CN215984982U

CN215984982U - Ceramic elastic diaphragm and ceramic force-sensitive sensor device thereof

Info

Publication number: CN215984982U
Application number: CN202121505452.7U
Authority: CN
Inventors: 许建平; 许文凯; 许美莲
Original assignee: Individual
Current assignee: Individual
Priority date: 2021-07-05
Filing date: 2021-07-05
Publication date: 2022-03-08
Anticipated expiration: 2031-07-05

Abstract

The invention relates to a ceramic elastic diaphragm and a ceramic force-sensitive sensor device manufactured by the same, in particular to a ceramic elastic diaphragm and a ceramic force-sensitive sensor device which are suitable for detecting liquid pressure, weight, gravity, touch force and displacement, wherein the stressed surface of the ceramic elastic diaphragm is provided with at least one of an elastic layer or a reinforcing layer which is made of non-elastic material and has suitable thickness, hardness and elasticity, or the back surface of the stressed surface of the ceramic elastic diaphragm is provided with at least one of an elastic layer, an elastic support body or a reinforcing layer which is made of non-elastic material and has suitable thickness, hardness and elasticity, wherein the ceramic force-sensitive sensor device comprises: a spherical or convex member, a compression spring, a connecting member, a force-bearing rod, a stopper portion, and the like.

Description

Ceramic elastic diaphragm and ceramic force-sensitive sensor device thereof

Technical Field

The present invention relates to a ceramic elastic diaphragm and a ceramic force-sensitive sensor device manufactured by the same, particularly to a ceramic elastic diaphragm suitable for detecting liquid pressure, weight, gravity, contact force and displacement, a sensor device, a control device, etc., which belongs to the technical field of sensors, but is not limited thereto.

Background

At present, pressure sensors composed of ceramic elastic diaphragms are more and more widely applied, because the ceramic elastic diaphragms have good stability and low manufacturing cost, but have the defects of poor flexibility or toughness and smaller overload capacity, and particularly, when the ceramic elastic diaphragms are used for manufacturing gravity, weight and touch force sensors, the ceramic elastic diaphragms are easy to break. In chinese invention patent application No. 2018100612650, title: in the data of 'a sensor device', a technical scheme for manufacturing a gravity, weight, touch force and displacement sensor is disclosed, wherein a convex component or a spherical component is used for abutting against an elastic sheet (416) which is provided with a predetermined thickness and can be compressed and deformed, and then the elastic sheet (416) abuts against an elastic membrane part in the elastic sheet, wherein the elastic sheet (416) is usually made of elastic materials such as silica gel, rubber and the like; the technical scheme is not beneficial to a force-sensitive sensor device consisting of the ceramic elastic diaphragm, because when the elastic sheet (416) is abutted by the spherical component or the convex component and then abutted by the ceramic elastic diaphragm, the area of the elastic sheet (416) abutted by the ceramic elastic diaphragm after deformation is smaller, the ceramic elastic diaphragm is easy to crack due to the smaller abutting area, and particularly when the abutting force is larger; the reason for this is that the ceramic elastic diaphragm is high in hardness, brittle, not easily made thin, and small in elastic deformation amount, and is easily broken by a large contact force and a small contact area. In addition, since the elastic piece (416) made of silicone rubber, rubber or the like is used, it is disadvantageous to manufacture a displacement sensor with high precision, and the elasticity or thickness of the elastic piece made of silicone rubber, rubber or the like is liable to change with the change of the ambient temperature, that is, under the same pressure, the thickness of the elastic piece is different due to the difference of the ambient temperature, thereby affecting the measurement precision or accuracy of the displacement sensor.

Disclosure of Invention

The invention aims to: improving the drawbacks of the above-mentioned products.

The purpose of the invention is realized by the following technical scheme.

1. A ceramic elastic diaphragm comprising: the ceramic wafer with arrange strain resistance or electric capacity on the ceramic wafer, the pottery elastic diaphragm is suitable for and receives external input power or deformation when conflicting the motion to convert external input power or deflection into the signal of telecommunication, wherein, be equipped with on the pottery elastic diaphragm atress face and have by at least one of the elastic layer or the strengthening layer that is suitable for thickness, hardness and elasticity that is made of non-elastic material, perhaps, be equipped with on the back of pottery elastic diaphragm atress face and have by at least one of the elastic layer, the elastic support body or the strengthening layer that is suitable for thickness, hardness and elasticity that is made of non-elastic material.

