CN215962219U - Sublimation instrument vacuum system - Google Patents
Sublimation instrument vacuum system Download PDFInfo
- Publication number
- CN215962219U CN215962219U CN202121331425.2U CN202121331425U CN215962219U CN 215962219 U CN215962219 U CN 215962219U CN 202121331425 U CN202121331425 U CN 202121331425U CN 215962219 U CN215962219 U CN 215962219U
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- Prior art keywords
- cavity
- vacuum
- gate valve
- cold trap
- ethanol
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/16—Filtration; Moisture separation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D3/00—Distillation or related exchange processes in which liquids are contacted with gaseous media, e.g. stripping
- B01D3/10—Vacuum distillation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D8/00—Cold traps; Cold baffles
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B41/00—Pumping installations or systems specially adapted for elastic fluids
- F04B41/06—Combinations of two or more pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
- F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
- F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps
- F04D29/706—Humidity separation
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Abstract
The utility model relates to a vacuum system of a sublimator, which comprises: the vacuum tube is arranged on one side of the sublimation instrument main body along a preset axis; a pipeline switching device is fixedly connected between the vacuum tube and the sublimation instrument main body; the vacuum tube is used for controlling the on-off of the vacuum between the sublimation instrument main body and the vacuum tube; one side of the pipeline switching device is connected in series to one side of the filtering device; a vacuum device is connected in series with the other side of the filtering device; the utility model adopts the secondary cold trap filtering device of the ethanol cold trap and the liquid nitrogen cold trap, which can effectively separate gaseous materials entering a vacuum system, so that the gas entering the vacuum pump is cleaner, and the service life of the vacuum pump is prolonged; the technical problem that in the prior art, a small amount of gaseous materials can enter a mechanical pump and a molecular pump along with gas, so that the service lives of the mechanical pump and the molecular pump are shortened is solved.
Description
Technical Field
Embodiments of the present invention relate to a vacuum system, and more particularly, to a sublimation meter vacuum system.
Background
In current sublimation appearance, filter equipment generally all adopts multilayer metal mesh to filter, and multilayer metal mesh can filter most powder outside vacuum system, but, always has gaseous material of a small amount to follow gas admission mechanical pump and molecular pump, causes mechanical pump and molecular pump life to shorten.
SUMMERY OF THE UTILITY MODEL
The utility model aims to provide a filtering device consisting of a plurality of layers of metal nets and a secondary cold trap, which is used for filtering powder, so that the technical problem that the service lives of a mechanical pump and a molecular pump are shortened because a small amount of gaseous materials enter the mechanical pump and the molecular pump along with gas is solved.
In order to achieve the above object, an embodiment of the present invention provides a vacuum system for a sublimator, including:
the vacuum tube is arranged on one side of the sublimation instrument main body along a preset axis;
the pipeline switching device is fixedly connected between the vacuum tube and the sublimation instrument main body; the vacuum tube is used for controlling the on-off of the vacuum in the sublimation instrument main body and the vacuum tube;
a filtering device connected in series to one side of the pipeline switching device at one side thereof;
and the vacuum device is connected in series with the other side of the filtering device.
Furthermore, the vacuum tube and the sublimation instrument main body are vertically and fixedly connected to one side of the sublimation instrument main body along a central axis, and are communicated and cut off with the sublimation instrument main body through the pipeline switching device.
Further, the pipeline switching device further comprises:
the gate valve is arranged along the longitudinal central axis of the vacuum tube; the longitudinal cross section of the vacuum tube is cut off by the inserting plate of the inserting plate valve;
the top of the gate valve is fixed with the gate valve driving device, and the gate valve driving device drives the gate to move up and down.
Further, the gate valve driving device is a motor or a cylinder.
Further, the filtering device further comprises:
the ethanol cold trap is connected with a gate valve in the pipeline switching device; one side of the ethanol cold trap is fixedly connected with one side of the gate valve;
the other side of the ethanol cold trap is fixedly connected with one side of the liquid nitrogen cold trap; the other end of the liquid nitrogen cold trap is connected with one side of a pneumatic gate valve, and the other side of the pneumatic gate valve is connected with a fixed molecular pump; and a mechanical pump is connected below the liquid nitrogen cold trap.
