CN113457197A - Sublimation instrument vacuum system and control method thereof - Google Patents
Sublimation instrument vacuum system and control method thereof Download PDFInfo
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- CN113457197A CN113457197A CN202110663750.7A CN202110663750A CN113457197A CN 113457197 A CN113457197 A CN 113457197A CN 202110663750 A CN202110663750 A CN 202110663750A CN 113457197 A CN113457197 A CN 113457197A
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- ethanol
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- 238000000859 sublimation Methods 0.000 title claims abstract description 68
- 230000008022 sublimation Effects 0.000 title claims abstract description 68
- 238000000034 method Methods 0.000 title claims abstract description 9
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims abstract description 110
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 86
- 239000007788 liquid Substances 0.000 claims abstract description 50
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 43
- 239000000463 material Substances 0.000 claims abstract description 27
- 238000001914 filtration Methods 0.000 claims abstract description 24
- 238000001816 cooling Methods 0.000 claims description 47
- 239000011261 inert gas Substances 0.000 claims description 18
- 238000005086 pumping Methods 0.000 claims description 5
- 238000000605 extraction Methods 0.000 claims description 4
- 239000007789 gas Substances 0.000 abstract description 17
- 230000002035 prolonged effect Effects 0.000 abstract description 5
- 230000000694 effects Effects 0.000 description 5
- 239000002184 metal Substances 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D7/00—Sublimation
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/70—Suction grids; Strainers; Dust separation; Cleaning
- F04D29/701—Suction grids; Strainers; Dust separation; Cleaning especially adapted for elastic fluid pumps
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D8/00—Cold traps; Cold baffles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/14—Production of inert gas mixtures; Use of inert gases in general
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/16—Filtration; Moisture separation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/002—Details, component parts, or accessories especially adapted for elastic fluid pumps
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Abstract
The invention relates to a vacuum system of a sublimation instrument and a control method thereof, comprising the following steps: the vacuum tube is arranged on one side of the sublimation instrument main body along a preset axis; a pipeline switching device is fixedly connected between the vacuum tube and the sublimation instrument main body; the vacuum tube is used for controlling the on-off of the vacuum between the sublimation instrument main body and the vacuum tube; one side of the pipeline switching device is connected in series to one side of the filtering device; a vacuum device is connected in series with the other side of the filtering device; the master control system controls the vacuum device to extract vacuum from the sublimation instrument; the invention adopts the secondary cold trap filtering device of the ethanol cold trap and the liquid nitrogen cold trap, which can effectively separate gaseous materials entering a vacuum system, so that the gas entering the vacuum pump is cleaner, and the service life of the vacuum pump is prolonged; the technical problem that in the prior art, a small amount of gaseous materials can enter a mechanical pump and a molecular pump along with gas, so that the service lives of the mechanical pump and the molecular pump are shortened is solved.
Description
Technical Field
The embodiment of the invention relates to a vacuum system and a control method thereof, in particular to a vacuum system of a sublimation meter and a control method thereof.
Background
In current sublimation appearance, filter equipment generally all adopts multilayer metal mesh to filter, and multilayer metal mesh can filter most powder outside vacuum system, but, always has gaseous material of a small amount to follow gas admission mechanical pump and molecular pump, causes mechanical pump and molecular pump life to shorten.
Disclosure of Invention
The invention aims to provide a filtering device consisting of a plurality of layers of metal nets and a secondary cold trap, which is used for filtering powder, so that the technical problem that the service lives of a mechanical pump and a molecular pump are shortened because a small amount of gaseous materials enter the mechanical pump and the molecular pump along with gas is solved.
In order to achieve the above object, an embodiment of the present invention provides a vacuum system for a sublimator, including:
the vacuum tube is arranged on one side of the sublimation instrument main body along a preset axis;
the pipeline switching device is fixedly connected between the vacuum tube and the sublimation instrument main body; the vacuum tube is used for controlling the on-off of the vacuum in the sublimation instrument main body and the vacuum tube;
a filtering device connected in series to one side of the pipeline switching device at one side thereof;
the vacuum device is connected in series with the other side of the filtering device;
and the master control system controls the vacuum device to extract vacuum from the sublimation instrument.
