CN215965120U

CN215965120U - Special equipment for cleaning cylinder bell jar

Info

Publication number: CN215965120U
Application number: CN202122214379.4U
Authority: CN
Inventors: 周尤; 段昧存; 韦树喜
Original assignee: Anhui Wanweikelin Precision Equipment Co ltd
Current assignee: Anhui Wanweikelin Precision Equipment Co ltd
Priority date: 2021-09-14
Filing date: 2021-09-14
Publication date: 2022-03-08
Anticipated expiration: 2031-09-14

Abstract

The utility model discloses a special device for cleaning a cylindrical bell jar, which belongs to the technical field of bell jar cleaning and comprises a cleaning machine, wherein the upper side in the cleaning machine is provided with a top spraying lamp and a lighting lamp, the middle part is provided with a table board, a central spraying head, a soaking tank, a soaking spraying pipe, a liquid storage tank, a drain pipe and a pneumatic diaphragm pump are arranged below the table board, the parts are connected through a pipeline, a plurality of pneumatic diaphragm valves are arranged on the pipeline, a quick exhaust cylinder is also arranged below the soaking tank, a drain pipe is arranged at the rear side of the quick exhaust cylinder, the utility model opens the tank door and the table top by arranging a cleaning machine, places a bell jar on the top surface of the soaking tank, closes the table top and the tank door, the program is set through control interface control, the pneumatic diaphragm pump is started, the top spraying pipe and the central spraying head are opened for spraying and soaking, acid liquor in the liquid storage tank is sprayed out and evenly sprayed on the inner surface and the outer surface of the bell jar, and the bell jar is sufficiently pickled.

Description

Special equipment for cleaning cylinder bell jar

Technical Field

The utility model relates to the technical field of bell jar cleaning, in particular to a special device for cleaning a cylindrical bell jar.

Background

In the semiconductor industry, the inner cavity of an epitaxial furnace for mass production of silicon wafers and silicon carbide wafers is basically made of high-purity quartz materials because of the requirements of high temperature resistance, light transmission and no material contamination, and quartz pieces in various shapes can be placed in the cavity in order to ensure the uniformity of airflow and the temperature consistency of the growth on the surface of a crystal besides the application of a quartz bell jar in a closed cavity. After a certain number of epitaxy processes, a plurality of residual substances are deposited on the surface of the quartz piece. These residual materials are regularly cleaned during equipment maintenance or otherwise can seriously affect the epitaxial layer growth quality of silicon wafers and silicon carbide wafers. The bell jar is a device commonly used in semiconductor production, and a special cleaning machine is required to clean the bell jar regularly.

The existing cleaning machine cleans the bell through button control, and the cleaning surface can not completely cover the inner surface and the outer surface of the bell, so that the cleaning effect is poor.

Based on the above, the utility model designs a special device for cleaning the cylindrical bell jar to solve the problems.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide a special device for cleaning a cylindrical bell jar, which solves the problems in the background technology.

In order to achieve the purpose, the utility model provides the following technical scheme: a special device for cleaning a cylindrical bell jar comprises a cleaning machine, wherein a box door is arranged on the upper portion of the front side of the cleaning machine, a table top is arranged inside the cleaning machine, a hollow groove is formed in the middle of the table top, a top spray and a lighting lamp are arranged inside the top surface of the cleaning machine, a control interface is arranged on the right side of the front side wall of the cleaning machine, an immersion tank is further arranged inside the cleaning machine, the immersion tank is located below the table top, a plurality of immersion spray pipes are fixed on the periphery above the immersion tank, a central spray head is further fixed in the middle of the bottom surface of the immersion tank, a quick exhaust cylinder is arranged below the left side of the immersion tank, a drain pipe is communicated with the rear side of the quick exhaust cylinder, a pneumatic diaphragm pump is communicated with the lower portion of the right side of the immersion tank through a pipeline, the pneumatic diaphragm pump is located below the left side of the immersion tank, the front side of the pneumatic diaphragm pump is communicated with a liquid storage tank, the liquid storage tank is respectively connected with the top spray, the immersion spray pipes and the central spray head through pipelines, and is provided with the pneumatic diaphragm pump, the pipeline is also communicated with an external water pipe.

Preferably, a filter is arranged on a pipeline between the soaking tank and the pneumatic diaphragm pump.

Preferably, a plurality of trundles are fixed on the bottom surface of the cleaning machine, a leakage-proof disc is arranged below each trundle, four corners of the bottom surface of the cleaning machine are provided with feet, connecting pieces are arranged on the feet, and the connecting pieces are fixedly connected with the ground through bolts.

Preferably, the upper part of the rear side wall of the cleaning machine is provided with an exhaust window, and an exhaust valve is arranged on the outer side of the exhaust window.