Further comprising: the elastic layer is made of at least one of an insulating material, a plastic material, a metal material, an alloy material and a graphene material. The reinforcing layer includes: at least one of an insulating material layer, a plastic material layer, a metal material layer, an alloy material layer, a graphene material layer, or an electroplating material layer, which is disposed on the ceramic elastic membrane in an adhered or non-adhered manner. The elastic support body includes: a compression spring and a spring plate arranged on the compression spring.

2. A ceramic force sensitive sensor device comprising at least one of the ceramic elastic diaphragms described above.

3. A ceramic force sensitive sensor device comprising a ceramic elastic diaphragm as described in at least one of the above, and arranged on a cylindrical ceramic substrate to constitute a cup-shaped ceramic pressure sensor core, or arranged on a cup-shaped ceramic substrate to constitute a cylindrical ceramic pressure sensor core.

4. A ceramic force sensitive sensor device comprising at least one of the ceramic elastic diaphragms described above, a force transmitting member and a housing.

Further comprising: the force transmission member includes: spherical part or convex part, compression spring, adapting unit, force bearing pole, still include wherein: a restricting portion and a restricting portion; the limiting part is suitable for confining the spherical part or the convex part in the central area of the ceramic elastic diaphragm; the restricting portion is adapted to prevent the connecting member from moving further in a direction of the ceramic elastic membrane after contacting the connecting member.

Further comprising: the inner diameter or inner circumference of the compression spring is larger than the outer diameter or outer circumference of the spherical or convex component, which is at least partially disposed within the inner diameter or inner circumference of the compression spring; one end of the connecting part is fixedly connected with the force bearing rod, and the other end of the connecting part is provided with a circular counter bore or a circular groove or a circular boss which is suitable for being sleeved with a compression spring; when the bearing rod is subjected to a preset resisting force, the compression spring is not contacted with the limiting part and the limiting part.

Still further comprising: the limiting part is an elastic layer or a reinforcing layer arranged on the stress surface of the ceramic elastic diaphragm, a concave part is arranged in the middle area of the elastic layer or the reinforcing layer, and the lower end of the spherical part or the convex part is arranged in the concave part.

The reinforcing layer is a laminar body which is made of non-elastic materials and has a preset thickness and is beneficial to improving the strength or toughness of the ceramic elastic membrane.

The invention has the beneficial effects that: the ceramic force-sensitive sensor device has the advantages of simple structure, low cost and wide measuring range.

Drawings

FIG. 1 is a schematic cross-sectional view of a ceramic elastic diaphragm according to the present invention;

FIG. 2 is a schematic cross-sectional view of another elastic ceramic diaphragm of the present invention;

FIG. 3 is a schematic cross-sectional view of another elastic ceramic diaphragm of the present invention;

FIG. 4 is a schematic diagram of the outer shape of a cup-shaped ceramic pressure sensor core in accordance with the present invention;

FIG. 5 is a schematic cross-sectional view A-A of the cup-shaped ceramic pressure sensor core of FIG. 4;

FIG. 6 is a schematic external view of a cylindrical ceramic pressure sensor core of the present invention;

FIG. 7 is a schematic cross-sectional view B-B of the cylindrical ceramic pressure sensor core of FIG. 6;

FIG. 8 is a schematic cross-sectional view of a ceramic force-sensitive sensor apparatus of the present invention;

FIG. 9 is a schematic top view of the ceramic force sensitive sensor device of FIG. 8;

FIG. 10 is a schematic cross-sectional view of another ceramic force sensitive sensor apparatus of the present invention;

FIG. 11 is a schematic cross-sectional view of another ceramic force sensitive sensor device of the present invention;

FIG. 12 is a schematic cross-sectional view of another ceramic force sensitive sensor device of the present invention;

FIG. 13 is a schematic cross-sectional view of another ceramic force sensitive sensor device of the present invention.

Detailed Description

The technical solution according to the present invention is exemplified below with reference to the accompanying drawings. For clarity and brevity of description, like reference numerals refer to functionally similar elements throughout the several views.

FIG. 1 is a schematic cross-sectional view of a ceramic elastic diaphragm according to the present invention; in particular to a technical proposal that at least one of an elastic layer or a reinforcing layer which is made of non-elastic materials and has suitable thickness, hardness and elasticity is arranged on the stressed surface F of the ceramic elastic diaphragm; wherein the ceramic elastic diaphragm comprises: a ceramic plate 01 of suitable thickness, a strain resistor or a strain capacitor 02 arranged on the ceramic plate, and electrical input and

