel outgoing light through the compound lens and the analyzer.
CN202122053503.3U 2021-08-27 2021-08-27 Testing device for silicon-based liquid crystal chip Active CN215986794U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117191358A (en) * 2023-09-21 2023-12-08 苏州猎奇智能设备有限公司 Silicon optical chip testing device and testing method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117191358A (en) * 2023-09-21 2023-12-08 苏州猎奇智能设备有限公司 Silicon optical chip testing device and testing method thereof
CN117191358B (en) * 2023-09-21 2024-02-13 苏州猎奇智能设备有限公司 Silicon optical chip testing device and testing method thereof

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