Preferably, the table top is divided into a left half and a right half which are respectively hinged on the left side wall and the right side wall of the cleaning machine, a plurality of water leakage holes are arranged on the table top, and hand-pulled grooves are arranged on the front sides of the table top of the left plate and the right plate.

Compared with the prior art, the utility model has the beneficial effects that:

according to the utility model, the cleaning machine is arranged, the box door and the table top are opened, the bell jar is placed on the top surface of the soaking tank, the table top and the box door are closed, the setting program is controlled through the control interface, the pneumatic diaphragm pump is started, the top spraying and soaking spraying pipe and the central spraying head are opened, acid liquor in the liquid storage tank is sprayed out and uniformly sprayed on the inner surface and the outer surface of the bell jar, and the bell jar is subjected to full acid washing;

the acid liquor after pickling enters the soaking tank through the water leakage hole on the table top, the acid liquor enters the filter by controlling the switch of the pneumatic diaphragm pump, and the acid liquor enters the liquid storage tank through the pneumatic diaphragm pump after being filtered; after pickling, spraying clear water through an external water pipe from the top, a soaking spray pipe and a central spray head, cleaning the bell jar, and discharging the washed sewage from a water outlet pipe through a quick exhaust cylinder after the sewage enters a soaking tank; through setting up the exhaust valve, the inside sour gas of cleaning machine is discharged through the exhaust valve in the cleaning machine working process.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a left side view of the present invention;

FIG. 3 is a schematic view of the structure at A-A of the present invention;

FIG. 4 is a schematic view of the structure at B-B of the present invention;

FIG. 5 is a schematic view of the structure of the present invention at position C;

in the drawings, the components represented by the respective reference numerals are listed below:

1-cleaning machine, 2-top spray, 3-lighting lamp, 4-exhaust window, 5-table surface, 6-exhaust valve, 7-control interface, 8-pneumatic diaphragm valve, 9-filter, 10-central spray header, 11-soaking tank, 12-soaking spray pipe, 13-quick exhaust cylinder, 14-liquid storage tank, 15-truckle, 16-water discharge pipe, 17-pneumatic diaphragm pump, 18-leakage-proof disk, 19-ground foot, 20-connecting piece, 21-water leakage hole, 22-empty tank and 23-hand-pulling tank.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and all other embodiments obtained by a person of ordinary skill in the art without any creative work based on the embodiments of the present invention belong to the protection scope of the present invention.

Referring to the drawings, the present invention provides a technical solution: the utility model provides a special equipment that washs drum bell jar, including cleaning machine 1, cleaning machine 1's front side upper portion is equipped with the chamber door, inside is equipped with mesa 5, the middle part of mesa 5 is equipped with empty groove 22, cleaning machine 1's top surface inside is equipped with the top and sprays 2 and light 3, cleaning machine 1's preceding lateral wall right side is equipped with control interface 6, cleaning machine 1's inside still is equipped with soaking groove 11, soaking groove 11 is located mesa 5 below, be fixed with a plurality of soaking shower 12 around soaking groove 11's top, soaking groove 11's bottom surface middle part still is fixed with central shower head 10, soaking groove 11's left side below is equipped with fast exhaust cylinder 13, fast exhaust cylinder 13 rear side intercommunication has drain pipe 16, soaking groove 11's right side below has pneumatic diaphragm pump 17 through the pipeline intercommunication, pneumatic diaphragm pump 17 is located soaking groove 11's left side below, pneumatic diaphragm pump 17's front side intercommunication has reservoir 14, reservoir 14 respectively with the top through the pipeline spray 2, the liquid storage tank 14, The soaking spray pipe 12 is connected with the central spray header 10, a plurality of pneumatic diaphragm valves 8 are arranged on the pipeline, and the pipeline is also communicated with an external water pipe.

Wherein, be equipped with filter 9 on the pipeline between soaking groove 11 and pneumatic diaphragm pump 17, carry out recycle to the acidizing fluid, avoid producing the waste.

Wherein, be fixed with a plurality of truckles 15 on the bottom surface of cleaning machine 1, truckle 15 below is equipped with leak protection dish 18, and the bottom surface four corners of cleaning machine 1 still is equipped with lower margin 19, is equipped with connection piece 20 on lower margin 19, and connection piece 20 passes through bolt and ground fixed connection, when the device needs to remove, puts the device subaerial, removes through truckle 15, after the device reachs fixed position, carries the device to leak protection dish 18 on, fixes device and leak protection dish 18 through connection piece 20 and bolt.

Wherein, the upper part of the rear side wall of the cleaning machine 1 is provided with an exhaust window 4, and an exhaust valve 7 at the outer side of the exhaust window 4 is convenient for discharging acid gas in the cleaning machine 1.