Further, the ethanol cold trap further comprises:
the first cavity is connected with one end of the gate valve;
the ethanol cooling pipe penetrates into the first cavity;
the cooling fins are penetrated through the ethanol cooling pipes in sequence and are symmetrically arranged along the central axis of the first cavity; the cooling radiating fins are fixed on the ethanol cooling pipe at intervals up and down;
the ethanol cooling pipe is U-shaped, a U shape is formed in the first cavity, and the inlet of the ethanol cooling pipe and the outlet of the ethanol cooling pipe are fixed above the first cavity; a cooling circuit is formed within the first cavity.
Further, the liquid nitrogen cold trap further comprises:
the second cavity is arranged on the central axis of the liquid nitrogen cold trap, and one side of the second cavity is connected with one side of the ethanol cold trap; the other side of the second cavity is connected with one side of the pneumatic gate valve;
the liquid nitrogen cavity is arranged in the second cavity, a liquid feeding pipe is arranged above the liquid nitrogen cavity, and one end of the liquid feeding pipe extends out of the second cavity; and the upper shell of the liquid nitrogen cavity is fixedly connected with the upper shell of the second cavity.
Furthermore, a first connecting joint is arranged below the second cavity and is connected with the mechanical pump; the side surface of the second cavity is connected with one side of the pneumatic gate valve.
Further, the vacuum device is a mechanical pump and a molecular pump.
Compared with the prior art, the implementation mode of the utility model adopts the secondary cold trap filtering device of the ethanol cold trap and the liquid nitrogen cold trap, so that gaseous materials entering a vacuum system can be effectively separated, the gas entering the vacuum pump is cleaner, and the service life of the vacuum pump is prolonged; the technical problem that in the prior art, a small amount of gaseous materials can enter a mechanical pump and a molecular pump along with gas, so that the service lives of the mechanical pump and the molecular pump are shortened is solved.
Drawings
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a schematic view in front elevation of FIG. 1;
fig. 3 is a schematic view in the left-hand direction of fig. 1.
Fig. 4 is an enlarged schematic view of the filter device of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, embodiments of the present invention will be described in detail below with reference to the accompanying drawings. However, it will be appreciated by those of ordinary skill in the art that numerous technical details are set forth in order to provide a better understanding of the present application in various embodiments of the present invention. However, the technical solutions claimed in the claims of the present application can be implemented without these technical details and with various changes and modifications based on the following embodiments.
A first embodiment of the present invention relates to a sublimator vacuum system, as shown in fig. 1, 2 and 3, comprising:
the vacuum tube 10 is arranged on one side of the sublimation instrument main body 20 along a preset axis; the vacuum tube 10 is mainly used for connecting the sublimation apparatus main body 20 and the filtering device 50;
a duct switching device 30 fixedly connected between the vacuum tube 10 and the sublimation apparatus main body 20; used for controlling the vacuum connection and disconnection between the sublimation instrument main body 10 and the vacuum tube 10;
in series to one side of the filtering device 50 at one side of the pipe switching device 30; the filtering device 50 is used for filtering and separating gaseous materials entering the vacuum system, so that the gas entering the vacuum pump is cleaner, and the service life of the vacuum pump is prolonged;
a vacuum device 60 is connected in series with the other side of the filtering device 50; the vacuum device 60 primarily functions to draw a vacuum.
The form of having adopted one side at pipeline switching device 30 to establish ties to filter equipment 50 in this embodiment carries out the filtration of material, can effectively separate the gaseous state material that gets into in vacuum apparatus 60, has solved among the prior art a small amount of gaseous state material and can follow gas admission vacuum apparatus 60, causes the technical problem that vacuum apparatus 60 life shortens.
In order to achieve the above technical effects, as shown in fig. 1, 2 and 3, the vacuum tube 10 is vertically and fixedly connected to one side of the sublimation apparatus main body 20 along the central axis with the sublimation apparatus main body 20, and is communicated and cut off with the sublimation apparatus main body 20 through the pipeline switching device 30. When the vacuum device 60 extracts vacuum from the sublimation apparatus main body 20, the control, the connection and the disconnection can be performed.
In order to achieve the above technical effects, as shown in fig. 1, 2 and 3, the pipe switching device 30 further includes:
the gate valve 31 is arranged along the longitudinal central axis of the vacuum tube 10; the longitudinal cross section of the vacuum tube 10 is cut off by the inserting plate of the inserting plate valve 31;
the gate valve driving device 32 is fixed on the top of the gate valve 31, and the gate valve driving device 32 drives the gate 31 to move up and down.
In the present embodiment, as shown in fig. 1, 2 and 3, the gate valve driving device 32 is a motor or a cylinder.
