CN215887304U - Heating device - Google Patents

Abstract

The application discloses heating device, including annular heating main part spare, heating main part spare includes a plurality of first heating portions and a plurality of second heating portions that set up along circumference in turn, and the length of first heating portion is different with the length of second heating portion, and wherein, at least one in first heating portion and second heating portion is the sectional type structure in length direction, and includes two or more heating sections that connect gradually. The application provides a heating device, through setting up at least one among first heating portion and the second heating portion into sectional type heating portion, sectional type heating portion need carry out segmentation processing man-hour, has not only reduced sectional type heating portion's processing length, reduces the processing degree of difficulty of heating main part spare, and partial heating section can also utilize waste material processing to form in the sectional type heating portion simultaneously, has reduced the waste material volume, and then reduces the manufacturing cost of heater.

Description

Heating device

Technical Field

The utility model relates to the technical field of single crystal silicon rod production equipment, in particular to a heating device.

Background

In the process for preparing the silicon single crystal rod by the production of the silicon single crystal material, the silicon single crystal material needs to be melted in melting equipment. Most of the melting devices are quartz crucibles and heaters, and the heaters are used for heating the quartz crucibles. The existing heater is an integrated structure, and comprises an annular heating main body part and an electrode part connected to the heating main body part, wherein the heating main body part is composed of a plurality of short heating sheets and a plurality of long heating sheets which are alternately arranged.

The heater is formed by a solid graphite blank through a machining process, so that the operation difficulty is high, the utilization rate of raw materials is low, and the production cost of the heater is high.

SUMMERY OF THE UTILITY MODEL

In view of the above-mentioned deficiencies or inadequacies in the prior art, it would be desirable to provide a heating device.

The application provides a heating device, including annular heating main part spare, the heating main part spare includes a plurality of first heating portions and a plurality of second heating portions that set up along circumference in turn, and the length of first heating portion is different with the length of second heating portion, and wherein, at least one in first heating portion and second heating portion is the sectional type structure in length direction, and includes two or more heating sections that connect gradually.

Further, the length of the first heating part is greater than that of the second heating part, and the first heating part is of a sectional structure.

Furthermore, the first heating part is provided with a first through groove, the first through groove extends to the top surface of the first heating part, and a first distance is formed between the first through groove and the bottom surface of the first heating part;

gaps are formed between any adjacent first heating parts and second heating parts, a second distance is formed between each gap and the top surface of the heating main body piece, and the second distance is smaller than the first distance.

Further, the two or more heating sections comprise a first heating section close to the top of the heating main body piece, the first heating section is connected with an adjacent second heating section, and the length of the first heating section is equal to that of the second heating section.

Further, the width of the first heating part is smaller than the width of the second heating part.

Further, any two adjacent heating sections are detachably connected.

Further, in any adjacent two heating sections, one heating section includes a first thinned end, and the other heating section includes a second thinned end, the first thinned end and the second thinned end being overlapped in a thickness direction of the heating body member and detachably connected.

Further, the electrode assembly is detachably connected with the heating main body piece.

Further, the electrode assembly comprises two electrode members, at least one of the two electrode members is provided with a supporting step, and the supporting step is in supporting fit with the bottom end of the heating main body member to support the heating main body member.

Further, the total number of the first heating part and the second heating part is less than 48, and the number of the second heating part is 4N, where N is a positive integer not greater than 6.

The application provides a heating device, through setting up at least one among first heating portion and the second heating portion into sectional type heating portion, sectional type heating portion can carry out segmentation processing man-hour, has not only reduced sectional type heating portion's processing length, reduces the processing degree of difficulty of heating main part spare, and partial heating section can also utilize waste material processing to form in the sectional type heating portion simultaneously, has reduced the waste material volume, and then reduces the manufacturing cost of heater.

Drawings

Other features, objects and advantages of the present application will become more apparent upon reading of the following detailed description of non-limiting embodiments thereof, made with reference to the accompanying drawings in which:

fig. 1 is a schematic structural diagram of a heating device provided in an embodiment of the present application;

FIG. 2 is an enlarged view of portion A of FIG. 1;

fig. 3 is a schematic structural diagram of an electrode element according to an embodiment of the present application.

