CN215969131U - 一种半导体材料开孔加工装置 - Google Patents
一种半导体材料开孔加工装置 Download PDFInfo
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- CN215969131U CN215969131U CN202122133307.7U CN202122133307U CN215969131U CN 215969131 U CN215969131 U CN 215969131U CN 202122133307 U CN202122133307 U CN 202122133307U CN 215969131 U CN215969131 U CN 215969131U
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122133307.7U CN215969131U8 (zh) | 2021-09-06 | 2021-09-06 | 一种半导体材料开孔加工装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122133307.7U CN215969131U8 (zh) | 2021-09-06 | 2021-09-06 | 一种半导体材料开孔加工装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN215969131U true CN215969131U (zh) | 2022-03-08 |
| CN215969131U8 CN215969131U8 (zh) | 2022-06-21 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202122133307.7U Expired - Fee Related CN215969131U8 (zh) | 2021-09-06 | 2021-09-06 | 一种半导体材料开孔加工装置 |
Country Status (1)
| Country | Link |
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| CN (1) | CN215969131U8 (zh) |
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2021
- 2021-09-06 CN CN202122133307.7U patent/CN215969131U8/zh not_active Expired - Fee Related
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| Publication number | Publication date |
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| CN215969131U8 (zh) | 2022-06-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CU01 | Correction of utility model |
Correction item: Patentee Correct: Weihai ailaifu Semiconductor Technology Co.,Ltd. False: Weihai ailaifu Semiconductor Technology Co.,Ltd. Number: 10-01 Page: The title page Volume: 38 Correction item: Patentee Correct: Weihai ailaifu Semiconductor Technology Co.,Ltd. False: Weihai ailaifu Semiconductor Technology Co.,Ltd. Number: 10-01 Volume: 38 |
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| CU01 | Correction of utility model | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20220308 |
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| CF01 | Termination of patent right due to non-payment of annual fee |