In order to achieve the above technical effects, as shown in fig. 1, 2 and 3, the filtering apparatus 50 further includes:
the ethanol cold trap 51 is connected with a gate valve 31 in the pipeline switching device 30; one side of the ethanol cold trap 51 is fixedly connected with one side of the gate valve 31; the ethanol cold trap 51 is cooled mainly with ethanol, thereby not filtering the powder.
The other side of the ethanol cold trap 51 is fixedly connected with one side of a liquid nitrogen cold trap 52; the other end of the liquid nitrogen cold trap 52 is connected with one side of a pneumatic gate valve 53, and the other side of the pneumatic gate valve 53 is connected with a fixed molecular pump 61; a mechanical pump 62 is connected below the liquid nitrogen cold trap 52; the liquid nitrogen cold trap 52 contains liquid nitrogen, the ethanol cold trap 51 and the liquid nitrogen cold trap 52, and the secondary cold trap filtering device can greatly reduce the gas temperature and further purify the gas; can effectively separate gaseous materials entering a vacuum system, so that the gas entering the vacuum pump is cleaner, and the service life of the vacuum pump is prolonged.
In order to achieve the above technical effects, as shown in fig. 4, the ethanol cold trap 51 further includes:
one end of the gate valve 31 is connected with the first cavity 511; the first cavity 511 functions to cool the gaseous material.
An ethanol cooling pipe 512 is inserted into the first cavity 511; the ethanol cooling pipe 512 serves as a cooling pipe for cooling the gaseous material, and plays a role in transferring heat.
The ethanol cooling pipe 512 sequentially penetrates through cooling fins 513, and the cooling fins 513 are symmetrically arranged along the central axis of the first cavity 511; the cooling fins 513 are fixed on the ethanol cooling pipe 512 at intervals up and down; the cooling fins 513 can enlarge the heat dissipation area, so that the ethanol cold trap 51 can better cool the gaseous materials.
The ethanol cooling pipe 512 is U-shaped, a U-shape is formed in the first cavity 511, and an ethanol cooling pipe inlet 514 and an ethanol cooling pipe outlet 515 are fixed above the first cavity 511; a cooling circuit is formed in the first cavity 511.
In this embodiment, ethanol flows through the ethanol cooling pipe 512 via the ethanol cooling pipe inlet 514 and the ethanol cooling pipe outlet 515, the ethanol cooling pipe 512 is U-shaped, and the ethanol cooling pipe 512 is provided with cooling fins 513 to reduce the gas temperature and slow down the gas flow rate; the gas temperature can be greatly reduced, and the gas can be purified; the gas material entering the vacuum system can be effectively separated, so that the gas entering the mechanical pump 62 and the molecular pump 61 is cleaner, and the service life of the mechanical pump 62 and the molecular pump 61 is prolonged.
In order to achieve the above technical effect, as shown in fig. 4, the liquid nitrogen cold trap 52 further includes:
a second cavity 521 is arranged on the central axis of the liquid nitrogen cold trap 52, and one side of the second cavity 521 is connected with one side of the ethanol cold trap 52; the other side of the second cavity 521 is connected with one side of a pneumatic gate valve 53; the second cavity 521 also serves the function of cooling the gaseous material.
A liquid nitrogen cavity 522 is arranged in the second cavity 521, a liquid feeding pipe 523 is arranged above the liquid nitrogen cavity 522, and one end of the liquid feeding pipe 523 extends out of the second cavity 521; the upper shell of the liquid nitrogen cavity 521 is fixedly connected with the upper shell of the second cavity 521. The liquid nitrogen cavity 522 is used for containing liquid nitrogen, the liquid nitrogen is injected into the liquid nitrogen cavity 522 through the liquid feeding pipe 523, and a large amount of heat is absorbed in the second cavity 521 through the liquid nitrogen cavity 522, so that the gaseous material is cooled.
The liquid nitrogen cold trap 52 in this embodiment is designed as a double-layer cylinder, liquid nitrogen is contained in the liquid nitrogen cavity 522,
in order to realize the function of cooling the gaseous material, as shown in fig. 1, 2 and 3, a first connecting joint 524 is arranged below the second cavity 521 and is connected with the mechanical pump 62; the side of the second cavity 521 is connected to one side of the pneumatic gate valve 53.
As shown in fig. 1, the vacuum device 60 is a mechanical pump 62 and a molecular pump 61, and the mechanical pump 62 and the molecular pump 61 are separately turned on to perform vacuum pumping.