Furthermore, the vacuum tube and the sublimation instrument main body are vertically and fixedly connected to one side of the sublimation instrument main body along a central axis, and are communicated and cut off with the sublimation instrument main body through the pipeline switching device.
Further, the pipeline switching device further comprises:
the gate valve is arranged along the longitudinal central axis of the vacuum tube; the longitudinal cross section of the vacuum tube is cut off by the inserting plate of the inserting plate valve;
the top of the gate valve is fixed with the gate valve driving device, and the gate valve driving device drives the gate to move up and down.
Further, the gate valve driving device is a motor or a cylinder.
Further, the filtering device further comprises:
the ethanol cold trap is connected with a gate valve in the pipeline switching device; one side of the ethanol cold trap is fixedly connected with one side of the gate valve;
the other side of the ethanol cold trap is fixedly connected with one side of the liquid nitrogen cold trap; the other end of the liquid nitrogen cold trap is connected with one side of a pneumatic gate valve, and the other side of the pneumatic gate valve is connected with a fixed molecular pump; and a mechanical pump is connected below the liquid nitrogen cold trap.
Further, the ethanol cold trap further comprises:
the first cavity is connected with one end of the gate valve;
the ethanol cooling pipe penetrates into the first cavity;
the cooling fins are penetrated through the ethanol cooling pipes in sequence and are symmetrically arranged along the central axis of the first cavity; the cooling radiating fins are fixed on the ethanol cooling pipe at intervals up and down;
the ethanol cooling pipe is U-shaped, a U shape is formed in the first cavity, and the inlet of the ethanol cooling pipe and the outlet of the ethanol cooling pipe are fixed above the first cavity; a cooling circuit is formed within the first cavity.
Further, the liquid nitrogen cold trap further comprises:
the second cavity is arranged on the central axis of the liquid nitrogen cold trap, and one side of the second cavity is connected with one side of the ethanol cold trap; the other side of the second cavity is connected with one side of the pneumatic gate valve;
the liquid nitrogen cavity is arranged in the second cavity, a liquid feeding pipe is arranged above the liquid nitrogen cavity, and one end of the liquid feeding pipe extends out of the second cavity; and the upper shell of the liquid nitrogen cavity is fixedly connected with the upper shell of the second cavity.
Furthermore, a first connecting joint is arranged below the second cavity and is connected with the mechanical pump; the side surface of the second cavity is connected with one side of the pneumatic gate valve.
Further, the vacuum device is a mechanical pump and a molecular pump, and the mechanical pump and the molecular pump are controlled by the main control system according to the vacuum degree, are separately started and perform vacuum pumping.
The embodiment of the invention also provides a control method of the vacuum system of the sublimator, which comprises the following steps:
step S10: opening the gate valve, opening the gate valve by the main control system, and communicating the vacuum device with the sublimation instrument main body; proceeding to step S20;
step S20: closing the pneumatic gate valve, closing the pneumatic gate valve by the main control system, and closing the space between the molecular pump and the sublimation instrument main body; proceeding to step S30;
step S30: circularly cooling the ethanol; the main control system injects the ethanol into an ethanol cooling pipe and continuously circularly cools; proceeding to step S40;
step S40: liquid nitrogen is circularly cooled, and is injected into the liquid nitrogen cavity to be cooled until the temperature in the first cavity and the second cavity reaches the temperature required by filtering; proceeding to step S50;
step S50: starting a mechanical pump, controlling the mechanical pump to be started by a main control system, pumping vacuum in the sublimation instrument main body by the mechanical pump to reach the vacuum value of the molecular pump, and entering step S60;
step S60: the molecular pump is started, the main control system controls the pneumatic gate valve to be opened, and the molecular pump is started; performing vacuum extraction until reaching a vacuum value required by the sublimation instrument; proceeding to step S70;
step S70, selecting whether to inject inert gas, if yes, entering step S80; if not, the molecular pump is continuously started, and the vacuum value required by the sublimation meter is kept;
step S80, injecting inert gas, closing the molecular pump, closing the pneumatic gate valve, and inserting the pneumatic gate valve into a pipeline on one side of the molecular pump; the main control system opens inert gas, injects inert gas into the sublimation instrument main body until the inert gas pressure value required by the sublimation instrument, and enters step S90;
step S90: the completion is waited to sublimate the material sublimation, and the major control system waits for wait to sublimate the material and accomplish after accomplishing the sublimation, inject into the air and destroy after collecting the material after the sublimation vacuum in the sublimation appearance main part or open the relief valve will inert gas pressure release to atmospheric pressure.