Detailed Description

The present application will be described in further detail with reference to the following drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the relevant invention and are not limiting of the utility model. It should be noted that, for convenience of description, only the portions related to the present invention are shown in the drawings.

Referring to fig. 1, the present application provides a heating apparatus for heating a quartz crucible to melt a single crystal silicon material. The heating target of the heating device is not limited to the quartz crucible, and may be other carriers for heating the single crystal silicon material.

With reference to fig. 1 and fig. 2, an embodiment of the present application provides a heating apparatus, which includes an annular heating body 100, where the heating body 100 includes a plurality of first heating portions 110 and a plurality of second heating portions 120 alternately arranged along a circumferential direction, a length of the first heating portion 110 is different from a length of the second heating portion 120, where at least one of the first heating portion 110 and the second heating portion 120 has a segmented structure in a length direction, and includes two or more heating segments connected in sequence.

In the embodiment, the heating apparatus includes a heating body 100, the heating body 100 is a ring structure, and a heating carrier such as a quartz crucible can be disposed in an inner cavity surrounded by the heating body 100. The heating body member 100 includes a plurality of first heating parts 110 and a plurality of second heating parts 120, and the plurality of first heating parts 110 and the plurality of second heating parts 120 are alternately disposed in a circumferential direction of the heating body member 100. The length of the first heating part 110 is different from that of the second heating part 120 to heat the quartz crucible at different positions in the length direction. For example, the shorter of the first heating part 110 and the second heating part 120 may focus on heating the top of the crucible, and the longer of the first heating part 110 and the second heating part 120 may heat both the top and the bottom of the quartz crucible, so that the heating device may heat both the top and the bottom of the quartz crucible, and the heating device may heat the top of the quartz crucible more than the bottom of the quartz crucible, so as to not only lower the temperature of the bottom of the quartz crucible and reduce the oxygen content in the crystal rod, but also make the bottom of the quartz crucible not crystallize in the subsequent crystal pulling process, thereby ensuring the stability of the crystal pulling process and further improving the quality of the single crystal silicon rod.

Here, at least one of the first heating part 110 and the second heating part 120 is a segmented structure, that is, the first heating part 110 may be a segmented structure, or the second heating part 120 may be a segmented structure, or both the first heating part 110 and the second heating part 120 may be a segmented structure. Every heating section of the heating portion of sectional type all prepares alone, has not only reduced the processing length of sectional type heating portion on the processing raw materials, reduces the processing degree of difficulty of heating main part spare 100, and partial heating section can also utilize waste material processing to form in the sectional type heating portion simultaneously, has reduced the waste material volume, and then reduces the manufacturing cost of heater.

In the structure shown in fig. 1, the heating body member 100 is composed of a plurality of first heating parts 110 and a plurality of second heating parts 120 which are alternately arranged. It should be understood that the type of the heating part in the heating body member 100 of the present application is not limited to two (i.e., the first heating part 110 and the second heating part 120), and may be a plurality. For example, in other embodiments, the heating body member 100 may further include a third heating portion, a fourth heating portion, and the like, and the different types of heating portions may have different lengths.

In some embodiments of the present application, the length of the first heating part 110 is greater than the length of the second heating part 120, and the first heating part 110 is a segmented structure.

In this embodiment, the length of the first heating part 110 is greater than the length of the second heating part 120, and the first heating part 110 is configured to be a segmented structure, so that the processing length of the first heating part 110 on the processing material can be reduced compared with the scheme that the second heating part 120 is configured to be a segmented structure, the processing difficulty of the first heating part 110 can be reduced, and meanwhile, the length of the processing material required to heat the main body member 100 can be reduced, thereby further reducing the amount of waste material.

In some embodiments of the present application, the two or more heating sections include a first heating section 111 near the top of the heating body member 100, the first heating section 111 being connected to an adjacent second heating section 120, wherein the length of the first heating section 111 is equal to the length of the second heating section 120.

