CN215969131U - 一种半导体材料开孔加工装置 - Google Patents
一种半导体材料开孔加工装置 Download PDFInfo
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- CN215969131U CN215969131U CN202122133307.7U CN202122133307U CN215969131U CN 215969131 U CN215969131 U CN 215969131U CN 202122133307 U CN202122133307 U CN 202122133307U CN 215969131 U CN215969131 U CN 215969131U
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- 239000000463 material Substances 0.000 title claims abstract description 31
- 239000004065 semiconductor Substances 0.000 title claims abstract description 31
- 238000004080 punching Methods 0.000 claims abstract description 27
- 230000006835 compression Effects 0.000 claims abstract description 13
- 238000007906 compression Methods 0.000 claims abstract description 13
- 238000003825 pressing Methods 0.000 claims abstract description 11
- 230000001681 protective effect Effects 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 abstract description 3
- 239000012634 fragment Substances 0.000 abstract description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
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Abstract
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202122133307.7U CN215969131U8 (zh) | 2021-09-06 | 2021-09-06 | 一种半导体材料开孔加工装置 |
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CN202122133307.7U CN215969131U8 (zh) | 2021-09-06 | 2021-09-06 | 一种半导体材料开孔加工装置 |
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CN215969131U true CN215969131U (zh) | 2022-03-08 |
CN215969131U8 CN215969131U8 (zh) | 2022-06-21 |
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CN202122133307.7U Expired - Fee Related CN215969131U8 (zh) | 2021-09-06 | 2021-09-06 | 一种半导体材料开孔加工装置 |
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CU01 | Correction of utility model |
Correction item: Patentee Correct: Weihai ailaifu Semiconductor Technology Co.,Ltd. False: Weihai ailaifu Semiconductor Technology Co.,Ltd. Number: 10-01 Page: The title page Volume: 38 Correction item: Patentee Correct: Weihai ailaifu Semiconductor Technology Co.,Ltd. False: Weihai ailaifu Semiconductor Technology Co.,Ltd. Number: 10-01 Volume: 38 |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20220308 |
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CF01 | Termination of patent right due to non-payment of annual fee |