Compared with the prior art, the implementation mode of the invention adopts the secondary cold trap filtering device of the ethanol cold trap and the liquid nitrogen cold trap, so that gaseous materials entering a vacuum system can be effectively separated, the gas entering the vacuum pump is cleaner, and the service life of the vacuum pump is prolonged; the technical problem that in the prior art, a small amount of gaseous materials can enter a mechanical pump and a molecular pump along with gas, so that the service lives of the mechanical pump and the molecular pump are shortened is solved.
Drawings
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a schematic view in front elevation of FIG. 1;
fig. 3 is a schematic view in the left-hand direction of fig. 1.
FIG. 4 is an enlarged schematic view of the filtration apparatus of the present invention;
FIG. 5 is a schematic diagram of the master control system and the control of the mechanical pump and the molecular pump according to the present invention;
fig. 6 is a flow chart illustrating a second embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, embodiments of the present invention will be described in detail below with reference to the accompanying drawings. However, it will be appreciated by those of ordinary skill in the art that numerous technical details are set forth in order to provide a better understanding of the present application in various embodiments of the present invention. However, the technical solutions claimed in the claims of the present application can be implemented without these technical details and with various changes and modifications based on the following embodiments.
A first embodiment of the present invention relates to a sublimator vacuum system, as shown in fig. 1, 2 and 3, comprising:
the vacuum tube 10 is arranged on one side of the sublimation instrument main body 20 along a preset axis; the vacuum tube 10 is mainly used for connecting the sublimation apparatus main body 20 and the filtering device 50;
a duct switching device 30 fixedly connected between the vacuum tube 10 and the sublimation apparatus main body 20; used for controlling the vacuum connection and disconnection between the sublimation instrument main body 10 and the vacuum tube 10;
in series to one side of the filtering device 50 at one side of the pipe switching device 30; the filtering device 50 is used for filtering and separating gaseous materials entering the vacuum system, so that the gas entering the vacuum pump is cleaner, and the service life of the vacuum pump is prolonged;
a vacuum device 60 is connected in series with the other side of the filtering device 50; the vacuum device 60 primarily functions to draw a vacuum.
The main control system 70 controls the vacuum device 60 to extract vacuum from the sublimation apparatus, and the main control system 70 mainly performs vacuum extraction control.
The form of having adopted one side at pipeline switching device 30 to establish ties to filter equipment 50 in this embodiment carries out the filtration of material, can effectively separate the gaseous state material that gets into in vacuum apparatus 60, has solved among the prior art a small amount of gaseous state material and can follow gas admission vacuum apparatus 60, causes the technical problem that vacuum apparatus 60 life shortens.
In order to achieve the above technical effects, as shown in fig. 1, 2 and 3, the vacuum tube 10 is vertically and fixedly connected to one side of the sublimation apparatus main body 20 along the central axis with the sublimation apparatus main body 20, and is communicated and cut off with the sublimation apparatus main body 20 through the pipeline switching device 30. When the vacuum device 60 extracts vacuum from the sublimation apparatus main body 20, the control, the connection and the disconnection can be performed.
In order to achieve the above technical effects, as shown in fig. 1, 2 and 3, the pipe switching device 30 further includes:
the gate valve 31 is arranged along the longitudinal central axis of the vacuum tube 10; the longitudinal cross section of the vacuum tube 10 is cut off by the inserting plate of the inserting plate valve 31;
the gate valve driving device 32 is fixed on the top of the gate valve 31, and the gate valve driving device 32 drives the gate 31 to move up and down.
In the present embodiment, as shown in fig. 1, 2 and 3, the gate valve driving device 32 is a motor or a cylinder.
In order to achieve the above technical effects, as shown in fig. 1, 2 and 3, the filtering apparatus 50 further includes:
the ethanol cold trap 51 is connected with a gate valve 31 in the pipeline switching device 30; one side of the ethanol cold trap 51 is fixedly connected with one side of the gate valve 31; the ethanol cold trap 51 is cooled mainly with ethanol, thereby not filtering the powder.