output terminals

03, 04, 05, 06 of the strain resistor or capacitor. The ceramic sheet 01 may be in the shape of a circle or a diamond. An elastic layer or a reinforcing layer 07 which is made of non-elastic materials and has proper thickness, hardness and elasticity is arranged on the stress surface 01a of the ceramic elastic membrane; if 07 is an elastic layer, 07 can be movably placed on the force-bearing surface 01a of the ceramic plate 01, or the elastic layer 07 can be arranged on the ceramic plate 01 by bonding at the edge, or can be bonded or bonded on the whole surface of the ceramic plate 01; if 07 is a reinforcing layer, 07 is partially or completely bonded to the force-bearing surface 01a of the ceramic sheet 01 by suitable technical means. The 07 can be made of insulating materials, plastic materials, metal materials, alloy materials, graphene materials and the like, the shape of the 07 comprises a circular plane elastic sheet or layer, a circular annular corrugated elastic sheet or layer, a hub-shaped elastic sheet or layer and the like, and the thickness, hardness and elasticity of the 07 are selected according to the designed sensitivity and range.

FIG. 2 is a schematic cross-sectional view of another elastic ceramic diaphragm of the present invention; in particular to a technical proposal that the back surface of the stressed F surface of the ceramic elastic diaphragm is provided with at least one of an elastic layer or a reinforcing layer which is made of non-elastic material and has suitable thickness, hardness and elasticity; wherein the ceramic elastic diaphragm comprises: a ceramic plate 01 of suitable thickness, a strain resistor or a strain capacitor 02 arranged on the ceramic plate, and electrical input and

output terminals

03, 04, 05, 06 of the strain resistor or capacitor. The ceramic sheet 01 may be in the shape of a circle or a diamond. An elastic layer or a reinforcing layer 07 which is made of non-elastic materials and has proper thickness, hardness and elasticity is arranged on the back surface 01b of the stress surface of the ceramic elastic membrane; if 07 is an elastic layer, 07 can be movably placed on the back 01b of the stressed surface of the ceramic sheet 01, or the elastic layer 07 can be arranged on the ceramic sheet 01 by bonding at the edge, or can be adhered or bonded on the whole surface of the ceramic sheet 01; if 07 is a reinforcing layer, 07 is partially or completely bonded to the back surface 01b of the force-bearing surface of the ceramic sheet 01 by suitable technical means. The 07 can be made of insulating materials, plastic materials, metal materials, alloy materials, graphene materials and the like, the shape of the 07 comprises a circular plane elastic sheet or layer, a circular annular corrugated elastic sheet or layer, a hub-shaped elastic sheet or layer and the like, and the thickness, hardness and elasticity of the 07 are selected according to the designed sensitivity and range.

FIG. 3 is a schematic cross-sectional view of another elastic ceramic diaphragm of the present invention; in particular to a technical proposal that the back surface of the stressed F surface of the ceramic elastic diaphragm is provided with at least one of an elastic layer or a reinforcing layer which is made of non-elastic material and has suitable thickness, hardness and elasticity; wherein the ceramic elastic diaphragm comprises: a ceramic plate 01 of suitable thickness, a strain resistor or a strain capacitor 02 arranged on the ceramic plate, and electrical input and

output terminals

03, 04, 05, 06 of the strain resistor or capacitor. The ceramic sheet 01 may be in the shape of a circle or a diamond. An elastic layer or a reinforcing layer 07 which is made of non-elastic materials and has proper thickness, hardness and elasticity is arranged on the back surface 01b of the stress surface of the ceramic elastic membrane; if 07 is an elastic layer, 07 can be movably placed on the back 01b of the stressed surface of the ceramic sheet 01, or the elastic layer 07 can be arranged on the ceramic sheet 01 by bonding at the edge, or can be adhered or bonded on the whole surface of the ceramic sheet 01; if 07 is a reinforcing layer, 07 is partially or completely bonded to the back surface 01b of the force-bearing surface of the ceramic sheet 01 by suitable technical means. The 07 can be made of insulating materials, plastic materials, metal materials, alloy materials, graphene materials and the like, the shape of the 07 comprises a circular plane elastic sheet or layer, a circular annular corrugated elastic sheet or layer, a hub-shaped elastic sheet or layer and the like, and the thickness, hardness and elasticity of the 07 are selected according to the designed sensitivity and range. As can be seen from fig. 3, the strain resistor or the strain capacitor 02, and the electrical input terminal and the

electrical output terminal

03, 04, 05, 06 of the strain resistor or the strain capacitor are disposed on the elastic layer or the reinforcing layer 07, and the elastic layer or the reinforcing layer 07 is bonded or adhered to the ceramic sheet 01; the technical scheme is more beneficial to the automation and the flow line production of the ceramic elastic diaphragm.