In the present embodiment, the first heating part 110 has a sectional structure and has two or more heating sections. Wherein, the two or more heating sections include a first heating section 111 near the top of the heating body member 100, and the first heating section 111 is connected to the adjacent second heating section 120. The length of the first heating section 111 is equal to the length of the second heating section 120, so that the processing sizes of the first heating section 111 and the second heating section 120 on the processing raw material are the same, the number of the processing sizes of the heating sections on the processing raw material can be reduced, and the processing efficiency of the heating body member 100 can be improved.

The connection mode between the first heating section 111 and the adjacent second heating section 120 may be an integral connection or a detachable connection, which is not limited in this application. The first heating section 111 and the adjacent second heating part 120 are integrally connected, so that not only the processing efficiency of the heating body member 100 can be improved, but also the assembly efficiency of the heating body member 100 can be improved. The detachable connection between the first heating section 111 and the adjacent second heating section 120 includes, but is not limited to, connection by a threaded fastener, etc.

Of course, in other embodiments, the length of the first heating section 111 may also be greater than the length of the second heating section 120; alternatively, the length of the first heating section 111 may be smaller than the length of the second heating section 120, as shown in fig. 1.

The first heating part 110 shown in fig. 1 has two heating sections, namely a first heating section 111 and a second heating section 112 connected to each other.

It should be understood that the number of the heating stages in the sectional type first heating part 110 or the sectional type second heating part 120 is not limited to two, and may be a plurality. For example, in other embodiments, the first heating part 110 may further include a third heating section, a fourth heating section, and the like, and the lengths of the different heating sections may be the same or different.

In some embodiments of the present application, the first heating part 110 is provided with a first through groove 113, and the first through groove 113 extends to a top surface of the first heating part 110, and a first distance is provided between the first through groove 113 and the bottom surface of the first heating part 110;

a gap 130 is formed between any adjacent first heating part 110 and second heating part 120, and a second distance is provided between the gap 130 and the top surface of the heating body member 100, and the second distance is smaller than the first distance.

In the present embodiment, the first heating part 110 is provided with a first through groove 113, and the first through groove 113 penetrates the first heating part 110 in a thickness direction of the first heating part 110. One end of the first through groove 113 extends to the top surface of the first heating part 110, and the other end extends toward the bottom surface of the first heating part 110, and a first gap is formed between the first through groove 113 and the bottom surface of the first heating part 110. A gap 130 is formed between any adjacent first heating part 110 and second heating part 120, and a second distance is provided between the gap 130 and the top surface of the heating body member 100. The second pitch is smaller than the first pitch, so that not only the heat generation amount of the heating main body member 100 can be increased, but also the difference in the heat generation amount between the top and bottom of the heating main body member 100 can be widened. When the heating device of the embodiment heats the quartz crucible, the heating effect of the heating main body piece 100 can be increased, the heating temperature difference between the top and the bottom of the quartz crucible can be enlarged, and the oxygen content in the crystal bar can be reduced while the crystal pulling stability is ensured.

In some embodiments of the present application, the second heating part 120 is provided with a second through groove 121, and the second through groove 121 extends to the top surface of the second heating part 120, and a third distance is provided between the second through groove 121 and the bottom surface of the second heating part 120, and the third distance is the same as the first distance.

In the present embodiment, the second heating part 120 is provided with a second through groove 121, and the second through groove 121 penetrates the second heating part 120 in the thickness direction of the second heating part 120. One end of the second through groove 121 extends to the top surface of the second heating part 120, and the other end extends toward the bottom surface of the second heating part 120, and a third gap is formed between the second through groove 121 and the bottom surface of the second heating part 120. The third interval is the same as the first interval, so set up and to make the length of first logical groove 113 be greater than the length of second logical groove 121, not only can give certain heat to the crucible bottom through first heating portion 110, guarantee that bottom temperature can not hang down excessively at crystal pulling in-process, crystal pulling risk has been reduced, can also increase the heat of generating heat that heats main part spare 100, simultaneously can also enlarge the calorific capacity difference between the top and the bottom that heats main part spare 100, not only can increase the heating effect that heats main part spare 100 promptly, can also enlarge the heating temperature difference to between quartz crucible top and the bottom, and then when realizing guaranteeing crystal pulling stability, can also reduce the oxygen content in the crystal bar.