The other side of the ethanol cold trap 51 is fixedly connected with one side of a liquid nitrogen cold trap 52; the other end of the liquid nitrogen cold trap 52 is connected with one side of a pneumatic gate valve 53, and the other side of the pneumatic gate valve 53 is connected with a fixed molecular pump 61; a mechanical pump 62 is connected below the liquid nitrogen cold trap 52; the liquid nitrogen cold trap 52 contains liquid nitrogen, the ethanol cold trap 51 and the liquid nitrogen cold trap 52, and the secondary cold trap filtering device can greatly reduce the gas temperature and further purify the gas; can effectively separate gaseous materials entering a vacuum system, so that the gas entering the vacuum pump is cleaner, and the service life of the vacuum pump is prolonged.
In order to achieve the above technical effects, as shown in fig. 4, the ethanol cold trap 51 further includes:
one end of the gate valve 31 is connected with the first cavity 511; the first cavity 511 functions to cool the gaseous material.
An ethanol cooling pipe 512 is inserted into the first cavity 511; the ethanol cooling pipe 512 serves as a cooling pipe for cooling the gaseous material, and plays a role in transferring heat.
The ethanol cooling pipe 512 sequentially penetrates through cooling fins 513, and the cooling fins 513 are symmetrically arranged along the central axis of the first cavity 511; the cooling fins 513 are fixed on the ethanol cooling pipe 512 at intervals up and down; the cooling fins 513 can enlarge the heat dissipation area, so that the ethanol cold trap 51 can better cool the gaseous materials.
The ethanol cooling pipe 512 is U-shaped, a U-shape is formed in the first cavity 511, and an ethanol cooling pipe inlet 514 and an ethanol cooling pipe outlet 515 are fixed above the first cavity 511; a cooling circuit is formed in the first cavity 511.
In this embodiment, ethanol flows through the ethanol cooling pipe 512 via the ethanol cooling pipe inlet 514 and the ethanol cooling pipe outlet 515, the ethanol cooling pipe 512 is U-shaped, and the ethanol cooling pipe 512 is provided with cooling fins 513 to reduce the gas temperature and slow down the gas flow rate; the gas temperature can be greatly reduced, and the gas can be purified; the gas material entering the vacuum system can be effectively separated, so that the gas entering the mechanical pump 62 and the molecular pump 61 is cleaner, and the service life of the mechanical pump 62 and the molecular pump 61 is prolonged.
In order to achieve the above technical effect, as shown in fig. 4, the liquid nitrogen cold trap 52 further includes:
a second cavity 521 is arranged on the central axis of the liquid nitrogen cold trap 52, and one side of the second cavity 521 is connected with one side of the ethanol cold trap 52; the other side of the second cavity 521 is connected with one side of a pneumatic gate valve 53; the second cavity 521 also serves the function of cooling the gaseous material.
A liquid nitrogen cavity 522 is arranged in the second cavity 521, a liquid feeding pipe 523 is arranged above the liquid nitrogen cavity 522, and one end of the liquid feeding pipe 523 extends out of the second cavity 521; the upper shell of the liquid nitrogen cavity 521 is fixedly connected with the upper shell of the second cavity 521. The liquid nitrogen cavity 522 is used for containing liquid nitrogen, the liquid nitrogen is injected into the liquid nitrogen cavity 522 through the liquid feeding pipe 523 and absorbs a large amount of heat in the second cavity 521 through the liquid nitrogen cavity 522, so that the function of cooling gaseous materials is realized,
the liquid nitrogen cold trap 52 in this embodiment is designed as a double-layer cylinder, liquid nitrogen is contained in the liquid nitrogen cavity 522,
in order to realize the function of cooling the gaseous material, as shown in fig. 1, 2 and 3, a first connecting joint 524 is arranged below the second cavity 521 and is connected with the mechanical pump 62; the side of the second cavity 521 is connected to one side of the pneumatic gate valve 53.
As shown in fig. 5, the vacuum device 60 is a mechanical pump 62 and a molecular pump 61, and the mechanical pump 62 and the molecular pump 61 are controlled by the main control system 70 according to the vacuum degree, and are separately turned on to perform vacuum pumping.