FIGS. 4 and 5 are schematic structural diagrams of a cup-shaped ceramic pressure sensor core according to the present invention; in particular to a technical proposal that at least one of an elastic layer or a reinforcing layer which is made of non-elastic materials and has suitable thickness, hardness and elasticity is arranged on the stressed surface F of the cup-shaped ceramic pressure sensor core body; wherein 20 is a cup-shaped ceramic body, 21 is a bottom or ceramic plate of suitable thickness in the cup-shaped ceramic body, 22 is a strain resistor or a strain capacitor arranged on the

ceramic plate

21, 23, 24, 25, 26 are electrical inputs and electrical outputs of the strain resistor or capacitor. Wherein, an elastic layer or a reinforcing layer 27 which is made of non-elastic material and has proper thickness, hardness and elasticity is arranged on the stress surface 21a of the ceramic elastic membrane 21; if 27 is an elastic layer, 27 can be movably placed on the force-bearing surface 21a of the ceramic sheet 21, or the elastic layer 27 can be arranged on the ceramic sheet 21 by bonding at the edge, or can be bonded or bonded on the whole surface of the ceramic sheet 21; if 27 is a reinforcing layer, 27 is partially or fully bonded to the force-bearing surface 21a of the ceramic sheet 21 by suitable technical means. The 27 can be made of insulating materials, plastic materials, metal materials, alloy materials, graphene materials and the like, the shape of the 27 comprises a circular plane spring sheet or layer, a circular annular corrugated spring sheet or layer, a hub-shaped spring sheet or layer and the like, and the thickness, hardness and elasticity of the 27 are selected according to the designed sensitivity and range.

Similarly, according to the technical solutions of fig. 2 and 3 of the present invention, the back surface 21b of the force-receiving surface F of the ceramic elastic diaphragm in fig. 4 and 5 may also be provided with at least one of an elastic layer or a reinforcing layer made of an inelastic material and having a suitable thickness, hardness and elasticity, thereby implementing the present invention.

FIGS. 6 and 7 are schematic structural views of a cylindrical ceramic pressure sensor core according to the present invention; in particular to a technical proposal that the back surface of the forced F surface of the core body of the cylindrical ceramic pressure sensor is provided with at least one of an elastic layer or a reinforcing layer which is made of non-elastic material and has suitable thickness, hardness and elasticity; wherein 30 is a circular tube cup-shaped ceramic body provided in the middle, 31 is a bottom or ceramic sheet with a suitable thickness in the 30 ceramic body, 32 is a strain resistor or a strain capacitor arranged on the

ceramic sheet

31, 33, 34, 35, 36 are an electrical input and an electrical output of the strain resistor or capacitor, and 37 is a ceramic sheet arranged on 30 for receiving and transmitting external forces. Wherein, an elastic layer or a reinforcing layer 37 which is made of non-elastic material and has proper thickness, hardness and elasticity is arranged on the back surface 31b of the stress surface of the ceramic elastic membrane; if 37 is an elastic layer, 37 can be movably placed on the force-bearing surface 31b of the ceramic plate 31, or the elastic layer 37 can be arranged on the ceramic plate 31 by bonding at the edge, or can be bonded or bonded on the whole surface of the ceramic plate 31; if 37 is a reinforcing layer, it is partly or entirely bonded to the force-bearing surface 31b of the ceramic plate 31 by suitable technical means 37. The 37 can be made of insulating materials, plastic materials, metal materials, alloy materials, graphene materials and the like, the shape of the 37 comprises a circular plane elastic sheet or layer, a circular annular corrugated elastic sheet or layer, a hub-shaped elastic sheet or layer and the like, and the thickness, hardness and elasticity of the 37 are selected according to the designed sensitivity and range.

FIGS. 8 and 9 are schematic structural views of a cup-shaped ceramic force-sensitive sensor device according to the present invention; in particular to a ceramic force-sensitive sensor device suitable for detecting gas and liquid pressure. Wherein, 30 is a metal shell, two outer ends of the shell 30 are provided with external threads, the upper end is provided with internal threads, 31 is a cup-shaped pressure sensor core body as shown in fig. 4 and 5 of the invention, 32 is an insulating pad, 33 is a circular ring-shaped corrugated elastic sheet arranged at the bottom of the cup-shaped pressure

sensor core body

31, 34 and 35 are sealing rings, 36 is a metal ring-shaped press ring with threads on the outer edge, and 37 is an electrical input and output connecting wire of the cup-shaped pressure sensor core body, wherein F represents the liquid pressure or gas pressure entering the cup-shaped pressure sensor core body 31. The elastic sheet 33 is not limited to a circular corrugated elastic sheet, and may be a circular plane elastic sheet, a hub shape with various shapes, and the like; in addition, the thickness, size, shape and area of the elastic sheet 33 can be selected according to design.