In some embodiments of the present application, the width of the first heating part 110 is smaller than the width of the second heating part 120.

In the embodiment, the width of the first heating part 110 is smaller than the width of the second heating part 120, so that the heating amount of the first heating part 110 can be lower than the heating amount of the second heating part 120, which not only can increase the heating amount of the heating body 100, but also can expand the heating amount difference between the top and the bottom of the heating body 100, that is, not only can increase the heating effect of the heating body 100, but also can expand the heating temperature difference between the top and the bottom of the quartz crucible, thereby reducing the oxygen content in the crystal ingot while ensuring the crystal pulling stability.

Of course, in other embodiments, the width of the first heating part 110 is greater than or equal to the width of the second heating part 120.

It should be understood that, when the heating apparatus satisfies any two or more of the second distance smaller than the first distance, the third distance equal to the first distance, and the width of the first heating part 110 smaller than the width of the second heating part 120, the heating temperature difference between the top and the bottom of the quartz crucible by the heating device can be further expanded, and thus the oxygen content in the ingot can be further reduced while ensuring the crystal pulling stability.

In some embodiments of the present application, any two adjacent heating segments are removably coupled to each other.

In the embodiment, in each sectional heating part, any two adjacent heating sections are detachably connected, so that the replacement of the heating sections is facilitated, and the maintenance cost of the heating device is reduced.

The detachable connection mode between any two adjacent heating sections can be screw connection, clamping connection and the like, and the detachable connection mode is not limited in the application.

Of course, in other embodiments, any two adjacent heating segments may also be non-detachably connected, such as but not limited to riveting, etc.

In some embodiments of the present application, in any two adjacent heating segments, one of the heating segments comprises a first thinned end 1111, and the other of the heating segments comprises a second thinned end 1121, and the first thinned end 1111 and the second thinned end 1121 are stacked and detachably connected in the thickness direction of the heating body member 100.

In this embodiment, in any two adjacent heating sections, two heating sections respectively have a first thinned end 1111 and a second thinned end 1121, and the first thinned end 1111 and the second thinned end 1121 respectively serve as connection ends in the two adjacent heating sections to connect the two adjacent heating sections together. Wherein, first attenuate end 1111 and second attenuate end 1121 are following the thickness direction superpose setting of heating main part piece 100, and detachably links together between first attenuate end 1111 and the second attenuate end 1121 after the superpose setting, so not only can make first attenuate end 1111 and second attenuate end 1121 as the coupling part of heating section, be convenient for the connection of dismantling between two adjacent heating sections, can also reduce the thickness of the hookup location between two adjacent heating sections simultaneously, help realizing laminating completely between the inside surface of heating main part piece 100 and the outside surface of quartz crucible.

Referring to fig. 1-2, the first heating section 111 has a first thinned end 1111, the second heating section 112 has a second thinned end 1121, and the second thinned end 1121 is located at the outer side of the first thinned end 1111. First attenuate end 1111 is equipped with the screw hole, and second attenuate end 1121 is equipped with the connecting hole, and the screw passes the connecting hole and the spiro union is to the screw hole to make detachably connect between first attenuate end 1111 and the second attenuate end 1121.

Referring to fig. 3, in some embodiments of the present application, the heating apparatus further includes an electrode assembly 200, and the electrode assembly 200 is detachably connected to the heating main body member 100.

In the present embodiment, the electrode assembly 200 is used to electrify the heating body member 100, so that the heating body member 100 generates heat to perform a heating process on the quartz crucible. The detachable connection between the electrode assembly 200 and the heating body member 100 facilitates the replacement of the electrode assembly 200 and the heating body member 100, and reduces the maintenance cost of the heating device.

The detachable connection between the electrode assembly 200 and the heating body member 100 may be a screw connection, a snap connection, or the like, which is not limited in this application.

In some embodiments of the present application, the electrode assembly 200 includes two electrode members 210, at least one of the two electrode members 210 is provided with a supporting step 211, and the supporting step 211 is in supporting engagement with the bottom end of the heating body member 100 to support the heating body member 100.