A second embodiment of the present invention relates to a method for controlling a vacuum system of a sublimator, as shown in fig. 6, comprising the steps of:
step S10: opening the gate valve 31, opening the gate valve 31 by the main control system 70, and communicating the vacuum device 60 with the sublimation meter main body 20; proceeding to step S20;
step S20: closing the pneumatic gate valve 53, closing the pneumatic gate valve 53 by the main control system 70, and closing the space between the molecular pump 61 and the sublimation instrument main body 20; proceeding to step S30;
step S30: circularly cooling the ethanol; the main control system 70 injects the ethanol into the ethanol cooling pipe 512, and continuously and circularly cools; proceeding to step S40;
step S40: liquid nitrogen is circularly cooled, and is injected into the liquid nitrogen cavity 522 to be cooled until the temperatures in the first cavity 511 and the second cavity 521 reach the temperature required by filtration; proceeding to step S50;
step S50: the mechanical pump 62 is started, the main control system 70 controls the mechanical pump 62 to be started, the mechanical pump 62 pumps the vacuum in the sublimation apparatus main body 20 to reach the vacuum value of the molecular pump 61, and the process goes to step S60;
step S60: the molecular pump 61 is started, the main control system 70 controls the pneumatic gate valve 53 to be opened, and the molecular pump 61 is started; performing vacuum extraction until reaching a vacuum value required by the sublimation instrument; proceeding to step S70;
step S70, selecting whether to inject the inert gas, if so, entering step S80 on the main control system 70; if not, the molecular pump 61 is continuously started, and the vacuum value required by the sublimation meter is kept;
step S80, injecting inert gas, closing the molecular 61 pump, closing the pneumatic gate valve 53, and inserting the pneumatic gate valve 53 into the pipeline at one side of the molecular pump 61; the main control system 70 opens the inert gas, injects the inert gas into the sublimation meter main body 20 until the pressure value of the inert gas required by the sublimation meter, and enters step S90;
step S90: the completion is waited to sublimate the material sublimation, and master control system 70 waits to wait to sublimate the material completion sublimation back to after the completion collects the material after the sublimation, inject into the air and destroy the vacuum in sublimation appearance main part 20 or open the relief valve and release inert gas pressure to atmospheric pressure.
It will be understood by those of ordinary skill in the art that the foregoing embodiments are specific examples for carrying out the invention, and that various changes in form and details may be made therein without departing from the spirit and scope of the invention in practice.
Claims (10)
1. A sublimator vacuum system, comprising:
the vacuum tube is arranged on one side of the sublimation instrument main body along a preset axis;
the pipeline switching device is fixedly connected between the vacuum tube and the sublimation instrument main body; the vacuum tube is used for controlling the on-off of the vacuum in the sublimation instrument main body and the vacuum tube;
a filtering device connected in series to one side of the pipeline switching device at one side thereof;
the vacuum device is connected in series with the other side of the filtering device;
and the master control system controls the vacuum device to extract vacuum from the sublimation instrument.
2. The sublimation system vacuum system according to claim 1, wherein the vacuum tube is fixedly connected to the sublimation main body at a side thereof along a central axis thereof, and is connected to and disconnected from the sublimation main body by the conduit switching device.
3. The sublimator vacuum system of claim 1, wherein said duct switching means further comprises:
the gate valve is arranged along the longitudinal central axis of the vacuum tube; the longitudinal cross section of the vacuum tube is cut off by the inserting plate of the inserting plate valve;
the top of the gate valve is fixed with the gate valve driving device, and the gate valve driving device drives the gate to move up and down.
4. The sublimation meter vacuum system according to claim 3, wherein the gate valve driving means is a motor or a cylinder.
5. The sublimator vacuum system of claim 1, wherein said filter means further comprises:
the ethanol cold trap is connected with a gate valve in the pipeline switching device; one side of the ethanol cold trap is fixedly connected with one side of the gate valve;
the other side of the ethanol cold trap is fixedly connected with one side of the liquid nitrogen cold trap; the other end of the liquid nitrogen cold trap is connected with one side of a pneumatic gate valve, and the other side of the pneumatic gate valve is connected with a fixed molecular pump; and a mechanical pump is connected below the liquid nitrogen cold trap.