FIG. 10 is a schematic cross-sectional view of another ceramic force sensitive sensor apparatus of the present invention; in particular to a ceramic force-sensitive sensor device which is suitable for weight, gravity and displacement measurement and control systems. Wherein, 40, 41 are shells, 42 is a cup-shaped ceramic pressure sensor core body as described in fig. 4, 5 of the invention, 43 is a spring sheet, 44 is a convex component but can also be a spherical component, 45 is a compression spring, 46 is a connecting component, 47 is a force bearing rod, 48 is a spacing sleeve, the cylindrical inner wall 4a of the spacing sleeve 48 forms a spacing part, 49 is a limiting component, the upper end face 4b of the limiting component 49 forms a limiting part, 401 is an electrical input and output connecting wire of the cup-shaped pressure sensor core body 42. It can be known from fig. 10 that the elastic sheet 43 is arranged on the force-bearing surface of the cup-shaped pressure sensor core 42 in a manner of being adhered or bonded or non-adhered or non-bonded, the elastic sheet 43 has a suitable shape area, thickness or elasticity, the elastic sheet 43 is made of non-elastic material, such as insulating material, plastic material, metal material, alloy material, graphene material, etc., the elastic sheet 43 should meet the condition that when a predetermined input force F is applied on the force-bearing rod 47, the contact or interference part of the elastic sheet 43 and the cup-shaped pressure sensor core 42 is surface contact or surface interference with a predetermined area, thereby reducing the interference destruction rate of the convex component 44 to the cup-shaped pressure sensor core 42, the elastic sheet 43 is generally circular but not limited thereto, and the diameter of the elastic sheet 43 is determined by practical conditions. Wherein, the spacing sleeve 48 or the spacing part 4a is movably matched with the convex component 48. The restricting portion 4a is adapted to contact the connecting member 46 and prevent the connecting member 46 from moving further toward the ceramic elastic diaphragm in the cup-shaped pressure sensor core 42 when the force-bearing rod 47 receives a predetermined input force F, for which reason the elastic force and the expansion distance H of the compression spring 45 are set with the object that the restricting portion 4a contacts the connecting member 46 when the force-bearing rod 47 receives the predetermined input force F, and the ceramic elastic diaphragm in the cup-shaped pressure sensor core 42 is not damaged, thereby achieving the object of the ceramic elastic diaphragm or the cup-shaped ceramic pressure sensor core of the present invention. Wherein, the inner diameter or the inner circle of the compression spring 45 is larger than the outer diameter or the outer circle of the convex part 44, the convex part 44 is at least partially arranged in the inner diameter or the inner circle of the compression spring 45, one end of the connecting part 46 is fixedly connected with the bearing rod 47, the other end of the connecting part 46 is provided with a circular groove suitable for sleeving the compression spring 45, and when the bearing rod 47 is subjected to a preset abutting force F, the compression spring 45 is not contacted with the limiting part 48 and the limiting part 49.

FIG. 11 is a schematic cross-sectional view of another ceramic force sensitive sensor device of the present invention; in particular to another ceramic force-sensitive sensor device suitable for weight, gravity and displacement measurement and automatic control systems. Wherein 50 and 51 are shells, 52 is a cylindrical ceramic pressure sensor core body as shown in fig. 6 and 7 of the invention, 53 is a spring plate, 54 is a spherical component but can also be a convex component, 55 is a compression spring, 56 is a connecting component, 57 is a force bearing rod, 5a is a cylindrical inner wall or a limiting part of the