In this embodiment, the electrode assembly 200 includes two electrode members 210, and the two electrode members 210 are a positive electrode member and a negative electrode member, respectively, through which the power supply to the heating main body member 100 is realized. At least one of the two electrode members 210 is provided with a supporting step 211, and the supporting step 211 is in supporting cooperation with the bottom end of the heating main body member 100 to support the heating main body member 100, so that the electrode members 210 not only have an electrode function, but also have a function of supporting the heating main body member 100.

The number of the electrode assemblies 200 may be one or more than two. The two electrode members 210 of each set of electrode assemblies 200 may be symmetrically disposed along the axial direction of the heating body member 100 to improve the stability of the heating body member 100.

In the electrode assembly 200 shown in fig. 1, each electrode member 210 is provided with a supporting step 211.

In some embodiments of the present application, the bottom end of the electrode member 210 extends out of the bottom end of the heating body member 100, so as to reduce the risk of damage to the heating portion during use and transportation of the heating apparatus.

In some embodiments of the present application, the total number of the first heating part 110 and the second heating part 120 is less than 48, and the number of the second heating part 120 is 4N, where N is a positive integer not greater than 6.

In the present embodiment, when the number of heating portions in the heating body 100 is set as described above, the number of heaters can be controlled as much as possible while the temperature requirement required for the pulling stability is satisfied, and the risk of damage to the heating device during use and transportation can be reduced.

It will be understood that any orientation or positional relationship indicated above with respect to the terms "central," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," etc., is based on the orientation or positional relationship shown in the drawings and is for convenience in describing and simplifying the utility model, and does not indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and is therefore not to be considered limiting of the utility model. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means three or more unless otherwise specified.

The above description is only a preferred embodiment of the application and is illustrative of the principles of the technology employed. It will be understood by those skilled in the art that the scope of the present invention is not limited to the specific combination of the above-mentioned features, but also covers other embodiments formed by any combination of the above-mentioned features or their equivalents without departing from the spirit of the present invention. For example, the above features may be replaced with (but not limited to) features having similar functions disclosed in the present application.

Claims (10)

1. The heating device is characterized by comprising an annular heating body piece, wherein the heating body piece comprises a plurality of first heating parts and a plurality of second heating parts which are alternately arranged along the circumferential direction, the length of each first heating part is different from that of each second heating part, at least one of the first heating parts and the second heating parts is of a sectional structure in the length direction, and each first heating part and the second heating parts comprise more than two heating sections which are sequentially connected.

2. The heating device according to claim 1, wherein a length of the first heating part is greater than a length of the second heating part, and the first heating part is a segmented structure.

3. The heating device according to claim 2, wherein the first heating part is provided with a first through groove, the first through groove extends to a top surface of the first heating part, and a first distance is provided between the first through groove and the bottom surface of the first heating part;

gaps are formed between any adjacent first heating part and second heating part, a second distance is formed between the gaps and the top surface of the heating main body piece, and the second distance is smaller than the first distance.

4. The heating device of claim 2, wherein the two or more heating segments comprise a first heating segment near a top of the heating body member, the first heating segment being connected to an adjacent second heating portion, wherein a length of the first heating segment is equal to a length of the second heating portion.

5. The heating device according to claim 1, wherein a width of the first heating part is smaller than a width of the second heating part.

6. The heating device of claim 1, wherein any two adjacent heating segments are removably connected.

7. The heating device of claim 6, wherein in any two adjacent heating segments, one of the heating segments comprises a first thinned end and the other heating segment comprises a second thinned end, and the first thinned end and the second thinned end are overlapped and detachably connected in a thickness direction of the heating body member.

8. The heating device of any one of claims 1-7, further comprising an electrode assembly removably coupled to the heating body member.

9. The heating apparatus as claimed in claim 8, wherein the electrode assembly comprises two electrode members, at least one of the two electrode members being provided with a supporting step, the supporting step being in supporting engagement with a bottom end of the heating body member to support the heating body member.

10. The heating apparatus as claimed in claim 1, wherein the total number of the first heating part and the second heating part is less than 48, and the number of the second heating part is 4N, where N is a positive integer not more than 6.

Images