The table top 5 is divided into a left half and a right half which are respectively hinged on the left side wall and the right side wall of the cleaning machine 1, a plurality of water leakage holes 21 are arranged on the table top, hand-pulled grooves 23 are arranged on the front sides of the table tops 5 of the left plate and the right plate, the bell jar is convenient to place and take out, and liquid on the table top 5 can conveniently enter the soaking groove 11.

One specific application of this embodiment is: opening a box door and a table board 5, placing a bell jar on the top surface of a soaking tank 11, closing the table board 5 and the box door, controlling a set program through a control interface 6, starting a pneumatic diaphragm pump 17, opening a top spray pipe 2, a soaking spray pipe 12 and a central spray head 10, spraying acid liquor in a liquid storage tank 14 out, uniformly spraying the acid liquor on the inner surface and the outer surface of the bell jar, fully pickling the bell jar, enabling the pickled acid liquor to enter the soaking tank 11 through a water leakage hole 21 on the table board 5, enabling the acid liquor to enter a filter 9 through controlling the opening and closing of a pneumatic diaphragm valve 8, and enabling the filtered acid liquor to enter the liquid storage tank 14 through the pneumatic diaphragm pump 17;

after pickling, clear water is sprayed out through the top of the cleaning machine 2, the soaking spray pipe 12 and the central spray head 10 through an external water pipe to clean the bell jar, the washed sewage enters the soaking groove 11 and is discharged from the water outlet pipe 16 through the quick exhaust cylinder 13, and acid gas in the cleaning machine 1 is discharged through the exhaust valve 7 in the working process of the cleaning machine 1.

In the description herein, references to the description of "one embodiment," "an example," "a specific example" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The preferred embodiments of the utility model disclosed above are intended to be illustrative only. The preferred embodiments are not exhaustive and do not limit the utility model to the precise embodiments disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the utility model and the practical application, to thereby enable others skilled in the art to best utilize the utility model. The utility model is limited only by the claims and their full scope and equivalents.

Claims

1. A special apparatus for cleaning cylindrical bell jars, comprising a cleaning machine (1), characterized in that: a box door is arranged at the upper part of the front side of the cleaning machine (1), a table board (5) is arranged in the cleaning machine, a hollow groove (22) is arranged in the middle of the table board (5), a top spray (2) and an illuminating lamp (3) are arranged in the top surface of the cleaning machine (1), a control interface (6) is arranged at the right side of the front side wall of the cleaning machine (1), a soaking groove (11) is also arranged in the cleaning machine (1), the soaking groove (11) is positioned below the table board (5), a plurality of soaking spray pipes (12) are fixed around the upper part of the soaking groove (11), a central spray header (10) is also fixed in the middle of the bottom surface of the soaking groove (11), a quick exhaust cylinder (13) is arranged below the left side of the soaking groove (11), a drain pipe (16) is communicated with the rear side of the quick exhaust cylinder (13), a pneumatic diaphragm pump (17) is communicated with the right side of the soaking groove (11) through a pipeline, and the pneumatic diaphragm pump (17) is positioned below the left side of the soaking groove (11), the front side of the pneumatic diaphragm pump (17) is communicated with a liquid storage tank (14), the liquid storage tank (14) is respectively connected with the top spray pipe (2), the soaking spray pipe (12) and the central spray header (10) through pipelines, a plurality of pneumatic diaphragm valves (8) are arranged on the pipelines, and the pipelines are also communicated with external water pipes.

2. The apparatus for cleaning a cylindrical bell jar as set forth in claim 1, wherein: and a filter (9) is arranged on a pipeline between the soaking tank (11) and the pneumatic diaphragm pump (17).

3. The apparatus for cleaning a cylindrical bell jar as set forth in claim 1, wherein: the cleaning machine is characterized in that a plurality of trundles (15) are fixed on the bottom surface of the cleaning machine (1), a leakage-proof disc (18) is arranged below each trundle (15), four corners of the bottom surface of the cleaning machine (1) are provided with feet (19), connecting pieces (20) are arranged on the feet (19), and the connecting pieces (20) are fixedly connected with the ground through bolts.

4. The apparatus for cleaning a cylindrical bell jar as set forth in claim 1, wherein: an exhaust window (4) is arranged on the upper portion of the rear side wall of the cleaning machine (1), and an exhaust valve (7) is arranged on the outer side of the exhaust window (4).

5. The apparatus for cleaning a cylindrical bell jar as set forth in claim 1, wherein: the table board (5) is divided into a left half and a right half which are respectively hinged on the left side wall and the right side wall of the cleaning machine (1), a plurality of water leakage holes (21) are arranged on the table board, and hand-pulled grooves (23) are arranged on the front sides of the table boards (5) of the left plate and the right plate.