shell

50, 5b is an inner platform end surface or a limiting part of the

shell

50, and 501 is an electrical input and output connecting wire of the cup-shaped pressure sensor core body 42. As shown in fig. 11, the elastic sheet 53 is adhered, bonded, non-adhered or non-bonded to the stressed surface of the cylindrical pressure sensor core 52, the elastic sheet 53 is a circular ring-shaped corrugated elastic sheet having a shape suitable for the shape area, thickness or elasticity, but the shape of the elastic sheet 53 may also be a circular plane elastic sheet or layer, a hub-shaped elastic sheet or layer, etc., the elastic sheet 53 is made of a non-elastic material, such as an insulating material, a plastic material, a metal material, an alloy material, a graphene material, etc., the elastic sheet 53 is configured such that when a predetermined input force F is applied to the force-bearing rod, the contact or contact portion of the elastic sheet 53 and the cylindrical pressure sensor core 52 is in surface contact or surface contact with a predetermined area, thereby reducing the contact damage rate of the spherical component 54 to the cup-shaped pressure sensor core 52, wherein the elastic sheet 53 may also be a plane circular elastic sheet, a hub-shaped elastic sheet with various shapes, etc., the diameter of the spring 43 is determined by the actual situation. Wherein, the spacing part 5a is movably matched with the spherical part 54. The restricting part 5b is adapted to contact the connecting part 56 and prevent the connecting part 56 from moving further toward the cylindrical ceramic pressure sensor core 52 when the force-bearing rod 57 receives a predetermined input force F, for which reason the elastic force and the expansion distance H of the compression spring 55 are set with the object that the restricting part 5b contacts the connecting part 56 when the force-bearing rod 57 receives the predetermined input force F, and the ceramic sheet in the cylindrical ceramic pressure sensor core 52 is not damaged, thereby achieving the object of the cylindrical ceramic pressure sensor core of the present invention. Wherein, the inner diameter or the inner ring of the compression spring 55 is larger than the outer diameter or the outer ring of the spherical part 54, the spherical part 54 is at least partially arranged in the inner diameter or the inner ring of the compression spring 54, one end of the connecting part 56 is fixedly connected with a bearing rod 57, the other end of the connecting part 56 is provided with a circular counter bore suitable for sleeving the compression spring 45, and when the bearing rod 57 is subjected to a preset interference force F, the compression spring 55 is not contacted with the limiting part 5a and the limiting part 5 b.

FIG. 12 is a schematic cross-sectional view of another ceramic force sensitive sensor device of the present invention; in particular to another ceramic force-sensitive sensor device suitable for weight, gravity and displacement measurement and automatic control systems. Wherein, 60 and 61 are shells, 62 is a cup-shaped ceramic pressure sensor core body as shown in fig. 4 and 5 of the present invention, 63a and 63b are elastic sheets, 63c is an insulating pad or layer, 64 is a spherical component but can also be a convex component, 65 is a compression spring, 66 is a connecting component, 67 is a force bearing rod, and 601 is an electrical input and output connection wire of the cup-shaped ceramic pressure sensor core body 62. Wherein the middle area of the elastic piece 63a is provided with a concave part 6a, and the lower end of the spherical part 64 is arranged in the concave part 6a, so that the part 6a constitutes one of the limiting parts of the invention. 6b is an upper end face of the cup-shaped ceramic pressure sensor core, and 6b constitutes a restricting portion of the invention, and the restricting portion 6b is adapted to contact the connecting member 66 and prevent the connecting member 66 from moving further toward the cylindrical ceramic pressure sensor core 62 when the force-bearing rod 67 receives a predetermined input force F, for which the elastic force and the expansion distance H of the compression spring 65 are set, with the object that the restricting portion 6b contacts the connecting member 66 when the force-bearing rod 67 receives the predetermined input force F, and the ceramic sheet in the cylindrical ceramic pressure sensor core 62 is not damaged, thereby achieving the object of the cylindrical ceramic pressure sensor core of the invention. As can be seen from fig. 12, the

elastic pieces

63a, 63b may be arranged on the force-bearing surface and the back surface of the cup-shaped ceramic pressure sensor core 62 in a bonded or non-bonded manner, the

elastic pieces

63a, 63b are made of non-elastic material, such as insulating material, plastic material, metal material, alloy material, graphene material, etc., the

elastic pieces

63a, 63b have suitable shape area and thickness, the elastic piece 63b is a circular ring-shaped corrugated elastic piece but may also be a planar circular elastic piece, hub-shaped pieces with various shapes, etc., and the elastic piece 63a should meet the condition that when a predetermined input force F is applied on the force-bearing rod 67, the contact or interference part of the elastic piece 63a and the cylindrical pressure sensor core 62 is in surface contact or surface interference with a predetermined area, thereby reducing the interference destruction rate of the spherical component 64 to the cup-shaped ceramic pressure sensor core 62. The inner diameter or the inner ring of the compression spring 65 is larger than the outer diameter or the outer ring of the spherical part 64, the spherical part 64 is at least partially arranged in the inner diameter or the inner ring of the compression spring 65, one end of the connecting part 66 is fixedly connected with the bearing rod 67, the other end of the connecting part 66 is provided with a circular counter bore or a boss which is suitable for sleeving the compression spring 65, such as sleeving parts of 44 and 45 in fig. 10, and when the bearing rod 67 is subjected to a preset abutting force F, the compression spring 65 is not in contact with the limiting part 6a and the limiting part 6 b.