In the embodiment, the two-stage cold trap filtering device of the ethanol cold trap and the liquid nitrogen cold trap is adopted, so that gaseous materials entering a vacuum system are effectively separated, gas entering a vacuum pump is cleaner, and the service life of the vacuum pump is prolonged; the technical problem that in the prior art, a small amount of gaseous materials can enter a mechanical pump and a molecular pump along with gas, so that the service lives of the mechanical pump and the molecular pump are shortened is solved.
It will be understood by those of ordinary skill in the art that the foregoing embodiments are specific examples for carrying out the utility model, and that various changes in form and details may be made therein without departing from the spirit and scope of the utility model in practice.
Claims (9)
1. A sublimator vacuum system, comprising:
the vacuum tube is arranged on one side of the sublimation instrument main body along a preset axis;
the pipeline switching device is fixedly connected between the vacuum tube and the sublimation instrument main body; the vacuum tube is used for controlling the on-off of the vacuum in the sublimation instrument main body and the vacuum tube;
a filtering device connected in series to one side of the pipeline switching device at one side thereof;
and the vacuum device is connected in series with the other side of the filtering device.
2. The sublimation system vacuum system according to claim 1, wherein the vacuum tube is fixedly connected to the sublimation main body at a side thereof along a central axis thereof, and is connected to and disconnected from the sublimation main body by the conduit switching device.
3. The sublimator vacuum system of claim 1, wherein said duct switching means further comprises:
the gate valve is arranged along the longitudinal central axis of the vacuum tube; the longitudinal cross section of the vacuum tube is cut off by the inserting plate of the inserting plate valve;
the top of the gate valve is fixed with the gate valve driving device, and the gate valve driving device drives the gate to move up and down.
4. The sublimation meter vacuum system according to claim 3, wherein the gate valve driving means is a motor or a cylinder.
5. The sublimator vacuum system of claim 1, wherein said filter means further comprises:
the ethanol cold trap is connected with a gate valve in the pipeline switching device; one side of the ethanol cold trap is fixedly connected with one side of the gate valve;
the other side of the ethanol cold trap is fixedly connected with one side of the liquid nitrogen cold trap; the other end of the liquid nitrogen cold trap is connected with one side of a pneumatic gate valve, and the other side of the pneumatic gate valve is connected with a fixed molecular pump; and a mechanical pump is connected below the liquid nitrogen cold trap.
6. The sublimator vacuum system of claim 5, wherein said ethanol cold trap further comprises:
the first cavity is connected with one end of the gate valve;
the ethanol cooling pipe penetrates into the first cavity;
the cooling fins are penetrated through the ethanol cooling pipes in sequence and are symmetrically arranged along the central axis of the first cavity; the cooling radiating fins are fixed on the ethanol cooling pipe at intervals up and down;
the ethanol cooling pipe is U-shaped, a U shape is formed in the first cavity, and the inlet of the ethanol cooling pipe and the outlet of the ethanol cooling pipe are fixed above the first cavity; a cooling circuit is formed within the first cavity.
7. The sublimator vacuum system of claim 5, wherein said liquid nitrogen cooled trap further comprises:
the second cavity is arranged on the central axis of the liquid nitrogen cold trap, and one side of the second cavity is connected with one side of the ethanol cold trap; the other side of the second cavity is connected with one side of the pneumatic gate valve;
the liquid nitrogen cavity is arranged in the second cavity, a liquid feeding pipe is arranged above the liquid nitrogen cavity, and one end of the liquid feeding pipe extends out of the second cavity; and the upper shell of the liquid nitrogen cavity is fixedly connected with the upper shell of the second cavity.
8. The sublimation meter vacuum system according to claim 7, wherein a first connection joint is arranged below the second cavity and connected with a mechanical pump; the side surface of the second cavity is connected with one side of the pneumatic gate valve.
9. The sublimator vacuum system of claim 1, wherein said vacuum means are mechanical and molecular pumps.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202121331425.2U CN215962219U (en) | 2021-06-16 | 2021-06-16 | Sublimation instrument vacuum system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202121331425.2U CN215962219U (en) | 2021-06-16 | 2021-06-16 | Sublimation instrument vacuum system |
Publications (1)
Publication Number | Publication Date |
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CN215962219U true CN215962219U (en) | 2022-03-08 |
Family
ID=80516945
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN202121331425.2U Active CN215962219U (en) | 2021-06-16 | 2021-06-16 | Sublimation instrument vacuum system |
Country Status (1)
Country | Link |
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CN (1) | CN215962219U (en) |
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2021
- 2021-06-16 CN CN202121331425.2U patent/CN215962219U/en active Active
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