6. The sublimator vacuum system of claim 5, wherein said ethanol cold trap further comprises:
the first cavity is connected with one end of the gate valve;
the ethanol cooling pipe penetrates into the first cavity;
the cooling fins are penetrated through the ethanol cooling pipes in sequence and are symmetrically arranged along the central axis of the first cavity; the cooling radiating fins are fixed on the ethanol cooling pipe at intervals up and down;
the ethanol cooling pipe is U-shaped, a U shape is formed in the first cavity, and the inlet of the ethanol cooling pipe and the outlet of the ethanol cooling pipe are fixed above the first cavity; a cooling circuit is formed within the first cavity.
7. The sublimator vacuum system of claim 5, wherein said liquid nitrogen cooled trap further comprises:
the second cavity is arranged on the central axis of the liquid nitrogen cold trap, and one side of the second cavity is connected with one side of the ethanol cold trap; the other side of the second cavity is connected with one side of the pneumatic gate valve;
the liquid nitrogen cavity is arranged in the second cavity, a liquid feeding pipe is arranged above the liquid nitrogen cavity, and one end of the liquid feeding pipe extends out of the second cavity; and the upper shell of the liquid nitrogen cavity is fixedly connected with the upper shell of the second cavity.
8. The sublimation meter vacuum system according to claim 7, wherein a first connection joint is arranged below the second cavity and connected with a mechanical pump; the side surface of the second cavity is connected with one side of the pneumatic gate valve.
9. The sublimation meter vacuum system according to claim 1, wherein the vacuum device is a mechanical pump and a molecular pump, and the mechanical pump and the molecular pump are controlled by the main control system according to the vacuum degree, and are separately started for vacuum pumping.
10. A control method of a vacuum system of a sublimator is characterized by comprising the following steps:
step S10: opening the gate valve, opening the gate valve by the main control system, and communicating the vacuum device with the sublimation instrument main body; proceeding to step S20;
step S20: closing the pneumatic gate valve, closing the pneumatic gate valve by the main control system, and closing the space between the molecular pump and the sublimation instrument main body; proceeding to step S30;
step S30: circularly cooling the ethanol; the main control system injects the ethanol into an ethanol cooling pipe and continuously circularly cools; proceeding to step S40;
step S40: liquid nitrogen is circularly cooled, and is injected into the liquid nitrogen cavity to be cooled until the temperature in the first cavity and the second cavity reaches the temperature required by filtering; proceeding to step S50;
step S50: starting a mechanical pump, controlling the mechanical pump to be started by a main control system, pumping vacuum in the sublimation instrument main body by the mechanical pump to reach the vacuum value of the molecular pump, and entering step S60;
step S60: the molecular pump is started, the main control system controls the pneumatic gate valve to be opened, and the molecular pump is started; performing vacuum extraction until reaching a vacuum value required by the sublimation instrument; proceeding to step S70;
step S70, selecting whether to inject inert gas, if yes, entering step S80; if not, the molecular pump is continuously started, and the vacuum value required by the sublimation meter is kept;
step S80, injecting inert gas, closing the molecular pump, closing the pneumatic gate valve, and inserting the pneumatic gate valve into a pipeline on one side of the molecular pump; the main control system opens inert gas, injects inert gas into the sublimation instrument main body until the inert gas pressure value required by the sublimation instrument, and enters step S90;
step S90: the completion is waited to sublimate the material sublimation, and the major control system waits for wait to sublimate the material and accomplish after accomplishing the sublimation, inject into the air and destroy after collecting the material after the sublimation vacuum in the sublimation appearance main part or open the relief valve will inert gas pressure release to atmospheric pressure.
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| CN202110663750.7A CN113457197A (en) | 2021-06-16 | 2021-06-16 | Sublimation instrument vacuum system and control method thereof |
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| CN202110663750.7A CN113457197A (en) | 2021-06-16 | 2021-06-16 | Sublimation instrument vacuum system and control method thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115531907A (en) * | 2022-08-19 | 2022-12-30 | 安徽贝意克智能科技有限公司 | Down-loading type cold trap structure and sublimation instrument |
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