FIG. 13 is a schematic cross-sectional view of another ceramic force sensitive sensor apparatus of the present invention; in particular to another ceramic force-sensitive sensor device suitable for weight, gravity and displacement measurement and automatic control systems. Wherein, 70 and 71 are casings, 72 is a cup-shaped ceramic pressure sensor core body as shown in fig. 4 and 5 of the present invention, 73a and 73b are elastic sheets, 73e is a compression spring, 73c is an insulating pad or layer, 74 is a spherical component but can also be a convex component, 75 is a compression spring, 76 is a connecting component, 77 is a force bearing rod, and 701 is an electrical input and output connection wire of the cup-shaped ceramic pressure sensor core body 72. Wherein the middle area of the elastic piece 73a is provided with a concave part 7a, and the lower end of the spherical part 74 is arranged in the concave part 7a, so that 7a constitutes one of the limiting parts of the invention. 7b is an upper end face of the cup-shaped ceramic pressure sensor core, and 7b constitutes a restricting portion of the invention, and the restricting portion 7b is adapted to contact the connecting member 76 and prevent the connecting member 76 from moving further toward the cylindrical ceramic pressure sensor core 72 when the force-bearing rod 77 receives a predetermined input force F, for which the elastic force and the expansion distance H of the compression spring 75 are set, with the object that the restricting portion 7b contacts the connecting member 76 when the force-bearing rod 77 receives the predetermined input force F, and the ceramic sheet in the cylindrical ceramic pressure sensor core 72 is not damaged, thereby achieving the object of the cylindrical ceramic pressure sensor core of the invention. As can be seen from fig. 13, the

elastic pieces

73a, 73b may be arranged on the force-bearing surface and the back surface of the force-bearing surface of the cup-shaped ceramic pressure sensor core 72 in a bonded or non-bonded manner, the

elastic pieces

73a, 73b are made of non-elastic material, such as insulating material, plastic material, metal material, alloy material, graphene material, etc., the

elastic pieces

73a, 73b are of suitable shape area and thickness, the elastic piece 73b is a circular ring-shaped corrugated elastic piece but may also be a flat circular elastic piece, hub-shaped pieces of various shapes, etc., and the elastic piece 73a should satisfy the condition that when a predetermined input force F is applied on the force-bearing rod 77, the contact or interference part of the elastic piece 73a and the cylindrical pressure sensor core 72 is surface contact or surface interference with a predetermined area, thereby reducing the interference destruction rate of the spherical component 74 on the cup-shaped ceramic pressure sensor core 72. Wherein, the inner warp or inner ring of the compression spring 75 is larger than the outer diameter or outer ring of the spherical part 74, the spherical part 74 is at least partially arranged in the inner warp or inner ring of the compression spring 75, one end of the connecting part 76 is fixedly connected with the bearing rod 77, the other end of the connecting part 76 is provided with a circular counter bore or a boss which is suitable for sleeving the compression spring 75, such as sleeving parts of 44 and 45 in fig. 10, and when the bearing rod 77 is subjected to a preset interference force F, the compression spring 75 is not contacted with the limiting part 7a and the limiting part 7 b. As can be understood from fig. 13, the arrangement of the elastic support body composed of the compression spring 73e and the elastic sheet 73b on the back of the force-bearing surface of the ceramic elastic diaphragm in the cup-shaped ceramic pressure sensor core 72 is beneficial to improve the range of the ceramic force-sensitive sensor device of the present invention, but the elastic deformation amount of the elastic sheet 73b, the elasticity of the compression spring needs to be specially designed, but the design scheme is not in the discussion of the present invention. Wherein, the elastic sheet 73a in fig. 13 can replace the elastic sheet 43 in fig. 10.

It should be understood that the limiting part and the limiting part are not limited to the above examples of the invention; the shape of the elastic layer or the reinforcing layer is not limited to the above examples of the present invention. Other components may be incorporated into the force transmitting member of the present invention, but force transmitting members incorporating other components are encompassed within the present invention. The ceramic elastic diaphragm described in fig. 1 and 2 of the present invention can replace the cup-shaped or cylindrical ceramic pressure sensor core described in fig. 8 to 12, thereby making the structure of the present invention simpler. The non-elastic material of the present invention is a material other than a material having elasticity such as a rubber material, a silicone material, or a gel, and may be attached or bonded by means of plating, thermal bonding, or adhesive bonding.

The foregoing is by way of specific examples of the present invention and it is therefore evident that the invention may be susceptible of considerable modification, variation or combination without departing from the broader aspects of the invention and therefore the scope of the appended claims is not intended to be limited to the specific examples and embodiments; the invention is intended to embrace all such modifications, variations or combinations that fall within the spirit and scope of the appended claims.

Claims

1. A ceramic elastic diaphragm comprising: the ceramic elastic diaphragm is suitable for deforming when being subjected to external input force or interference motion and converting the external input force or deformation into an electric signal,

the method is characterized in that:

the stress surface of the ceramic elastic membrane is provided with at least one of an elastic layer or a reinforcing layer which is made of non-elastic material and has suitable thickness, hardness and elasticity, or,

the back surface of the stress surface of the ceramic elastic membrane is provided with at least one of an elastic layer, an elastic support body or a reinforcing layer which is made of non-elastic materials and has suitable thickness, hardness and elasticity.

2. The ceramic elastic diaphragm according to claim 1, characterized in that:

the elastic layer is made of at least one of an insulating material, a plastic material, a metal material, an alloy material and a graphene material.

3. The ceramic elastic diaphragm according to claim 1, characterized in that:

the reinforcing layer includes: at least one of an insulating material layer, a plastic material layer, a metal material layer, an alloy material layer, a graphene material layer, or an electroplating material layer, which is disposed on the ceramic elastic membrane in an adhered or non-adhered manner.

4. The ceramic elastic diaphragm according to claim 1, characterized in that:

the elastic support body includes: a compression spring and a spring plate arranged on the compression spring.

5. A ceramic force sensitive sensor device comprising a ceramic elastic diaphragm, the ceramic elastic diaphragm comprising: the ceramic elastic diaphragm is suitable for deforming when being subjected to external input force or interference motion and converting the external input force or deformation into an electric signal,

the method is characterized in that:

6. A ceramic force sensitive sensor device comprising a ceramic elastic diaphragm, the ceramic elastic diaphragm comprising: the ceramic pressure sensor comprises a ceramic plate and a strain resistor or a capacitor arranged on the ceramic plate, wherein the ceramic elastic diaphragm is suitable for deforming when receiving external input force or resisting movement and converting the external input force or the deformation into an electric signal, the ceramic elastic diaphragm is arranged on a cylindrical ceramic substrate so as to form a cup-shaped ceramic pressure sensor core body, or the ceramic elastic diaphragm is arranged on the cup-shaped ceramic substrate so as to form a cylindrical ceramic pressure sensor core body,

the method is characterized in that:

7. A ceramic force sensitive sensor device comprising a ceramic elastic diaphragm, a force transmitting member and a housing, the ceramic elastic diaphragm comprising: the ceramic elastic diaphragm is suitable for deforming when being subjected to external input force or interference motion and converting the external input force or deformation into an electric signal,

the method is characterized in that:

8. The ceramic force sensitive sensor device of claim 7, wherein:

the force transmission member includes: a spherical part (54; 64; 74) or a convex part (44), a compression spring (45; 55; 65; 75), a connecting part (46; 56; 66; 76), and a force bearing rod (47; 57; 67; 77).

9. The ceramic force sensitive sensor device of claim 8, wherein:

the inner diameter or inner circumference of the compression spring (45; 55; 65; 75) being larger than the outer diameter or outer circumference of the spherical part (54; 64; 74) or the male part (44), the spherical part (54; 64; 74) or the male part (44) being arranged at least partially in the inner diameter or inner circumference of the compression spring (45; 55; 65; 65),

one end of the connecting part (46; 56; 66; 76) is fixedly connected with the bearing rod (47; 57; 67; 77), and the other end of the connecting part (46; 56; 66; 76) is provided with a circular counter bore or a circular groove or a circular boss which is suitable for being sleeved with the compression spring (45; 55; 65; 75).

10. The ceramic force sensitive sensor device of claim 8, further comprising:

a limiting part and a limiting part, wherein,

said stop portion (4 a; 5 a; 6 a; 7a) being adapted to enclose said spherical part (54; 64; 74) or convex part (44) in a central region of the ceramic elastic membrane, or,

the limiting part is an elastic layer or a reinforcing layer (63 a; 73a) made of an inelastic material and having suitable thickness, hardness and elasticity on the force bearing surface of the ceramic elastic diaphragm, the middle area of the elastic layer or the reinforcing layer (63 a; 73a) is provided with a concave part (6 a; 7a), the lower end of the spherical part (64; 74) or the convex part (44) is arranged in the concave part (6 a; 7a), the limiting part (63 a; 73a) is suitable for encircling the spherical part (54; 64; 74) or the convex part (44) on the central area of the ceramic elastic diaphragm,

the limiting portion (4 b; 5 b; 6 b; 7b) is adapted to prevent the connecting member (46; 56; 66; 76) from moving further in the direction of the ceramic elastic membrane upon contact with the connecting member (46; 56; 66; 76),

when the force bearing rod (47; 57; 67; 77) receives a predetermined resisting force F, the compression spring (45; 55; 65; 75) is not contacted with the limiting part (4 a; 5 a; 6 a; 7a) and the limiting part (4 b; 5 b; 6 b; 7 b).